SECS/GEM & GEM300 are a set of communication protocol for a semiconductor equipment and factory host. These standards are maintained by SEMI. While GEM300 refers to a set of communication standards for 300mm wafers, which are more than those for 200mm, SECS/GEM is used as a generic term for both 200 and 300mm communication protocols and other automation standards.
EIGEMEquipment is a SECS/GEM software of eInnoSys, which comes with support for most of the SECS messages for 200mm out‐of‐the‐box.