Fab Automation Standards – SECS/GEM & EINNOSYS SOLUTIONS The organization that defines and governs the standards for semiconductor manufacturing, equipment, automation and other relevant areas is SEMI.org. It is an international body for semiconductor manufacturers and equipment manufacturers. Factory automation standards defined by SEMI are generally known as SECS/GEM standards, which for 200mm wafer processing is comprised of four main standards: SECS-I (E4), SECS-II (E5), HSMS (E37) and GEM (E30) standards.
Let’s understand what each standard covers:
SECS-I (E4): This standard is a communication protocol based on RS-232 serial communications. This is a much slower as compared to HSMS.