SECS/GEM Data Items

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-:SECS/GEM Data Items:SECS/GEM is an industry standard, that defines standard process of communication between equipment and fab host software for controlling and monitoring purposes. By connecting SECS/GEM equipment, fabs can immediately gain operational benefits. Factory hosts can collect data in multiple ways. Along with event reports, the fab host often requires to poll the equipment for current data values. The host can directly request Data values , or can be sampled periodically in a trace report this process is called Data Polling There are 3 categories of Data Items defined in SECS/GEM standards:

Status Variables (SV) Status variables are data items that identify the status of the equipment, or any of its components, such as sensors, meters, etc. Examples of status variables for process equipment are – Temperature, Pressure, Gas Flows, RF Forward Power, Spin Speed, etc. These data items are generally not attached to events such as lot start, wafer start, etc. A factory host can query the status variables to the equipment any time or can define trace data setup through which it asks the equipment of supplying status variables at regular intervals. A factory host cannot change status variables of the equipment.


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SECS/GEM Data Items by einvensys dm - Issuu