einvensys dm

SECS/GEM ,the communication interface protocol for communication between a semiconductor equipment and fab host. Fab host is a software application that is controlling and monitoring equipment processing using SECS/GEM protocol. SECS/GEM complaint equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 - HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing.