Parker Hannifin Corporation’s Veriflo Division presents the 600 Series Bellows Valves. These valves are manufactured specifically for Ultra High Purity Gas Systems.
Parker Bellows Valves are designed with the industry’s leading straight-through full flow. There are no restricted paths or bends that would reduce flow and generate particulate. These features provide the highest gas flow with minimal pressure drop.
Contact Information: Parker Hannifin Corporation Veriflo Division 250 Canal Blvd Richmond, California 94804 phone 510 235 9590 fax 510 232 7396 veriflo.sales@parker.com www.parker.com/veriflo Mobile App: m.parker.com/veriflo
Proposition:
Value
UHP Stainless Steel Bellows Valve Manual & Pneumatic 600 Series (CvMax) Product Features: • Standard full internal electroplish • Inconel 625® bellows for increased pressure, ultra high purity and maximum cycle life in a small envelope • Vericlean™, Veriflo’s low sulfur high purity 316L Stainless Steel enhances electropolishing, welding, and corrosion resistance • Standard surface finish of 10 micro inch Ra • Fully functional from vacuum to 375 psig • Serialized and heat code traceable • 100% Helium leak tested • Optimum purge port locations
E
Drawings
Expanded Configuration
Open Indicator 45° D
B C
Part Number Cv Xt A (Height) B(Tube O.D.)
UHP0608**0808**ASK
UHP0608**1212**ASK
UHP0612**1212**ASK
UHP0612**1616**ASK
UHP0616**1616**ASK
UHP0616**2424**ASK
UHP0624**2424**ASK
UHP0624**3232**ASK
UHP0636**3232**ASK
A
.236 .319 .241 .183 .193 .225 .183 .240 .189 .307
Body Tube Straight Inchmm Expanded
Width)E(Handle Dia.)
5.7 5.7 8.0 8.0 10.3 14.0 14.0 14.1 19.5 22.4
144 144 203 203 261 356 356 358 495 569
25.4 25.4 38.1 38.1 50.8 50.8 76.2 76.2 101.6 114.3 Inchmm B(Tube Wall) Inchmm C(Length) Inchmm InchmmInchmmInchmm D(Body
1.00 1.50 1.50 2.00 2.00 3.00 3.00 4.00 4.00 6.00
25.4 38.1 34.1 50.8 50.8 76.2 76.2 101.6 101.6 152.4
0.065 0.065 0.065 0.065 0.065 0.065 0.065 0.083 0.083 0.109
1.65 1.65 1.65 1.65 1.65 1.65 1.65 2.11 2.11 2.77
10.1 12.1 16.11 16.11 13.9 17.1 15.5 18.5 20.4 26.3
257 308 409 409 353 435 394 470 518 668
2.00 2.00 3.12 3.12 3.67 3.67 5.60 5.60 8.00 8.00
51 51 74 79 93 93 142.2 142.2 203.2 203.2
mm inch mm inch mm
3.75 3.75 6.00 6.00 8.00 8.00 10.00 10.00 14.00 14.00
95 95 152 152 203 203 254 254 356 356
UHP0616**1616**AS* 178 .193 2.00 50.8 St 10.3 261 2.00 50.8 0.065 1.65 13.9 353 3.67 93 8.00 203
UHP0616**2424**AS* 134 .225 2.00 50.8 Ex 14.0 356 3.00 76.2 0.065 1.65 17.1 435 3.67 93 8.00 203
St Ex St Ex St Ex St Ex St Ex Note: 600 Series
Cv and Xt
Note: Cv and Xt calculated per SEMI Flow Coeffiecent Standard Test Method.
1.00 1.00 1.50 1.50 2.00 2.00 3.00 3.00 4.00 4.50 calculated per SEMI Flow Coefficient Standard Test Method
Safety Guide and Installation and Operating Instructions available at www.parker.com/veriflo
UHP0636**4848**ASK
35 28 81 91 178 134 413 354 779 814
Cv Xt Body Tube Straight Expanded A (Height) B (Tube O.D.) B (Tube Wall) C (Length) D (Body
E (Handle Dia.) inch mm inch mm inch mm inch mm inch
Dimensional
Part Number
Width)
UHP0608**0808**AS* 35 .236 1.00 25.4 St 5.7 144 1.00 25.4 0.065 1.65 10.1 257 2.00 51 3.75 95
UHP0608**1212**AS* 28 .319 1.00 25.4 Ex 5.7 144 1.50 38.1 0.065 1.65 12.1 308 2.00 51 3.75 95
UHP0612**1212**AS* 81 .241 1.50 38.1 St 8.0 203 1.50 34.1 0.065 1.65 16.11 409 3.12 74 6.00 152 UHP0612**1616**AS* 91 .183 1.50 38.1 Ex 8.0 203 2.00 50.8 0.065 1.65 16.11 409 3.12 79 6.00 152
“08” Body Style 0808 = 1” Tube Stub 1212 = 1-1/2” Expanded Tube Stub “12” Body Style 1212 = 1-1/2” Tube Stub 1616 = 2” Expanded Tube Stub “16” Body Style 1616 = 2” Tube Stub 2424 = 3” Expanded Tube Stub
Configuration
Straight Valve
Series
Series
Size
Port A = None B = Upstream C = Up & Downstream D = Downstream J = Purge Valves Up & Downstream
color)
Size & Type
Internal Surface Finish 10
10 Ra Generation A
First Generation Purge Port Type S = Standard Male Face Seal Fitting Seat Seal Materials K
PCTFE V = Vespel® Additional configurations available upon request. 1 2 3 4 5 6 7 8 9 1 2 3 4 5 UHP 06 08 C 1 0808 10 A S K UHP0608C1080810ASK 600 Series Ordering Information Sample: Finished Order: 10 6 7 8 9 10 Build a 600 Series valve by replacing the numbered symbols with an option from the corresponding tables below. Color Explanations: For an explanation of Ordering options please
literature
at
Black = Standard Lead Time Configurations Blue = Extended Lead Time Configurations
UHP =
Basic
06 = 600
Body
08 = 1” 12 = 1-1/2” 16 = 2” Purge
Actuation Manual (handle
1 = Blue Pneumatic A = Fail Close Actuation B = Double Acting Actuation Consult Factory for additional Handle Colors Inlet/Outlet Tube
=
=
=
reference
25000275
www.parker.com/veriflo
Specifications 600 Series
Materials of Construction
Functional Performance
Flow Capacity
See Table
Leak Rate Inboard Test Method
Internal ≤ 1 X 10-10 scc/sec He
External ≤ 1 X 10-10 scc/sec He Surface Finish 10 micro inch Ra Operating Conditions Maximum Pressure 375 psig (25.9 barg) Minimum Pressure Vacuum Maximum Temperature Closed 140°F (60°C) Open 150°F (66°C)
Inconel® is a registered trademark of Special Metals Corporation Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C. VeriClean™ is a trademark of Parker Hannifin Corporation
OFFER OF SALE:
The items described in this document are hereby offered for sale by Parker-Hannifin Corporation, its subsidiaries or its authorized distributors. This offer and its acceptance are governed by the provisions stated in the detailed “Offer of Sale” elsewhere in this document or available at www.parker.com/veriflo
!
WARNING USER RESPONSIBILITY
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE. THIS DOCUMENT IS FOR REFERENCE ONLY. PLEASE CONSULT FACTORY FOR LATEST PRODUCT DRAWINGS AND SPECIFICATIONS
This document and other information from Parker-Hannifin Corporation, its subsidiaries and authorized distributors provide product or system options for further investigation by users having technical expertise.
The user, through its own analysis and testing, is solely responsible for making the final selection of the system and components and assuring that all performance, endurance, maintenance, safety and warning requirements of the application are met. The user must analyze all aspects of the application, follow applicable industry standards, and follow the information concerning the product in the current product catalog and in any other materials provided from Parker or its subsidiaries or authorized distributors.
To the extent that Parker or its subsidiaries or authorized distributors provide component or system options based upon data or specifications provided by the user, the user is responsible for determining that such data and specifications are suitable and sufficient for all applications and reasonably foreseeable uses of the components or systems.
The products described herein, including without limitation, product features, specifications, designs. availability and pricing are subject to change by Parker Hannifin Corp and it’s subsidiaries at any time without notice.
Proposition 65 Warning: This product contains chemicals known to the state of California to cause cancer or birth defects or other reproductive harm.
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LitPN: 25000273 Rev: B Date of Issue 04/2013
© 2009 Parker Hannifin Corporation
Wetted
Body VeriClean™ 316L Stainless Steel Tube Ends 316L Stainless Steel Stem VeriClean™ 316L Stainless Steel Seat Retainer VeriClean™ 316L Stainless Steel Bellows Adapter 316L Stainless Steel Bellows Inconel 625® Seat Options PCTFE (std) or Vespel® Bonnet Gasket Nickel Non-wetted Pneumatic Actuator Housing Aluminum Bonnet Aluminum Guide Brass Manual Handle Aluminum Bonnet Aluminum Guide Brass Driver Bronze For additional information on materials of construction, functional performance and operating conditions, please contact factory.