Customer Value Proposition:
The SQServo pressure regulator incorporates a pressure-setting knob controlling a precise pressure sensor, a pneumatic servo-valve, and a high flow, “dome loaded” large SQ pressure regulator, controlled by the servo-valve.
The pressure sensing servovalve mechanism smoothly controls the outlet pressure of the larger pressure regulator to +/- 0.25 psig . The pneumatic servo valve, integrated with the modified SQ60, amplifies the control signal causing the SQServo to precisely maintain the set pressure.
Product Features:
Flow rates in excess of 4,000 • liters per minute (SLPM).
Pressure drops typically less • than 3 psig.
Tied Diaphragm. •
Maintains a constant • pressure with changing flow demands.
No springs or threads are • exposed to the wetted area.
“VeriClean”, Veriflo’s • custom low sulfur high purity 316L Stainless Steel™ enhances electropolishing, welding and corrosion resistance.
Hastelloy C-22® poppet • and diaphragm for superior strength and corrosion resistance.
Veri flo Contact Information: Parker Hannifin Corporation Veriflo Division 250 Canal Blvd Richmond, California 94804 phone 510 235 9590 fax 510 232 7396 veriflo.sales@parker.com www.parker.com/veriflo
Ultra Precision High Flow Regulator SQServo
Dimensional Drawing
at a minimum of 20 psig greater than the outlet pressure setting. If an interruption of the external control gas occurs, the SQServo will shut off automatically.
A continuous bleed of the external control gas dome pressure (about .5 SLPM) will vent from the Servo Control Mechanism to maintain the resolution sensitivity of the outlet pressure regulation.
SQServo140E .25 1250 psig (86 barg) SQServo420E 1.2 250 psig (17 barg)
Safety Guide and Installation and Operating Instructions available at www.parker.com/veriflo
SQSERVO Cv CHART
Model Cv Max Inlet
Basic Series 140E 420E Body Material 30 = 0 - 30 psig 50 = 0 - 50 psig 100 = 0 - 100 psig Porting 2P = 2 Ports No X required for gauges, Inlet & outlet ports only 3P = 3 Ports One X for gauge port See Regulator Porting Guide for additional options and port layouts Outlet Gauge V3 = -30 in Hg 0 - 30 psig L = -30 in Hg 0 - 60 psig V1 = -30 in Hg 0 - 100 psig X = No Gauge Additional ranges available upon request Port Style FS8 = 1/2” Face Seal FS12 = 3/4” Face Seal TS6 = 3/8” Tube Stub TS8 = 1/2” Tube Stub TS12 = 3/4” Tube Stub Port Configuration M = Male F = Female 1/4” FS-M Gauge Ports are Standard Optional Features This section can have multiple options SS = Stainless Steel Internals Recommended for Carbon Monoxide (CO) or Nickel Carbonyl Ni(CO)4 Service TH = Hastelloy C-22® Trim Compression Member VESP = Vespel® Seat Recommended for Nitrous Oxide (N20) Service For preset outlet range, contact factory. 1 2 3 4 5 6 7 1 2 3 4 5 6 7 SQSERVO 140E 30 3P V1 FS8 FM SS SQSERVO140E303PV1FS8FMSS Build an SQServo pressure regulator by replacing the numbered symbols with an option from the corresponding tables below. SQServo Ordering Information Sample: Finished Order: 20 30 40 50 60 70 80 050010001500200025003000 N2 Flow (slpm) Pressure Outlet (psig) Flow Curves Additional flow curves available upon request
Materials of Construction
Wetted
Body VeriClean™ 316L Stainless Steel
Compression Member VeriClean™ 316L Stainless Steel
Hastelloy C-22® (std) or 316L Stainless Steel Sensor Diaphragm Options Hastelloy C-22® (std) or 316L Stainless Steel
Functional Performance Design
Burst Pressure
Proof Pressure
Flow Capacity
3750 psig (259 barg) - 140E Only
750 psig (52 barg) - 420E Only
1875 psig (129 barg) - 140E Only
375 psig (26 barg) - 420E Only
Cv 0.25 - 140E Only Cv 1.2 - 420E Only
Poppet Options
Hastelloy C-22® (std) or 316L Stainless Steel Seat Options PCTFE (std) or Vespel® Non-wetted Cap Nickel Plated Brass Nut 316L Stainless Steel Knob (Blue) ABS
Operating Conditions
Maximum Inlet Refer to Range Table for specific information
Leak Rate
SQSERVO140E
Inboard Test Method
Internal < 5 x 10-8 scc/sec He External < 2 x 10-10 scc/sec He
SQSERVO420E
Design Internal < 5 x 10-8 scc/sec He
Production Internal Leak Test: Outboard sniffer probe at 50-70 psig, 20%-25% Helium External < 2 x 10-10 scc/sec He (Inboard Test Method)
Outlet
0-30 psig (2 barg) 0-50 psig (3.4 barg) 0-100 psig (7 barg) Temperature -40°F to 165°F (-40°C to 74°C) For additional information
Surface Finish 10 micro inch Internal Volume 42cc Approx. Weight 8 lbs. (3.7 kg)
!
or specifications provided by the user, the user is responsible for determining that such data and specifications are suitable and sufficient for all applications and reasonably foreseeable uses of the components or systems.
LitPN: 25000249 Date of Issue 03/2010 © 2009 Parker Hannifin Corporation Veriflo OFFER OF SALE: The items described in this document are hereby offered for sale by Parker-Hannifin Corporation, its subsidiaries or its authorized distributors. This offer and its acceptance are governed by the provisions stated in the detailed “Offer of Sale” elsewhere in this document or available at www.parker.com/veriflo WARNING USER RESPONSIBILITY FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE. THIS DOCUMENT IS FOR REFERENCE ONLY. PLEASE CONSULT FACTORY FOR LATEST PRODUCT DRAWINGS AND SPECIFICATIONS This document and other information from Parker-Hannifin Corporation, its subsidiaries and authorized distributors provide product or system options for further investigation by users having technical expertise.
user,
its own analysis and testing, is solely responsible for making the final selection of the system and components and assuring that all performance, endurance, maintenance, safety and warning requirements of the application are met. The user must analyze all aspects of the application, follow applicable industry standards, and follow the information concerning the product in the current product catalog and in any other materials provided from Parker or its subsidiaries or authorized distributors.
the extent that Parker or its subsidiaries or authorized distributors provide component or system options based upon data
The
through
To
Diaphragm Options
SQServo
on materials of construction, functional performance and operating conditions, please contact factory. Specifications
Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C. Hastelloy C-22® is a registered trademark of Haynes International, Inc. VeriClean™ is a trademark of Parker Hannifin Corporation
