NFF Policy and Safety Manual

POLICY AND SAFETY MANUAL

20 FACILITY HAZARDS

4.1Laboratory Hazards

4.2 Definition of a Chemical

4.3 Sources of Chemical Safety Information

44 Chemical Authorization

4.5 Specific Chemical Hazards (HF,Carcinogens, etc.)

451Acetone and Flammable Solvents

4.5.2 Hydrofluoric Acid (HF)

4.5.3 Piranha Etch

454 Tetramethlammonium Hydroxide

4.5.5 Glycol Ethers

456 Peroxides

4.6 Pregnancy

28 WASTE HANDLING

5.1Chemical Waste

5.2 Solvent-Contaminated Items

30 EMERGENCY PROTOCOLS

6 1Emergency Phone

6 2 Emergency Response Equipment

6.3 Chemical Exposures

6 4 Chemical Spills

6 5 Building Fire Alarms

6.6 Medical Emergencies

6.7 Facility Malfunctions, Leaks,and Alarms

6.8 Incident Reporting

35 MINORS IN THE LABORATORY

GAINING ACCESS TO NANOFABRICATION FACILITIES

1.1

Laboratory Safety Orientation (LSO), Hazard Communication, and Hazardous and Regulated Waste Training is required before gaining access to the Nanofabrication Facility (NFF). Laboratory Safety Refresher (LSR) training is required by GMU (George Mason University) personnel annually after the completion of the LSO. Please visit the Safety, Emergency, & Enterprise Risk Management website training page to attend your LSO and LSR training online. Review the George Mason University Laboratory Safety Manual for additional information. Once a user has completed LSO and/or LSR training, a NFF User Application can be completed and submitted through an online application form, which is available on the NFF website. Please use the following link to access the form: https://nff.gmu.edu/nff-user-application/

All users are required to have an account in Facility Online Manager (FOM). FOM is an online app that controls physical access to instruments. It is also used to facilitate the billing process for the charges generated from equipment use.

Once an approved application is on file and a FOM account is created, NFF orientation training can be scheduled. See Table 1 for a list of topics covered. Training for individual instruments can also be scheduled. There will be specific training for each instrument in the NFF. Being trained on one piece of equipment does not authorize use of a different instrument. Contact the NFF Manager for instrument training.

If an NFF user needs to use chemicals in the facility, additional Chemical Safety Training will be required.

Table 1: Topics covered in NFF Orientation

PPE

Chemical Hazards

Gowning

Allowed/Prohibited Items

Chemical Buddy

Contact Lenses

Safety Showers and Eye Wash Stations

HOURS OF OPERATION

1.2

The NFF is open 24 hours a day, seven days a week. Certain instruments and procedures may have restrictions during evenings and weekends. See the section on the “Buddy System.” Users will be given “business hours” access (M-F, 9am-5pm) by default. A user must demonstrate full competency and understanding of working in the NFF to be granted 24-hour access. 24-hour access will be given to a user at the sole discretion of the NFF manager on a case-by-case basis.

VISITORS 1.3

Tours of the NFF should be approved by the NFF manager prior to scheduling the tours. Tours of the cleanroom should be limited to valid technical visitors. A tour gives the visitor an overview of the processes and types of equipment available in the facility. Tours are not for training or demonstrations on how to operate

equipment. A user is responsible for the actions and safety of their guests when touring the facility. Visitors are not allowed after 5:00 P.M.

NFF DRESS CODE

1.4

A user’s clothing should be clean before entering the lab spaces. Users should not come to the facility with clothing that is dusty or dirty. Clothing that tends to shed a lot of fibers, like fur, fake fur, mohair, etc. can contaminate even noncleanroom spaces and should not be worn in the NFF.

SHOES

Shoes must be closed-toe shoes that fully enclose the heel and the top of the foot. Sandals, open weave shoes, or shoes that expose the top of the foot are not allowed. Shoes must not have high heels or deep cleats. Socks or stockings are also required.

Shoes must be clean and dry when you enter the facility. During winter weather, users must change to shoes not worn outside to prevent contamination of the cleanroom with water and salt.

PANTS

Pants must run from the shirt to the ankles. Shorts, short pants, or skirts/dresses are not allowed.

SHIRTS

Shirts must completely cover the torso and may have either short or long sleeves.

SAFETY GLASSES

Safety glasses must be worn in the labs. The NFF does not provide safety glasses to users. Safety glasses must meet the ANSI Z87 standard. Glasses that meet this standard will be marked Z87 by the manufacturer. Safety glasses may only be

removed when using optical microscopes. Safety glasses are not a substitute for face shields when working with chemicals.

CONTACT LENSES

Wearing contact lenses in the NFF is prohibited.

CLEANROOM SUIT PROTOCOLS

1.5

Proper gowning technique is important to ensure the cleanliness of the garments and the facility, as well as the safety of the users.

Before entering the cleanroom, users should ascertain that they meet the clothing requirements listed in the dress code.

TO ENTER THE CLEANROOM:

Step on the sticky mats with both feet before entering the main corridor. After entering the corridor, put on a hairnet and shoe covers.

If you are going into the Characterization Lab, put on gloves. Using the provided wipes, wipe down all the items being brought into the Characterization Lab.

If you are going into the cleanroom, enter the gowning room. Put on a coat, being careful not to drag the coat on the floor during the process. Put on gloves. Using the provided wipes, wipe down all the items being brought into the cleanroom.

NOTE:

Tuck your gloves into your coat, or put the cuffs of your coat into your gloves. The goal is to cover up the skin on your wrists.

ALLOWED/PROHIBITED ITEMS

1.6

To maintain a safe working environment, certain items are not allowed in the lab spaces. Common items that are prohibited are food, drinks, gum, cough drops, mints, etc. Allowed items include cell phones, tablets, and laptops. If you are uncertain, please check with NFF staff before bringing an item into the facility.

Allowed Prohibited

Plastic Items

Pens

Synthetic Fabrics (polyester, nylon)

Cardboard

Pencils

Cloth Items

Paper Items Sealed in Plastic Hats and Coats

USER STORAGE

1.7

Large amounts of storage space in the cleanroom are not available. A limited amount of dry box space is available, which is temporary storage space for use while working on a project. All items in the cleanroom should be clearly labeled with the user’s name, the name of the research group, and the date. Items left unlabeled for more than two hours will be discarded. See the Wet Chemical Use section of this manual for additional information related to using and storing chemicals in the cleanroom.

FACILITY BILLING

1.8

All users are charged by the hour for equipment use. Entry into the cleanroom is charged on a daily basis. Academic and non-academic users are charged at different rates. Non-academic rates are comparable to those charged by commercial suppliers and encompass the full cost of instrument operation. Academic user fees are for academic research only by students, post-doctoral researchers, and full-time university staff members.

All accounts are billed every month. Payment of the balance is due in 30 days. Failure to pay will result in revocation of laboratory privileges.

Please contact the NFF Manager for a list of the current rates. For additional information, please read the NFF Billing and Procedures Amendment.

EQUIPMENT

Access to the laboratory does not mean that the use of any instrument is permitted. Each major instrument will require specific training. When a user has demonstrated proper operation of the system, the user will be authorized to use the system without further supervision via FOM. Rule violations and/or carelessness in operation can result in damage to the equipment, downtime, and considerable expense. Consequently, the improper use of equipment will result in suspension of user privileges, either for a specific instrument or the entire facility.

EQUIPMENT TRAINING REQUIREMENTS

2.1

Before using any piece of equipment at the NFF, users must be trained by NFF staff. Users cannot be trained by other users. Once a user is authorized to use a piece of equipment, the user will receive notification from the facility via email.

EQUIPMENT SCHEDULING

2.2

NFF equipment is reserved through a FOM account. Users must log in with their own account when logging into instruments. "Group" use is not available. For high demand tools, there may be limitations on the length of reservations and how many reservations a user can place in advance. Information on any scheduling restrictions will be covered during equipment training.

If a user is going to be late for a reservation, they should delete and reschedule their time on the equipment piece. If a user is more than 15 minutes late for their

reserved time on an equipment piece, the reserved time may be claimed by anyone in the lab.

Uncanceled reservations will result in the user’s account being billed for the entire reserved time.

EQUIPMENT ACCESS

2.3

The NFF uses FOM to control equipment access and to record equipment use charges. Users will need a FOM account to access the system. FOM does not turn on any instrument, but it does enable/disable the instruments. Users may be logged on to several instruments at once. They may log off them individually. Users must remember to log off, or they will be charged for the entire time that they are logged in to the instrument.

NOTE 1: You may log off from any computer.

NOTE 2: Some tools may utilize paper log sheets.

PROBLEMS WITH EQUIPMENT

2.4

Problems with the operation of equipment should be reported to the staff member in charge of the tool. This is a two-step process. First, send an email to the NFF staff. Second, fill out a Trouble Sheet and attach it to the front of the tool. A user should never attempt any repairs to the tool beyond what is

explicitly allowed in the facility operating instructions. If a user is unsure, they should check with NFF staff before acting.

Any emergency involving injuries, fire, or chemical spills should be immediately reported to University Police directly at 703-993-2810 or by dialing 911 from any university phone. The Laboratory Manager should be notified after contacting University Police.

BUDDY SYSTEM

2.5

A “buddy” should be present in the cleanroom for certain processes and for the use of specific equipment. A buddy is defined as an approved NFF user who can assist the tool operator in case of an emergency. The buddy system is for wet chemical use and is further described in section 3.9. Information on any buddy restrictions will be given during equipment training.

WET CHEMICAL USE

LABWARE

3.1

Clean glassware and plasticware are available for use in the laboratory. Users are not authorized to appropriate a private supply for their own use and are not allowed to bring their own labware into the facility. All labware is to be cleaned after use. If a user needs labware that is not available, please contact the Facility Manager.

CHEMICAL SUPPLIES

3.2

The facility stocks and supplies common processing chemicals. Users are forbidden from bringing in their own chemicals. All chemicals must be directly approved by the Facility Manager.

USERS ARE NEVER ALLOWED TO CARRY CHEMICALS IN TO OR OUT OF THE FACILITY.

All chemical containers moved outside of a hood must be sealed with a screw top lid. Open containers or containers with unattached lids may not be carried around the lab, even if they only contain water. Users must not open a new bottle until the old one is empty. When a chemical bottle is emptied, leave it in the hood and notify the staff.

ADDITIONAL PERSONAL PROTECTIVE EQUIPMENT FOR CHEMICAL USE

3.3

FACE SHIELD

The face shield is to be worn whenever working in or near the hoods. Users should only handle the face shield from the top. Do not handle the face shield by the front as this can contaminate the clear portion of the shield, decreasing visibility. Examples of approved face shields include the VWR #76336-850 and the Grainger #4EZC2.

The Employer/Sponsor or Department is responsible for providing the proper PPE for their lab personnel working in the NFF. Storage and upkeep of PPE is the responsibility of the user.

CHEMICAL APRON

The chemical apron is to be worn over top of normal cleanroom attire. It is highly suggested to wear an apron with sleeves in order to protect the arms. Aprons made from “Silver Shield” material or DuPont Tychem offer good protection from a variety of chemicals. However, the best material depends on the chemicals being used. Please contact the NFF Manager for assistance in choosing PPE.

GLOVES

A second pair of gloves is required when working in the general chemistry hoods and should be worn over the standard cleanroom gloves. The second pair of gloves must be removed whenever handling items outside of the hood, such as phones and sample holders, in order to prevent contaminating other areas of the cleanroom with chemical residues. When putting on or removing PPE, the second pair of gloves should be the last item put on and the first item removed to prevent transferring any chemical residues to the face shield or coat/apron straps.

NOTE: PPE, such as face shields, aprons, and gloves, should only be worn in the immediate area of the chemical hood to avoid transferring chemical residues into non-chemical areas of the facility.

RESPIRATOR USE POLICY

3.4

A respirator is not required, as engineering controls in the facility, such as fume hoods and equipment interlocks, provide sufficient protection to prevent the need for users to use a respirator. Users who feel they would benefit from using a respirator in the facility should discuss it with the NFF Manager to determine if it is appropriate. Before using a respirator, a researcher must contact Employee Health and Wellbeing to schedule a respiratory assessment to determine if voluntary use is permissible.

TYPES OF CHEMICAL HOODS

3.5

The NFF classifies chemical hoods into two groups: lithography hoods and general chemistry hoods. Lithography hoods are limited to work involving photoresist, primer, and developer for lithographic processing. For materials such as acids and bases, general chemistry hoods should be used. Due to size restrictions, there should only be one user per hood.

LITHOGRAPHY HOODS

3.6

Nitrile gloves are required when using a lithography hood. An additional pair of heavy gloves should be worn when using developer and solvents. Gloves must be regularly checked for photoresist and replaced when contaminatedputting on a second pair of gloves prior to photoresist use is highly suggested. Additionally, safety glasses are to be worn whenever working in or near the hoods.

GENERAL CHEMISTRY HOODS

3.7

A face shield, a chemical coat, and a second pair of gloves (overtop standard cleanroom gloves), are required at all general chemistry hoods.

CHEMICAL BUDDY

3.8

Users working with the general chemistry hoods are required to have a “chemical buddy” present in the lab. A chemical buddy is defined as another knowledgeable user who should A) Actively check on the status of the user

while they work in the hood, and B) Be close enough to be of assistance in case an incident occurs.

CHECKING WASTE BOTTLES

3.9

Before starting work with a chemical in a hood, users should check for an appropriate waste bottle to ensure that they are using the correct hood. If the waste bottle is full, please contact the NFF staff.

NOTE: Pre-approved chemical solutions are the only solutions that can be made in the facility. Please contact management for approval. NON-APPROVED SOLUTIONS CANNOT BE DISPOSED OF IN THE FACILITY.

CHEMICAL CONTAINERS

3.10

After a user has checked the waste bottles, they should get the containers needed for their work. Containers must be of the appropriate size and material. Do not use containers that are too large for samples, as this will use more chemicals than needed and create waste. Plastic, Teflon, and glass are acceptable materials for containers. If a solution is to be heated, only a glass container should be used. If using a hydrofluoric acid containing solution, glass containers should be avoided. All containers are required to have covers on them, including containers of water. The U.S. Environmental Protection Agency (EPA) defines any uncovered container not in current use as an illegal disposal of a chemical through evaporation.

CONTAINER LABELS

3.11

All containers are required to have labels on them that clearly identify the contents, including containers of water. Post-it notes are available for use as labels. The label must be clearly printed with the full chemical name and hazard, the user's full name, and the date. The label should be attached to the chemical container itself whenever possible, rather than the lid or hood. Labels should be present on containers before the chemical is poured.

WORKING WITH CHEMICALS

3.12

Users must understand the risks of all the materials they work with inside the hoods. The SDS (Safety Data Sheet) can be used to understand the properties and hazards of materials. Users are expected to read the SDS of each chemical they will be using. SDSs can be found in a binder in the gowning room. Refer to Section 4.3 for additional information.

When working in the hoods:

o Be careful when pouring chemicals, as this is the most common time for spills or other accidents.

o Users should plan out their work when they place the containers in the hood. Arrange the containers close together so that movement of samples is minimized.

o Avoid distractions - do not use your phone or engage in conversations with other users.

o Chemicals should not be left in the hood for long periods of time. The lab does not have enough hood space to allow each researcher to have

their own section of hood for their chemicals. Substrates are allowed to soak overnight in chemicals if needed, but a note indicating this should be placed on the container in addition to the standard container label.

HOT PLATES

3.13

Hot plates must never be left unattended. The hot plates in the lithography hood should only be used for the baking of resist on substrates. If you require a hot plate for any other task, please discuss this with the Clean Room Manager - hot plates are tightly controlled due to the risk of fire and other hazardous situations.

WASTE DISPOSAL AND CLEANUP

3.14

Once a user is finished with chemicals in a hood, the chemicals should be disposed of in the appropriate waste bottle. (See Section 5 for information on how to dispose of chemical waste.) Containers should be placed in the rinse bin in the hood. Lab staff will collect and clean used labware. The waste cans next to each hood are for gloves and wipes that become contaminated during use. All items should be returned to their proper locations, and the hood must be clean, dry, and empty for the next user.

LABORATORY HAZARDS

4.1

The major hazards in the NFF are wet chemicals. The acids, bases, and solvents commonly used in lithography and etching can cause severe burns, tissue damage, organ damage, asphyxiation, and genetic damage if improperly used. These chemicals can enter the body by inhalation, ingestion, or absorption (either directly through the skin or through gloves) and may have either long-term or short-term health consequences. In addition, the incorrect use of solvents can result in a fire. Users are expected to wear the proper PPE, to treat all chemicals with respect, and to be aware of all chemical reactions which may be created, either intentionally or by accident.

DEFINITION OF A CHEMICAL

4.2

From a regulatory perspective, chemicals are defined as any materials that are not common household items. In addition to common acids and solvents, industrial grade cleaners, adhesives, lubricants, etc. are defined as chemicals as well. Any chemical brought into the facility must be done so in accordance with Section 4.4.

SOURCES OF CHEMICAL SAFETY INFORMATION

4.3

The SDS is a federally mandated document which must be supplied by the manufacturer or seller of a chemical. It is a convenient, condensed source for information on the properties of any chemical, including the chemical composition, physical and chemical properties, toxicology data, and instructions for handling, spill control, and waste disposal. As a matter of good habit, users should read the SDS for every chemical that they handle. SDSs for all approved chemicals are available in a binder in the gowning room.

CHEMICAL AUTHORIZATION

4.4

Only specifically authorized chemicals may be used in the laboratory - no individual may bring any chemical into the lab under any circumstances. NFF management may issue approval of a chemical based on a review of the SDS and other relevant information provided by the user. To submit a new chemical for review, send an email to the Laboratory Manager. Approval of new chemicals is not guaranteed; new chemical requests may be turned down if they are too hazardous or are incompatible with other uses of the laboratory. The approval process can take up to two weeks, as chemical compatibility, waste disposal, and other issues must be resolved. Researchers should plan accordingly when needing new chemicals approved. Do not order a chemical prior to receiving approval for it.

SPECIFIC CHEMICAL HAZARDS (HF, CARCINOGENS, ETC.)

4.5

Below is an overview of specific or unique hazards from chemicals used in the facility. Individuals should review the SDSs for all materials that they plan to use.

ACETONE AND FLAMMABLE SOLVENTS

4.5.1

Acetone is a very flammable solvent with a low flash point, (i.e., it can be ignited at a low ambient temperature). Because of this, it presents a significant fire hazard. Spilling a gallon bottle of acetone could cause a catastrophic fire or explosion. Solvents should be handled with care in the hoods and not be used near hot plates, as spilled solvent can be ignited by the hot plates. A resulting fire could be drawn up into the exhaust ducts with catastrophic consequences. Spilled solvents can react explosively with chemical oxidizers present, such as peroxides and nitric acid. Spilled solvents should be contained immediately with spill control pillows. EHS should be called for emergency response and to assist in clean up with any significant spill.

HYDROFLUORIC ACID (HF)

4.5.2

Only a member of the NFF staff can serve as a chemical buddy when HF is in use. HF presents a significant hazard for personal injury. It is used in the lab in both pure form and diluted as the active component of Buffered Oxide Etch (BOE). HF is much more hazardous than any of the other acids - its danger comes from its effect on flesh and bone. At the concentrations used in the laboratory, an HF "burn" is initially painless. The person may not even know that they have gotten HF on their hands, arms, face, or in their gloves. The acid, however, will silently liquify flesh. The fluoride ion is not consumed in this process and is soluble in tissue; the damage penetrates deeper until it reaches the bone, causing significant pain. At this stage, tissue damage is irreversible. HF can also enter the blood stream and disrupt the nervous system’s ionic chemistry. If left untreated, severe injury or death will result.

Simple washing of an HF splash is not sufficient to prevent damage. It does not wash off; it immediately dissolves flesh and will continue to do so until medical attention specific to HF burns is given (including deep injections to neutralize the penetrated acid). Be sure that medical personnel know that it is an HF burn and that it requires specific treatment different from a common acid burn.

If you experience an HF exposure in the facility, rinse for five minutes and then promptly apply liberal amounts of calcium gluconate to the affected area. Calcium gluconate is located in the facility's first aid cabinet.

HF etches silicon dioxide, therefore also etching glass. HF must not be kept in a glass bottle, used in a glass beaker, or disposed of in a glass waste bottle. Plastic labware is available for this purpose. HF, like all other chemicals, must only be used in the chemical hoods. A user may not take a beaker of acid out of the hood to strip a sample.

PIRANHA ETCH

4.5.3

Piranha etch is a common name for a mixture of hydrogen peroxide and sulfuric acid (typically 1:5). It is extremely aggressive towards organic materials (e.g., flesh and photoresist residue). It also removes heavy metal contamination. It is commonly used in the semiconductor industry for wafer cleaning. However, it is difficult to dispose of this mixture - the waste reacts and decomposes for a significant amount of time, which can build up pressure in the waste bottles, causing them to burst. Additionally, if the solution is mixed very peroxide rich, one can make unstable compounds. Piranha etch is only to be made with a member of the NFF staff acting as a chemical buddy.

TETRAMETHYLAMMONIUM HYDROXIDE

4.5.4

In the NFF, tetramethylammonium hydroxide (TMAH) serves as a dilute (<4%) aqueous solution for developing photoresist. TMAH is highly toxic in more concentrated forms. Developers are often referred to by their brand names –without the SDS, it can difficult to determine which developers contain TMAH.

GLYCOL ETHERS

4.5.5

A variety of solvents are used in photoresists. The composition of these mixtures is generally not disclosed on the bottle. The SDS should be referenced to identify the chemicals and their properties in the photoresist. One functional group, the glycol ethers, is commonly used in photoresists and has various names, and are identical solvents. These include:

o Cellosolve

o Methyl Cellosolve

o Ethylene glycol monomethyl ether

o 2-Methoxyethanol

o Ethyl Cellosolve

o 2-Ethoxyethanol (2EE)

o Ethylene glycol mono ethyl ether

Another functional group in photoresist solvents are acetates. The following acetates are identical solvents and can be identified by the names below:

o Cellosolve Acetate, Ethyl cellosolve acetate (ECA)

o Ethylene glycol mono methyl ether acetate

o 2-Ethyoxy ethyl acetate

Most photoresists contain one or more of these as solvents. Currently, the most common solvent used is propylene glycol monomethyl ether acetate (PGMEA), also known as 1-methoxy-2-propanol acetate. Members of this chemical family are teratogenic and have shown a number of effects on reproduction in laboratory animals, such as miscarriage, increased fetal death, and birth defects. Additionally, PGMEA can irritate your eyes and respiratory tracts, as well as causing kidney damage, narcosis, and paralysis. Primary routes of exposure are inhalation, through-the-skin absorption, and your eyes. Another component in PGMEA, n-Butyl acetate, has a similar list of possible systemic effects. Review Section 3.6 regarding use of the lithography chemical hoods to ensure that exposure to these compounds is minimized.

PEROXIDES

4.5.6

All peroxides are highly oxidizing and are incompatible with all forms of organic solvents and flammable materials. Certain peroxide compounds are unstable and can explode. The hydrogen peroxide found in the facility is over 10 times more concentrated than the solution used in the medical field and has a high contact risk. Extreme care should be taken when mixing solutions containing peroxides.

When disposing of pure hydrogen peroxide solutions, waste should only go into waste bottles explicitly marked as designated for pure hydrogen peroxide. Adding pure hydrogen peroxide to an ammonium hydroxide/hydrogen peroxide or hydrochloric acid/hydrogen peroxide waste bottle can lead to rapid heating and breakdown of the peroxide, which can result in the waste bottle being over-pressurized and rupturing.

PREGNANCY

4.6

Users who believe they are pregnant are encouraged to make an informed decision with their personal physician regarding chemical safety and pregnancy.

WASTE HANDLING

CHEMICAL WASTE

5.1

No waste is to be poured down the drain. All labels for waste bottles are created by the NFF staff. Users should never alter a waste label. If the correct label for a chemical mixture cannot be found or if a user is uncertain about which waste bottle to use, they should leave the chemical in the hood and contact the facility staff for assistance.

Waste bottles are kept in the back of the hood and must have both labels and caps, do not overfill the waste bottles, as this makes them more dangerous to handle. Facility staff will remove any overfilled bottles. Any unusual reactions with waste or bottles showing signs of a secondary reaction (bubbling in the waste, pressurized bottles, etc.) should be reported to the staff immediately.

Only the original chemical mixture should be poured into a waste bottle. Any containers of water used to rinse the substrates after etching should be poured into the small cup sink in the chemical hood. Adding excess water to concentrated acid waste bottles can lead to overheating and pressurization of the waste container. All waste containers must be sealed with a screw top lid to prevent evaporation.

SOLVENT-CONTAMINATED ITEMS

5.2

Wipes, gloves, or other items that have resists or other spin-on polymer solutions on them should be placed into the yellow waste can next to the lithography hoods.

EMERGENCY PROTOCOLS

EMERGENCY PHONE

6.1

A phone is located next to the door of the facility. In an emergency, dial 911. This will connect you to the campus police, who can determine the appropriate response. When calling, it is important to clearly communicate the type of emergency to the dispatcher. For medical emergencies, any chemicals involved should be mentioned so that the proper care can be received.

EMERGENCY RESPONSE EQUIPMENT

6.2

Spill control pads are located in each chemical hood. An emergency shower and an eye wash are next to the door. Most chemical burns, especially in the eyes, should be washed for 20 minutes before seeking further medical attention. A first aid kit is available by the door in the gowning room. Tubes of calcium gluconate gel are available in the first aid kit for application on HF burns but are not a substitute for medical attention.

CHEMICAL EXPOSURES

6.3

Any major chemical exposure should be responded to immediately by using the chemical safety shower. All clothing must be removed as soon as possible to help get any chemicals off the body. The injured person should fully rinse the affected area/s for 15 minutes and then seek medical treatment. A chemical buddy should use an emergency phone to contact EHS and/or to request medical assistance. If the exposure is to a HF-containing solution, the affected area/s should only be rinsed for five minutes, followed by liberal application of calcium gluconate gel. The user must then receive prompt professional medical attention. After seeking medical attention for chemical exposure, the user should contact the facility management to inform them of the incident.

CHEMICAL SPILLS

6.4

Individuals are responsible for cleaning up any minor chemical spills using approved procedures. Training on the cleaning of chemical spills is covered in the chemical hood orientation. Users should request assistance from the NFF staff then EHS for any significant spill. A spill kit is next to the hoods and contains various items like spill pillows and wipes for soaking up larger spills. For major chemical spills, spills releasing significant hazardous fumes, and for any unanticipated chemical reaction, users must evacuate the area and call 911. If a spill requires a spill pillow, users should notify NFF management after the situation is resolved.

BUILDING FIRE ALARMS

6.5

If there is a fire alarm, users should exit the building. Researchers in the clean room should not stop in the gowning room to remove the clean room suit, but instead should exit out the nearest door and remove the clean room suit after they have left the building.

MEDICAL EMERGENCIES

6.6

When an emergency arises, contact University Police by dialing 911 from any university phone or 703-993-2810. Provide the following information:

o Name and telephone number

o Location of the emergency (building name, room number, and building specific address, if known)

o Nature of the emergency (e.g., chemical spill and chemical(s) involved, fire, injuries)

o Special considerations (e.g., the potential for explosion, acutely hazardous gases present, people trapped in rooms or buildings, the number of people injured and the type/s of injuries, electrical hazards, property damage, and access routes to the emergency)

University Police will dispatch an officer(s) to the scene and will secure the area, assist the injured, establish emergency communications, and control the situation until response personnel arrive. If necessary, EHS will be notified.

FACILITY MALFUNCTIONS, LEAKS, AND ALARMS

6.7

In the case of a general power failure to the building, emergency lights will allow you to exit the facility normally. It will be necessary for the staff to turn the equipment back on before general laboratory use can be resumed. Situations requiring immediate attention, such as water leaks and equipment smoldering, should be promptly reported to the staff. Phone numbers are listed on all lab doors.

INCIDENT REPORTING

6.8

All accidents involving chemicals and/or personal injury must be reported to the facility management in writing as soon as possible. Reports must include the event's nature and the procedures that were followed at the time. In addition, all accidents and injuries must be reported to the user’s supervisor, and the appropriate EHS form must be filed within three days. EHS forms can be found using the following link: https://ehs.gmu.edu/programareas/occupationalsafety/programs/accidents-and-incidents/

MINORS IN THE LABORATORY

There may be occurrences where experiential learning and the laboratory environment will intersect. PIs/LS may be asked to facilitate this type of experience in his or her laboratory with an individual under the age of 18 who is not enrolled in courses at George Mason University (herein referred to as a minor). Due to potential risks associated with the laboratory environment, access to all university laboratories is restricted for minors. EHS has developed the Minors in the Laboratory Guide (available on the EHS website) to assist PIs/LS with the process of reviewing, approving, and assessing risk for minors who would like to participate in laboratory activities. This section also provides guidance for PIs/LS on activities that involve minors such as: laboratory tours, required safety training, documentation of risk assumption by the minor’s parent or legal guardian, and medical clearance requirements and forms.

George Mason University is committed to providing educational and research opportunities, when feasible, to minors ages 16 and 17. PIs/LS are permitted to have minors ages 16 and 17 participate in and perform educational activities and routine education-related duties in a research laboratory.

o A risk assessment must be on file with EHS for all projects involving minors

o Minors must be supervised at all times in the laboratory

o Minors are not permitted to visit or work in laboratories operating at BSL-3 or ABSL-3 or other high-hazard locations, such as a machine shop

Minors may not perform work involving:

o Agents on the federal select agent list

o Highly hazardous substances, including pyrophorics and explosives

o Large quantities of flammable substances

o Controlled substances

o Substances of high acute toxicity (having a rat lethal dose [LD] 50 less than or equal to 50 mg/Kg [e.g., sodium azide, nicotine, etc.])

The following requirements are in place for PIs/LS who will be supervising minors. If the responsibility of supervising the minor will be delegated to a staff member, the staff member must meet these requirements:

o Ability to provide supervision at all times to the minor during laboratory activities

o Successful completion of a background check through the university in accordance with University Policy Number 2221, Background Investigations

o Current on all safety training

o Knowledge and understanding of laboratory hazards and proper safety controls

All work involving minors must be approved by EHS prior to starting the project. The PI/LS is responsible for submitting all required paperwork to EHS for review. The forms and documents listed below are available on the EHS website.

o Upon agreeing to mentor a minor in the laboratory, the PI/LS must complete the Risk Assessment for Minors in the Laboratory form and submit it to labsafe@gmu.edu

o EHS will review the submission and approve or deny the project

o The PI/LS will forward approval to the parent/guardian along with the Acknowledgement of Risk for Laboratories. A signed Acknowledgement of Risk for Laboratories must be on file in the laboratory and with EHS before beginning work

o Minors must attend safety training relevant to the work to be performed

All photolithography chemicals, acids, and bases will be removed from the cleanroom before minors enter. The materials will be placed in storage cabinets located in Room 3210A, which is locked at all times. The materials will only be returned to the cleanroom once activities involving minors are complete and all minors have left the facility.