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FOOD,MEDICAL,ANDENVIRONMENTAL APPLICATIONSOFNANOMATERIALS

FOOD,MEDICAL, AND ENVIRONMENTAL APPLICATIONSOF NANOMATERIALS

Editedby KUNAL PAL

DepartmentofBiotechnologyandMedicalEngineering,NationalInstituteofTechnology,Rourkela,Odisha,India

ANGANA SARKAR

DepartmentofBiotechnologyandMedicalEngineering,NationalInstituteofTechnology,Rourkela,Odisha,India

PREETAM SARKAR

DepartmentofFoodProcessEngineering,NationalInstituteofTechnologyRourkela,Rourkela,India

NANDIKA BANDARA

DepartmentofFoodandHumanNutritionalSciences,RichardsonCentreforFoodTechnologyandResearch, UniversityofManitoba,Winnipeg,Manitoba,Canada

VEERIAH JEGATHEESAN

Water:EffectiveTechnologiesandTools(WETT)ResearchCentre,SchoolofEngineering,RMITUniversity, Melbourne,Australia

Elsevier

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TypesetbySTRAIVE,India

Contributorsix

1.Fabricationofnanomaterials1

VaidhegiKugarajah,HushnaaraHadem,AtulKumarOjha, ShivenduRanjan,NanditaDasgupta,BhartenduNathMishra,and SangeethaDharmalingam

1Introduction2

2Fabricationofnanomaterials5

3Top-downfabricationmethods7

4Bottom-upfabricationmethods17

5Othercommonmethodsavailablefor nanomaterialsproduction26

6Nanocomposites32

7Futuretrends33 References33

2.Nanoparticlesandnanofluids: Characteristicsandbehavioraspects41

VaidhegiKugarajah,AtulKumarOjha,HushnaaraHadem, NanditaDasgupta,BhartenduNathMishra,ShivenduRanjan,and SangeethaDharmalingam

1Introduction42

2Nanoparticleaggregationanddispersion behavior45

3Physicochemicalcharacteristicsof nanoparticles48

4Interactionsbetweennanoparticles51

5Propertiesofnanofluid53

6Masstransferinnanofluids62

7Futuretrends64 References64

3.Robustorganometallicgoldnanoparticles innanomedicineengineeringofproteins73

MahreenArooj,MehaveshHameed,SeemaPanicker,IhsanShehadi, andAhmedA.Mohamed

1Introduction74

2BSAconjugatedgold-carbonnanoparticleswith outstandingrobustnessandhemocompatibility74

3Greenandcytocompatiblecarboxyl-modified gold-lysozymeantibacterial76

4Inhibitionofamyloidfibrillationat carboxyl-tailoredgold-arylnanoparticles76

5Protein-coatedgoldnanoparticles:Greenand chemicalsynthesisroutesandtheircellular uptake80

6Computationalmethods84

7Conclusion90 References90

4.Polysaccharide-basednanomaterials95 LilyJaiswal,AlyaLimayem,andShivShankar

1Introduction95

2Agarnanoparticles97

3Agarosenanoparticle98

4Alginatenanoparticles99

5Carrageenannanoparticles100

6Chitinnanoparticles101

7Chitooligosaccharidenanoparticles103

8Chitosannanoparticles104

9Cellulosenanoparticles105

10Conclusion106 References106

5.Lipid-basednanostructuresinfood applications113

AnujitGhosalandNandikaBandara

1Introduction:Potentialoflipid-based nanostructure113

2Typeoflipidnanostructuresusedinfood industries115

3Differentsynthesismethodologies120

4Applicationoflipidnanostructureinfood industries122

5Futureoflipid-basednanostructures123 References124

6.Bio-basedmultifunctionalnanomaterials: Synthesisandapplications129

1Introduction130

2Biomoleculesinnanomaterialsynthesis132

3Microbialmoleculesinnanomaterialsynthesis132

4Plantresourcesinnanoparticlesynthesis140

5Template-basedsynthesis144

6NPshapecontrolwithbiomolecularsystems146

7Extensiveuseofnanoparticles152

8Scopeandapplicationsofas-synthesizedNPs154

9Summaryandfutureoutlook158

Acknowledgement159

References159

7.Nanocompositesinfoodpackaging167

1Introduction167

2Fabricationmethodsofnanocomposites169

3Typesofnanoparticles172

4Essentialoils175

5EffectoftheincorporationofnanoparticlesandEOs onthepropertiesofthenanocompositepackaging films176

6Regulatoryissues193

7Concludingremarks196

References196

8.Nanodeliverysystemsforfood bioactives205

L.Mahalakshmi,K.S.Yoha,J.A.Moses,and C.Anandharamakrishnan

1Introduction205

2Requirementofnanodeliverysystem207

3Propertiesofthedeliverysystem208

4Nanodeliverysystem209

5Conclusionandfutureperspective225

References226

9.Nanostructuresforimprovingfood structureandfunctionality231

1Introduction231

2Overviewofmethodsfornanostructure formations232

3Sourcesofbiopolymersfornanostructure development239

4Applicationonnanostructuresinfood systems243

5Conclusion247 References247

10.Nanotechnologyinmicrobial foodsafety253

AbhinandanPalandKanishkaBhunia

1Introduction254

2Interactionbetweennanoparticlesand microbes256

3Antimicrobialnanocoating266

4Anti-foulingsurface268

5Antimicrobialnanomaterialsforbiofilm270

6Nanoencapsulation272

7Nanophotosensitizer274

8Applicationofnanotechnologyinmicrobial foodsafety277

9Riskassessment288

10Regulatoryandlegislativeaspects289

11Finalremarks290 References291

11.Electroconductivenanofibrillar biocompositeplatformsforcardiactissue engineering305

TarunAgarwal,Sheri-AnnTan,LeiNie,EnsiehZahmatkesh, AafreenAnsari,NiloofarKhoshdelRad,IbrahimZarkesh, TapasKumarMaiti,andMassoudVosough

1Introduction307

2Nanotopologiesandelectricalstimulation— Intrinsicbiophysicaldeterminant ofCMs308

3Strategiesforfabricatingelectroactivenanofibrous platforms309

4Recentdevelopmentsinelectroconductive nanofibrillarplatformsforCTE310

5Conclusionandoutlook325

Acknowledgment325

Conflictofinterest325 References325

12.Impactsofnanotechnologyintissue engineering331

MhBusraFauzi,JiaXianLaw,MinHweiNg,YogeswaranLokanathan, NadiahSulaiman,andAtiqahSalleh

1Nanomaterialsforskinrepairand regeneration332

2Nanomaterialtechnologyforeye regeneration335

3Nanostructuredbiomaterialusedinbone regeneration337

4Nanomaterialsinmanagementofchronic respiratorydiseasesandmucosalinjury340

5Biomaterialsincardiovasculartissueengineering andregenerativemedicine343

References346

13.Piezoelectricnanomaterialsfor biomedicalapplications355

AkashRoy,DipanjanDwari,MukeshKumarRam, andPallabDatta

1Introductionandoriginofpiezoelectricity356

2Preparationofpiezoelectricmaterials358

3Biomedicalapplicationsofpiezoelectric nanomaterials362

4Conclusions373

References374

14.Nanotechnology-basedinterventions forinteractionswiththeimmune system379

SayandeepSaha,ShaliniDasgupta,andAnanyaBarui

1Introduction380

2Emergingclinicalneedsofhumanimmune physiology380

3Nanotechnologyandnanoparticlesfor vaccination387

4Treatmentofimmunosuppressivediseaseswith nanoparticles395

5Cancertreatmentwithnanotechnologybyimmune modulation397

6Conclusion407

Acknowledgment407

References408

15.Polycaprolactone-basedshapememory polymericnanocompositesforbiomedical applications413

VaishnaviHada,S.A.R.Hashmi,MedhaMili,NikhilGorhe, SaiSateeshSagiri,KunalPal,RashmiChawdhary,ManalKhan, AjayNaik,N.Prashant,A.K.Srivastava,andSarikaVerma

1Introduction414

2Aninsightofshape-memorypolymersandshape memoryeffect415

3SignificanceofSMPsinbiomedical applications417

4SynthesisandpropertiesofPCL419

5PCL-basedshapememorypolymeric nanocomposites422

6Scopeandfutureperspective426

7Conclusion428

Acknowledgment428

Conflictsofinterest429

References429

16.Nanoemulsionsforantitumor activity435

SomaMukherjee,DarrylL.Holliday,NabarajBanjara,and NavamHettiarachchy

1Introduction435

2NanoemulsionandMDR440

3Applicationanddifferenttypesofcancer therapy441

4Theragonosticapplicationofnanoemulsion449

5Futureprospects449

6Conclusion450

References450

17.Nanomaterialsforagingand cosmeceuticalapplications455

MhBusraFauzi,AliSmandri,IbrahimN.Amirrah, NurkhuzaiahKamaruzaman,AtiqahSalleh,ZawaniMazlan, NusaibahSallehuddin,IzzatZulkiflee,LawXiaJian,and FatimahMohdNor

1Introduction456

2Classificationsofnanocosmeceuticals457

3Nanocosmeceuticalsmechanismsofaction462

4Toxicityofnanoparticlesforcosmeceuticals465

5Safetyassessmentofnanomaterialsincosmetic industry467

6Futureperspectiveandrecommendations468 References470

18.Nano-formulationsindrug delivery473

MelissaGarcia-Carrasco,ItzelF.Parra-Aguilar, ErickP.Gutierrez-Grijalva,AngelLicea-Claverie,and J.BasilioHeredia

1Nanotechnologyinnano-formulationsindrug delivery474

2Morphologiesandtheirpropertiesindrug delivery476

3Preparationofnano-formulations479

4Differentapplicationsofnano-formulations484

5Biocompatibilityandmechanismofsomesystem drugdelivery484

6Perspectives486 References487

19.Nano-materialsasbiosensorforheavy metaldetection493

SampritBose,SouravMaity,andAnganaSarkar

1Introduction493

2Biosensor495

3Advancementonnanomaterial-based biosensor516

4Prosandcons520

5Futureprospects520 References521

20.Smartnano-biosensorsinsustainable agricultureandenvironmental applications527

RaniPuthukulangaraRamachandran,ChelladuraiVellaichamy,and ChyngyzErkinbaev

1Introduction528

2Principleofnano-biosensors528

3Typesofnano-biosensors529

4Nanostructuresusedinsensors532

5Nano-biosensorsforenvironmentalandagricultural application533

6Conclusion538 References538

Index543

Contributors

TarunAgarwal DepartmentofBiotechnology, IndianInstituteofTechnology,Kharagpur, WestBengal,India

IbrahimN.Amirrah CentreforTissue EngineeringandRegenerativeMedicine, FacultyofMedicine,NationalUniversityof Malaysia,KualaLumpur,Malaysia

C.Anandharamakrishnan Computational ModelingandNanoscaleProcessingUnit, NationalInstituteofFoodTechnology, EntrepreneurshipandManagement— Thanjavur,MinistryofFoodProcessing Industries,Govt.ofIndia,Thanjavur,Tamil Nadu,India

AafreenAnsari DepartmentofBiotechnology andMedicalEngineering,NationalInstituteof TechnologyRourkela,Rourkela,Orissa,India

MahreenArooj DepartmentofChemistry, CollegeofSciences,UniversityofSharjah, Sharjah,UnitedArabEmirates

NandikaBandara DepartmentofFoodand HumanNutritionalSciences,Richardson CentreforFoodTechnologyandResearch, UniversityofManitoba,Winnipeg,MB, Canada

NabarajBanjara DepartmentofBiologicaland PhysicalScience,UniversityofHolyCross, NewOrleans,LA,UnitedStates

AnanyaBarui CentreforHealthcareScience andTechnology,IndianInstituteof EngineeringScienceandTechnology,Shibpur, Howrah,WestBengal,India

J.BasilioHeredia ResearchCenterforFoodand Development(CIAD),Nutraceuticalsand FunctionalFoodsLaboratory,Culiaca ´ n, Sinaloa,Mexico

KanishkaBhunia AgriculturalandFood EngineeringDepartment,IndianInstituteof TechnologyKharagpur,Kharagpur,WB,India

SampritBose DepartmentofBiotechnologyand MedicalEngineering,NationalInstituteof Technology,Rourkela,Odisha,India

RashmiChawdhary AllIndiaInstituteof MedicalSciences(AIIMS),Bhopal,Madhya Pradesh,India

RahulChetri DepartmentofFoodProcess Engineering,NationalInstituteofTechnology Rourkela,Rourkela,India

NanditaDasgupta Departmentof Biotechnology,InstituteofEngineeringand Technology,Dr.A.P.J.AbdulKalamTechnical University,Lucknow,UttarPradesh,India

ShaliniDasgupta CentreforHealthcareScience andTechnology,IndianInstituteof EngineeringScienceandTechnology,Shibpur, Howrah,WestBengal,India

PallabDatta DepartmentofPharmaceutics, NationalInstituteofPharmaceuticalEducation andResearch(NIPER),Kolkata,WestBengal, India

SangeethaDharmalingam Departmentof MechanicalEngineering,AnnaUniversity, Chennai,TamilNadu,India

DipanjanDwari CentreforHealthcareScience andTechnology,IndianInstituteof EngineeringScienceandTechnology(IIEST), Howrah,WestBengal,India

ChyngyzErkinbaev DepartmentofBiosystems Engineering,UniversityofManitoba, Winnipeg,MB,Canada

MhBusraFauzi CentreforTissueEngineering andRegenerativeMedicine,Facultyof Medicine,NationalUniversityofMalaysia, KualaLumpur,Malaysia

MelissaGarcia-Carrasco ResearchCenterfor FoodandDevelopment(CIAD),Nutraceuticals andFunctionalFoodsLaboratory,Culiaca ´ n, Sinaloa,Mexico

AnujitGhosal DepartmentofFoodandHuman NutritionalSciences,FacultyofAgricultural andFoodSciences,UniversityofManitoba; RichardsonCentreforFunctionalFoods& Nutraceuticals,Winnipeg,MB,Canada

NikhilGorhe CouncilofScientificand IndustrialResearch—AdvancedMaterialsand ProcessesResearchInstitute;Academyof CouncilScientificandIndustrialResearch (AcSIR)—AdvancedMaterialsandProcesses ResearchInstitute(AMPRI),Hoshangabad Road,Bhopal,MadhyaPradesh,India

ErickP.Gutierrez-Grijalva CATEDRAS CONACYT-ResearchCenterforFoodand Development(CIAD),Nutraceuticalsand FunctionalFoodsLaboratory,Culiaca ´ n, Sinaloa,Mexico

VaishnaviHada CouncilofScientificand IndustrialResearch—AdvancedMaterialsand ProcessesResearchInstitute,Bhopal,Madhya Pradesh,India

HushnaaraHadem CentreforNanoSciences andTechnology,PondicherryUniversity, ChinnaKalapet,Kalapet,Puducherry, India

MehaveshHameed DepartmentofChemistry, CollegeofSciences,UniversityofSharjah, Sharjah,UnitedArabEmirates

S.A.R.Hashmi CouncilofScientificand IndustrialResearch—AdvancedMaterialsand ProcessesResearchInstitute;Academyof CouncilScientificandIndustrialResearch (AcSIR)—AdvancedMaterialsandProcesses ResearchInstitute(AMPRI),Hoshangabad Road,Bhopal,MadhyaPradesh,India

NavamHettiarachchy DepartmentofFood Science,UniversityofArkansas,Fayetteville, AR,UnitedStates

DarrylL.Holliday DepartmentofBiological andPhysicalScience,UniversityofHolyCross, NewOrleans,LA,UnitedStates

NishantRachayyaSwamiHulle Departmentof FoodEngineeringandTechnology,Tezpur University,Tezpur,Assam,India

K.JagajjananiRao Departmentof Biotechnology,VelTechRangarajan Dr.SagunthalaR&DInstituteofScienceand Technology,Chennai,India

LilyJaiswal DepartmentofFoodandNutrition, BioNanocompositeResearchInstitute,Kyung HeeUniversity,Seoul,RepublicofKorea

LawXiaJian CentreforTissueEngineeringand RegenerativeMedicine,FacultyofMedicine, NationalUniversityofMalaysia,Kuala Lumpur,Malaysia

NurkhuzaiahKamaruzaman CentreforTissue EngineeringandRegenerativeMedicine, FacultyofMedicine,NationalUniversityof Malaysia,KualaLumpur,Malaysia

ManalKhan AllIndiaInstituteofMedical Sciences(AIIMS),Bhopal,MadhyaPradesh, India

TaranginiKorumilli Departmentof Biotechnology,VelTechRangarajan

Dr.SagunthalaR&DInstituteofScienceand Technology,Chennai,India

VaidhegiKugarajah DepartmentofMechanical Engineering,AnnaUniversity,Chennai,Tamil Nadu,India

JiaXianLaw CentreforTissueEngineeringand RegenerativeMedicine,FacultyofMedicine, NationalUniversityofMalaysia,Kuala Lumpur,Malaysia

AngelLicea-Claverie TNM,Tijuana TechnologicalInstitute,GraduateStudiesand ChemistryResearchCenter,Tijuana,Baja California,Mexico

AlyaLimayem ResearchDepartmentof PharmaceuticalSciences,Collegeof Pharmacy,UniversityofSouthFloridaCentre forResearch&Educationin

Nanobioengineering,USFHealth,Tampa,FL, UnitedStates

YogeswaranLokanathan CentreforTissue EngineeringandRegenerativeMedicine, FacultyofMedicine,NationalUniversityof Malaysia,KualaLumpur,Malaysia

L.Mahalakshmi ComputationalModelingand NanoscaleProcessingUnit,NationalInstitute ofFoodTechnology,Entrepreneurshipand Management—Thanjavur,MinistryofFood ProcessingIndustries,Govt.ofIndia, Thanjavur,TamilNadu,India

TapasKumarMaiti Departmentof Biotechnology,IndianInstituteofTechnology, Kharagpur,WestBengal,India

SouravMaity DepartmentofBiotechnology andMedicalEngineering,NationalInstituteof Technology,Rourkela,Odisha,India

ZawaniMazlan CentreforTissueEngineering andRegenerativeMedicine,Facultyof Medicine,NationalUniversityofMalaysia, KualaLumpur,Malaysia

MedhaMili CouncilofScientificandIndustrial Research—AdvancedMaterialsandProcesses ResearchInstitute;AcademyofCouncil ScientificandIndustrialResearch (AcSIR)—AdvancedMaterialsandProcesses ResearchInstitute(AMPRI),Hoshangabad Road,Bhopal,MadhyaPradesh,India

BhartenduNathMishra Departmentof Biotechnology,InstituteofEngineeringand Technology,Dr.A.P.J.AbdulKalamTechnical University,Lucknow,UttarPradesh,India

AhmedA.Mohamed Departmentof Chemistry,CollegeofSciences,Universityof Sharjah,Sharjah,UnitedArabEmirates

J.A.Moses ComputationalModelingand NanoscaleProcessingUnit,NationalInstitute ofFoodTechnology,Entrepreneurshipand Management—Thanjavur,MinistryofFood ProcessingIndustries,Govt.ofIndia, Thanjavur,TamilNadu,India

SomaMukherjee DepartmentofBiologicaland PhysicalScience,UniversityofHolyCross, NewOrleans,LA,UnitedStates

AjayNaik CouncilofScientificandIndustrial Research—AdvancedMaterialsandProcesses ResearchInstitute;AcademyofCouncil ScientificandIndustrialResearch (AcSIR)—AdvancedMaterialsandProcesses ResearchInstitute(AMPRI),Hoshangabad Road,Bhopal,MadhyaPradesh,India

DebarshiNath DepartmentofFoodProcess Engineering,NationalInstituteofTechnology Rourkela,Rourkela,India

MinHweiNg CentreforTissueEngineering andRegenerativeMedicine,Facultyof Medicine,NationalUniversityofMalaysia, KualaLumpur,Malaysia

LeiNie CollegeofLifeSciences,Xinyang NormalUniversity,Xinyang,China

SophiaDeviNongmaithem Departmentof FoodEngineeringandTechnology,Tezpur University,Tezpur,Assam,India

FatimahMohdNor KPJAmpangPuteri SpecialistHospital,Ampang,Selangor, Malaysia

AtulKumarOjha CentreforNanoSciencesand Technology,PondicherryUniversity,Chinna Kalapet,Kalapet,Puducherry,India

AbhinandanPal AgriculturalandFood EngineeringDepartment,IndianInstituteof TechnologyKharagpur,Kharagpur,WB,India

KunalPal DepartmentofBiotechnologyand MedicalEngineering,NationalInstituteof Technology,Rourkela,Odisha,India

SeemaPanicker DepartmentofChemistry, CollegeofSciences,UniversityofSharjah, Sharjah,UnitedArabEmirates

ItzelF.Parra-Aguilar ResearchCenterforFood andDevelopment(CIAD),Nutraceuticalsand FunctionalFoodsLaboratory,Culiaca ´ n, Sinaloa,Mexico

N.Prashant CouncilofScientificandIndustrial Research—AdvancedMaterialsandProcesses ResearchInstitute;AcademyofCouncil ScientificandIndustrialResearch(AcSIR)— AdvancedMaterialsandProcessesResearch Institute(AMPRI),HoshangabadRoad, Bhopal,MadhyaPradesh,India

NiloofarKhoshdelRad DepartmentofStem CellsandDevelopmentalBiology,CellScience ResearchCenter,RoyanInstituteforStemCell BiologyandTechnology,ACECR,Tehran,Iran

MukeshKumarRam CentreforHealthcare ScienceandTechnology,IndianInstituteof EngineeringScienceandTechnology(IIEST), Howrah,WestBengal,India

RaniPuthukulangaraRamachandran DepartmentofBiosystemsEngineering, UniversityofManitoba,Winnipeg,MB, Canada

ShivenduRanjan FacultyofEngineeringand theBuiltEnvironment,Universityof Johannesburg,Johannesburg,SouthAfrica; AnimalCellandTissueCultureLab,Gujarat BiotechnologyResearchCentre,Departmentof ScienceandTechnology,Governmentof Gujarat,Gandhinagar,Gujarat,India

AkashRoy CentreforHealthcareScienceand Technology,IndianInstituteofEngineering ScienceandTechnology(IIEST),Howrah,West Bengal,India

SaiSateeshSagiri Agro-Nanotechnologyand AdvancedMaterialsResearchCenter,Institute ofPostharvestandFoodSciences,Agricultural ResearchOrganization,TheVolcaniCenter, RishonLeZion,Israel

SayandeepSaha CentreforHealthcareScience andTechnology,IndianInstituteof EngineeringScienceandTechnology,Shibpur, Howrah,WestBengal,India

AtiqahSalleh CentreforTissueEngineering andRegenerativeMedicine,Facultyof Medicine,NationalUniversityofMalaysia, KualaLumpur,Malaysia

NusaibahSallehuddin CentreforTissue EngineeringandRegenerativeMedicine, FacultyofMedicine,NationalUniversityof Malaysia,KualaLumpur,Malaysia

R.Santhosh DepartmentofFoodProcess Engineering,NationalInstituteofTechnology Rourkela,Rourkela,India

AnganaSarkar DepartmentofBiotechnology andMedicalEngineering,NationalInstituteof Technology,Rourkela,Odisha,India

PreetamSarkar DepartmentofFoodProcess Engineering,NationalInstituteofTechnology Rourkela,Rourkela,India

ShivShankar DepartmentofFoodand Nutrition,BioNanocompositeResearch Institute,KyungHeeUniversity,Seoul, RepublicofKorea;ResearchLaboratoriesin SciencesAppliedtoFood,INRS-Institute Armand-Frappier,Laval,QC,Canada

IhsanShehadi DepartmentofChemistry, CollegeofSciences,UniversityofSharjah, Sharjah,UnitedArabEmirates

AliSmandri CentreforTissueEngineeringand RegenerativeMedicine,FacultyofMedicine, NationalUniversityofMalaysia,Kuala Lumpur,Malaysia

A.K.Srivastava CouncilofScientificand IndustrialResearch—AdvancedMaterials andProcessesResearchInstitute;Academyof CouncilScientificandIndustrialResearch (AcSIR)—AdvancedMaterialsand ProcessesResearchInstitute(AMPRI), HoshangabadRoad,Bhopal,Madhya Pradesh,India

NadiahSulaiman CentreforTissue EngineeringandRegenerativeMedicine, FacultyofMedicine,NationalUniversityof Malaysia,KualaLumpur,Malaysia

Sheri-AnnTan DepartmentofBioscience, FacultyofAppliedSciences,TunkuAbdul RahmanUniversityCollege,KualaLumpur, Malaysia

ChelladuraiVellaichamy Departmentof AgriculturalEngineering,Bannariamman InstituteofTechnology,Sathyamangalam, TamilNadu,India

SarikaVerma CouncilofScientificand IndustrialResearch—AdvancedMaterialsand ProcessesResearchInstitute;Academyof CouncilScientificandIndustrialResearch (AcSIR)—AdvancedMaterialsand ProcessesResearchInstitute(AMPRI), HoshangabadRoad,Bhopal, MadhyaPradesh,India

MassoudVosough DepartmentofStemCells andDevelopmentalBiology;Departmentof RegenerativeMedicine,CellScience ResearchCentre,RoyanInstituteforStem CellBiologyandTechnology,ACECR, Tehran,Iran

K.S.Yoha ComputationalModelingand NanoscaleProcessingUnit,NationalInstitute ofFoodTechnology,Entrepreneurshipand Management—Thanjavur,MinistryofFood ProcessingIndustries,Govt.ofIndia, Thanjavur,TamilNadu,India

EnsiehZahmatkesh DepartmentofStemCells andDevelopmentalBiology,CellScience ResearchCenter,RoyanInstituteforStemCell BiologyandTechnology,ACECR,Tehran,Iran

IbrahimZarkesh DepartmentofStemCellsand DevelopmentalBiology,CellScienceResearch Center,RoyanInstituteforStemCellBiology andTechnology,ACECR,Tehran,Iran

IzzatZulkiflee CentreforTissueEngineering andRegenerativeMedicine,Facultyof Medicine,NationalUniversityofMalaysia, KualaLumpur,Malaysia

Fabricationofnanomaterials

VaidhegiKugarajah a,∗,HushnaaraHademb,∗,AtulKumar Ojhab,ShivenduRanjanc,d,NanditaDasguptae,BhartenduNath

Mishrae,andSangeethaDharmalingam a

aDepartmentofMechanicalEngineering,AnnaUniversity,Chennai,TamilNadu,India bCentre forNanoSciencesandTechnology,PondicherryUniversity,ChinnaKalapet,Kalapet, Puducherry,India cFacultyofEngineeringandtheBuiltEnvironment,UniversityofJohannesburg, Johannesburg,SouthAfrica dAnimalCellandTissueCultureLab,GujaratBiotechnology ResearchCentre,DepartmentofScienceandTechnology,GovernmentofGujarat,Gandhinagar, Gujarat,India eDepartmentofBiotechnology,InstituteofEngineeringandTechnology,Dr.A.P.J. AbdulKalamTechnicalUniversity,Lucknow,UttarPradesh,India

1Introduction

Nanotechnologydealswithmaterialswith1–100nmdimensioninsize.Theconceptof nanotechnologywasintroducedbyRichardP.Feynman(NobelLaureateinPhysics,1965) in“There’sPlentyofRoomattheBottom.”Heintroducedtheconceptofthepossibilityto arrangetheatomsinthenanoscale(Feynman,1960).Nowadays,mostelectronics,optical communications,andbiologicalsystemsarebasedonnanotechnology(Enescuetal.,2019; Mathewetal.,2019; Shangetal.,2019; Kumaretal.,2020).Thisisduetotheuniquephysical, chemical,andthermalpropertiesandhighsurfaceareatovolumeratio.Itwasfoundthat usingnanotechnology,billionsoftransistorscanbepackedincomputerchips(Srivastava andKotov,2008).Inbiomedical,nanotechnologyhasbeenusedtoachievetargeteddrugdelivery(Oroojalianetal.,2020; Saxenaetal.,2020),genereplacement(Pandeyetal.,2019; Chengetal.,2020),tissueregeneration(Yangetal.,2019),etc.Opticallithographyisanother bestapplicationofnanotechnology(CruchoandBarros,2017; Karaballietal.,2020),which hasbeenusedforprintingsmallobjects(Albisettietal.,2016; Boseetal.,2018).Also,nanotechnologyhasvariousapplicationssuchasinflatdisplaydevices(Lim,2019),medicalimaging(R € othlisbergeretal.,2017; Tibbals,2017),paint(Lutz,2019),additives,automobile components(Werneretal.,2018),satellitecomponents(Pourzahedietal.,2017),high-energy storagesystem,fuelcells(ElumalaiandSangeetha,2018; KugarajahandDharmalingam, 2020),opticaldevices(Wangetal.,2019),electromagneticinterferenceshielding,foodand beveragepackaging(Enescuetal.,2019),sensors(Farzinetal.,2020),aircraftcomponents,etc.

Variousmethodsarebeingusedtofabricatenanomaterial-basedproductssuchassol-gel synthesis,plasmasynthesis,chemicalsynthesis,hydrothermalsynthesis,alloying,blending, mechanical,andmechanochemicalsynthesis,etc.(CruchoandBarros,2017; Dastan,2017; Jamkhandeetal.,2019; Karaballietal.,2020).Inordertoexplainthefabrication,design, andapplicationofnanomaterials,nanoscienceusesthebasicconceptsofpropertiesand mechanismsofnanomaterialsused(Zhong,2009).Thehistoricalaspectofnanotechnology ismentionedin Table1

Crystallizationprocess(nucleationandgrowth)hasagreatimpactonthecrystalstructure andshapeduringnanoparticlesynthesis.TheLaMertheoryandSugimotomodelcanbeused tostudythekineticsofnucleationandgrowthmechanismofnanomaterials(Sugimoto,2007; Mehranpouretal.,2010).AccordingtoLaMertheory,whenthesoluteconcentrationreaches thecriticalconcentration(whichistheminimumconcentrationfornucleation),itstartsnucleating.Then,thesoluteconcentrationreachesitsmaximum,whichdecidestheconsumptionrateforthenucleationandthegrowthofthegeneratednuclei.However,afurther increaseinthesoluteconcentrationforthegrowthofthegeneratednucleiresultsinthedeclinationofthecurve.Itindicatestheendofnucleation(asshownin Fig.1)oftheconcentration vstimecurve.Thistheorywasonlyproposedformonodisperseparticleformation.Thebasic assumptionsofthistheorywere

(1) Massbalancebetweenthesupplyrateofsoluteanditsconsumptionratefornucleation andgrowthofthegeneratednuclei;

(2) Thesupplyrateofsoluteisindependentofthesubsequentprecipitationevents;

(3) Thenucleationrateiscontrolledonlybythegrowthofthepreformednucleiatafixedsupply rateofsolutewhenprecursorsoluteistransferredbyslowirreversiblegenerationinaclosed systemorbyacontinuousfeedfromoutsideinanopensystem(LaMerandDinegar,1950).

TABLE1 Historicalaspectsofnanotechnology(HorikoshiandSerpone,2013).

YearRemarksCountry/people

1200–1300 BC DiscoveryofsolublegoldEgyptandChina

290–325 AD LycurguscupAlexandriaorRome

1618ThefirstbookoncolloidalgoldF.Antonii

1676Bookpublishedondrinkablegoldthatcontains metallicgoldinneutralmedia

1718Publicationofacompletetreatiseoncolloidal gold

J.vonLowenstern-Kunckel(Germany)

HansHeinrichHelcher

1857SynthesisofcolloidalgoldM.Faraday(TheRoyalInstitutionofGreat Britain)

1902Surfaceplasmonresonance(SPR)R.W.Wood(JohnsHopkinsUniversity,United States)

1908Scatteringandabsorptionofelectromagnetic fieldsbyananosphere

G.Mie(UniversityofGottingen,Germany)

1931Transmissionelectronmicroscope(TEM)M.KnollandE.Ruska(TechnicalUniversityof Berlin,Germany)

1937Scanningelectronmicroscope(SEM)M.vonArdenne(Forschungslaboratoriumf € ur Elektronenphysik,Germany)

1959Feynman’sLectureon“There’sPlentyofRoom attheBottom”

R.P.Feynman(CaliforniaInstituteofTechnology, Pasadena,CA,UnitedStates)

1960Microelectromechanicalsystems(MEMS)I.Igarashi(ToyotaCentralR&DLabs,Japan)

1960SuccessfuloscillationofalaserT.H.Maiman(HughesResearchLaboratories, UnitedStates)

1962TheKuboeffectR.Kubo(UniversityofTokyo,Japan)

1965Moore’sLawG.Moore(FairchildSemiconductorInc.,United States)

1969TheHonda–FujishimaeffectA.FujishimaandK.Honda(UniversityofTokyo, Japan)

1972Amorphousheterostructurephotodiodecreated withbottom-upprocess

E.Maruyama(HitachiCo.Ltd.,Japan)

1974ConceptofnanotechnologyproposedN.Taniguchi(TokyoUniversityofScience,Japan)

1976CarbonnanofiberM.Endo(ShinshuUniversity,Japan)

1976AmorphoussiliconsolarcellsD.E.CarlsonandC.R.Wronski(RCA,United States)

1980Quantumhalleffect(NobelPrize)K.vonKlitzing(UniversityofW € urzburg, Germany) Continued

TABLE1 Historicalaspectsofnanotechnology(HorikoshiandSerpone,2013)—cont’d

YearRemarksCountry/people

1982Scanningtunnelingmicroscope(STM)(Nobel Prize)

G.BinnigandH.Rohrer(IBMZurichResearch Lab.,Switzerland)

1986Atomicforcemicroscope(AFM)G.Binnig(IBMZurichResearchLab., Switzerland)

1986Three-dimensionalspacemanipulationofatoms demonstrated(NobelPrize)

S.Chu(BellLab.,UnitedStates)

1987GoldnanoparticlecatalysisM.Haruta(IndustrialResearchInstituteofOsaka, Japan)

1990Atomscontrolledwithscanningtunneling microscope(STM)

D.M.Eigler(IBM,UnitedStates)

1991CarbonnanotubesdiscoveredS.Iijima(NECCo.,Japan)

1992Japan’sNationalProjectonUltimateManipulationofAtomsandMoleculesbegins

1995NanoimprintingS.Y.Chou(UniversityofMinnesota,United States)

1996NanosheetsT.Sasaki(NationalInstituteforResearchin InorganicMaterials,Japan)

2000NationalNanotechnologyInitiative(NNI),UnitedStates

200321stCenturyNanotechnologyResearchandDevelopmentAct,UnitedStates

2005NanosciencesandNanotechnologies:Anactionplan,Europe

FIG.1 LaMerdiagramasaschematicexplanationfortheformationprocessofmonodisperseparticles,where C∞ and Ccrit aretheequilibriumconcentrationofsolutewiththebulksolidandthecriticalconcentrationastheminimum concentrationfornucleation,respectively.TheregionsI,II,andIIIrepresenttheprenucleation,nucleation,andgrowth stages,respectively. ReproducedfromSugimoto,T.,2007.Underlyingmechanismsinsizecontrolofuniformnanoparticles.J. ColloidInterfaceSci.309,106–118. https://doi.org/10.1016/j.jcis.2007.01.036

Thesizeandtheuniformityofthefinalnanoparticlescanbecontrolledbyreducingthe growthrateofnuclei,whichispossiblebydetailedknowledgeaboutfactorssuchastemperature,pH,adsorptionofadditives,andaffinityofsolvents( Sugimoto,2007 ).Further, fluorescentbiosensorlight-emittingdiodescanbefabricatedusingthesequantumdots ornanoparticles( Linetal.,2017 ; Muetal.,2020).Sharpandsymmetricalemissionspectra, highquantumyield,goodphotochemicalstability,andsize-dependentemissionwavelengthtenabilityarethemainpropertiesofquantumdotsornanoparticles,owing totheirquantumconfinementeffect(Raphae letal.,2011).Therefore,semiconductorquantumdotsnanomaterialsplayasignificantroleinmodernelectronicslight-emittingdiode (Caoetal.,2017 ; Dongetal.,2019 ),digitalandanalogintegratedcircuits,transistors,solar cells(Ahmadetal.,2018 ),solarphotovoltaicpanels,wastewatertreatmentbyadsorptionof pollutants( Mustaphaetal.,2020),etc.Functionalizationofnanomaterialsofferstoachieve betterperformanceandproperties(PalitandHussain,2020 ).Thefunctionalizationof nanomaterialsiscarriedoutbasedontheint eractionbetweenmainnanostructuredmaterialsandneighboringmaterialsystems(Iordacheetal.,2011).AccordingtotheHall-Petch equation,thenanomaterial-basedcomposites systemalsoshowsbettermechanicalproperties,accordingtowhichthestrengthofmaterialsisinverselyproportionaltotherootdiameterofgrain.Nanomaterialsofferexcellentba rrierpropertiesduetotheincreaseddiffusion lengthofthesolventgas.Themainobjectiveofthischapteristoexplainthefabricationof nanomaterials.

2Fabricationofnanomaterials

Materialscanbeclassifiedaccordingtotheirmechanical,electrical,magnetic/dielectric propertiesandtheirdimensions,includingbulkmaterials,0Dnanomaterials(allthreedimensionsinnano-range),1D(twodimensionsinnano-range)(Weietal.,2017),2D(onedimension innano-range)(Wangetal.,2017a),and3D(polycrystallinenanomaterials)(Zhuetal.,2017). Inthischapter,wewillfocusonthefabricationmethodsofnanomaterials.Thetechniqueto fabricateandprocessthenanomaterialsisthemainissueinnanotechnology.Probingtheir uniquephysicalpropertiesandunderstandingtheirpossiblefabricationtechniquesprovide advantagesforusingthenanomaterialsfortheirfinaluse.Generally,physicalmethodsor chemicalmethodsareemployedtofabricatenanomaterials.Thephysicalmethodsinclude top-downandbottom-upapproaches.

Top-downsuchassolid-stateroute,ballmillingandbottom-upsuchassol-geland coprecipitationarethetwomethodsthathavebeenadoptedtosynthesizethenanomaterials. Insomecases,thebottom-upandtop-downmethodsareappliedtogethertofabricate nanomaterialssuchasinLithographyprocess(GregorczykandKnez,2016).Suchanapproachiscalledahybridmethod.Aflowchartforsomemethodsofnanomaterialsfabrication ismentionedin Fig.2.Thereareseveralmethodstocharacterizethenanomaterialsprepared. SomemajorcharacterizationtechniquesincludeX-raydiffraction,scanningelectronmicroscopy,transmissionelectronmicroscopy,energydissipativeanalysis,ultraviolet-visiblespectroscopy,dynamiclightscattering,andFouriertransformationinfraredspectroscopy (Thomasetal.,2017).Morphology,physical,chemical,andthermalpropertiesof

nanomaterialsdependonthefabricationtechniquesandprecursorsofthenanomaterialsthat wereusedtofabricatethem.Thepropertiesofnanomaterialsdecidetheapplicationsof nanomaterialsinvariousareassuchascatalysis,foodindustry,medicine,andelectronics. Hydrothermalsynthesis,combustionsynthesis,gas-phasemethods,microwavesynthesis, andsol-gelprocessinghavebeenusedtosynthesizenanometaloxides(Chengetal.,1995; Gopaletal.,1997; Kimetal.,1999; WangandYing,1999; Watsonetal.,2004; Wolf,2008). Othertechnologiessuchasself-assembly,nontraditionallithography,templategrowth, andbiomimeticshavealsobeenusedtoproducenanomaterial-basedproducts,quantum dots,nanorods,nanotubes,etc.(Wolf,2008).Nanomaterialshaveatleastonedimensionin thenanometerrange.Thenanomaterialsshowdifferentphysicalandchemicalproperties fromtheirbulkcounterparts.Nanotechnologyallowsustounderstandthesizeeffectpropertiesofnanostructuredmaterialsandtheirpossibleapplications.Nowadays,nanotechnologyisbeingusedasaninterdisciplinaryscienceandtechnology,whichincludes nanochemistry,nanoelectronics,nanomaterialsscience,nanophysics,nanorobotics, nanobiotechnology,nanometrology,etc.

Inadditiontotheabove,thereareseveralmethods,includingcoprecipitation,hydrothermal,microwave,microemulsion,ultrasound,templatesynthesis,biologicalsynthesis,electrochemicalsynthesis,etc.whicharediscussedinthefollowingsections.

FIG.2 Aflowchartfornanomaterialsfabrication.

3Top-downfabricationmethods

Thetop-downapproachisawell-developedtechnologycommonlyusedtodivideamassivesolidintosmallerparticlesuptothenanometersizerange(SuandChang,2018).Dry etching,ballmilling,andlithographyaremainlyemployedforfabricatingthenanoparticles throughatop-downapproach.Therearecertaincharacteristicsofnanomaterials,whichcan beachievedbythesefabricationtechniques:

(a) Mono(uniform)sizedistribution,i.e.,alltheparticleswillhavethesamesizeinnanorange,

(b) Similarshapeand(microstructure)morphology,

(c) Similarchemicalcomposition,and

(d) Loweragglomeration(bysurfaceareaandvarioustypesofinteraction).

However,therearealsomanydrawbacksinthesemethods,includingcrystallographicdefects,roughness,andtheintroductionofimpurities(SuandChang,2018).Theseimpurities anddefectsalterthesurfacepropertiesoftheresultingnanomaterials.Forexample,theconductivityofnanomaterialsisalteredbythesurfaceimperfections,andexcessivegenerationof heatisanotherproblemofthesedefects.Top-downapproachhasanotherdrawback,suchas smallerflakesorparticleswithawidesizedistribution(Habibaetal.,2014).Thetop-down approachfornanomaterialsismentionedin Fig.3.Top-downapproachisalsocalledassolidphasefabricationmethod.

3.1Mechanicalmethods

Mechanicalmillinghasbeenwidelyadoptedforfabricatingvariouskindsofmaterialsso far.Mechanicalmillingisperformedusingtheballshaking,rotatingdisk,androtatingcylinder.Themainaimofmechanicalmillingistoreducetheparticlesize,mechanicalmixing,or alloyingbyapplyingmechanicalenergyandmechanicalshearforcesonthepowdersampleof themixture(BoldyrevandTkacova,2000).Mechanicalmillinghasbeenusedtofabricate nanomaterialsandnanocomposites.Theprincipleofmechanicalmillingisbasedonthe

FIG.3 Aschematicrepresentationof thetop-downapproachfor nanomaterials.

ball-powder-ballcollisioninthecaseofshakermills,frictionalandimpactforcesinthecaseof planetaryballmills(PrasadYadavetal.,2012),andveryhighshearandimpactforcesinthe caseofAttritionmills(Rajput,2015).Thesemechanicalandshearforcescausethepowderparticlestoundergodeformationand/orfracturetoachievethedesiredmicrostructureofthe powder.Themechanicalcharacteristicsofpowdercomponentorpowdermixtureisacrucial factorinmechanicalballmilling;therearevarioustypesofpowdermixturesuchasductileductile,brittle-brittle,ductile-brittlesystem(BenjaminandVolin,1974; Davisetal.,1988; LeeandKoch,1988).However,thetemperatureandthenonuniformityofparticlesizeduring millingprofoundlyaffectthestructural,microstructuralchanges(SuandChang,2018).The speedoftheball,thematerialpropertiesofthepowder,andmillingenvironmentcaninfluence thetemperatureofpowderduringmilling.Phasetransfercanbeinducedbytheballmilling, whichdependsonthediffusivityanddefectconcentrationinthepowder,while,diffusivity anddefectconcentrationinthepowderareinfluencedbythetemperatureofthepowder (Sunetal.,2002; PrasadYadavetal.,2012).Aschemefortheballmillingprocessisshown in Fig.4.Themechanicalmillingcanbeperformedinvariouswayssuchasattritionballmill, planetaryballmill,vibratingballmill,low-energytumblingmill,andhigh-energyballmill. Nanoparticle-basedpowderscanbeeasilyproducedbyhigh-energyballmilling ( Jamkhandeetal.,2019).Inhigh-energyballmilling,powdersandheavysteelortungsten carbideareloadedtogetherinacontainer,andshakingorhigh-speedrotationisapplied totransferthehighenergyontheloadedpowder;thecollisionbetweenballsgeneratesthe energy.However,high-energyballmillinghascertaindrawbackssuchascontamination problems,lowsurface,highlypolydispersesizedistribution,andpartiallyamorphousstate ofthepowder.Toresolvethisissue,inertatmosphereand/orhighvacuumprocessesareapplied.Themillingduration,characteristicsofmaterials,andsizeofballarethemainparameters(PrasadYadavetal.,2012).Low-energytumblingmillisemployedtofabricate nanoparticles-basedalloymaterialsinasimplewayandatlowcost.Vibratingballmills areusedtoproduceamorphousalloys.Avibratingballsuppliesahighamountofenergy totheparticles.Thevibratingcontainerisusedtoacceleratethemillingprocess.Thevibrating frequencyandamplitudeofoscillationarefoundtobearound1500

3000oscillation/minand 2–3mm,respectively.Thegrindingballismadeofsteelorcarbideballandisheavierthanthe

FIG.4 Ballmillingprocess.

powderparticlesand10–20mmindiameter.Planetaryballmillingisperformedinasmall container,thesesmallcontainersarefixedontoarotatingdrum,andthecontainersrotate inoppositedirectiontotherotatingdrum.Centrifugalforcesareimpartedbytherotation ofthesupportingdiskandautonomousturningofthecontainers.Theballandpowderroll ontheinnerwallofthecontainersandarethrownoffacrossthecontainersataround360rpm. Asattritionindicates,thefinerparticlesareobtainedbythewearorrubbing.Attritionmilling (StirredBallMills)isperformedviaaverticalshaftwithhorizontalarmssuchasflatdisks, diskswithvariousgeometricopenings,andconcentricrings.Theshaftiskeptinmedia, whichcontainstheballandpowderslurry.Whentheshaftrotates,stirreractionofthehorizontalarmonthepowderslurryreducesthesizeofparticles.Theshakermillreducesthesize ofpowderbytheshakingprocess.Thepowderandtheballarekeptinthecontainer;during theshakingprocess,ballscollidewitheachotherandthecontainerwall,whichproduceshigh shearandimpactforcesonthepowder.Thishighimpactandshearforcereducethepowder size(Ullahetal.,2014).Inoneofthestudies,researcherspreparedMg-dopedZnO nanoparticlesbyplanetaryballmillingataspeedof400rpmandmilledfor20h.Thespherical nanoparticleswereagglomeratedintoaclusterinordertoreducethesurface-freeenergy,as shownin Fig.5 (SuwanboonandAmornpitoksuk,2012).Arecentstudyby Abu-Oqailetal. (2019) showedthattheincreaseinmillingtimeto20himprovedthemicrostructureofthe

Cu-ZrO2 nanocompositesupto10%higherthanthatofpurecopper,whichenabledbetter mechanicalpropertiesofthenanocomposites.Anotherstudyshowedtheinfluenceofball millinginstarchnanoparticleproductionforitsapplicationindrugandfoodformulations. Itwasobservedthattherelativecrystallinesizedecreasedafterballmillingwithanaverage nanoparticlesizeintherangeof9–12nm(Ahmadetal.,2020).

3.2Mechanochemicalsynthesis

Mechanochemicalsynthesisisthecombinationofmechanicalandchemicalmethodstoget nanomaterials(Dutkova ´ etal.,2018; Galaburdaetal.,2019).Mechanochemicalsynthesisisan entirelydifferentprocessfromtheballmillingprocess(HaiNguyenetal.,2020).Itis performedbysolid-statedisplacementreactionduringtheballmillingprocesstoobtain nanoparticlesembeddedinby-productfinally.Millingtemperature,millingcollisionenergy, volumeandparticlesize,millingtime,molarratioofprecursor,powdermixturetoballratio arethemainfactorsthatinfluencetheparticlessizeandparticlessizedistribution.Themain drawbacksofthissystemare(1)contamination,(2)longprocessingtime,(3)uncontrollable particlemicrostructure,and(4)agglomeration. Fig.6 showstheflowchartofmechanochemicalsynthesismethodfornanoparticles.Inonestudy,researchersfabricatedZnO nanoparticlesbymechanochemicalmethodusingZnCl2,NaCl,andNa2CO3 asrawmaterials. TEMimageshowsthatcalcinationhasaprofoundeffectontheparticlesize.Itwasfoundthat theparticlesizeincreaseswithanincreaseinthecalcinationtemperature.As Fig.7 shows,the averagesizeofparticleswasapproximately20–30nm(Moballeghetal.,2007).Itshouldbe pointedoutthatthemechanochemicalsynthesisisaresultofmillingandchemicalinteraction betweenprecursors.ResearchershavefabricatedSiO2/TDIandSiO2/TDI/(PDMS-OH) hybridparticlesbythemechanochemicalmethodinthepresenceofTDI(2,4diisocyanatotoluene)andhydroxylsiliconeoil(PDMS-OH),asshownin Fig.8.TEMmicrostructureindicatesthathybridparticles(SiO2/TDIandSiO2/TDI/(PDMS-OH))preparedby ballmillingmethodexhibitmuchbettermiscibilityanddispersioninPDMSmatrixwhen

FIG.6 Mechanochemicalprocess.

comparedwiththoseparticlespreparedbyacommonmixingdevice(Linetal.,2010). ArecentreportshowsthepreparationofInP/TiO2-Cnanocompositessynthesizedthrough themechanochemicalprocessasananodeforitsapplicationinLi-ionbatteriestoimprove efficiencyandstability(HaiNguyenetal.,2020).

3.3Lithographicprocesses

Nanolithographyhasbeenconsideredasthebranchofnanotechnology,whichisusedtofabricatenanometer-scalestructures.Recently,variousnano-electromechanicalsystems,nanotransistors,nanodiodes,nanoswitches,nanologicgates,semiconductingintegratedcircuits (ICs),etc.havebeenfabricatedthroughthenanolithographytechnology(Chouetal.,1996). NanolithographyisderivedfromtheGreekword“nanos,lithos,grapho,”whichmeansdwarf (nano),rock,orstone(litho)andwrites(grapho),respectively.Itisexplainedastinywriting onstoneasnanotermssuggestthepatterningwithatleastonedimensioninnanoscale. Nanolithographyhasseveraladvantagessuchasahigherdegreeofsafety,improvedstability, androbustness,ahigherdegreeofefficiencyandcapability,predictablepropertiesof nanocompositesandmaterials,environmentalcompetitiveness,andflexibility.Nanolithography consistsofmaskedormask-less,top-downorbottom-up,beam-ortip-based,resist-basedor resist-less,andserialorparallelmethods.Therefore,manynanolithographytechnologieshave beenusedtofabricatethemicro/nanopattern;thosetechnologiesarephotolithography,ionbeam lithography,X-raylithography,electronbeamlithography,microcontactprinting,nanoimprint lithography,scanningprobelithography.

Thephotolithographysystemisperformedusingalightsource,amask,andanopticalprojectionsystem(Wangetal.,2017b).Inphotolithographyapproach,initially,awaferorsubstratewithanoxidelayerisprepared;afterthatphotoresistmaterials(light-sensitive materialsorchemical)arecoatedonthesubstrate,aphotomaskofthedesiredpatternisfixed ontothecoatedsubstrate,whichisdevelopedontoaglasssubstrate.TheUVlightisexposed throughthephotomask,thenthephotoresistundergoesachemicalreactionduringthelight exposure,anddependingonthecharacteristicsofphotoresist,apatterniscreated,andetchingwasperformedtogetanoxidelayerpattern.Thephotoresistisclassifiedasanegativeor

FIG.7 TEMmicrographsofZnOnanoparticlesofheattreatedat300°C(Moballeghetal.,2007).

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