XYZMotion,CAPSensor,Non-magnetPiezo
NanopositioningStageandController!
Thistimeweintroducesapiezonano-positioningstagewithXYZ3-axismotionandclosed-loop capacitorsensoranditscorrespondingcontroller.ThecapacitormotionstageisP12.XYZ100Cand thecontrollerisE00D11AL
P12.XYZ100CPiezoNanopositioningStage
The3axesmotionofP12XYZ100Cpiezonano-positioningstageadoptsseriesconnectionDuring thedesignprocess,thevolumeisreducedasmuchaspossible,itsvolumeisonly 80×80×45mm^3Thereisaφ40mmcircularthroughholeinthecenter,suitableforlight transmissionorstructureintegration,placement.
Closed-loopCapacitorSensor
P12XYZ100Cpiezonanopositioningstageadoptscapacitivesensorforclosed-loopcontrol,and has3internalcapacitivesensorstomeasureandfeedbackthedisplacementofX,YandZaxesin realtime.Capacitivesensorisakindofnon-contactmeasurement.Thechangeofdistance betweenthecapacitorprobeandthemeasuredsurface,thatis,thepiezonano-positioning plastagemoves,changesthedistancebetweenthecapacitorprobeandthecapacitorprobe,and causesthevoltagevalueoftheoutputofthecapacitorsensortochangeThevoltagevalue correspondstothedisplacementofthenano-positioningstage.Non-contactmeasurement meansthereisnocontactbetweenthesensorandthemovingsurface,andwillnothave additionalinfluenceonthemovementofthedisplacementtable,whichcanensureverygood accuracyandlong-termstability,andtheresponsespeedisveryfast
XYZMotion,CAPSensor,Non-magnetPiezoNanopositioningStageandController!
Non-magnetic
AnotherimportantcharacteristicofP12XYZ100Cpiezonanopositioningstageisnon-magneticIt adoptsnon-magneticmaterialandnon-magneticprocessingtechnologytoensurethatthe productitselfwillnotbringadditionalmagneticfieldtotheappliedsystemenvironment,soitis verysuitableforapplicationsrequiringnon-magneticenvironment
Productmeasurementcurve
1)StepRiseCurve
ThemeasuredresultsshowthatthesteprisetimeofP12XYZ100Cpiezonanopositioningstage islessthan100ms
XYZMotion,CAPSensor,Non-magnetPiezoNanopositioningStageandController!
2)DisplacementVSVoltageCurve
ThevoltageanddisplacementcurvesofP12XYZ100Cpiezonanopositioningstageareshownin thefigurebelowIntheclosed-loopcontrol,thedrivecontrolvoltageislinearlyrelatedtoits displacementAt130Vdrivingvoltage,thedisplacementcanreach90μm
3)RepeatabilityCurve
Underdifferentpercentagestroke,therepeatedpositioningaccuracywillbedifferent,whichis relatedtothecharacteristicsofpiezoceramicsused,flexiblehingestructure,etcThemeasured resultsshowthattherepeatablepositioningaccuracyofP12.XYZ100Cpiezonanopositioning stageisbetterthan0027%inthewholedisplacementrange,andbetterthan0014%FSat10% stroke.
Applications
P12XYZ100Cpiezonanopositioningstagehashighresolution,highprecisionandnon-magnetic materialselection,makingitverysuitableforsuperresolutionmicroscopy,screening,confocal microscopy,biotechnology,etc
XYZMotion,CAPSensor,Non-magnetPiezoNanopositioningStageandController!
TechnicalData
ThebasicparametersofP12XYZ100Cpiezonanopositioningstageareasfollows
Note:TheaboveparametersaremeasuredbypiezocontrollerE00D11AL
E00.D11ALPiezoController
P12XYZ100CpiezonanopositioningstageisdrivenbyE00D11ALpiezocontroller
E00.D11ALpiezocontrollerisathree-channeloutputpiezocontroller,capacitorclosedloop,it canbecontrolledbyanalogsignalordigitalsignalIthasaLCDkeyboardcontrolmodule,butalso throughRS-232,RS-422,USBandotherinterfacestocommunicatewiththeuppercomputer, softwarecontrol
XYZMotion,CAPSensor,Non-magnetPiezoNanopositioningStageandController!
IntroductionoftheFrontPanel
TechnicalData
ThebasictechnicalparametersofE00D11ALpiezocontrollerareasfollowsItisdesignedfor capacitiveclosed-looppiezonanopositioningstage.ItcannotonlydriveP12.XYZ100Cpiezo nanopositioningstage,butalsobecompatiblewithothercapacitiveclosed-looppiezo nanopositioningstage.
XYZMotion,CAPSensor,Non-magnetPiezoNanopositioningStageandController!
XYZMotion,CAPSensor,Non-magnetPiezoNanopositioningStageandController!