XYZ Motion, CAP Sensor, Non-magnet Piezo Nanopositioning Stage and Controller!
XYZ Motion, CAP Sensor, Non-magnet Piezo Nanopositioning Stage and Controller! This time we introduces a piezo nano-positioning stage with XYZ 3-axis motion and closed-loop capacitor sensor and its corresponding controller. The capacitor motion stage is P12.XYZ100C and the controller is E00.D11AL.
P12.XYZ100C Piezo Nanopositioning Stage The 3 axes motion of P12.XYZ100C piezo nano-positioning stage adopts series connection. During the design process, the volume is reduced as much as possible, its volume is only 80×80×45mm^3. There is a φ40mm circular through hole in the center, suitable for light transmission or structure integration, placement.
Closed-loop Capacitor Sensor P12.XYZ100C piezo nanopositioning stage adopts capacitive sensor for closed-loop control, and has 3 internal capacitive sensors to measure and feedback the displacement of X, Y and Z axes in real time. Capacitive sensor is a kind of non-contact measurement. The change of distance between the capacitor probe and the measured surface, that is, the piezo nano-positioning plastage moves, changes the distance between the capacitor probe and the capacitor probe, and causes the voltage value of the output of the capacitor sensor to change. The voltage value corresponds to the displacement of the nano-positioning stage. Non-contact measurement means there is no contact between the sensor and the moving surface, and will not have additional influence on the movement of the displacement table, which can ensure very good accuracy and long-term stability, and the response speed is very fast.