Vacuum XYZ Axis Piezo Screw Motion Platform The vacuum version XYZ65N81K26 is a XYZ three‐dimensional motion platform driven by piezoelectric screws, which can realize millimeter‐level large‐travel position adjustment, the stroke can reach 25.4mm/axis, and can achieve nanometer‐level displacement increments. It is widely used in precision positioning and semiconductors testing and other fields. At the same time, it is suitable for vacuum application environment, and the vacuum degree can reach 10^‐5Pa.
The platform is driven by a vacuum version piezoelectric screw, with a resolution of more than 20nm in the full stroke and a rated load of 30N. It is featured by a compact design, excellent long‐ term stability, and can continue to remain in the set position in the event of a power failure.
Features • XYZ motion • Stroke can reach 25.4mm/axis • Resolution up to 0.5μm