Vacuum XYZ Axis Piezo Screw Motion Platform The vacuum version XYZ65N81K26 is a XYZ three‐dimensional motion platform driven by piezoelectric screws, which can realize millimeter‐level large‐travel position adjustment, the stroke can reach 25.4mm/axis, and can achieve nanometer‐level displacement increments. It is widely used in precision positioning and semiconductors testing and other fields. At the same time, it is suitable for vacuum application environment, and the vacuum degree can reach 10^‐5Pa.
The platform is driven by a vacuum version piezoelectric screw, with a resolution of more than 20nm in the full stroke and a rated load of 30N. It is featured by a compact design, excellent long‐ term stability, and can continue to remain in the set position in the event of a power failure.
Features • XYZ motion • Stroke can reach 25.4mm/axis • Resolution up to 0.5μm
• The vacuum is 10^‐5Pa • Customizable closed‐loop version Applications • Lithography • Nanoimprint/Nanometrics • Semiconductor technology/semiconductor testing • Movement in a strong magnetic and vacuum field 1~3 Axis Motion Platform This series of vacuum version of the motion platform can realize multi‐axis motion such as X, XY, XYZ, etc., and can achieve 25.4mm precision displacement adjustment. X65 N81K26
XY65 N81K26
XYZ65 N81K26
Technical Parameter Model: XYZ65N81K26 Motion axis: XYZ Travel range: 25.4mm/axis Minimum displacement increment: <30nm Resolution: 0.5μm
Center load: 50N Bearing: Ball Material: Aluminum Working temperature: 10~40℃ Port: 4‐Pin Outgoing line length: 2m Products Video Show https://www.youtube.com/watch?v=C5heZY20kIc Recommended Controller This series of platforms can be controlled by the driver E53.C4K through the USB interface for 4‐ channel open loop control.