Vacuum XYZ Axis Piezo Nano Positioning Stage The P12B.XYZ100 piezoelectric scanning stage is a 3D parallel translation scanning table with a through hole in the center of the table body. The internal uses a frictionless flexible hinge guiding mechanism. The finite element simulation analysis is used to optimize the structure. It has high guiding accuracy, high rigidity, and large load, no wear and other characteristics.
The platform can be optionally equipped with high‐performance sensors for full closed‐loop feedback to achieve 0.05% F.S. repeat positioning accuracy. The scanning range of the P12B.XYZ100 piezoelectric scanning stage can reach 100μm/axis, the closed‐loop scanning accuracy is high, and the linear motion has no yaw. The products are widely used in surface measurement, microscopic imaging and other application fields, and are also suitable for vacuum applications to meet customer vacuum application needs. Features · Three‐dimensional XYZ movement · Stroke 100μm/axis · Center through hole Ø10mm · Suitable for vacuum applications Application Field · Scanning microscopy/surface measurement · Confocal microscopy/semiconductor testing · Wafer positioning/image processing and stabilization · Optical fiber positioning/optical scanning