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The Influence of Low-Temperature Vacuum Environment on Piezo Nano-Positioning Products

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The Influence of Low‐Temperature Vacuum Environment on Piezo Nano‐Positioning Products & the Corresponding Recommendations People often ask questions like this: Does the low‐temperature vacuum environment have any effect on piezo products? Can piezo ceramics withstand low temperatures? So today we will talk about the effects of low temperature on piezo ceramics. First of all, it is certain that piezo ceramics can be used at low temperatures, and CoreMorrow can provide piezo ceramics for use at low temperatures of ‐273°C. But we need to understand that the piezo effect of piezo ceramics will be reduced when the temperature is lower than room temperature, and the output and displacement that the piezo ceramics can produce will also be greatly reduced. When the low temperature is <260K, the loss is about every K. 0.4%, in the environment of liquid nitrogen, the displacement of piezo ceramics is about 10% of the displacement at room temperature. The displacement curve of piezo ceramics with decreasing temperature is shown in the figure below. For different piezo materials, the curve will change.

Compared with the room temperature environment, the displacement corresponding to different


voltages in the low temperature environment is relatively reduced. The piezo ceramics we usually use are semi‐bipolar piezo ceramics, that is, the negative pressure that piezo ceramics can withstand is about 20% of the maximum positive voltage, but due to the low temperature environment, the ability of piezo ceramics to resist depolarization is sharp Increase, so in the ultra‐low temperature environment, the piezo ceramics can be driven bipolar to obtain greater displacement. For example, the strain capacity of piezo ceramics is reduced to about 20% of room temperature at a low temperature of 77K, but a displacement of about 40% of room temperature unipolarity can be obtained through bipolarity. In addition, under low temperature conditions, the frequency constant, d33, coupling coefficient, dielectric constant, capacitance and other parameters of piezo ceramics will change. Some of the curves are shown below. For different materials, the curves will be different.

Frequency constant changes with temperature


d33 relative change with temperature

Relative change of coupling coefficient with temperature


Relative change of dielectric constant with temperature Coremorrow Low Temperature Vacuum Compatible Piezo Motion Product Recommendation Low Temperature Vacuum Compatible Co‐Fired Piezo Ceramic Stack

The low‐pressure stacked co‐firing process piezo ceramics have excellent performance and long service life, and are suitable for scientific experiments and industrial applications. Stacked piezo ceramics include two shapes, square and ring, and a variety of sizes and displacements can meet


the needs of different applications. Special insulating materials ensure the output of dynamic performance under severe conditions. And the volume is small and exquisite, easy to integrate. CoreMorrow’s piezo stack ceramics have a variety of resin outer types. The standard products are generally green or gray resin. For low‐temperature vacuum use, black or gray resin‐based piezo stack ceramics should be selected. Low Temperature Vacuum Compatible Encapsulated Piezo Ceramic Actuator

The low‐voltage cylindrical piezo ceramic actuator is designed by encapsulating the low‐voltage piezo ceramic stack inside, and the outside is protected by a cylindrical stainless steel shell, and the piezo ceramic stack is preloaded through the mechanical shell, which has a higher internal mechanical preload force that can be applied to high load and high dynamic applications. It can output the displacement and output generated by the piezo ceramic stack, and can withstand a certain pulling force. CoreMorrow’s cryogenic vacuum compatible piezo ceramic actuators have undergone cryogenic vacuum treatment and use cryogenic vacuum compatible materials to make them suitable for cryogenic vacuum applications. It is characterized by direct drive structure, large output, high precision and high reliability. Low Temperature Vacuum Compatible Piezo Nano Positioning Stage


The low‐temperature UHV compatible piezo nano positioning stage generally adopts an enlarged drive structure, with a large displacement range, and can produce multi‐dimensional motion, and the motion axis can reach 6 dimensions. The picture above shows the CoreMorrow P60.X250 piezo nano positioning stage, which has a stroke of up to 250μm, adopts a closed loop form of fully closed loop, has higher positioning accuracy, and is anti‐vibration design with strong anti‐vibration performance. Low Temperature Vacuum Compatible Three‐Dimensional Piezo Objective Lens Positioner

The piezo objective lens positioner is used to drive the objective lens to do micro‐nano‐level high‐ precision fast scanning motion or focusing applications. The above picture shows a low‐ temperature piezo objective lens positioner of CoreMorrow. It can generate three‐dimensional XYZ motion with a stroke of up to 100μm/axis, which is suitable for low‐temperature vacuum applications. Low Temperature Vacuum Strong Magnetic Compatible Hollow Piezo Nano Positioning Stage

The picture above shows CoreMorrow P13A series piezo nano positioning stage, which is specially developed and designed for extremely low temperature and strong magnetic field environment. It adopts low temperature piezo drive, and the outer shell is made of light materials. P13A can perform XY two‐dimensional scanning movement, its volume is small and exquisite, the size is only


33×33×14.6mm, and the center has a 10×10mm through hole. All components adopt low temperature and strong magnetic compatible version to ensure their performance under low temperature and strong magnetic. The displacement can reach 30μm@150V at 4K temperature, and the resolution can reach 0.5nm. Vacuum Compatible Piezo Screws

The piezo screw provided by CoreMorrow has a vacuum compatible version, which is suitable for vacuum applications, with a stroke of up to 26mm, a rotation resolution of <50μrad, and a minimum step length of a straight line <20nm. Vacuum Compatible 3D Piezo Screw Motion Platform

Similarly, CoreMorrow can also provide a motion platform integrated with piezo screw drive, vacuum compatible, minimum displacement increment <30nm, resolution up to 0.5μm, and load capacity up to 50N. Low Temperature Vacuum Compatible Piezo Deflection Mirror


Two‐dimensional θx θy deflection piezo deflection mirror, compatible with low‐temperature vacuum, with a light hole in the center, and a deflection angle of ±3°. Low Temperature Vacuum Compatible 3D Piezo Motor Platform

XYZ three‐dimensional linear piezo motor platform, compatible with low‐temperature vacuum, stroke up to 3.5mm/axis, ultra‐small size, nanometer precision.


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