PiezoMicrodriveTechnologyAppliedtoMicro-nano
OperatingSystems/Robots
Micronanooperatingsystem/robotisalsocallednanomanipulator,nanomanipulator,nano manipulator,etc.,whichischaracterizedbymicronanomotioncontroloperationandprocessing ofmicrosizedobjectsAtpresent,withtherapiddevelopmentofscienceandtechnology,ithasa verywiderangeofapplicationscenarios,suchasMEMS,molecularoperation,DNAsequencing, trillioncapacitymemory,etc,alltheseapplicationsneedmicronanooperatingsystem
Micronanooperatingsystem/robotrequiresveryhighmotioncontrolprecision,usually composedofmicroscopicvision,driving,sensingandcontrol,etcOnlywithclosedloop coordinationbetweeneachpartcanmicronanolevelprecisionoperationandcontrolactionsbe completedThisactionincludesgrabbing,lifting,moving,placing,etc
Andtherearemanykindsofmicronanooperatingsystems/robots,suchasthemicronano operatingsystembasedonlightmicroscope,SEMbasedonscanningelectronmicroscope,SPM basedonscanningprobemicroscope,andmanymoretypesofmicronanooperatingsystem Micronanooperatingsystems/robotsarealsocommonlyusedtoobserveandunderstandthe operationprocesswithamicroscope
Micro-nanoOperator
Inthemicronanooperatingsystem/robot,thereisaveryimportantcomponent,called micronanooperatorMicronanooperatoristheactuatorthatcarriesoutthespecifiedactionin themicronanooperatingsystem/robot.Thisactuatorneedstoprovidemicronanolevelmotion accuracy
Ifyouneedactuatorswithmicronanomotioncontrolaccuracy,CoreMorrowpiezonanomotion andcontrolsystemproductsarenaturallythemainchoice
CoreMorrowpiezonanomotionandcontrolsystemisfamousforitshighprecisionandfast responsespeed.Ithasbeenwidelyusedinvariousmicroandnanoleveloperatingsystemsand hasbroadapplicationprospectsinthefieldofmodernscienceandtechnology
CoreMorrowPiezoHexapodisUsedforSamplePoseControl
Inmicronanooperatingsystem/robot,itisoftennecessarytochangetheposeofobjectsand samples,includingtheadjustmentofmotionrange,motionaccuracy,lineardistanceandangle range,etc,andthemotionaccuracyoftheseadjustmentsisveryhighLinearadjustmentneeds theprecisiontobenanometerlevel,whiletheprecisionoftheanglemovementcanbeusually uptomicroradianorevennanoradianlevel.
Tomeetthisapplicationrequirement,CoreMorrowdevelopedH60PiezoHexapodparallel mechanismmotionstage.Parallelmechanismmotionstageisdriveninparallelbysixpiezo actuators,eachofwhichhasamotionaccuracyofnanometerTherangeofmotion,accuracyof
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
motionandbearingcapacityoftheHexapodparallelmechanismcanbeincreased(orreduced) bychangingthemodelofthepiezoactuator Throughtheparallelcoordinationofsixpiezoactuators,theobjectorsamplemountedonthe topsurfacecanbeadjustedforanypose. ThemeasuredparametersofthemovingplatformoftheH60Hexapodparallelmechanismareas follows ActiveAxisTravelrange Resolution Linearity Repeatability X 40μm Betterthan05nm Betterthan01% Betterthan01% Y 40μm Betterthan05nm Betterthan01% Betterthan01% Z 55μm Betterthan0.5nm Betterthan0.1% Betterthan0.1% θx 12mrad Betterthan05μrad Betterthan01% Betterthan01% θy 1.2mrad Betterthan0.5μrad Betterthan0.1% Betterthan0.1% θz 1.6mrad Betterthan0.5μrad Betterthan0.1% Betterthan0.1% CoreMorrowPiezoMotorandPiezoNano-positioningStageAppliedto FiberOpticDocking Professionalpeopleinthespecificindustryareveryfamiliarwithopticalfiberdocking.The accuracyandprecisionofopticalfiberdockingwillhaveaveryimportantimpactonthefinal transmissionoflight.Opticalfiberdockingisanimportantmicronanooperationprocessin opticalfibersensingandcommunicationapplications Thecorediameterofanopticalfiberisusuallyverysmall,alwaysseveralmicrometers,sothe operationofaligningtwoopticalfibersrequiresveryhighprecision,generallybeuptomicroor nanoManualoperationrequiresveryexperiencedpersonnelandistimeconsumingThe adoptionofmicronanooperatingsystemrobotcannotonlyensuretheaccuracy,butalsogreatly shortenthedockingtime,improvetheproductionefficiency,andalsomaintainingthequality
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
CoreMorrow3Dpiezomotorand3Dflexibleflexuralpiezonanopositioningstagecanprovide opticalfibercoarseandfinealignmentformicronanooperatingsystemrobotsThecoarse adjustmentstrokecanbeselectedwithin100mm,thefineadjustmentstrokecanbeselected withinhundredsofmicrons,andtheprecisionparameterscanbeselected Active Axis Travelrange Resolution CoarseadjustmentFineadjustmentCoarseadjustmen t Fineadjustment X 0~100mm 0~1000μm <50nm 0.1~20nm Y 0~100mm 0~1000μm <50nm 0.1~20nm Z 0~100mm 0~1000μm <50nm 01~20nm CoreMorrowPiezoLinearActuatorsUsedforProbeControland MechanicalArm Thepiezolinearactuatorusesthestickslipprincipletopushthemovingthreadedrodforward gradually.Thestepisdrivenbyhighprecisionpiezoceramics,whichcanensuretheaccuracyof eachstepatnanometerlevelThemotioneffectisshowninthevideobelow piezolinearactuatornotonlyhashighprecision,butalsolargestrokeupto26mmormoreItcan beusedforlargestroke,highprecisionprobeormanipulatoradjustmentinnanomanipulation applicationsInaddition,multiplepiezolinearactuatorcanbeusedtoformastructuretoforma probeormanipulatorwith6ormoredimensionsfornanomotionregulation.
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
Model Travelrange Minimumstep Travelspeed LoadCapacity
N818K 8mm <20nm 3mm/min 25N
N8113K 13mm <20nm 3mm/min 25N
N81.26K 26mm <20nm 3mm/min 25N
Inspecialcavitiessuchasvacuum,nanomotorcontrolisevenmoreimpossibletotouchbyhand CoreMorrowcanprovideavacuumversionofthepiezoscrewlinearactuator,compatiblewith vacuumenvironment,tocompletethenanooperationofsingleormultiaxisprobe,operatorand manipulatorinvacuumchamber
CoreMorrowPiezoNanopositioningStage/PiezoClampisAppliedto Microholding
Micronanooperatingsystemrobotsgenerallyoperateunderhighrate,highresolution monitoringdevices,thefieldofvisionisverysmall.Theabilitytoholdandplacetinyobjectsis requiredforarbitrarymanipulationinsuchasmallfieldofviewInsomecases,adsorption(such aselectrostaticforce,surfacetension,etc.)isusedforcontrol,butdisengagementismore difficultTherefore,micronanooperationclampispreferred
CoreMorrowpiezoclamp/wireclampisaverysuitabletoolforholdingandreleasingthemicron diameterleadwire.Itcanholdandreleasethemicrondiametergoldwire,copperwire,silver wireandsoonItisverysuitableforautomaticintegratedcircuitproductionequipment
Formoreflexibleoperation,CoreMorrownanopositioningstagecanbeusedtomatchtheprobe, andthenanoscalemotionofthepiezonanopositioningstageitselfcanbeconvertedintothe nanoscalemotioncontroloftheprobethroughappropriateadaptiveconnection,soastoobtain thehighresolutionmotionability.
CoreMorrowcanprovideyouwithcustomdesignednanomanipulationsolutions
CoreMorrowPiezoObjectiveScannerusedforVisualZ-direction
FocusingandOpticalTweezers
Inthemicronanomanipulativerobotsystem,therewillbevisualobservation,optical manipulationandotheroperations,suchasatomicandmolecularmanipulationofobjectsand otheroperations,usuallyneedtocarryouthighprecisionfocusoflightandXYZ multidimensionalmovementcontrol.
TheopticalZaxisofnanoscalefocusingandfinetuningcanbeadjustedbytheCoreMorrow piezoobjectivescanner,andtheadjustmentresolutioncanbeuptonanometersoreven subnanometers CoreMorrowPiezoObjectiveScanner
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
BasicParametersofCoreMorrowPiezoObjectiveScanner:
Model
P72Z100 100μm 1nm 02kg P73Z200 200μm 2nm 02kg
P73.Z500 500μm 4nm 0.4kg P73Z1000 1000μm 8nm 02kg
P76Z50 75μm 1nm 05kg P76.Z50A 50μm 0.5nm 0.5kg
P76.Z100 100μm 1nm 0.5kg
P76Z200 200μm 2nm 05kg XD730400 400μm 4nm 05kg XD730.500 500μm 5nm 0.5kg XP721 100μm 1nm 02kg
Forthetwodimensionaladjustmentofthelight,CoreMorrow2Dor3Dpiezoscanningstageisa goodchioceItisdesignedwithacenterthroughhole,suitablefortransmissionlightapplications, whichcancarryoutmultidimensionalnanomotionwithloadedlightsourceoropticalelements, tocompletetheadjustmentofthepositionofthelighttarget.
Whenpenetratingthemembraneorinjectingdrugsintothecell,itiseasytodamagethe
Throughthehighfrequencymicronanovibrationofthepiezoactuator,thefilmcanbe penetratedorperforated,soastocarryoutthenextdruginjectionandotheroperations.The piezoactuatorcansignificantlyimprovetheoperationaccuracyandsuccessrate,soastoensure theaccuracyandsmoothexperiment
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
Zaxistravelrange Resolution Loadcapacity
CoreMorrowLinearPiezoActuatorsareUsedforMembraneBreaking andCellPenetration
membraneorcelliftheoperationisnotfineTherefore,piezoactuatorswithhighmotion accuracyareusuallyusedtosolvetheproblem
PiezoMicrodriveTechnologyAppliedtoMicro-nanoOperatingSystems/Robots
CoreMorrowhashundredsoftypesofpiezoactuators,thefollowingarebasicparametersfrom severalmodels
Model ZaxistravelrangeNonloadresonantfrequencyOuterdiameter
PSt150/4/7VS9 9μm 40kHz 9mm
PSt150/4/20VS9 19μm 30kHz 9mm
PSt150/5/7VS10 9μm 40kHz 10mm
PSt150/5/20VS10 19μm 30kHz 10mm
PSt150/7/7VS12 9μm 40kHz 12mm
PSt150/7/20VS12 19μm 30kHz 12mm PSt150/7/40VS12 38μm 20kHz 12mm ... ... ... ...
PSt150/10/100VS1595μm
CoreMorrowhasnearly20yearsexperienceofcustomdesignproducts,wearelookingforward tocommunicatingwithyou
10kHz 15mm Conclusion TheapplicationofCoreMorrowpiezonanomotionandcontrolproductsinmicronanooperating systemisfarmorethantheabove,andwilldevelopcomplexanddiversechangesindifferent applicationenvironmentDifferentapplicationenvironmentshavedifferentrequirementsfor micronanooperation.Therefore,thetypesofmicronanooperatingsystemsarealsovery diverseCustomselectionisidealinordertofindtheexactparametersandstructural requirementsofthemicronanooperatorrequiredintheapplication.
