Piezo Fast Tool Servo Ultra‐Precision Micro‐ Machining System With the increasing advancement of science and technology, ultra‐precision processing technology has also been developed rapidly. Microstructure elements with complex surfaces are widely used in many fields such as high‐tech equipment and optical fiber communications. This type of component has a complex structure and high requirements for processing accuracy, and it is difficult to meet processing requirements with traditional processing methods. With the continuous advancement of technology, many ultra‐precision machining methods have emerged that can process microstructured surfaces that meet the needs, such as photolithography, micro‐ grinding, laser processing, and fast tool servos. These methods have their own advantages and disadvantages. Among them, the fast tool servo is a relatively classic ultra‐precision machining technology, and it is one of the hotspots in the research of micro‐structure turning.
Fast tool servo machining refers to the fast tool servo micro‐feed mechanism installed on the Z axis to drive the tool for high‐frequency response, small amplitude axial rapid feed movement during the turning process, coordinating with high‐precision return axis and radial feed to complete this turning process. Compared with the feed frequency of the Z axis which is generally tens of Hz, the feed frequency of the fast tool servo micro‐feed mechanism can reach several kilohertz or even higher, which greatly improves the processing efficiency. Compared with other ultra‐precision processing methods, the fast tool servo turning processing technology has the characteristics of high frequency response and high efficiency. It can obtain complex microstructure surfaces with high surface accuracy in one processing, which is suitable for high efficiency and high quality of microstructure components such as optical components processing.