Piezo Actuator is Suitable for Nanocutting Based on Atomic Force Microscope (AFM)!

PiezoActuatorisSuitableforNanocuttingBasedonAtomicForceMicroscope(AFM)!

PiezoActuatorisSuitableforNanocuttingBasedon

AtomicForceMicroscope(AFM)!

Nanocuttingtechniquereliesonatomicforcemicroscopy(AFM),canbeusedtocreategrooves withaconstantcuttingdepthofseveralmicrons.Lineardisplacementsensors,feedbackcontrol systemsandpiezoactuatorsoperatetogethertomaintainaconstantnormalcuttingforceduring machining.

Microtextured,micro-structuredorengineeredsurfacesarewidelyusedinvariousindustrial fieldssuchaselectronics,energy,optics,mechanics,tribologyandbiology,forexampleinoptical lenses,prismsforliquidcrystaldisplay(LCD)panels,texturedsurfacesdesignedtoproducea "lotuseffect"torepelwater,heatexchangers,etcMicrostructuresonmechanicalpartsareoften manufacturedusinglithographyandetchingtechniques,buttheseprocessesrequirecomplex andexpensiveequipment,restrictionsonmaterials,geometriclimitations,andtheuseof hazardouschemicals,amongotherthings.Componentswithfeaturessuchasmoth-eyestructure thatinhibitsurfacereflectionaremorecomplextomanufacture,especiallywhenmadeon non-flatsurfaces.

Motheyestructure

Moldingandembossingaregoodwaystoproducethismicrotexturedsurface,howeverthe accuracyofthemoldisoneofthemostimportantfactorsasitrepresentsthequalityofthe moldedproduct.Theuseofdiamondtoolsforprecisionmachininghasbeenincreasinglyusedto manufacturehigh-precisionmachinedpartsforadvancedindustrialapplications

Thetechniqueofusingdiamondtoolstofabricatemicrostructuresandmicro-groovingcanbe usedforplanarmachining,whichrequirestheuseofultra-precisemotionmechanismsofpiezo fasttoolpositioningplatformsandcomplexcontrolsystemstoachievethedesired nanometer/micronlevelofaccuracy.Thecuttingdepthissetbythefeedmechanism,andthe

byDavidScharf1977,2005

precisionofthepartsisdirectlydependentontheprecisionofthepiezofasttoolpositioning stage

Piezofasttoolpositioningplatformisakindofhighprecision,highspeed,highstiffness,high reliabilitytoolpositioningequipment,mainlyusedinhighprecisioncutting,precisionmachining, semiconductormanufacturing,precisionelectronics,optoelectronics,precisioninstrumentsand otherfields.Itisdrivenbypiezoceramicsandachieveshighprecisiontoolpositioningthrough fastdeformationThecontrolsystemcontrolsthepowersupplyandsignalofthepiezodriving mechanismtorealizetheprecisecontrolofthetoolposition.Thepiezofasttoolpositioningstage canimprovetheworkingefficiencyandproductquality,reducetheerrorofmanualoperation, whichisoneoftheimportantequipmentofmodernhigh-techmanufacturingandlaboratory.

Inadditiontotheabovemicrofeedusingpiezofasttoolpositioningstage,anothermethodof constantforcecuttingcanbeused,whichcancontrolthenormalcuttingforceappliedtothetool

PiezoActuatorisSuitableforNanocuttingBasedonAtomicForceMicroscope(AFM)!

Model P92.X20S/K Unit Travelrange 18@95Hz（150V） μm 9@190Hz 1@600Hz Sensor SGS/Resolution 0.5/0.2 nm Linearity 01 %FS Repeatability 15 nm Load 300 g Stiffness 120 N/μm Unloadedresonantfrequency 4000 Hz

CoreMorrowP92PiezoToolPositioningTableandE01PiezoController

PiezoActuatorisSuitableforNanocuttingBasedonAtomicForceMicroscope(AFM)!

tokeepthecuttingforceconstant,forexample,nanocuttingwithatomicforcemicroscope(AFM) mechanismHowever,duetothelimitedtravelofthepiezoscannerusedandthelowcantilever stiffness,theprocesscannotbeappliedtoactualcutting.

ConstantLoadCuttingEffect

However,onthebasisofAFMnanocuttingtechnology,combinedwithdiamondtools,acutting systemcanbeformedformicro-scalemachiningandlargecuttingarea.SimilartotheAFM,the systemalsohasacantileverbeamstructureonwhichadiamondcutterismountedThesystem alsousesopticalmethodstomeasurethetorsionandbendingofthecantilevertoestimate cuttingforcesThesystemischaracterizedbyitsabilitytocreategrooveswithconstantcutting depthonsurfaceswithinclinedandcurvedsurfaces

Thepicturebelowshowsamicro-cuttingsystemthatcombinesAFMwithdiamond.Thesystem integratesanon-contactcapacitancesensorwithaPZTpiezoactuator,whichworksintandemto maintainaconstantnormalcuttingforce.

PiezoActuatorisSuitableforNanocuttingBasedonAtomicForceMicroscope(AFM)!

Boththecantileverbeamandthecapacitivesensorareinstalledonthelinearguiderail connectedwiththepiezoactuatorThecapacitivesensorcandetectthedeformationand displacementofthecantileverbeam,andthepiezoactuatorcanadjustthepositioninthez-up withnanometerprecisionThesystemcancompensateforsomeofthegeometricerrorsofthe movingsystem,suchasshaftmisalignmentorerrorsinthetoolpath.

CoreMorrowcapacitivesensor

TheBasicTechnicalParametersofCoreMorrowCapacitorSensorareasfollows:

Inordertocontrolthecuttingnormalforce,thedeformationofthefreeedgeofthecantileveris measuredbyacapacitancesensorThefeedbackcontrolsystemcompensatesforany deformationofthecantileverbeamanditsmaintasktokeeptherelativepositionbetweenthe sensorandthemeasuringplateconstantBycontrollingtheexpansionorcontractionofthepiezo actuatorduringthecuttingprocess,itinteractswiththecantilever.Theclosed-loopsystem consistsofafunctiongenerator,avoltageamplifier(controllingthepiezoelectricactuator),a piezoactuator,acapacitivesensor,andacontroller(proportionalintegralPI).

Model E09CAP100 E09CAP200 E09CAP500 Displacement 0100μm 0200μm 0500μm Staticresolution 1.25nm 2.5nm 5nm Bandwidth-3dB 2kHz 2kHz 2kHz Linearity 005% 005% 005% Repeatibility 0.0025% 0.0025% 0.0025%

PiezoActuatorisSuitableforNanocuttingBasedonAtomicForceMicroscope(AFM)!

CoreMorrowpiezoactuatorhasavarietyofmodels,diameterisoptionalfrom9mmto45mm, displacementisoptionalfrom7μmto260μm,outputuptotensofthousandsofNewtons,and canbecustomizedaccordingtorequirements.

TypicalParameterofPiezoCeramicActuator:

CoreMorrowpiezoamplifiershasmanyoptionalfunctions,optionalanalogordigitalcontrol, optionalkeyboardoperation,softwareoperation,optionalboardcardtype,chassistypeWe havebothsmallsizeandhighpowermodelstomeettheneedsofdifferentapplications

CommonAFMsystemsusepiezoscanningtubesthatnotonlycompensateforcantilever deformation,butalsoallowforrelativeX-Ymotionbetweenthetipandthesurfacetobe scanned.However,themaximummeasuringareaofpiezoscanningtubeisintheorderof hundredsofsquaremicrons,whichcannotmeettherequirementsoflargeprocessingarea

Model Displacement Push/Pullforce PSt150/10/100VS15 95μm 2300/250N PSt150/14/120VS20 114μm 4700/700N PSt150/20/140VS25 133μm 7300/1000N PSt150/20/200VS25 190μm 7300/1000N PSt1000/10/150VS18 150μm 4000/700N PSt1000/16/60VS25 60μm 12000/1500N PSt1000/25/40VS35 40μm 25000/4000N PSt1000/35/20VS45 20μm 50000/6000N

CoreMorrowPiezoAmplifier CoreMorrowPiezoTubeScanner

PiezoActuatorisSuitableforNanocuttingBasedonAtomicForceMicroscope(AFM)!

ThebasicparametersofCoreMorrowpiezotubescannerareasfollows:

Inordertosolvetheproblemofsmallprocessingarea,thecuttingsystemisinstalledonthe three-axisprecisionmachinetool,thesystemcanbeadjustedbythethree-axismovement,soas toexpandthemeasuringarea,tomakemicro-grooveonthesurfaceofafewsquarecentimeters

CoreMorrowthree-axispiezomotor

TypicaldataofCoreMorrowthree-axispiezomotor:

Attheconditionof0.5kgload,20.8℃,31%humidity.

Formoreinformationonmicroandnanocuttingapplications,welcometocontactCoreMorrow by0451-86268790,17051647888(wechatID).

Model Length(mm) OD(mm) Scanrange(μm)ExtensionRange(μm) 1005 10 5 38 21 2005 20 5 15 4.2 3507 35 7 39 74 5009 508 95 52 10 5509 55 9 66 12 6006 60 6 114 12

Type X Y Z Travelrange ±25mm ±25mm ±50mm Linearity 0526μm 0942μm 1377μm Repeatability 0.645μm 0.611μm 0.681μm Resolution 40nm 40nm 40nm Travelspeed 4186mm/s 4185mm/s 4577mm/s

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