P60 Series Z-Direction Vacuum Piezo Nano Positioning Stage P60.Z250 is a one-dimensional Z-movement piezoelectric nano-positioning stage. The interior of the platform adopts a frictionless flexible hinge guiding mechanism and an integrated structural design. With mechanism amplifying driving principle and built-in high-performance piezoelectric ceramics, it can achieve 250μm displacement in Z direction. The piezoelectric positioning table has very high control accuracy, resolution and stability which can reach the order of nanometers, and the positioning stability time is on the order of milliseconds. The platform has optional vacuum compatible version, the components in the platform are suitable for vacuum applications, and the vacuum degree can reach 1×10^(-5)mbar.
The Closed-Loop Version with High Positioning Accuracy P60.Z250 has open-loop and closed-loop versions. The closed-loop version uses high-precision sensors for real-time position detection and feedback. The closed-loop piezoelectric controller can be configured to accurately adjust the displacement in real time, achieving nanometer-level precision positioning control and excellent linearity, movement and stability. Features • One-dimensional Z motion • Stroke up to 250μm • Load capacity up to 1kg • Optional vacuum compatible version Application • Metrology/Interference/Scan • Nano positioning • CD drive test • Semiconductor technology • Quality Assurance Testing