HighlyReliableIndustrial,SpacePiezoTip/TiltPlatform S37|CoreMorrow
CoreMorrowhasbeeninspecializedinresearchanddevelopment,design,processingand productionofpiezotip/tiltplatformfor16yearsWehaveveryrichexperienceinthedesignand productionandhavesolvedavarietyofparametersandtheuseofenvironmentalproblemsfor users
Todayweintroduceahighperformance,highreliability,industrialandaerospacegradeS37series piezotip/tiltplatform.
Piezotip/tiltplatformisoneofCoreMorrowpiezomotionproducts,whichcanproduce one-dimensionalormultidimensionaldeflectionmotion,suchasrapiddeflectionmotioninθx, θyaxis,itiswidelyusedinopticalcommunication,imagestabilization,opticalpathregulation, laserprocessing,laserbeamcombinationandotherfields
S37seriespiezotip/tiltplatformhasT2,T3,T4,T5,T6,T8andotherversions,thetravelrange increasessuccessively,from25mradto135mradS37T8hasadeflectiontravelrangeof 135mradDuetoitsanti-vibrationdesign,itsreliabilityanddynamicsarealsoverygood,which solvestheproblemoflowdynamicsofpiezotip/tiltplatformunderlargetravel
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
Characteristics
•Highreliability
•Anti-vibrationdesign
•Fullclosedloop,highprecision
•Optionalopen/closedloop
•Industrialgrade/Militarygrade/Aerospacegrade
Application
•Imageprocessing/stabilization
•Interleavedscanning,jitter
•Lightfilter/switch
•Scanningmicroscopy,etc
•Laserscanning/beamdeflectionandstabilization
•Optics
Ingeneral,withthesameshapeanddiameteristhesame,thelargerthestrokeofthepiezo tip/tiltplatform,thelongeritslengthOnthebasisofincreasingthelength,thereliabilityofpiezo tip/tiltplatformwilldecreaseHowever,manyapplicationshavehigherandhigherrequirements onthereliability,whichisdifficultformanystandardproductstomeet.Inordertosolvethis problem,CoreMorrowadoptsseismicreinforcementandfullclosed-loopmethodtoachieve optimalreliabilityandaccuracy,andhaspassedthethird-partyvibrationresistancetest.
ThefunctionofS37seriespiezotip/tiltplatformistodrivethespeculumtoproducefastThe functionofS37seriespiezotip/tiltplatformistodrivethespeculumtoproducefastdeflection motion,deflectionresponsespeeduptomillisecondmagnitude,deflectionaccuracyinnanoarc magnitude,whichiscommongalvanometer,voicecoilmotorcannotreachThesecharacteristics makeitverysuitableforfaststeeringadjustmentofopticalpath
S37T8piezotip/tiltplatform,θx,θytwoaxismotion
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
Structure
S37seriespiezotip/tiltplatformcanproduceθxandθytwo-axisdeflectionmotionItisbasedon parallelkinematicdesign,withcoplanaraxisandmovingsurfaceThefourpiezoactuatorsare placedequallyat90°anglesanddistributedinpairsofdifferentialcontrolTwopairsof differentiallydrivenpiezoactuatorsprovidethehighestattainableangularstabilityoverawide rangeoftemperatures.Itsyawmotionisrealizedbytwopairsofpiezoactuatorsinpush-pull modeandcontrolledbyabridgecircuit
FullClosed-Loop,HigherPrecision
Highstabilityandpositioningaccuracyisachievedbyusingabsolutelymeasuredsensorsat suitablelocationsintheexecutionofthedrivestructure.Theyprovidehighbandwidthand feedbacktothecontrollerelectricalsignalsrepresentingthepositioninformationThesensors areconnectedinabridgeconfigurationtoeliminatethermaldriftandensuresuperiorstability.
ExamplesofVoltagevsDisplacementCurves
S37T5Sclosed-loopdisplacementcurve
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
S37.T8KOpen-loopdisplacementcurve
Model S37T2SFS37T2KF S37T3SFS37T3KF Activeaxis θX,θY θX,θY Drivingchannels 3 3 Tiltangle(0~120V) 2.5mrad 4mrad Tiltangle(0~150V) 35mrad 55mrad Integratedsensor SGS/- SGS/Closed/open-loopresolution 0.08/0.03μrad 0.15/0.04μrad Closed-looplinearity 01%FS 01%FS Closed-looprepeatability 0.02%F.S. 0.02%F.S. Unloadedresonantfrequency 65kHz 64kHz Elcapacitance 36μF 52μF Material Steel,titanium Steel,titanium Mass 200g 230g
S37.T2S37.T3TechnicalData
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
S37.T4S37.T5TechnicalData
S37.T6S37.T8TechnicalData
Model S37T4SFS37T4KF S37T5SFS37T5KF Activeaxis θX,θY θX,θY Drivingchannels 3 3 Tiltangle(0120V) 5mrad 68mrad Tiltangle(0~150V) 6.8mrad 9.5mrad Integratedsensor SGS/- SGS/Closed/open-loopresolution 02/005μrad 025/007μrad Closed-looplinearity 01%FS 01%FS Closed-looprepeatability 002%FS 002%FS Unloadedresonantfrequency 63kHz 62kHz El.capacitance 7.2μF 9μF Material Steel,titanium Steel,titanium Mass 250g 275g
Model S37T6SFS37T6KF S37T8SFS37T8KF Activeaxis θX,θY θX,θY Drivingchannels 3 3 Tiltangle(0~120V) 7.5mrad 10mrad Tiltangle(0~150V) 10mrad 135mrad Integratedsensor SGS/- SGS/Closed/open-loopresolution 025/008μrad 035/01μrad Closed-looplinearity 0.1%F.S. 0.1%F.S. Closed-looprepeatability 0.02%F.S. 0.02%F.S. Unloadedresonantfrequency 61kHz 6kHz Elcapacitance 11μF 145μF
ThirdPartyEnvironmentalTestReport
S37piezotip/tiltplatformshavepassedtheenvironmentaltestreportconductedbythethird party,includingS37T8S/KwiththelargestdisplacementandlongestvolumeintheS37series, whichfullyprovesthehighreliabilityandhighvibrationresistanceofS37.
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow Material Steel,titanium Steel,titanium Mass 300g 350g
PiezoTip/tiltPlatformApplication
•SatelliteLaserCommunication
Themainfunctionofpiezotip/tiltplatformistodeflecttheloadedlensItsapplicationismainly toadjustthedirectionoflight.Anoutstandingadvantageofpiezotip/tiltplatformisthatthe angleadjustmentaccuracyisveryhigh,whichcanbelessthan001"Sincethedeflectionangleis smallandthedeflectionmotionprecisionishigh,itisverysuitablefortheadjustmentoflong distanceopticaltransmissiondirection,suchassatellitelasercommunicationSignaltransmission communicationbetweensatelliteandgroundisverydifficulttoachieve,thereasonisthatthe divergenceangleofthebeamisverysmall,verydifficulttoalign,sosatellitelasercommunication needsaveryhighprecisionaimingsystem.
Forthecurrentstarlinkconstruction,thepiezotip/tiltplatformisalsoneededtocompletethe accuratealignmentofopticalpath
•LightPathStabilization
Intheprocessoflighttransmission,theopticalpathwillbeunstableduetovariousexternal interferenceorenvironmentalfactors,whichisveryunfavorableforopticalcommunicationor imagingapplicationsInordertoeliminateorcompensatetheinstabilityordeviationofthe opticalpath,CoreMorrowpiezotip/tiltplatformcanbeusedforrapidandhighprecision adjustmentandcompensationToadjustthedeflectionofopticalpathinaveryshorttimeisone oftheessentialfactorsforthesuccessfulapplicationofpiezotip/tiltplatform.
CoreMorrowcanalsoprovidescientificuserswiththelaserstabilityexperimentoftheentire laserstabilitysystem,includinglaser,piezotip/tiltplatformandcontrolsystem,PSDposition signaldetector,spectral,opticalmachinery,etc.
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
Thebasicprincipleis,afterinterferencewithpiezotip/tiltplatformandcompensationwithpiezo tip/tiltplatformreflection,thelaserbeamisreceivedbythePSDopticalsignalpositionsensor, andfeedbacktothecompensationwithpiezotip/tiltplatformcontroller,throughitsinternal deviationcomparisoncircuitcalculation,outputcompensationvoltage,compensationwithpiezo tip/tiltplatformangleadjustment,theinterferencesignalcompensation,attenuation
TheinterferencesignalofCoreMorrowpiezotip/tiltplatformcanbereducedtolessthan5 micronsafterclosed-loopcompensationundertheinterferencesignalof150micronsand10Hz intheXorYdirection.
•OpticalImagingSystem
Intheprocessofopticalimaging,theopticalaxisofthecamerawillbeoffsetduetovarious influencingfactorssuchasplatformvibrationandattituderandomdisturbance,sothatthetarget movesrelativetothefocalplaneandgeneratesimageshiftonthefocalplane,thencausedthe
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
imagingfuzzyproblem.Forexample,intheterrestrialastronomicalobservation,therandom jitterofthefocalplaneimageofthetelescopewillbecausedbyatmosphericturbulenceand telescopejitter,whichgreatlyreducesthespatialresolutionofthetelescope.
Themosteffectiveschemetosuppressbeamjitteristousethefinetrackingringinthecapture, trackingandpointing(ATP)systemtocompensatePiezodeflectionsystemisthepreferred actuatorbecauseofitsgoodstability,lowenergyloss,highmirrorreflectivity,highdeflection resolutionandfastdeflectionspeed
•RapidLaserMachining
Formachiningapertureandholedistanceaccuracyrequirementsareveryhigh,suchasafew micronstohundredsofmicrons,dozensofmicrons,usingtheprecisedirectioncontroloflaser anditsfastresponsespeedandothercharacteristicsofCoreMorrowtip/tiltplatform,can completelysolvetheproblemslikethesmallholeprocessingaccuracyislow,andapertureisnot smooth,etc
Thepiezotip/tiltplatformisintegratedintheultrafastlaserprocessingapplicationinvolving micrometersmallholes,whichhasthecharacteristicsofhighmachiningprecisionandfast machiningspeedIthasbeenwidelyusedinmicro-holemachiningandspecial-shapedhole machiningofvariousdevices.
HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow