Highly Reliable Industrial, Space Piezo Tip/Tilt Platform S37| CoreMorrow

Page 1

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatform S37|CoreMorrow

CoreMorrowhasbeeninspecializedinresearchanddevelopment,design,processingand productionofpiezotip/tiltplatformfor16yearsWehaveveryrichexperienceinthedesignand productionandhavesolvedavarietyofparametersandtheuseofenvironmentalproblemsfor users

Todayweintroduceahighperformance,highreliability,industrialandaerospacegradeS37series piezotip/tiltplatform.

Piezotip/tiltplatformisoneofCoreMorrowpiezomotionproducts,whichcanproduce one-dimensionalormultidimensionaldeflectionmotion,suchasrapiddeflectionmotioninθx, θyaxis,itiswidelyusedinopticalcommunication,imagestabilization,opticalpathregulation, laserprocessing,laserbeamcombinationandotherfields

S37seriespiezotip/tiltplatformhasT2,T3,T4,T5,T6,T8andotherversions,thetravelrange increasessuccessively,from25mradto135mradS37T8hasadeflectiontravelrangeof 135mradDuetoitsanti-vibrationdesign,itsreliabilityanddynamicsarealsoverygood,which solvestheproblemoflowdynamicsofpiezotip/tiltplatformunderlargetravel

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

Characteristics

•Highreliability

•Anti-vibrationdesign

•Fullclosedloop,highprecision

•Optionalopen/closedloop

•Industrialgrade/Militarygrade/Aerospacegrade

Application

•Imageprocessing/stabilization

•Interleavedscanning,jitter

•Lightfilter/switch

•Scanningmicroscopy,etc

•Laserscanning/beamdeflectionandstabilization

•Optics

Ingeneral,withthesameshapeanddiameteristhesame,thelargerthestrokeofthepiezo tip/tiltplatform,thelongeritslengthOnthebasisofincreasingthelength,thereliabilityofpiezo tip/tiltplatformwilldecreaseHowever,manyapplicationshavehigherandhigherrequirements onthereliability,whichisdifficultformanystandardproductstomeet.Inordertosolvethis problem,CoreMorrowadoptsseismicreinforcementandfullclosed-loopmethodtoachieve optimalreliabilityandaccuracy,andhaspassedthethird-partyvibrationresistancetest.

ThefunctionofS37seriespiezotip/tiltplatformistodrivethespeculumtoproducefastThe functionofS37seriespiezotip/tiltplatformistodrivethespeculumtoproducefastdeflection motion,deflectionresponsespeeduptomillisecondmagnitude,deflectionaccuracyinnanoarc magnitude,whichiscommongalvanometer,voicecoilmotorcannotreachThesecharacteristics makeitverysuitableforfaststeeringadjustmentofopticalpath

S37T8piezotip/tiltplatform,θx,θytwoaxismotion

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

Structure

S37seriespiezotip/tiltplatformcanproduceθxandθytwo-axisdeflectionmotionItisbasedon parallelkinematicdesign,withcoplanaraxisandmovingsurfaceThefourpiezoactuatorsare placedequallyat90°anglesanddistributedinpairsofdifferentialcontrolTwopairsof differentiallydrivenpiezoactuatorsprovidethehighestattainableangularstabilityoverawide rangeoftemperatures.Itsyawmotionisrealizedbytwopairsofpiezoactuatorsinpush-pull modeandcontrolledbyabridgecircuit

FullClosed-Loop,HigherPrecision

Highstabilityandpositioningaccuracyisachievedbyusingabsolutelymeasuredsensorsat suitablelocationsintheexecutionofthedrivestructure.Theyprovidehighbandwidthand feedbacktothecontrollerelectricalsignalsrepresentingthepositioninformationThesensors areconnectedinabridgeconfigurationtoeliminatethermaldriftandensuresuperiorstability.

ExamplesofVoltagevsDisplacementCurves

S37T5Sclosed-loopdisplacementcurve

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow
S37.T8KOpen-loopdisplacementcurve
Model S37T2SFS37T2KF S37T3SFS37T3KF Activeaxis θX,θY θX,θY Drivingchannels 3 3 Tiltangle(0~120V) 2.5mrad 4mrad Tiltangle(0~150V) 35mrad 55mrad Integratedsensor SGS/- SGS/Closed/open-loopresolution 0.08/0.03μrad 0.15/0.04μrad Closed-looplinearity 01%FS 01%FS Closed-looprepeatability 0.02%F.S. 0.02%F.S. Unloadedresonantfrequency 65kHz 64kHz Elcapacitance 36μF 52μF Material Steel,titanium Steel,titanium Mass 200g 230g
S37.T2S37.T3TechnicalData

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

S37.T4S37.T5TechnicalData

S37.T6S37.T8TechnicalData

Model S37T4SFS37T4KF S37T5SFS37T5KF Activeaxis θX,θY θX,θY Drivingchannels 3 3 Tiltangle(0120V) 5mrad 68mrad Tiltangle(0~150V) 6.8mrad 9.5mrad Integratedsensor SGS/- SGS/Closed/open-loopresolution 02/005μrad 025/007μrad Closed-looplinearity 01%FS 01%FS Closed-looprepeatability 002%FS 002%FS Unloadedresonantfrequency 63kHz 62kHz El.capacitance 7.2μF 9μF Material Steel,titanium Steel,titanium Mass 250g 275g
Model S37T6SFS37T6KF S37T8SFS37T8KF Activeaxis θX,θY θX,θY Drivingchannels 3 3 Tiltangle(0~120V) 7.5mrad 10mrad Tiltangle(0~150V) 10mrad 135mrad Integratedsensor SGS/- SGS/Closed/open-loopresolution 025/008μrad 035/01μrad Closed-looplinearity 0.1%F.S. 0.1%F.S. Closed-looprepeatability 0.02%F.S. 0.02%F.S. Unloadedresonantfrequency 61kHz 6kHz Elcapacitance 11μF 145μF

ThirdPartyEnvironmentalTestReport

S37piezotip/tiltplatformshavepassedtheenvironmentaltestreportconductedbythethird party,includingS37T8S/KwiththelargestdisplacementandlongestvolumeintheS37series, whichfullyprovesthehighreliabilityandhighvibrationresistanceofS37.

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow Material Steel,titanium Steel,titanium Mass 300g 350g

PiezoTip/tiltPlatformApplication

•SatelliteLaserCommunication

Themainfunctionofpiezotip/tiltplatformistodeflecttheloadedlensItsapplicationismainly toadjustthedirectionoflight.Anoutstandingadvantageofpiezotip/tiltplatformisthatthe angleadjustmentaccuracyisveryhigh,whichcanbelessthan001"Sincethedeflectionangleis smallandthedeflectionmotionprecisionishigh,itisverysuitablefortheadjustmentoflong distanceopticaltransmissiondirection,suchassatellitelasercommunicationSignaltransmission communicationbetweensatelliteandgroundisverydifficulttoachieve,thereasonisthatthe divergenceangleofthebeamisverysmall,verydifficulttoalign,sosatellitelasercommunication needsaveryhighprecisionaimingsystem.

Forthecurrentstarlinkconstruction,thepiezotip/tiltplatformisalsoneededtocompletethe accuratealignmentofopticalpath

•LightPathStabilization

Intheprocessoflighttransmission,theopticalpathwillbeunstableduetovariousexternal interferenceorenvironmentalfactors,whichisveryunfavorableforopticalcommunicationor imagingapplicationsInordertoeliminateorcompensatetheinstabilityordeviationofthe opticalpath,CoreMorrowpiezotip/tiltplatformcanbeusedforrapidandhighprecision adjustmentandcompensationToadjustthedeflectionofopticalpathinaveryshorttimeisone oftheessentialfactorsforthesuccessfulapplicationofpiezotip/tiltplatform.

CoreMorrowcanalsoprovidescientificuserswiththelaserstabilityexperimentoftheentire laserstabilitysystem,includinglaser,piezotip/tiltplatformandcontrolsystem,PSDposition signaldetector,spectral,opticalmachinery,etc.

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

Thebasicprincipleis,afterinterferencewithpiezotip/tiltplatformandcompensationwithpiezo tip/tiltplatformreflection,thelaserbeamisreceivedbythePSDopticalsignalpositionsensor, andfeedbacktothecompensationwithpiezotip/tiltplatformcontroller,throughitsinternal deviationcomparisoncircuitcalculation,outputcompensationvoltage,compensationwithpiezo tip/tiltplatformangleadjustment,theinterferencesignalcompensation,attenuation

TheinterferencesignalofCoreMorrowpiezotip/tiltplatformcanbereducedtolessthan5 micronsafterclosed-loopcompensationundertheinterferencesignalof150micronsand10Hz intheXorYdirection.

•OpticalImagingSystem

Intheprocessofopticalimaging,theopticalaxisofthecamerawillbeoffsetduetovarious influencingfactorssuchasplatformvibrationandattituderandomdisturbance,sothatthetarget movesrelativetothefocalplaneandgeneratesimageshiftonthefocalplane,thencausedthe

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

imagingfuzzyproblem.Forexample,intheterrestrialastronomicalobservation,therandom jitterofthefocalplaneimageofthetelescopewillbecausedbyatmosphericturbulenceand telescopejitter,whichgreatlyreducesthespatialresolutionofthetelescope.

Themosteffectiveschemetosuppressbeamjitteristousethefinetrackingringinthecapture, trackingandpointing(ATP)systemtocompensatePiezodeflectionsystemisthepreferred actuatorbecauseofitsgoodstability,lowenergyloss,highmirrorreflectivity,highdeflection resolutionandfastdeflectionspeed

•RapidLaserMachining

Formachiningapertureandholedistanceaccuracyrequirementsareveryhigh,suchasafew micronstohundredsofmicrons,dozensofmicrons,usingtheprecisedirectioncontroloflaser anditsfastresponsespeedandothercharacteristicsofCoreMorrowtip/tiltplatform,can completelysolvetheproblemslikethesmallholeprocessingaccuracyislow,andapertureisnot smooth,etc

Thepiezotip/tiltplatformisintegratedintheultrafastlaserprocessingapplicationinvolving micrometersmallholes,whichhasthecharacteristicsofhighmachiningprecisionandfast machiningspeedIthasbeenwidelyusedinmicro-holemachiningandspecial-shapedhole machiningofvariousdevices.

HighlyReliableIndustrial,SpacePiezoTip/TiltPlatformS37|CoreMorrow

Turn static files into dynamic content formats.

Create a flipbook
Issuu converts static files into: digital portfolios, online yearbooks, online catalogs, digital photo albums and more. Sign up and create your flipbook.