CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

When it comes to the term hexapod, it can be traced back to 1965. It was proposed by the German scholar Stewart. It is a parallel-mechanism flight simulator with six-degree-of-freedom motion capability. The classic hexapod is composed of the upper and lower tabletops and six retractable outriggers and the connecting hinges between them are formed, wherein the lower tabletop is usually called the base table, and the upper tabletop is usually called the load platform. The hexapod can realize the six-degree-of-freedom motion of the load platform within the working space through the telescopic motion of the six outriggers, and has many advantages such as high rigidity, high precision, strong bearing capacity, and good dynamic characteristics.

Therefore, it has been widely used in scientific research and commercial fields for many years.

Compared with the series mechanism, the hexapod has the advantages of high precision, high stiffness, stable structure, strong bearing capacity, small motion inertia, and good dynamic characteristics.

Stewart hexapod motion diagram

As a professional design and production enterprise in the field of nano-motion and control,

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

CoreMorrow has also made full use of the principle of the hexapod to develop, design and produce a piezo six-degree-of-freedom parallel mechanism platform. Its main feature is that the six legs of the six-degree-of-freedom parallel mechanism use closed-loop piezo actuators, and the closed-loop piezo actuators themselves have very high linear motion accuracy and resolution, up to the nanometer scale.

CoreMorrow piezo hexapod

Difficulty in design and assembly It is very difficult to assemble and control the stage. Users who have used piezo actuators know that the tensile force that piezo actuators can withstand is limited. The tolerance to lateral force is even lower, almost zero.

Therefore, in the assembly process of the piezo hexapod, the lateral force and pulling force on the piezo actuator must be strictly avoided, which has very strict requirements on the assembly process.

Difficulty in control algorithm In addition, in the whole process of motion control, the coordinated control of the six piezo actuators is extremely important, not only to ensure the realization of the motion stroke and accuracy, but also to ensure that no piezo actuator is actuated. The piezo controller produces excessive tensile force and lateral force, which puts forward higher requirements on the algorithm and fault tolerance of the control software. Moreover, each motion posture

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

corresponds to each axis and has a different operating range, and it is necessary to ensure that the platform controls the motion within the operating range of each posture.

Easy operate, good interactive communication of CoreMorrow software Each axis in the control software designed by CoreMorrow has a motion control slider, which can control six degrees of freedom through the slider. For the operation control of the stroke range of piezo actuator, the system will give a running prompt.

Accuracy control is simple, with Cartesian coordinate system In the control software, there is also a function of controlling the stepping accuracy of each axis, so that the user can perform nano-scale micro-stepping control of a single axis under any current posture of the six-degree-of-freedom motion platform. Also, the hexapod control software uses a Cartesian coordinate system to define the angular deflection of the coordinate system.

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

The application fields of CoreMorrow piezo hexapod is very wide, mainly used in semiconductor, micromachining, medical surgery, aerospace and other fields. It based on the parallel mechanism has the advantages of small inertia of moving parts, good dynamic characteristics, compact structure, high rigidity and high reliability and repeatability. The linear motion precision of it can reach nm level, and the angular precision can reach urad level. The high-precision motion control makes its application prospect more impressive.

CoreMorrow Piezo Hexapod Testing The linear and angular displacement and voltage curves measured by the CoreMorrow piezo hexapod are as follows.

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

The measured performance parameters of CoreMorrow piezo hexapod are as follows.

Parameters Model: H60.XYZTR5S Degrees of freedom of motion: X, Y, Z, θx, θy, θz Structural form: six degrees of freedom parallel Driving method: Piezo X, Y nominal travel range: 80µm Z nominal travel range: 55µm θx, θy angle range: 1.2mrad

CoreMorrow Piezo Hexapod Delivered Successfully Attract Rreporters To Interview!

θz angle range: 1.6mrad Angular Resolution: >0.5μrad (0.1 sec) Linear displacement resolution: > 0.5nm Closed-loop linearity: >0.1%F.S. Closed loop repeat positioning accuracy: >0.1%F.S. Carrying capacity: 5kg Weight: 1.3kg Interview The high-precision motion positioning and control capability of CoreMorrow piezo hexapod has also attracted the attention of reporters from Heilongjiang TV Station. They have conducted relevant interviews and reports on CoreMorrow. Some of the reports are as follows.

In the report, Mr. Yang, deputy general manager of CoreMorrow, said: "As a leading enterprise in domestic precision positioning, we will better transform knowledge and experience into technologies and products, and will continue to increase research and development efforts, enrich product categories, and provide semiconductors Contribute to the localization of core devices.”