CoreMorrow Piezo Macro-Micro Combination Stage Suitable for Cage Structure!

CoreMorrow Piezo Macro-Micro Combination Stage Suitable for Cage Structure!

CoreMorrow Piezo Macro-Micro Combination Stage Suitable for Cage Structure!

With the development of piezo technology, researchers are no longer satisfied with the scene requirements of small displacement and high precision, and the demand for larger displacement stroke with high precision is constantly proposed. Such piezo products have also emerged as the times require with the development and progress of piezo technology. CoreMorrow XYZ72SN81K13 series piezo macro-micro combination stage adopts the combination of piezoelectric stick-slip principle and piezoelectric micro-motion technology to meet the XY axis millimeter-level large stroke, and achieve Z-axis nanometer-level high precision.

Features ·XY millimeter stroke, suitable for lateral adjustment of the lens ·Z micro-travel, suitable for optical focus adjustment ·Φ35mm aperture, suitable for transmitted light applications ·Voltage drive control, fast response and convenient operation Macro-Micro Combination XYZ72SN81K13 adopts macro-micro composite method, which perfectly combines piezoelectric stick-slip principle and piezoelectric micro-motion technology. Realize large stroke macro movement of XY stroke to ±5mm/axis, stroke can reach 8μm.

Z axis can be adjusted by micro movement, and the

CoreMorrow Piezo Macro-Micro Combination Stage Suitable for Cage Structure!

XY Millimeter Travel Motion, Piezo Screw Driving XY axis is driven by the piezo screw designed and produced by CoreMorrow. It uses the stick-slip principle and has the characteristics of large stroke and high precision. Combined with the hollow sliding platform, the linear motion of the piezo screw is converted into the XY axis motion of the sliding platform.

Z micrometer travel motion, piezo direct driving Z-axis adopts piezo direct drive structure, providing micron-level travel and nano-level precision.

The driving voltage has a linear relationship with the motion stroke.

Equipped with Cage structure Mounting Holes XYZ72SN81K13 is specially designed for the application in the cage structure. The structure is equipped with cage structure mounting through holes, which can be directly integrated into the cage structure. It can be used to carry any optical element, such as carrying a lens in a cage structure, the movement adjustment in the XY axis can precisely control the center position of the lens focus in the plane, and Z axis micro-motion enables precise nanoscale

CoreMorrow Piezo Macro-Micro Combination Stage Suitable for Cage Structure!

fine-tuning of the position of the focal point on the optical axis.

XYZ72SN81K13 adopts φ35mm aperture structure, which is suitable for optical applications.

Z Axis Displacement and Voltage Curves Different from the driving principle in the XY direction, when the Z direction is driven, the displacement generated is linearly related to the driving voltage.

Parameters Model: XYZ72SN81K13 Active axis: XYZ XY macro stroke: ±5mm/axis Z piezo stroke: 8μm@150V XY min. increment: <30nm Closed/open loop resolution(Z): 0.3/0.1nm Sensor(Z): SGS Unload resonant frequency(Z): 2.5kHz Load capacity: upright 500g/side 200g