Drawings of low voltage Piezo Actuators

Piezo·Nano·Motion

Drawing

L

3±0.5

Ø9 Ø3

Ø9

6

M2

Ø9

6±0.5

motion direction

VS10

2

4±0.5

Ø10 Ø4

Ø10

Ø10

6±0.5

motion direction

4±0.5

10

2

SW4mm

motion direction

L

13

4±0.5

Ø12

Ø6

M44

Ø15 Ø6

Ø15

M44

2

motion direction

Ø12 SR1.5

Ø5 4±0.5

Spherical

Ø6

SW5mm

Ø4

Plane

5±0.5

Extermal thread

7±0.5 SW5mm

Ø5

SW4mm 2

M4

Ø15

3

VS15

Ø12 Ø5

7±0.5

Ø10 SR1.5 4±0.5

Spherical

M4

Plane

5±0.5

Extermal thread

M34

Ø5

M44

3

Ø12

L

VS12

Ø4

SW3mm

M34

Ø4

M34

M3

Ø3 3±0.5

Spherical

8

Ø9 SR1

4±0.5

Extermal thread

L 3

Ø3

SW2mm

M2 3

Ø3

M34

3

Preloaded Piezo Actuators

VS9

Plane

Ø15 SR2

5±0.5

Ø6 4±0.5

Extermal thread

Spherical

Ø20 Ø8

Ø20

Plane

L

VS20

5

17

M5

Ø8 Ø20

M87

4±0.5

M55

8±0.5

SW6mm

Ø8

SW6mm 3

6±0.5

Ø8 4±0.5

Spherical

Extermal thread

motion direction

Ø20 SR3

Plane

L

VS25

5

22

4±0.5

M6

Ø10 Ø25

M87

Ø25 Ø10

Ø25

M66

8±0.5

3

Extermal thread

SW8mm

Ø10

SW8mm 6±0.5

Ø25 SR3

Ø10 4±0.5

Spherical

Plane

motion direction

Notes: 1.5m cable length; LEMO connector; Optional heat sink, thermal stability, open/closed loop versions. (VS9 has only open-loop version). Internal thread as default.

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