The X-Prep® is a specialized 5-axis CNC-based milling/grinding/polishing machine designed to support electrical and physical failure analysis techniques and other applications requiring high precision sample preparation. Fault Localization – Electrical (EFA) •
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TDR, GMR/SQUID, Lock-In Thermography (LIT)
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Photon/Thermal/Laser/Magnetic-based response, SEM-PVC, FIB (circuit edit), eBeam Probing, atomic force probing (AFP)/nano-probing
Defect Identification – Physical (PFA) •
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Die Level •
2
Acoustic, pre-chemical decapsulation, substrate delayering SEM, SIMS, frontside delayering