Summer06

Page 1

yms

yield management solutions www.kla-tencor.com/ymsmagazine $ 5.00

Summer 2006

18

A Balancing Act

Raising the Bar

23

(Feed)back to the Future

Trends and Challenges in CMOS FEOL

30

FĂŞting the Fin

48

The Winning Streak

64

Surface Watch

Technology for the 45nm Node and Beyond


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