Pre-Aligners Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.
External Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.
Wafer Sizes
100mm
125mm
150mm
200mm
Rotational Accuracy
< 2 arc sec
Centration Accuracy
< 0.002 inch (0.051mm)
300mm
External Small Wafer Our external small wafer prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability.
` Wafer Sizes
50mm
75mm
100mm
Rotational Accuracy
< 2 arc sec
Centration Accuracy
< 0.002 inch (0.051mm)