Performix System- High Performance 300MM EFEM

PERFORMIX SYSTEMHIGH PERFORMANCE 300mm EFEM

About Kensington Laboratories offers Performix, a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specifications, to address the growing constraints faced by the semiconductor industry.

2 Wide Performix EFEM

3 Wide Performix EFEM

4 Wide Performix EFEM

EFEM EFEM Configurable For A Wide Range Of Semiconductor Substrate Processing Applications.

Performance Excellence Performix combines the best of newly developed advanced robotic technologies and industry-proven equipment. Available in 2, 3, and 4 port configurations, the Performix system monocoque construction, a anybody frame, provides a sturdy foundation for the four major components, each uniquely designed to provide the speed, accuracy, and flexibility to meet your particular needs.

ADO Load Port

The ADO 300mm load port accesses the wafer in up to 6 seconds, 1.5 to over 3 times better than competitive products.  Best in class FOUP interoperability: Kensington Laboratories patented latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition, ensuring excellent repeatability.  Built to last: A robust design and precision assembly ensures exceptional lifetime and performance.  Superior reliability: Demonstrated MCBF >600,000 cycles at 90% confidence level.

MultiLink Robotic Systems

Introduced in 1995, Multilink robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.  Exceptional throughput: Proprietary z axis design enables market leading peak speeds of 55 inches/second and acceleration rates of up to 200 inches/second2.  Precision wafer placement: High performance design provides precise motion control and eliminates structural deflection and creep.  Fast swap times: Dual arm systems have demonstrated swap times of less than 3 seconds and throughput greater than 360 wph on a 4 port configuration.  300mm installed base: MultiLink robots are currently installed at 98% of all 300mm fabs.

Prealigner

High-speed prealignment provides state of the art placement accuracy in both vacuum chuck and edge contact configurations.

Central Controller

The optional central controller provides a simple single wire host interface, coordinating all EFEM operations. A straightforward, user-friendly command set makes interfacing and controlling the Performix fast and easy.

System Features

The Performix system’s unique monocoque frame forms a rigid enclosure that reduces vibration and enhances stability. This design eliminates the need for a traditional skin-on-frame EFEM design. A patented datum plane serves as a reference point to ensure precision alignment of components and eliminate tolerance variability.

Key Patents   

     

Latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition FOUP latchkeys require no vacuum door attachment Dual end effector, multiple link robot arm system with corner reach-around and extended reach capabilities High torque, synchronously operating multiple link robot arm mechanism Continuously rotatable multiple link robot arm mechanism Robot arm with specimen edge gripping end effector Robot arm with specimen sensing and edge gripping end effector Self-teaching robot arm position method Through-beam wafer mapping

Performix System Performix integrates the highest quality components based upon a history of cutting-edge system design.

Features       

Unibody frame for simple and sturdy foundation Configurable using Kensington full line of Multilink Robots, PreAligners and FOUP Load Ports SEMI Complaint and CE Certified Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide BOLTS interface for ADO as well as alternative substrate handling platforms Class 1 Cleanliness Options  BOLTS interface for non-wafer applications  BOLTS interface for small wafer applications  Chemical Filtration  AMHS Options  Programmable lights, light tower and buttons

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Service -

Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800