Manufacturer of advanced highthroughput, sub-micron motion control equipment for a broad range of industrial, scientific, and academic applications. The company is engaged in supplying wafer handling robots, precision motion control, linear stages, rotary stages, and integrated stages used for optical fiber alignment and semiconductor wafer handling.
EFEM
Performix™ EFEM is an integrated sub-system for a wide range of semiconductor process applications, and had been deployed in the following applications areas Metrology; Dry Wafer Processing; Wet Wafer Processing; Lithography; Wafer Level Packaging. The EFEM is configurable for different wafer sizes as well as different substrate shapes and formats while using the BOLTS interface.
