Advanced Robotic Technologies- Kensington Robots

Advanced Robotic TechnologiesKensington Robots Kensington Robots Repairing

Performance Excellence The best of newly developed advanced robotic technologies and industry-proven equipment.

Available in 2, 3, and 4 port configurations, the Performix system’s monocoque construction, a anybody frame, provides a sturdy foundation for the four major components, each uniquely designed to provide the speed, accuracy, and flexibility to meet your particular needs.

ADO Load Port The ADO 300mm load port accesses the wafer in up to 6 seconds, 1.5 to over 3 times better than competitive products.

• Best in class FOUP interoperability: Kensington Laboratories’

patented latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition, ensuring excellent repeatability.

• Built to last: A robust design and precision assembly ensures exceptional lifetime and performance.

• Superior reliability: Demonstrated MCBF >600,000 cycles at 90% confidence level.

MultiLink Robotic Systems MultiLink robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.

• Exceptional throughput: Proprietary z axis design enables market leading peak speeds of 55 inches/second and acceleration rates of up to 200 inches/second2.

• Precision wafer placement: High performance design provides precise motion control and eliminates structural deflection and creep.

• Fast swap times: Dual arm systems have demonstrated swap times of less than 3 seconds and throughput greater than 360 wph on a 4 port configuration.

• 300mm installed base: MultiLink robots are currently installed at 98% of all 300mm fabs.

Wafer Pre-aligner High-speed prealignment provides state of the art placement accuracy in both vacuum chuck and edge contact configurations.

Central Controller The optional central controller provides a simple single wire host interface, coordinating all EFEM operations.

A straightforward, user-friendly command set makes interfacing and controlling the Performix fast and easy.

System Features The Performix system’s unique monocoque frame forms a rigid enclosure that reduces vibration and enhances stability. This design eliminates the need for a traditional skin-on-frame EFEM design. A patented datum plane serves as a reference point to ensure precision alignment of components and eliminate tolerance variability. More importantly, the datum plane puts precision where it is needed – in the automation components – thus eliminating high tolerance requirements in auxiliary subsystems. The prealigned, preleveled Performix EFEM simplifies system integration, providing faster installation and start up, and guaranteeing repeatable load port and robotic alignment, and wafer position.

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Kensington Laboratories, LLC

Service -

Phone: 510.324.0126

Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

6200 Village Parkway Dublin , CA 94568 Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800