Meet your 300mm Automation Partner

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Page 1

Meet your 300mm automation partner.

510-620-0235 ext 718 or visit www.kensingtonlabs.com Š 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.

All other trademarks are property of their respective owners.

FM27207 M-02025 2/03

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Kensington Laboratories’ is an advanced

robotics technology leader committed to

developing and manufacturing the highest

quality, most reliable and cost effective

atmospheric wafer handling robots in the

industry. Our technical innovation along with

investment in capital infrastructure ensures

PAT E N T E D S E L F - T E A C H SYSTEM

INTEGRATED TRANSMISSIVE OPTICAL SENSOR

The advantage of our self-teaching system

An eye safe LED is integrated into the robot

begins with its installation. An expert

end effector and provides the robot with

technician is required to teach other robotics

superior sensing capabilities. Allowing the

systems, a time consuming process taking

robot to not only accurately map the location

many hours, perhaps days. With its built

and presence of wafers in a cassette, but

in sensor, a Kensington robot is capable

also to detect common errors, such as

of “seeing” and measuring its environment

missing, doubled, or cross-slotted wafers.

and performing an automated self teach.

that our customers receive products with

superior performance, high reliability, and

low cost of ownership.

Advanced Robotics Technologies

Built in sensor technology, enables the robot to

In effect putting an automation expert inside

measure its environment, providing the robot

the system itself, reducing the time required

with the wafer’s elevation and edge locations.

to bring the system online and providing for

The robot then precisely calculates the wafer’s

easy interchangeability of our robots.

center, allowing it to adjust automatically for

Possibly more important to your ultimate

any potential misalignment of the wafer

success, the self-teach feature also gives

before moving in to pick it up.

you the ability to rapidly and effectively scale your production and support capabilities.

PAT E N T E D E D G E G R I P TECHNOLOGY Kensington Laboratories’ exclusive patented

to particulate generation and improving your

edge grip technology is a prime example of our

process yields. Which translates into reduced

technology leadership in automation systems.

overall cost of ownership for your system.

Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination.

Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss.

Kensington Laboratories’ failsafe design maintains

Our field proven edge grip technology enables

its grip on the wafer, even when the wafer is being

our 300mm robots to provide true edge grip,

held in an inverted or a vertical position.

virtually eliminating the potential for defects due

F E AT U R E S Patented Edge Grip Technology • Patented Automated Self-Teaching Sy stem • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options

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Kensington Laboratories’ is an advanced

robotics technology leader committed to

developing and manufacturing the highest

quality, most reliable and cost effective

atmospheric wafer handling robots in the

industry. Our technical innovation along with

investment in capital infrastructure ensures

PAT E N T E D S E L F - T E A C H SYSTEM

INTEGRATED TRANSMISSIVE OPTICAL SENSOR

The advantage of our self-teaching system

An eye safe LED is integrated into the robot

begins with its installation. An expert

end effector and provides the robot with

technician is required to teach other robotics

superior sensing capabilities. Allowing the

systems, a time consuming process taking

robot to not only accurately map the location

many hours, perhaps days. With its built

and presence of wafers in a cassette, but

in sensor, a Kensington robot is capable

also to detect common errors, such as

of “seeing” and measuring its environment

missing, doubled, or cross-slotted wafers.

and performing an automated self teach.

that our customers receive products with

superior performance, high reliability, and

low cost of ownership.

Advanced Robotics Technologies

Built in sensor technology, enables the robot to

In effect putting an automation expert inside

measure its environment, providing the robot

the system itself, reducing the time required

with the wafer’s elevation and edge locations.

to bring the system online and providing for

The robot then precisely calculates the wafer’s

easy interchangeability of our robots.

center, allowing it to adjust automatically for

Possibly more important to your ultimate

any potential misalignment of the wafer

success, the self-teach feature also gives

before moving in to pick it up.

you the ability to rapidly and effectively scale your production and support capabilities.

PAT E N T E D E D G E G R I P TECHNOLOGY Kensington Laboratories’ exclusive patented

to particulate generation and improving your

edge grip technology is a prime example of our

process yields. Which translates into reduced

technology leadership in automation systems.

overall cost of ownership for your system.

Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination.

Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss.

Kensington Laboratories’ failsafe design maintains

Our field proven edge grip technology enables

its grip on the wafer, even when the wafer is being

our 300mm robots to provide true edge grip,

held in an inverted or a vertical position.

virtually eliminating the potential for defects due

F E AT U R E S Patented Edge Grip Technology • Patented Automated Self-Teaching Sy stem • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options

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Configurations and Options

Robot Platforms

R E A C H C O N F I G U R AT I O N S Our advanced Multi Link reach design utilizes single arm

a superior field-tested and proven Direct Drive

3 link

system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing

single arm

when an object is stuck and halting motion to

4 link

prevent further damage.

S TA N D A R D AT M O S P H E R I C R O B O T P L AT F O R M S

Robot Type

Standard Reach1

single arm

14 or 21in. (355.6 or 533.4mm)

dual arm

14 in. (355.6mm)

Note: 1 without End Effector

dual arm

Kensington Laboratories’ atmospheric robots are

WORKING ENVELOPE

designed to the most rigorous performance standards. Its machine tool quality construction and

Typical Swept Area1

the meticulous selection of its long-life components contribute to our robots unsurpassed reliability

System Type

Without Wafer

With 300mm Wafer

and performance. Our modular design and patented

single arm

18 . 3 4 in. (465.8mm)

22.18 in. (563.4mm)

self-teaching capability allow our robots to be

single arm w/wrist

24. 4 8 in. (621.8mm)

26.38 in. (670.1mm)

used both in new systems and as a drop-in field

dual arm

20.17in. (512.3mm)

20.17in. (512.3mm)

Note: 1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types

replaceable unit (FRU) in existing systems. Our single arm

attention to detail and our focus on performance

Our robots are designed to provide wafer

and reliability ensure our robots provide the highest

handling operations within a very compact

throughput and lowest cost of ownership available.

footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected. single arm robot

dual arm robot

14 in. (355.6mm)

14 in. (355.6mm)

300mm (11.811 in)

300mm (11.811 in)

Edge Grip

Edge Grip

Z Travel

14.25 in. (362.0mm)

14.25 in. (362.0mm)

Height2

26.94 in. (684.3mm)

30.25 in. (768.4mm)

9.75in. (247.7mm)

9.75in. (247.7mm)

< 85 lb (38.6kg)

< 110 lb (49.9kg)

Reach1 Wafer Size End Effector3

Diameter Weight

4

Cleanliness

< Class 1

Control Interface

3 link dual arm

Z T R AV E L O P T I O N S Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of

single arm

applied force. This reduces long-term wear and

RS-232 Connection (IEEE-488 Optional)

Controller

maintains a high degree of positional

Model 4000

Payload Capacity

accuracy throughout the life of the robot.

Up to 8 lb Max (3.6kg)

Input power Vacuum requirement

single arm w/wrist

90 to 132 VAC at 47 to 63 Hz 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg)

Mounting types

System Height2

Wall Mount (Vertical) or Flange Mount (Horizontal)

MCBF5 MTTR Note: 1 without Edge Grip End Effector 2 measured from the bottom of the robot body to the bottom end effector mounting surface

single arm

21 in. Reach

Z Travel1

< 2 hours

11.25 in.

23.29 in. (591.6mm)

24.94 in. (633.5mm)

14.25 in.

26.94 in. (684.3mm)

27.94 in. (709.7mm)

17.25 in.

29.94 in. (760.5mm)

30.94 in. (785.9mm)

dual arm

3 Vacuum Grip optional 4 varies based on configuration options 5 minimum cycles, wafer moves, before failure, varies by application and environment

dual arm Actual specifications subject to change

14 in. Reach

10 Million

Note: 1 includes High Speed Z and Braking Mechanism 2 measured from the bottom of the robot body to the bottom end effector mounting surface

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Page 5

Configurations and Options

Robot Platforms

R E A C H C O N F I G U R AT I O N S Our advanced Multi Link reach design utilizes single arm

a superior field-tested and proven Direct Drive

3 link

system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing

single arm

when an object is stuck and halting motion to

4 link

prevent further damage.

S TA N D A R D AT M O S P H E R I C R O B O T P L AT F O R M S

Robot Type

Standard Reach1

single arm

14 or 21in. (355.6 or 533.4mm)

dual arm

14 in. (355.6mm)

Note: 1 without End Effector

dual arm

Kensington Laboratoriesâ&#x20AC;&#x2122; atmospheric robots are

WORKING ENVELOPE

designed to the most rigorous performance standards. Its machine tool quality construction and

Typical Swept Area1

the meticulous selection of its long-life components contribute to our robots unsurpassed reliability

System Type

Without Wafer

With 300mm Wafer

and performance. Our modular design and patented

single arm

18 . 3 4 in. (465.8mm)

22.18 in. (563.4mm)

self-teaching capability allow our robots to be

single arm w/wrist

24. 4 8 in. (621.8mm)

26.38 in. (670.1mm)

used both in new systems and as a drop-in field

dual arm

20.17in. (512.3mm)

20.17in. (512.3mm)

Note: 1 using a typical 300mm Edge Grip End Effectorâ&#x20AC;&#x201D;varies with different end effector sizes and types

replaceable unit (FRU) in existing systems. Our single arm

attention to detail and our focus on performance

Our robots are designed to provide wafer

and reliability ensure our robots provide the highest

handling operations within a very compact

throughput and lowest cost of ownership available.

footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected. single arm robot

dual arm robot

14 in. (355.6mm)

14 in. (355.6mm)

300mm (11.811 in)

300mm (11.811 in)

Edge Grip

Edge Grip

Z Travel

14.25 in. (362.0mm)

14.25 in. (362.0mm)

Height2

26.94 in. (684.3mm)

30.25 in. (768.4mm)

9.75in. (247.7mm)

9.75in. (247.7mm)

< 85 lb (38.6kg)

< 110 lb (49.9kg)

Reach1 Wafer Size End Effector3

Diameter Weight

4

Cleanliness

< Class 1

Control Interface

3 link dual arm

Z T R AV E L O P T I O N S Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of

single arm

applied force. This reduces long-term wear and

RS-232 Connection (IEEE-488 Optional)

Controller

maintains a high degree of positional

Model 4000

Payload Capacity

accuracy throughout the life of the robot.

Up to 8 lb Max (3.6kg)

Input power Vacuum requirement

single arm w/wrist

90 to 132 VAC at 47 to 63 Hz 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg)

Mounting types

System Height2

Wall Mount (Vertical) or Flange Mount (Horizontal)

MCBF5 MTTR Note: 1 without Edge Grip End Effector 2 measured from the bottom of the robot body to the bottom end effector mounting surface

single arm

21 in. Reach

Z Travel1

< 2 hours

11.25 in.

23.29 in. (591.6mm)

24.94 in. (633.5mm)

14.25 in.

26.94 in. (684.3mm)

27.94 in. (709.7mm)

17.25 in.

29.94 in. (760.5mm)

30.94 in. (785.9mm)

dual arm

3 Vacuum Grip optional 4 varies based on configuration options 5 minimum cycles, wafer moves, before failure, varies by application and environment

dual arm Actual specifications subject to change

14 in. Reach

10 Million

Note: 1 includes High Speed Z and Braking Mechanism 2 measured from the bottom of the robot body to the bottom end effector mounting surface

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PREALIGNERS

TRACK SYSTEMS

Both integrated and external prealigners use transmissive sensors located within the prealigner

Kensington Laboratories’ standard track

to sense the wafer’s edge and accurately measure location and orientation during a single rotation.

solutions provide high acceleration and overall

They accurately detect any combination of SEMI standard wafer alignment features.

speed in a reliable and proven design.

The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered

External

systems. Our track systems can also be

Our external prealigner is designed to mount

equipped with integrated alignment features

inside the front end of the tool. It provides

that assure the locational accuracy of other

high throughput, up to 450 wafers per hour,

critical automation elements of the system,

while maintaining cleanliness, accuracy,

such as 300mm pod doors and load ports.

and reliability. It also allows our edge grip and

Integrated

Unlike typical linear motor driven track systems

transmissive sensor equipped robots to

Track System

Length

Specifications/ Features

perform an automated one-step self teach.

2 Station Track

26 in. (660.4mm)

Acceleration

3 Station Track

40.62 in. (1031.8mm)

Velocity

4 Station Track

60.5 in. (1536.7mm)

Accuracy

The integrated prealigner is designed to mount on the shoulder of the robot, minimizing

Wafer Sizes

the footprint of the robot and prealigner

Rotational Accuracy

< 2 arc sec

system and maximizing cleanliness, accuracy,

Centration Accuracy

< 0.002 in (0.051mm)

125mm

150mm

200mm

and

that are incapable of sensing objects and can

125 in./s2, 2G's (3175.0mm/s2) Max 50 in./s (1270.0mm/s) Max 0.0001 in. (0.003mm)

300mm

125mm

150mm

200mm

and

Rotational Accuracy

< 2 arc sec

Centration Accuracy

< 0.002 in (0.051mm)

and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.

and reliability.

Wafer Sizes

be extremely dangerous to both operators

END EFFECTORS

300mm

Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications.

Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements.

Wafer Sizes

100mm

125mm

150mm

t r a n s m i s s i v e

300mm vacuum grip

Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an

Single Arm Robots

340˚

Dual Arm Robots

n/a

and

300mm

Edge Grip and Vacuum Grip

Grip Types

S U P I N AT I O N

200mm

b e a m

t e c h n o l o g y

300mm edge grip

200mm vacuum grip

standard vacuum grip double

additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.

forked vacuum grip double

standard vacuum grip

forked vacuum grip

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Page 7

PREALIGNERS

TRACK SYSTEMS

Both integrated and external prealigners use transmissive sensors located within the prealigner

Kensington Laboratories’ standard track

to sense the wafer’s edge and accurately measure location and orientation during a single rotation.

solutions provide high acceleration and overall

They accurately detect any combination of SEMI standard wafer alignment features.

speed in a reliable and proven design.

The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered

External

systems. Our track systems can also be

Our external prealigner is designed to mount

equipped with integrated alignment features

inside the front end of the tool. It provides

that assure the locational accuracy of other

high throughput, up to 450 wafers per hour,

critical automation elements of the system,

while maintaining cleanliness, accuracy,

such as 300mm pod doors and load ports.

and reliability. It also allows our edge grip and

Integrated

Unlike typical linear motor driven track systems

transmissive sensor equipped robots to

Track System

Length

Specifications/ Features

perform an automated one-step self teach.

2 Station Track

26 in. (660.4mm)

Acceleration

3 Station Track

40.62 in. (1031.8mm)

Velocity

4 Station Track

60.5 in. (1536.7mm)

Accuracy

The integrated prealigner is designed to mount on the shoulder of the robot, minimizing

Wafer Sizes

the footprint of the robot and prealigner

Rotational Accuracy

< 2 arc sec

system and maximizing cleanliness, accuracy,

Centration Accuracy

< 0.002 in (0.051mm)

125mm

150mm

200mm

and

that are incapable of sensing objects and can

125 in./s2, 2G's (3175.0mm/s2) Max 50 in./s (1270.0mm/s) Max 0.0001 in. (0.003mm)

300mm

125mm

150mm

200mm

and

Rotational Accuracy

< 2 arc sec

Centration Accuracy

< 0.002 in (0.051mm)

and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.

and reliability.

Wafer Sizes

be extremely dangerous to both operators

END EFFECTORS

300mm

Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications.

Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements.

Wafer Sizes

100mm

125mm

150mm

t r a n s m i s s i v e

300mm vacuum grip

Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an

Single Arm Robots

340˚

Dual Arm Robots

n/a

and

300mm

Edge Grip and Vacuum Grip

Grip Types

S U P I N AT I O N

200mm

b e a m

t e c h n o l o g y

300mm edge grip

200mm vacuum grip

standard vacuum grip double

additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.

forked vacuum grip double

standard vacuum grip

forked vacuum grip

M-02025 Robot Brochure.qxd

8/31/06

3:25 PM

Page 1

Meet your 300mm automation partner.

510-620-0235 ext 718 or visit www.kensingtonlabs.com Š 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.

All other trademarks are property of their respective owners.

FM27207 M-02025 2/03