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Page 1
Meet your 300mm automation partner.
510-620-0235 ext 718 or visit www.kensingtonlabs.com Š 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners.
FM27207 M-02025 2/03
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Kensington Laboratories’ is an advanced
robotics technology leader committed to
developing and manufacturing the highest
quality, most reliable and cost effective
atmospheric wafer handling robots in the
industry. Our technical innovation along with
investment in capital infrastructure ensures
PAT E N T E D S E L F - T E A C H SYSTEM
INTEGRATED TRANSMISSIVE OPTICAL SENSOR
The advantage of our self-teaching system
An eye safe LED is integrated into the robot
begins with its installation. An expert
end effector and provides the robot with
technician is required to teach other robotics
superior sensing capabilities. Allowing the
systems, a time consuming process taking
robot to not only accurately map the location
many hours, perhaps days. With its built
and presence of wafers in a cassette, but
in sensor, a Kensington robot is capable
also to detect common errors, such as
of “seeing” and measuring its environment
missing, doubled, or cross-slotted wafers.
and performing an automated self teach.
that our customers receive products with
superior performance, high reliability, and
low cost of ownership.
Advanced Robotics Technologies
Built in sensor technology, enables the robot to
In effect putting an automation expert inside
measure its environment, providing the robot
the system itself, reducing the time required
with the wafer’s elevation and edge locations.
to bring the system online and providing for
The robot then precisely calculates the wafer’s
easy interchangeability of our robots.
center, allowing it to adjust automatically for
Possibly more important to your ultimate
any potential misalignment of the wafer
success, the self-teach feature also gives
before moving in to pick it up.
you the ability to rapidly and effectively scale your production and support capabilities.
PAT E N T E D E D G E G R I P TECHNOLOGY Kensington Laboratories’ exclusive patented
to particulate generation and improving your
edge grip technology is a prime example of our
process yields. Which translates into reduced
technology leadership in automation systems.
overall cost of ownership for your system.
Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination.
Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss. Kensington Laboratories’ failsafe design maintains
Our field proven edge grip technology enables
its grip on the wafer, even when the wafer is being
our 300mm robots to provide true edge grip,
held in an inverted or a vertical position.
virtually eliminating the potential for defects due
F E AT U R E S Patented Edge Grip Technology • Patented Automated Self-Teaching Sy stem • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options
M-02025 Robot Brochure.qxd
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Page 3
Kensington Laboratories’ is an advanced
robotics technology leader committed to
developing and manufacturing the highest
quality, most reliable and cost effective
atmospheric wafer handling robots in the
industry. Our technical innovation along with
investment in capital infrastructure ensures
PAT E N T E D S E L F - T E A C H SYSTEM
INTEGRATED TRANSMISSIVE OPTICAL SENSOR
The advantage of our self-teaching system
An eye safe LED is integrated into the robot
begins with its installation. An expert
end effector and provides the robot with
technician is required to teach other robotics
superior sensing capabilities. Allowing the
systems, a time consuming process taking
robot to not only accurately map the location
many hours, perhaps days. With its built
and presence of wafers in a cassette, but
in sensor, a Kensington robot is capable
also to detect common errors, such as
of “seeing” and measuring its environment
missing, doubled, or cross-slotted wafers.
and performing an automated self teach.
that our customers receive products with
superior performance, high reliability, and
low cost of ownership.
Advanced Robotics Technologies
Built in sensor technology, enables the robot to
In effect putting an automation expert inside
measure its environment, providing the robot
the system itself, reducing the time required
with the wafer’s elevation and edge locations.
to bring the system online and providing for
The robot then precisely calculates the wafer’s
easy interchangeability of our robots.
center, allowing it to adjust automatically for
Possibly more important to your ultimate
any potential misalignment of the wafer
success, the self-teach feature also gives
before moving in to pick it up.
you the ability to rapidly and effectively scale your production and support capabilities.
PAT E N T E D E D G E G R I P TECHNOLOGY Kensington Laboratories’ exclusive patented
to particulate generation and improving your
edge grip technology is a prime example of our
process yields. Which translates into reduced
technology leadership in automation systems.
overall cost of ownership for your system.
Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination.
Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss. Kensington Laboratories’ failsafe design maintains
Our field proven edge grip technology enables
its grip on the wafer, even when the wafer is being
our 300mm robots to provide true edge grip,
held in an inverted or a vertical position.
virtually eliminating the potential for defects due
F E AT U R E S Patented Edge Grip Technology • Patented Automated Self-Teaching Sy stem • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options
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Configurations and Options
Robot Platforms
R E A C H C O N F I G U R AT I O N S Our advanced Multi Link reach design utilizes single arm
a superior field-tested and proven Direct Drive
3 link
system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing
single arm
when an object is stuck and halting motion to
4 link
prevent further damage.
S TA N D A R D AT M O S P H E R I C R O B O T P L AT F O R M S
Robot Type
Standard Reach1
single arm
14 or 21in. (355.6 or 533.4mm)
dual arm
14 in. (355.6mm)
Note: 1 without End Effector
dual arm
Kensington Laboratories’ atmospheric robots are
WORKING ENVELOPE
designed to the most rigorous performance standards. Its machine tool quality construction and
Typical Swept Area1
the meticulous selection of its long-life components contribute to our robots unsurpassed reliability
System Type
Without Wafer
With 300mm Wafer
and performance. Our modular design and patented
single arm
18 . 3 4 in. (465.8mm)
22.18 in. (563.4mm)
self-teaching capability allow our robots to be
single arm w/wrist
24. 4 8 in. (621.8mm)
26.38 in. (670.1mm)
used both in new systems and as a drop-in field
dual arm
20.17in. (512.3mm)
20.17in. (512.3mm)
Note: 1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types
replaceable unit (FRU) in existing systems. Our single arm
attention to detail and our focus on performance
Our robots are designed to provide wafer
and reliability ensure our robots provide the highest
handling operations within a very compact
throughput and lowest cost of ownership available.
footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected. single arm robot
dual arm robot
14 in. (355.6mm)
14 in. (355.6mm)
300mm (11.811 in)
300mm (11.811 in)
Edge Grip
Edge Grip
Z Travel
14.25 in. (362.0mm)
14.25 in. (362.0mm)
Height2
26.94 in. (684.3mm)
30.25 in. (768.4mm)
9.75in. (247.7mm)
9.75in. (247.7mm)
< 85 lb (38.6kg)
< 110 lb (49.9kg)
Reach1 Wafer Size End Effector3
Diameter Weight
4
Cleanliness
< Class 1
Control Interface
3 link dual arm
Z T R AV E L O P T I O N S Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of
single arm
applied force. This reduces long-term wear and
RS-232 Connection (IEEE-488 Optional)
Controller
maintains a high degree of positional
Model 4000
Payload Capacity
accuracy throughout the life of the robot.
Up to 8 lb Max (3.6kg)
Input power Vacuum requirement
single arm w/wrist
90 to 132 VAC at 47 to 63 Hz 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg)
Mounting types
System Height2
Wall Mount (Vertical) or Flange Mount (Horizontal)
MCBF5 MTTR Note: 1 without Edge Grip End Effector 2 measured from the bottom of the robot body to the bottom end effector mounting surface
single arm
21 in. Reach
Z Travel1
< 2 hours
11.25 in.
23.29 in. (591.6mm)
24.94 in. (633.5mm)
14.25 in.
26.94 in. (684.3mm)
27.94 in. (709.7mm)
17.25 in.
29.94 in. (760.5mm)
30.94 in. (785.9mm)
dual arm
3 Vacuum Grip optional 4 varies based on configuration options 5 minimum cycles, wafer moves, before failure, varies by application and environment
dual arm Actual specifications subject to change
14 in. Reach
10 Million
Note: 1 includes High Speed Z and Braking Mechanism 2 measured from the bottom of the robot body to the bottom end effector mounting surface
M-02025 Robot Brochure.qxd
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Page 5
Configurations and Options
Robot Platforms
R E A C H C O N F I G U R AT I O N S Our advanced Multi Link reach design utilizes single arm
a superior field-tested and proven Direct Drive
3 link
system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing
single arm
when an object is stuck and halting motion to
4 link
prevent further damage.
S TA N D A R D AT M O S P H E R I C R O B O T P L AT F O R M S
Robot Type
Standard Reach1
single arm
14 or 21in. (355.6 or 533.4mm)
dual arm
14 in. (355.6mm)
Note: 1 without End Effector
dual arm
Kensington Laboratories’ atmospheric robots are
WORKING ENVELOPE
designed to the most rigorous performance standards. Its machine tool quality construction and
Typical Swept Area1
the meticulous selection of its long-life components contribute to our robots unsurpassed reliability
System Type
Without Wafer
With 300mm Wafer
and performance. Our modular design and patented
single arm
18 . 3 4 in. (465.8mm)
22.18 in. (563.4mm)
self-teaching capability allow our robots to be
single arm w/wrist
24. 4 8 in. (621.8mm)
26.38 in. (670.1mm)
used both in new systems and as a drop-in field
dual arm
20.17in. (512.3mm)
20.17in. (512.3mm)
Note: 1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types
replaceable unit (FRU) in existing systems. Our single arm
attention to detail and our focus on performance
Our robots are designed to provide wafer
and reliability ensure our robots provide the highest
handling operations within a very compact
throughput and lowest cost of ownership available.
footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected. single arm robot
dual arm robot
14 in. (355.6mm)
14 in. (355.6mm)
300mm (11.811 in)
300mm (11.811 in)
Edge Grip
Edge Grip
Z Travel
14.25 in. (362.0mm)
14.25 in. (362.0mm)
Height2
26.94 in. (684.3mm)
30.25 in. (768.4mm)
9.75in. (247.7mm)
9.75in. (247.7mm)
< 85 lb (38.6kg)
< 110 lb (49.9kg)
Reach1 Wafer Size End Effector3
Diameter Weight
4
Cleanliness
< Class 1
Control Interface
3 link dual arm
Z T R AV E L O P T I O N S Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of
single arm
applied force. This reduces long-term wear and
RS-232 Connection (IEEE-488 Optional)
Controller
maintains a high degree of positional
Model 4000
Payload Capacity
accuracy throughout the life of the robot.
Up to 8 lb Max (3.6kg)
Input power Vacuum requirement
single arm w/wrist
90 to 132 VAC at 47 to 63 Hz 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg)
Mounting types
System Height2
Wall Mount (Vertical) or Flange Mount (Horizontal)
MCBF5 MTTR Note: 1 without Edge Grip End Effector 2 measured from the bottom of the robot body to the bottom end effector mounting surface
single arm
21 in. Reach
Z Travel1
< 2 hours
11.25 in.
23.29 in. (591.6mm)
24.94 in. (633.5mm)
14.25 in.
26.94 in. (684.3mm)
27.94 in. (709.7mm)
17.25 in.
29.94 in. (760.5mm)
30.94 in. (785.9mm)
dual arm
3 Vacuum Grip optional 4 varies based on configuration options 5 minimum cycles, wafer moves, before failure, varies by application and environment
dual arm Actual specifications subject to change
14 in. Reach
10 Million
Note: 1 includes High Speed Z and Braking Mechanism 2 measured from the bottom of the robot body to the bottom end effector mounting surface
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PREALIGNERS
TRACK SYSTEMS
Both integrated and external prealigners use transmissive sensors located within the prealigner
Kensington Laboratories’ standard track
to sense the wafer’s edge and accurately measure location and orientation during a single rotation.
solutions provide high acceleration and overall
They accurately detect any combination of SEMI standard wafer alignment features.
speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered
External
systems. Our track systems can also be
Our external prealigner is designed to mount
equipped with integrated alignment features
inside the front end of the tool. It provides
that assure the locational accuracy of other
high throughput, up to 450 wafers per hour,
critical automation elements of the system,
while maintaining cleanliness, accuracy,
such as 300mm pod doors and load ports.
and reliability. It also allows our edge grip and
Integrated
Unlike typical linear motor driven track systems
transmissive sensor equipped robots to
Track System
Length
Specifications/ Features
perform an automated one-step self teach.
2 Station Track
26 in. (660.4mm)
Acceleration
3 Station Track
40.62 in. (1031.8mm)
Velocity
4 Station Track
60.5 in. (1536.7mm)
Accuracy
The integrated prealigner is designed to mount on the shoulder of the robot, minimizing
Wafer Sizes
the footprint of the robot and prealigner
Rotational Accuracy
< 2 arc sec
system and maximizing cleanliness, accuracy,
Centration Accuracy
< 0.002 in (0.051mm)
125mm
150mm
200mm
and
that are incapable of sensing objects and can
125 in./s2, 2G's (3175.0mm/s2) Max 50 in./s (1270.0mm/s) Max 0.0001 in. (0.003mm)
300mm
125mm
150mm
200mm
and
Rotational Accuracy
< 2 arc sec
Centration Accuracy
< 0.002 in (0.051mm)
and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.
and reliability. Wafer Sizes
be extremely dangerous to both operators
END EFFECTORS
300mm
Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications. Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements. Wafer Sizes
100mm
125mm
150mm
t r a n s m i s s i v e
300mm vacuum grip
Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an
Single Arm Robots
340˚
Dual Arm Robots
n/a
and
300mm
Edge Grip and Vacuum Grip
Grip Types
S U P I N AT I O N
200mm
b e a m
t e c h n o l o g y
300mm edge grip
200mm vacuum grip
standard vacuum grip double
additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.
forked vacuum grip double
standard vacuum grip
forked vacuum grip
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Page 7
PREALIGNERS
TRACK SYSTEMS
Both integrated and external prealigners use transmissive sensors located within the prealigner
Kensington Laboratories’ standard track
to sense the wafer’s edge and accurately measure location and orientation during a single rotation.
solutions provide high acceleration and overall
They accurately detect any combination of SEMI standard wafer alignment features.
speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered
External
systems. Our track systems can also be
Our external prealigner is designed to mount
equipped with integrated alignment features
inside the front end of the tool. It provides
that assure the locational accuracy of other
high throughput, up to 450 wafers per hour,
critical automation elements of the system,
while maintaining cleanliness, accuracy,
such as 300mm pod doors and load ports.
and reliability. It also allows our edge grip and
Integrated
Unlike typical linear motor driven track systems
transmissive sensor equipped robots to
Track System
Length
Specifications/ Features
perform an automated one-step self teach.
2 Station Track
26 in. (660.4mm)
Acceleration
3 Station Track
40.62 in. (1031.8mm)
Velocity
4 Station Track
60.5 in. (1536.7mm)
Accuracy
The integrated prealigner is designed to mount on the shoulder of the robot, minimizing
Wafer Sizes
the footprint of the robot and prealigner
Rotational Accuracy
< 2 arc sec
system and maximizing cleanliness, accuracy,
Centration Accuracy
< 0.002 in (0.051mm)
125mm
150mm
200mm
and
that are incapable of sensing objects and can
125 in./s2, 2G's (3175.0mm/s2) Max 50 in./s (1270.0mm/s) Max 0.0001 in. (0.003mm)
300mm
125mm
150mm
200mm
and
Rotational Accuracy
< 2 arc sec
Centration Accuracy
< 0.002 in (0.051mm)
and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.
and reliability. Wafer Sizes
be extremely dangerous to both operators
END EFFECTORS
300mm
Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications. Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements. Wafer Sizes
100mm
125mm
150mm
t r a n s m i s s i v e
300mm vacuum grip
Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an
Single Arm Robots
340˚
Dual Arm Robots
n/a
and
300mm
Edge Grip and Vacuum Grip
Grip Types
S U P I N AT I O N
200mm
b e a m
t e c h n o l o g y
300mm edge grip
200mm vacuum grip
standard vacuum grip double
additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.
forked vacuum grip double
standard vacuum grip
forked vacuum grip
M-02025 Robot Brochure.qxd
8/31/06
3:25 PM
Page 1
Meet your 300mm automation partner.
510-620-0235 ext 718 or visit www.kensingtonlabs.com Š 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners.
FM27207 M-02025 2/03