300mm FOUP Load Port Wafer Handling Robot With being the technology leader in the wafer handling automation products exhibits their 300mm wafer handling robot. The Kensington Laboratories' ADO proves the volume manufacturing at specific 300mm FOUP production fabs, which is supported by the worldwide service and support network.
What does all robot installation take? • • • •
Automation Abrupt set-up without the help of the experts The robotic interchangeability The production scalability
What does built-in sensor work? • It measures the position of the wafer, detects and calculates it. • It also improvises the system accuracy.
What does a shaped LED beam offer in this? • Integrated end effector sensor • LED for reliability and safety The wafer mapping identifies the stacked wafer cassette errors, and the cross slotted wafer cassette errors. Its wafer position helps in elevation and edge detection. Its shaped beam permits the measurements vs. the presence/absence detection. It measures both x and z wafer positions. The actuator deployment has a controlled force for secure gripping wafers. The fail-safe closed-loop design has a grip over the wafer in both the power and vacuum loss. The true edge grip has minimal contact with the wafer edge and virtually eradicates the backside contamination from the robot gripper.