SCOPE OF HUMIDITY AND TEMPERATURE CHAMBER IN SILICON WAFER MANUFACTURING
A clean room environment is needed during the manufacturing and repair of silicon wafers and various other semiconductor wafers. Here, all stages are carried out within a closed environment where airflow is filtered using HEPA or ULPA filters through the clean room.
The deposition of particles or condensate on the silicon wafers must be avoided Moreover, the filter's efficiency must remain high throughout its useful life
Some research studies carried out in this area include studying the effect of humidity on the deposition of water vapor on oxidized and unoxidized silicon.
In addition to this, other studies have explored the impact of temperature and humidity on the degradation of silicon crystals
Typically, silicon wafers are sealed to protect them from environmental conditions
To test the effectiveness of the sealing material and methods, the sealed wafers are tested in a controlled environment that mimics the range of environments and they will get exposed to during their service life
Due to the high cost of these materials and the precision required, such experiments are the best suited for miniaturized humidity and temperature chamber like the Hygro-Remote system
