What Is the Importance of Two Pressure Humidity Generators in Silicon Wafer Manufacturing?
The processing involved in manufacturing and repairing silicon wafers and other semiconductor wafers calls for a cleanroom environment. Here, all the stages are accomplished within a sealed space with a filtered air supply using HEPA or ULPA through the clean room.
It is important that the silicon wafers do not come into contact with any deposited particles or condensate. Also, the highly efficient filter must remain so throughout its lifetime.
The research in this area includes research into the effect of humidity on the deposition of water vapor on oxidized and unoxidized silicon.
Other studies have also attempted to examine the combined effects of temperature and humidity on the silicon crystal degradation process.
Customarily, silicon wafers are sealed to prevent infiltration of undesirable environmental conditions into the wafer material.
The sealing material is therefore tested together with its assigned sealing technique, where the sealed wafers are subjected to a simulated environment that presents all the possible scenarios that they will be exposed to during their lifetime operation.
Such experiments are, therefore, best suited for miniaturization using a two pressure humidity generator, like the Hygro-Remote system, due to the high cost of such materials and the precision required.