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DataandStatistics;GlowDischargeMassSpectrometry,MethodsidSCSBResearchToolsapartiallyionizedgas,consistingofpositiveionsandelectrons,and alargenumberofneutralatoms.Wepresentacombinedexperimentalandtheoreticalstudyofunintendeddischargesinthenarrowgapsofplasmaprocessing chambersandreportsignificantThefirst,ninechaptersonfundamentalsoflowpressurepartiallyionizedplasmas(Chapters2–6)andgas-phaseandsurface physicsandchemistry(Chapters7–9)havebeenrevisedmainlytoclarifythepresentationofthematerial,basedontheauthors’continuingteachingexperienceand increasedunderstandingIntroductionBasicPlasmaEquationsandEquilibriumAtomicCollisionsPlasmaDynamicsDiffusionandTransportDCSheathsChemical ReactionsandEquilibriumMolecularCollisionsChemicalKineticsandSurfaceProcessesParticleandEnergyBalanceinDischargesCapacitiveDischargesPrinciples ofPlasmaDischargesandMaterialsProcessingisavailablethroughtheASUCBookstore()Publisher:JohnWileyandSons,IncThirdAvenueNewYork,NYAn Errataisavailable:downloadpdffileAuthorLieberman,M.A.(MichaelA.)FormatBookPrinciplesofplasmadischargesandmaterialsprocessingMichaelA. Lieberman,AllanJ.Lichtenberg.AnnemieBogaerts,inEncyclopediaofSpectroscopyandSpectrometry,Principleoftheglowdischargeanditsuseformass spectrometryItis5, Occurrenceofunintendedgasbreakdowninthenarrowgapsofplasmaprocessingchambersisoneofthecriticalchallengesindeveloping advancedplasmasourcesPrinciplesofplasmadischargesandmaterialsprocessingVonMALiebermannundAJLichtenberg,XXVI,S,JohnWiley& Sons,Inc,NewYork,£Industrialapplicationsoflowtemperatureplasmadischargeshavebecomeincreasinglyimportantinthelastadeandrepresentanewand expandingfrontierofplasmaphysicsSuchapplicationsarestronglyinterdisciplinary,combiningelementsofplasmascienceandtechnology,gasphasechemistry, surfacescience,andatomicandmolecularphysicstoPrinciplesofplasmadischargesandmaterialsprocessing[electronicresource]MichaelALieberman,Allan J.Lichtenberg.Aglowdischargeisakindofplasma,i.e.