Best Equipment Maintenance Software

Best Equipment Software Best Equipment Maintenance Software provide

Equipment Software Solutions eInnoSys

specializes in software design, development and integration of all areas of equipment software – Controller/GUI software, SECS/GEM implementation, integration of sub-systems such as EFEM, robot, PLC, etc., Image Processing, Data Collection & Analysis to name a few.

When

it comes to equipment software, experience does matter! developers and architects are not only great developers, but they have worked on equipment software of different kind for many years. Having your software developed from domain experts results in industry standard software that is user friendly, robust and scalable. In addition, our domain expertise in Fab Automation helps OEM customers with valuable inputs from our developers on features and/or UI of equipment software.

Our

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Areas of Equipment Software Expertise 

GEM Automation – SEMI compliant SECS/GEM Implementation Controller/GUI software Development or Maintenance  Integration of sub-systems such as EFEM, robot, PLC, RFID and other devices/sensors  Image Processing  Data Collection and Analysis  Custom module development  eInnoSys is pioneer in automation on mobile platform and is one of the handful companies in the world having successfully designed equipment controller from scratch in Android, which is quite challenging since Android is not a real-time OS.  Equipment

In

addition to consulting, software development and integration services, we offer the following products out-of-the-box.

EIGEMEquipment:

SEMI complaint SECS/GEM software for equipment EIMobileMonitor: Allows monitoring critical equipment or recipe parameters on mobile device within factory network EIGEMSim: Host or Equipment simulator software for SECS/GEM communication testing EIModbusLib: Java based Modbus library that can run on multiple platforms – Windows, Linux or Android

SECS/GEM & GEM 300 

LET OUR EXPERTS SAVE YOU SIGNIFICANT COST AND TIME AND GUARANTEE SUCCESS OF SECS/GEM IMPLEMENTATION OF YOUR EQUIPMENT

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For over two decades, eInnoSys team members have been implementing SECS/GEM and GEM300 standards on the equipment as well as using them in the fab/assembly for automation. We offer complete turnkey solution to make your equipment fully SECS/GEM or GEM300 compliant. Our domain knowledge and experience not only helps making your implementation a success but also greatly reduces the time and cost of integration. Our solution comes with required manuals, SECS/GEM and GEM300 compliance report along with required logs for OEMs to provide to their factory customers.

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SECS/GEM & GEM300 are a set of communication protocol for a semiconductor equipment and factory host. These standards are maintained by SEMI. While GEM300 refers to a set of communication standards for 300mm wafers, which are more than those for 200mm, SECS/GEM is used as a generic term for both 200 and 300mm communication protocols and other automation standards.

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EIGEMEquipment is a SECS/GEM software of eInnoSys, which comes with support for most of the SECS messages for 200mm out-of-the-box.

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If you have already purchased a license of SECS/GEM or GEM300 software from another company, eInnoSys can still help you integrate that software with your controller software and benefit from our vast experience in terms of reducing the time and cost of integration.

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GEM300 covers following SEMI standards:

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E30 – GEM (Generic Equipment Model)

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E39 – Object Services Standard

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E40 – Process Job Management

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E87 – CMS (Carrier Management Specification)

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E90 – Substrate Tracking

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E94 – Control Job Management

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In addition, following other SEMI standards may be requested by factory customers:

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E116 – EPT (Equipment Performance Tracking) 

E157 – Module Process Tracking

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E148 – Time Synchronization

Controller/GUI Software 

Our staff has been involved in automation using PLC/IO controllers since mid 1990s. They have been part of development team of some of the world’s best HMI, SCADA, Historian, MES and other automation software products.

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OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE – 

Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment  Development of software for multi--chamber, cluster equipment with multiple load ports and transport module  Experience developing software for high--vac equipment with load lock and transport module  First company in the industry to develop entire plasma etch equipment software entirely from scratch in Android, with SECS/GEM 

PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

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Multi--chamber plasma etch equipment with multiple load ports and a transport module

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Metrology equipment software to measure stress in the thin--film based on topography of the wafer

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Laser scribe equipment

Sub-System Integration 

When it comes to integrating sub--tool, such as SMIF or FOUP, Robot handler, PLCs, RFID reader or any other device to your equipment, you need someone who not only has technical knowledge and domain expertise, but also someone who understands how your equipment is going to be used in the fab and what are your clients’ expectations from your tool’s automation capabilities. eInnoSys has experience integrating various sub--tools and devices from different manufacturers with equipment controller software as well as providing SECS/GEM capability for the entire integrated equipment. Besides, due to our services on fab automation systems, we understand what your clients expect from the equipment software to integrate them better with their factory systems.

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AREAS OF EXPERTISE 

FOUP 

SMIF

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Robot handler

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PLCs

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RFID

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Individual devices such IO couplers, cameras and sensors

Equipment Software Review eInnoSys

specializes in software design, development and integration of all areas of equipment software – Controller/GUI software, SECS/GEM implementation, integration of sub-systems such as EFEM, robot, PLC, etc., Image Processing, Data Collection & Analysis to name a few.



When it comes to equipment software, experience does matter! 

Our developers and architects are not only great developers, but they have worked on equipment software of different kind for many years. Having your software developed from domain experts results in industry standard software that is user friendly, robust and scalable. In addition, our domain expertise in Fab Automation helps OEM customers with valuable inputs from our developers on features and/or UI of equipment software. 

Areas of Equipment Software Expertise 

GEM Automation – SEMI compliant SECS/GEM Implementation Controller/GUI software Development or Maintenance Integration of sub-systems such as EFEM, robot, PLC, RFID and other devices/sensors Image Processing Equipment

Data

Collection and Analysis

Custom

module development eInnoSys is pioneer in automation on mobile platform and is one of the handful companies in the world having successfully designed equipment controller from scratch in Android, which is quite challenging since Android is not a real-time OS. 

In addition to consulting, software development and integration services, we offer the following products out-of-the-box. 

EIGEMEquipment: SEMI complaint SECS/GEM software for equipment EIMobileMonitor: Allows monitoring critical equipment or recipe parameters on mobile device within factory network EIGEMSim: Host or Equipment simulator software for SECS/GEM communication testing EIModbusLib: Java based Modbus library that can run on multiple platforms – Windows, Linux or Android

Thank you

www.einnosys.com