ECI Technology Process Control Equipment Overview

Wet Chemistry Process Controls Enabling Advancements in Semiconductor, Advanced Packaging, and PCB Manufacturing

We Keep Your Chemistry Right™

Enabling Semiconductor and Advanced Packaging Technologies ECI Technology is a leading provider of chemical process control equipment for the microelectronics industry.

ECI systems are found throughout the fabs ‒ qualifying incoming supplies, managing tool inputs, adjusting chamber/bath conditions, and monitoring process waste ‒ and are widely accepted as critical enablers for the successful implementation of most wet processes.

Technology Innovation and Leadership

Since its inception in 1987, ECI has established itself as a market and technology leader in chemical process control.

The company has been recognized repeatedly for innovation and holds a broad portfolio of fundamental patents. It was the first to build analytical equipment based on cyclic voltammetric stripping (CVS) – a patented technique for the quantitative determination of organic additives and their contaminants in plating solutions.

A Team with Unsurpassed Experience and Expertise

Teamwork is at the heart of ECI’s problem-solving approach and core team members average nearly 20 years with the company. The R&D staff includes worldrenown scientists who speak regularly at major analytical conferences. All product design and customization, both hardware and software, is done by in-house engineers. The manufacturing operation is also in-house, executed by a staff of dedicated engineers and technicians who adhere to the highest standards of quality and manufacturing practice (ISO9001:2015 certified).

Components Monitored in Plating Solutions Organic Components (Additives) • Accelerator

• Suppressor

• Leveler

• Wetting

agent

Other Properties • Specific

gravity • Surface

tension • Bath

turn over • pH

• TOC

Inorganic Components • Metal

ions • Acids

and bases • Anode

activator • Buffer

• Complexer

• Reducer

• Stabilizer

Contaminants • By-products

• Photoresist

• Trace

metals

PCB Development

ECI pioneered efficient chemical analysis for the PCB industry, providing plating bath control technologies that have become standard in precision plating applications in this and many other industries. The speed and accuracy of ECI measurements permit precise control of bath composition to ensure void-free plating. Today, as the rate of development in PCB processing matches the break-neck pace notoriously maintained by the semiconductor industry, ECI leverages its deep expertise and adaptability to help its PCB customers tighten process windows and maximize yields as they strive to meet the fast-changing demands of their industry.

Semiconductor Manufacturing

ECI’s chemical management systems are essential in meeting the challenging requirements of advanced semiconductor manufacturing where processes must operate within evernarrowing process windows. By precisely controlling the composition of process chemicals, the company’s accurate, reliable analyzers help manufacturers accelerate process development and ramp-to-volume, shorten time-to-market for new products, and maximize yields in high-volume manufacturing. Building on decades of innovative research and critical knowledge, ECI has a complete portfolio of equipment that can be configured to meet the specific demand of an application.

Analytical Techniques

Multiple techniques are combined and optimized in a single analyzer to achieve the best performance and low CoO

Spectroscopy • UV-VIS

• NIR

• Raman

• ICP

Electrochemistry • Cyclic

Voltammetric Stripping (CVS) • OCP

(Open circuit Potentiometry) • E-Chem

Impedance

Other Methods • Specific

gravity • Surface

tension • Dissolved

Oxygen • Large

particle counting • Small

(abrasive) particle counting • TOC

Titration • Potentiometric

• Conductometric

Chromatography • HPLC • Ion Chromatography

Automatic Online and Benchtop Lab Analyzers Chemical Monitoring Systems for Interconnect Metallization QUALI-LINE PRIMÅ and QUANTÅ ®

+ BEOL (Interconnects) - Cu & Co + I nterconnects electroplating and Damascene processes + Incorporates CVS electrochemical technology together with Spectroscopic and Potentiometric Titration methods to determine the concentrations of both Organic and Inorganic components with highest degree of accuracy and precision +C ommercially proven analytical performance

Chemical Monitoring Systems and Doser for Advanced Packaging QUALI-FILL® LIBRÅ and QUALI-DOSE® + Seamlessly integrate with electroless plating lines + Surface preparation – Desmear, cleaner, micro etch, predip, activator (Pd), reducer, accelerator + E-less plating – Cu, ENIG, ENEG, ENIPIG, Immersion Tin, Immersion Silver + Dosing maintains accurate plating bath chemical concentrations by delivering precise doses of replenishing solutions

Analyzer for FEOL, BEOL, 3D NAND, Advanced Packaging, DRAM, & CIS QUALISURF and QUALISURF 22 ®

Benchtop Plating Bath Analyzers QUALI-LAB® +L eading lab instrument for CVS analysis +N ew technology and compact design provide a superior user experience and performance +C VS, Potentiometric titration, and spectroscopy techniques, and ever-growing library of application packages continue to evolve and support the industries we serve

Direct Transfer of R&D Developments to ECI’s Online Process Control Equipment QUALI-LAB® QL-HPLC + HPLC is an analytical technique to separate, identify, and quantify components in a process tank + Seamless transfer of analyses from benctop to online + Never miss a tank measurement – ECI’s online software easily transfers from online to benchtop to provide the same analytical results for primary (online) and secondary (benchtop) method

Benchtop Chemical Analyzer QUALISURF® 22 and QUALISURF® 32

®

+ FEOL applications: DSP wall residue removal, ESL removal, selective Si etch with hot phosphoric acid (H3PO4) trench isolation, spacing and thinning, bit-line, Sigma Anisotropic etch (TMAH), Si Etch, SiGe, GAA, polysilicon etch, photoresist strip, removal and rework +

+B EOL applications: Diluted ozone for SiGe cleans, clean & etch PERR, W contacts PERR, TiN hard mask removal, AlOx/HMO cleans +M OL/BEOL applications: Cobalt PERR +A dvanced Packaging applications: UBM copper etching reclaim, photoresist strip, removal and rework +C hemical quality control for facilities and production floor +A dvanced cleaning chemistries with multiple species +M onitor and optimize process solutions for reuse

+ For lab use can rapidly convert R&D process control to high volume manufacturing + NIR spectroscopy with ECI Technology’s Smart-BT software to assist in the development of quantitative analyses of new chemicals for process optimization and quality control

Benchtop Analyzers for Surface Profiles and Oxides on PCB and Wires + F or fundamental metallization

study, research, process engineering and quality control for fundamental metallization study, research, process engineering and quality control

Global Leadership. Local Expertise.

Global Sales, Service & Support

ECI maintains a global sales and service organization that supports thousands of successful installations in major factories around the world. The organization provides comprehensive technical support, service and training for all products. Staffing in every territory includes service and process engineers. In addition to a suite of standard products, ECI also develops customized solutions to meet applicationspecific customer requirements.

GERMANY

PORTLAND, OR CHANDLER, AZ AUSTIN, TX

IRELAND FRANCE C ITALY TOTOWA, NJ

S. KOREA

JAPAN TA TAIWAN AIW CHINA NA VIETNAM

INDIA A ISRAEL L THAILAND THAIL THAI L AN AND MALAYSIA SINGAPORE

GLOBAL HEADQUARTERS RESEARCH & DEVELOPMENT SALES & CUSTOMER SUPPORT DISTRIBUTION PARTNERSHIPS & ECI TECHNOLOGY CERTIFIED FSEs

Get in touch with us for more information ECI Technology 60 Gordon Drive, Totowa New Jersey, 07512 T: +1 (973) 890-1114 E: info@ecitechnology.com www.ecitechnology.com Japan T: +81 45 620 4661 E: info-japan@ecitechnology.com Korea T: +82 31 262 8503 E: info-korea@ecitechnology.com Taiwan T: +886 03 573 5899 E: info-taiwan@ecitechnology.com

Distribution Partners Cerma Precision, Inc. – Japan T: +03 3643 2921 E: info-@cerma.co.jp ISI – Israel T: +972 3 9232202 E: isi@isil.co.il TELTEC North – Germany T: +49 7 903 91 44 0 E: info-de@teltec.com

TELTEC South – France T: +33 467 22 40 00 E: info-fr@teltec.com

TransTechnology India Pvt. Ltd. – India T: +91 9810449898 E: trans-tec.sg@trans-tec.com WESi Technology – China v +86 21 5058 0051 E: info@wesitechnology.com WKK Distribution Ltd. Hong Kong T: +852 2357 8888 E: wkk_hongkong@wkk.com.hk WKK Singapore T: +65 6741 7322 DDI: +65 6469 6506 E: hk_yip@wkks.com.sg

We Keep Your Chemistry Right™ © 2021 ECI Technology, Inc. All rights reserved. 2021.40