Page 1

1250 1401 2000 501

The compact production workhorse

BAK 641 701 761 901 1101


BAK 641

Platform summary ƒƒ Low materials utilization

Select a BAK641, and you can be sure of a proven production workhorse for precision optics, optoelectronics and semiconductor applications.

ƒƒ Production on substrate sizes up to 8 inch ƒƒ Space for multiple sources and process accessories

1. Choose your chamber geometry

800

2100

ƒƒ Standard Throw - for typical metals and dielectrics depostion ƒƒ Extended Throw - for “lift off” ƒƒ Split Chamber - for reactive materials ƒƒ Extended rear for custom dep & etch requirements 2. Choose your Sources

Typical Layout

ƒƒ EBS electron beam guns ƒƒ A wide range of thermal sources ƒƒ Barrel sources and effusion cells ƒƒ Ion and plasma sources for PIAD or etch ƒƒ Back & front side heating ƒƒ Linear and round sputter cathodes

1800 2000

900

2300

500

1000

1800

3. Choose your tooling

1300

Substrate size

Capacity (standard dome)

2” 3” 4” 5” 6” 8”

78 33 24 18 9 6

Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland

Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com

ƒƒ Dome as standard ƒƒ Additional options for:-- Flip systems -- Planetary -- Custom designs 4. Choose your process control ƒƒ Khan system & process controller as standard ƒƒ Additional options for:-- Quartz or optical monitoring layer termination -- Optical pyrometry - temperature control

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.

Eva bak 641 web  
Read more
Read more
Similar to
Popular now
Just for you