Nanotechnology and MEMS Research
substrates. These actuators are made of nickel, copper and other metals deposited in trenches cut into the substrate. The actuators can be used in microrelays and miniature medical instruments. Virtual 3-D Displays This technology would allow visually impaired people to browse a website and “touch” objects that don’t exist in solid form. Where others can see a geometric shape or the structure of a DNA molecule on their screen, for instance, a visually impaired person could use this technology to touch the objects. The 3-D display would use arrays of miniature pixels that vibrate to produce the feel of a 3-D object. The National Science Foundation has funded this project for $270,000 over three years.
Srini Raghavan Professor Materials Science and Engineering Expertise: Silicon wafer cleaning and photomask cleaning, electrochemical and environmental aspects of chemical mechanical polishing of metals, etching and drying issues in microelectromechanical systems. srini@u.arizona.edu Mark Riley Associate Professor Agriculture and Biosystems Engineering Expertise: Study of animal cell metabolism using near infrared spectroscopy. riley@ag.arizona.edu Supapan Seraphin Professor and Faculty Fellow Materials Science and Engineering Expertise: Carbon
nanoclusters; and transmission and scanning electron microanalysis of various materials, including semiconductors, ceramics, metals and composite materials. seraphin@u.arizona.edu Pak Kin Wong Assistant Professor Aerospace and Mechanical Engineering Expertise: Single molecule detection and manipulation, molecular and cellular biomechanics, BioMEMS, micro- and nanofluidics, computational systems biology and point-of-care diagnostics. pak@ame.arizona.edu Jeong-Yeol Yoon Assistant Professor Agricultural and Biosystems Engineering Expertise: Lab-on-a-chip for water safety and quality,
LABOR AT OR IES
Arizona Materials Laboratory Most of the research carried out by UA’s Nanotechnology Interdisciplinary Research Team (NIRT) is done in individual faculty labs. But some research is also conducted in the Arizona Materials Laboratory (AML), which is based in the Department of Materials Science and Engineering. AML offers a large array of state-of-the-art equipment suitable for measurements at the nanoscale. Other work is conducted in UA’s Micro/Nano Fabrication Center, which is located in the Electrical and Computer Engineering Building. The center includes 3,800 square feet of clean rooms. These facilities include many of the tools needed to construct nanoscale devices.
protein nanoarray for single molecule detection, protein adsorption on polymer surfaces. jyyoon@email.arizona.edu Brian Zelinski Associate Professor Materials Science and Engineering Expertise: Solid state chemistry, glass science, crystallization, ceramics processing. bzelinski@mse.arizona.edu
Yitshak Zohar Professor Aerospace and Mechanical Engineering Expertise: Science and technology of microelectromechanical systems (MEMS), microscale fluid mechanics and heat transfer, bioMEMS, microsensors and microactuators, and integrated microfabrication technologies. zohar@ame.arizona.edu
Richard W. Ziolkowski Litton Industries John M. Leonis Distinguished Professor Electrical and Computer Engineering Expertise: Metamaterials, computational electromagnetics, antennas, ultrafast optics, nanomaterials, nanodevices, localized wave and directed energy systems. ziolkowski@ece.arizona.edu university of arizona | college of engineering | progress report 2009 | 25