




Vacuum Parts For Semiconductor Equipment Market Size & Growth :

Global Vacuum Parts For Semiconductor Equipment market size was estimated at USD 3511 million in 2023 and is projected to reach USD 5175.54 million by 2030, exhibiting a CAGR of 5.70% during the forecast period.

CAGR OF 5.70 %

(2025-2032)


Market Segmentation
:

By Type :
•Vacuum Pumps

•Mass Flow Controller (MFC)
•Vacuum Valves
•Vacuum Gauges
•Others
By Application :
•Deposition (PVD, CVD, ALD)
•Etching Equipment
•Ion Implantation
•Semiconductor Processing Furnace
•CMP Equipment
•Others






By Region & Country











