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Japan // Technology
NatRefs Meet Semiconductors
From left, standing around GX-20 chiller: Kazushige Shimizu, Tomoyuki Kariya and Toshihide Haruki; kneeling at left, Yasuhiro Fukami. All are with ATS Japan.
ATS Japan is first to market with a CO2 chiller for the global semiconductor manufacturing industry, with an initial test at a German plant.
― By Tomoro Sato and Rena Okabe
Accelerate Magazine // July - August 2019