ADO- Automatic Door Opener 300mm FOUP Load Port for Automated Wafer Handling
Kensington Laboratories, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington’s ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington’s global service and support network.
Additional Key Features • • • • • • • • • • •
Carrier ID R/W at dock and undock Twist and Pull FOUP door attach Twist and Pull center lock FOUP clamp Servo control/force feedback motion technology FEOL and BEOL lockout pins Five FOUP placement sensors Programmable AMHS drop off position Finger safe motion control safety circuit Flash firmware up-loadable Integrated self-test diagnostics Configurable status lights
Options • • • •
Mobility stand Wafer mapper, Break-The-Beam type Manual load/unload button/s Carrier ID R/W interface – RFID AdvanTag™, HERMOS™, Omron® – IRID SMART-Tag™ – Barcode
• AMHS Single and Dual E84 PIO for OHT and AGV/RGV • Info pads sensors • Quartz wafer protrusion sensor • SWIF FOUP-For-One interface • 200mm Bridge Tool (with insert @ 10mm pitch) • E-diagnostics with GUI
CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com
Kensington Laboratories, LLC
Service -
Phone: 510.324.0126
Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com
6200 Village Parkway Dublin , CA 94568 Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800