Pfeiffer Vacuum Turbo pumps by Daniel Everett

Vacuum generation

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Turbopumps

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Turbopumps Page

Selection aid

334

Turbopumps

336

Important information relating to the technical data

337

Safety is important

338

The HiPace™ innovation

339

Series 10 – 700 l / s

340

Series 1,000 – 2,000 l / s

342

- HiPace 10

344

- HiPace 80

348

- HiPace 300

356

- HiPace 400

364

- HiPace 700

372

- HiPace 1200

380

- HiPace 1500

388

- HiPace 1800

396

- HiPace 2300

404

The HiPace™ MC innovation

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412

- HiPace 2400 MC

414

- HiPace 3400 MC

422

Turbopumps HiPace™ accessories

Turbopumps

426

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Vacuum generation

Turbopumps

Selection aid Analysis

Semiconductors & electronics

Hard drive coating

Load locks, transfer chambers, handling systems

MBE (Molecular Beam Epitaxy)

Bonding

Inspection

Implantation – Beamline

Implantation – Source

Plasma etching

CVD (Chemical Vapor Deposition)

PVD (Physical Vapor Deposition)

Lithography

Residual gas analysis

Plasma monitoring

Surface analysis

Mass spectrometry

Leak detection

Electron microscopy

Holweck stage

Recommended

Model HiPace 10 HiPace 80

HiPace 300

HiPace 300 C HiPace 400

HiPace 400 C HiPace 700

HiPace 700 C HiPace 1200 HiPace 1200 C HiPace 1500 HiPace 1500 C HiPace 1800 HiPace 1800 C HiPace 2300 HiPace 2300 C HiPace 2400 MC HiPace 3400 MC

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www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumps

Biotechnology

Nanotechnology

Elementary particle physics

Cryogenic research

Space simulation

Particle accelerators

Plasma research

Fusion technology

Industry

Nuclear research

Vacuum furnaces

Vacuum drying

Heat treatment

Incandescent and ďŹ&#x201A;uorescent lamp production

Isolation vacuums

Electron beam welding

Industrial leak detection

Medical technology

Film coating (PVD)

Wear protection (PVD, CVD)

Optical coatings (PVD)

CD / DVD / Blu-ray production (PVD)

Glass coating (PVD)

Solar cell production (PECVD, CIS, CIGS, etc.)

Coating Research & development

Page 335

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Vacuum generation

Turbopumps

Turbopumps Pfeiffer Vacuum, the inventor of the turbopump, is again demonstrating its technology edge with the new HiPace innovation. It enables the entire spectrum of widely varying applications to be handled reliably, safely and cost-effectively.

Features The new HiPace family covers the 10 - 3,400 liters/second pumping speed classes. The outstanding features of the Pfeiffer Vacuum HiPace series are its unique rotor design with proven hybrid bearings. This represents a new class of industrial suitability, while simultaneously reducing operating costs. All Pfeiffer Vacuum turbopumps naturally incorporate integrated drive electronics. In fact, even the power supply is integrated in the HiPace 1200 to 2300. Its advanced design, which is rigorously geared to reliability and ruggedness, assures safe, dependable operation through integrated security concepts and patented venting mechanisms, even in difﬁcult applications. All turbopumps in the HiPace series conform to the Semi S2 standard. This assures outstanding accessibility to all connections in a range of 120°.

Versions The turbopumps in the 80 - 700 l/s range are also offered with an integrated Holweck stage. The advantages of this design include: Better critical backing pressure Lower power consumption Higher compression From the 300 l/s pumping speed class onward, the HiPace is also available in a corrosive-gas version. These pumps have a highly developed rotor coating and come with an integrated sealing gas supply system with electrical shutoff valve as standard equipment. Corrosive-gas versions do not incorporate a Holweck stage. The HiPace MC series is characterized by a 5-axis, fully magnetic and thus maintenance-free bearing system. Thanks to its comprehensive diagnostic capabilities, users are always informed about the condition of their magnetically levitated turbomolecular pumps. In addition to the standard design with RS-485 interface, Pfeiffer Vacuum also offers optional versions with DeviceNet or Proﬁbus in response to modern control concepts. Service The unique selling point of Pfeiffer Vacuum turbopumps is on-site maintenance by the Pfeiffer Vacuum ﬁeld service organization. As a result of the unique bearing concept, maintenance intervals of up to 4 years are possible. This means that the maintenance costs amount to only a fraction of those for competition products.

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Important information relating to the technical data Pumping speed The pumping speed of a turbopump depends on its size and design. It is stated in liters per second and is a function of the intake pressure. The pumping speed characteristics are assigned to the products. Compression ratio The compression ratio of a turbopump is the ratio between forevacuum pressure measured at the forevacuum flange of the pump and the high vacuum pressure at the intake flange. Compression is stated for different types of gas and is determined without gas load. With the aid of this value it is possible to determine for a given backing pump the theoretical final pressure of the entire pumping station configuration.

Pend min =

Qtotal Seff

Pvv1 K01

+ ... +

Turbopumps

Final pressures The data stated for the final pressure apply for the conditions laid down in DIN 28428. These values are attained under clean conditions, using metal seals in the high vacuum area and after baking out or degassing the pump for 48 hours. Pumps with an aluminum housing are unsuitable for baking out and for this reason the final pressure is stated which is attained without baking the pump out and with clean FPM seals. The final pressures stated in the technical data are always practice related values which may be easily improved upon in the case of a corresponding pretreatment (venting with dry inert gas, degassing). The theoretically attainable minimum values depend on the gas-type specific compression ratios Koi and the partial pressures Pwi on the forevacuum side as well as the system-specific gas flows Qtotal like, for example, desorption from the surface being pumped down by a turbopump having an effective pumping speed of Seff. Pvvn K0n

As a rule, these theoretical final pressures can be attained only approximately since the system-specific conditions will generally have a significant influence on the final pressures. Final pressures for turbopumps depending on housing material, flange type, backing pump used and rotor coating: Ultimate pressure conforms to DIN 28 428, attained in a measuring dome 48 hours after bake-out. Rotary vane pump or dry backing pump with p < 0.05 mbar

Diaphragm vacuum pump with p < 0.05 mbar

Stainless-Steel housing with CF-F 1)

< 5 . 10 -10 mbar

< 1 . 10 -8 mbar

Corrosive gas version with rotary vane pump or dry backing pump with p < 0.05 mbar < 1 . 10 -8 mbar

Stainless-Steel housing with ISO-K 2)

< 5 . 10 -10 mbar

< 1 . 10 -8 mbar

Aluminum housing with ISO-K 3)

< 1 . 10 -7 mbar

Bakeable with copper seal, 2) Bakeable with aluminum seal, 3) Not bakeable, with elastomer seal

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Vacuum generation

Turbopumps

Gas throughput The term gas throughput, is used to describe the ability of the turbopump to pump quantities of gas for a certain pressure level through the pump. Here there are dependencies which are also dependent on the specific application. All gas throughput data stated in the technical data apply under the following conditions: Operation with a backing pump which at least offers the performance data of the backing pump specified in connection with the gas load data Operation with water cooling at the specified water flow and a water supply temperature of 25° C, a maximum ambient temperature of 25° C and the employment of sealing gas (in connection with heavy gases) A turbopump cannot be operated simultaneously at its maximum gas load and at its maximum forevacuum pressure Maximum permissible forevacuum pressure The maximum permissible forevacuum pressure of the turbopump is the pressure at which the turbopump still produces a compression of 100. It depends on the gas load pumped through the turbopump and the pumping speed of the backing pump used. For gas load operation, the forevacuum pressure should not exceeded more than approximately 50 % of the maximum permissible forevacuum pressure.

Safety is important Notes relating to the mounting materials for turbopumps Our turbopumps excel by a high degree of safety. This is based on our own theoretical and practical analyses regarding the crash behavior and the high safety margins in the design of the pumps. And we must claim the same also for the interface between the pumps and the customer’s system. For this reason, we are offering a full line of installation components which ensure safe interface connections and which are presented together with the pump accessories.

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Turbopumps

The HiPace™ innovation

Picking up the pace in vacuum technology! Faster. Higher. Stronger.

What is HiPace? HiPace stands for a complete line of compact yet powerful turbopumps featuring pumping speeds that range from 10 – 2,000 liters per second. It offers a cost-effective yet ﬂexible installation. This series offers convincing cost-effectiveness and ﬂexibility, which also includes the ability to install the HiPace 1200 to 2300 in an upside-down orientation. The proven bearing system offers you unparalleled reliability. Thanks to its sophisticated rotor design, very high values are achieved with respect to both pumping speed, critical backing pressure and gas throughout as well as compression for light gases.

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Vacuum generation

Turbopumps

Photovoltaic

Glass coating

Drive concepts Integrated – no cumbersome and costly cabling Small physical size – optimal integration options Expanded remote functions – greater ﬂexibility Shorter run-up time – ready to service faster Modern pump management – operating parameter monitoring Suitable for industrial applications – Protection Class IP 54 Extremely low power consumption – top-efﬁciency performance Innovative electronics – maximum reliability

Series 10 – 700 l / s Advantages at a glance Robust engineering and proven bearing system offer maximum reliability Compact design makes for minimum footprint High gas throughputs and high pumping speeds Integrated, powerful cooling system Installation possible in any orientation Suitable for industrial environments thanks to Protection Class IP 54 Corrosive-gas version available Semi S2 and UL certiﬁcation Complete line of accessories expands the range of potential applications Extended maintenance intervals On-site bearing change

Drive

TC 110

Pump model Nominal connection diameter

HiPace™ 10 DN 25

TC 110 / TC 400 TC 400 HiPace™ 80 DN 63 ISO-K DN 63 CF-F DN 40 ISO-KF

HiPace™ 300* DN 100 ISO-K DN 100 CF-F DN 100 ISO-F

HiPace™ 400 DN 100 ISO-K DN 100 CF-F DN 100 ISO-F

HiPace™ 700 DN 160 ISO-K DN 160 CF-F DN 160 ISO-F

* HiPace 300 C only availlable with TC 400

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Pfeiffer Vacuum Permanent magnetic bearing

Competition

Oil-lubricated ceramic ball bearing

Grease-lubricated ball bearings

High-vacuum side

Turbopumps

Backing vacuum

Reliability

Highly reliable Robust bearing system Extremely low vibration Minimum wear Mean time to failure > 200,000 hours Extended service intervals

Dry high-vacuum pumping station with HiPace™ and XtraDry™

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Calibrating pumping station with HiPace™ and OnTool DryPump™

Residual gas analysis with HiPace™ and PrismaPlus™

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Vacuum generation

Turbopumps

Series 1,000 – 2,000 l / s Advantages at a glance Four sizes offering pumping speeds of from 1,000 to 2,000 l / s High pumping speeds for light gases (H2, He) and heavy gases (Ar, CF4) High gas throughputs, even for heavy gases (Ar, CF4) Installation orientation available from 0° to 90° and from 90° to 180° Corrosive gas versions (C-models) available Integrated sealing gas system with throttle and valve Integrated, powerful cooling Integrated TC 1200 drive unit for direct mains connection Standard interfaces: RS-485 and Remote, Proﬁbus or DeviceNet optional Compatible with Semi S2 Certiﬁed under UL, CSA and TÜV Suitable for industrial environments thanks to Protection Class IP 54 The utmost in process suitability, resistant to particles Robust rotor bearing system Simple installation

*approx. development of costs in Euro with use on an implanter

Cost of ownership

Factors for minimum operating costs of Pfeiffer Vacuum turbopumps: Simple maintenance offers Highest uptime Flexible service concepts Long service intervals On-site bearing change capability

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Drive

TC 1200

Type of pump Nominal connection diameter

HiPace™ 1200 DN 200 ISO-K DN 200 ISO-F DN 200 CF-F up 0° – 90° upside down 90° – 180°

Orientation of flange

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Typical installation on a PVD system

HiPace™ 1500 DN 250 ISO-K DN 250 ISO-F DN 250 CF-F up 0° – 90° upside down 90° – 180°

HiPace™ 1800 DN 200 ISO-K DN 200 ISO-F up 0° – 90° upside down 90° – 180°

Turbopumps

Typical installation on a PVD system

HiPace™ 2300 DN 250 ISO-K DN 250 ISO-F DN 250 CF-F up 0° – 90° upside down 90° – 180°

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Vacuum generation

HiPaceTM 10

Turbopumps HiPaceTM

Small and robust turbopump with a pumping speed of 10 l/s for N2 X The small design makes for minimum

HiPaceTM 10

footprint X Integrated drive electronics, suitable for industrial environments - Protection class IP 54 X Semi S2- and UL/CSA certification X Maximum reliability through monitoring of operating data

N2 He H2 Ar

Pumping speed [l/s]

Pumping speed 12

0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPaceTM 10

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Dimensions 55 55

M6, 6tief

DN 25 ISO-KF HV

M5, 8tief

DN 16 ISO-KF VV 59

45째

Turbopumps

45째

100

97.3

168.4

37.5

118

HiPaceTM 10, with TC 110, DN 25

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Vacuum generation

Turbopumps HiPaceTM

Technical data

Connection nominal diameter Flange (in) Flange (out)

DN 25 DN 16 ISO-KF

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

3.7 l/s 6 l/s 10 l/s 11.5 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

3·102 3·103 3·106 3·107

Fore Vacuum max. for N2

25 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar

0.15 mbar l/s 0.15 mbar l/s 0.15 mbar l/s 0.15 mbar l/s

Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 5·10-5 mbar 90000 rpm 0.9 min Convection cooling 3 mT < 45 dB (A) IP 54 RS-485, Remote 1.8 kg

Order number pump

PM P03 960

Ultimate pressure Rotation speed ±2% Run-up time Cooling method, standard

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HiPaceTM 10, with TC 110, DN 25

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Order number pump

HiPaceTM 10, with TC 110, DN 25 PM P03 960

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 820 PM 061 340-T PM 061 344-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 350-T

Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

PM 061 372-T PM 061 373-T PM Z01 205 PM Z01 206

General accessories Connecting adapter DN 25 ISO-KF Centering ring Centering ring, with integrated mesh screen USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485

PM 093 315-T PF 110 125-T PF 113 225-T PM 061 207-T PM 061 283-T P 4723 010

Mounting materials Centering ring with 4 prackets, screws and U-washers

PM 016 627-T

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PM 061 351-T

Turbopumps

Accessories

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Vacuum generation

HiPaceTM 80

Turbopumps HiPaceTM

Compact yet powerful turbopumps with pumping speeds of up to 71 l/s for N2 X Compact design makes for minimum

HiPaceTM 80

footprint X High pumping speed and maximum compression for all gases X Integrated drive electronics, suitable for industrial environments Protection class IP 54 X Semi S2 and UL/CSA certification X Maximum reliability through monitoring of operating data

N2 He H2 Ar

Pumping speed [l/s]

Pumping speed 80 70 60 50 40 30 20 10 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPaceTM 80

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Dimensions

89.3

DN 63 ISO-K 33°

43°

Ø86

33° 40°

43°

149

91 100

Ø 97

119.5

30°

M5 - 10tief (6x) 37.5

VV DN 16 ISO-KF

HiPaceTM 80 with TC 110, DN 63 ISO-K HV DN 40 ISO-KF

89.3 33°

43°

100

Ø 86

Turbopumps

158

100

128..5 Ø 97

30°

M5 - 10tief (6x) 33° 40°

43°

37.5

VV DN 16 ISO-KF

HiPaceTM 80 with TC 110, DN 40 ISO-KF HV DN 63 CF-F

89.3

100

Ø 97

155.2

97.2

33°

125.7

30°

43°

Ø8

33° 40°

43°

M5 - 10 tief (6x) 37.5

VV DN 16 ISO-KF

HiPace

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80 with TC 110, DN 63 CF-F

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Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 80 with TC 110, DN 63 ISO-K

HiPaceTM 80 with TC 110, DN 63 CF-F

HiPaceTM 80 with TC 110, DN 40 ISO-KF

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 63 ISO-K DN 16 ISO-KF G 1/8"

DN 63 CF-F DN 16 ISO-KF G 1/8"

DN 40 ISO-KF DN 16 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

48 l/s 58 l/s 67 l/s 66 l/s

38 l/s 41 l/s 35 l/s 30 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

1.4·105 1.3·107 > 1011 > 1011

1.4·105 1.3·107 > 1·1011 > 1·1011

Fore Vacuum max. for N2

22 mbar

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling method, optional Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.4 kg

< 5·10-10 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 3.8 kg

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.4 kg

Order number pump

PM P03 940

PM P03 941

PM P03 942

Technical data

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HiPaceTM 80 for TCP 350, DN 63 ISO-K

HiPaceTM 80 for TCP 350, DN 63 CF-F

HiPaceTM 80 for TCP 350, DN 40 ISO-KF

DN 63 ISO-K DN 16 ISO-KF G 1/8"

DN 63 CF-F DN 16 ISO-KF G 1/8"

DN 40 ISO-KF DN 16 ISO-KF G 1/8"

48 l/s 58 l/s 67 l/s 66 l/s

38 l/s 41 l/s 35 l/s 30 l/s

1.4·105 1.3·107 > 1·1011 > 1·1011

22 mbar

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.1 kg

< 5·10-10 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 3.5 kg

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.1 kg

PM P03 943

PM P03 944

PM P03 945

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Turbopumps

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Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 80 with TC 110, DN 63 ISO-K PM P03 940

HiPaceTM 80 with TC 110, DN 63 CF-F PM P03 941

HiPaceTM 80 with TC 110, DN 40 ISO-KF PM P03 942

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 820 PM 061 340-T PM 061 344-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 351-T

PM 061 350-T

Venting accessories Venting valve Air drier TTV 001

PM Z01 290 PM Z00 121

Cooling accessories Air cooling Water cooling

PM Z01 300 PM 016 623-T

Accessories

Connection cable, length 3 m between TC 110 / TPS/DCU 110/111/180/181 with accessory ports und RS-485, Connection cable for HiPace with TC 110 to power supply TPS/DCU 110/111/180/181 with bridges and RS-485 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A Connection cable relaisbox - TCP 350 TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

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PM 061 360-T PM 061 361-T PM 061 362-T

PM 061 372-T PM 061 373-T

PM Z01 205 PM Z01 206

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HiPaceTM 80 for TCP 350, DN 63 ISO-K PM P03 943

HiPaceTM 80 for TCP 350, DN 63 CF-F PM P03 944

HiPaceTM 80 for TCP 350, DN 40 ISO-KF PM P03 945

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 353-T

PM C01 740 PM C01 741 PM C01 742

PM Z01 290 PM Z00 121

PM Z01 300 PM 016 623-T

Turbopumps

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PM 061 360-T PM 061 361-T PM 061 362-T

PM 061 372-T PM 061 373-T PM 061 376-T PM Z01 205 PM Z01 206

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PM 061 372-T PM 061 373-T PM 061 376-T PM Z01 205 PM Z01 206

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Vacuum generation

Turbopumps HiPaceTM

Accessories

Order number pump General accessories Sealing gas Sealing gas throttle Centering ring Centering ring, with integrated mesh screen Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Set of hexagon bolts Set of stud screws Clamping ring with centering ring Clamping ring with centnering ring with splinter shield Coated centering ring DN 63 ISO-K, 4 claws M8 Coated centering ring DN 63 ISO-K, 4 claws M8, protection screen Coated centering ring DN 63 ISO-K, 4 claws M8, splinter shield

SeitePage 354 354 Fussleiste Englisch.indd 354

HiPaceTM 80 with TC 110, DN 63 ISO-K PM P03 940

HiPaceTM 80 with TC 110, DN 63 CF-F PM P03 941

HiPaceTM 80 with TC 110, DN 40 ISO-KF PM P03 942

PM Z01 310 PM Z01 316

PM Z01 310 PM Z01 316 PF 110 140-T PF 113 240-T

PM 016 206-U PM 016 208-U PM 016 207-U

PM 006 800-X PM 061 207-T PM 061 283-T P 4723 010

PM 006 375-X PM 016 333 PM 016 312 PM 006 801-X PM 061 207-T PM 061 283-T P 4723 010

PM 006 799-X PM 061 207-T PM 061 283-T P 4723 010

PM 016 360-T PM 016 362-T PM 016 361-T PM 016 683-T PM 016 684-T PM 016 625-T PM 016 626-T PM 016 510-T PM 016 512-T PM 016 511-T

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HiPaceTM 80 for TCP 350, DN 63 ISO-K PM P03 943

HiPaceTM 80 for TCP 350, DN 63 CF-F PM P03 944

HiPaceTM 80 for TCP 350, DN 40 ISO-KF PM P03 945

PM Z01 310 PM Z01 316

PM Z01 310 PM Z01 316 PF 110 140-T PF 113 240-T

PM 016 206-U PM 016 208-U PM 016 207-U

PM 006 375-X

PM 006 800-X PM 061 207-T

PM 016 333 PM 016 312 PM 006 801-X PM 061 207-T

PM 006 799-X PM 061 207-T

PM 051 726-T

Turbopumps

PM 016 360-T PM 016 362-T PM 016 361-T PM 016 683-T PM 016 684-T PM 016 625-T PM 016 626-T PM 016 510-T PM 016 512-T PM 016 511-T

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OBJ_DOKU-1259-001.fm Seite 356 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 300

Turbopumps HiPaceTM

Compact yet powerful turbopumps with pumping speeds of up to 260 l/s for N2 HiPaceTM 300

X Maximum reliability in a compact design X High pumping speed and maximum compression for all gases X Semi S2 and UL/CSA certification X Ideal for industry and research X Integrated drive electronics, suitable for industrial environments Protection class IP 54 X Continuous monitoring of operating data

N2 He H2 Ar

Pumping speed [l/s]

Pumping speed 300 250 200 150 100 50 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

N2 He H2 Ar CF4

Pumping speed [l/s]

HiPaceTM 300, with TC 400 300 250 200 150 100 50 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPaceTM 300 C, with TC 400

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Dimensions

190

DN 100 ISO-K

18.6

VV DN 16 ISO-KF / G1/4"

2 .6 °

Ø1 M8

45°

184

195

162 131

130

Ø144

20°

90°

163

131

Ø8

(5x

)

45°

118

HiPaceTM 300, with TC 400, DN 100 ISO-K

18.6

DN 16 ISO-KF / G1/4"

DN 100 ISO-F

2.6°

45°

184

Turbopumps

(5x

195

131

163 131

Ø 144

90°

83 130

20° Ø1 10

162

Ø8

)

45°

118

HiPaceTM 300, with TC 400, DN 100 ISO-F HV

DN 100 CF-F

18.6

DN 16 ISO-KF / G1/4"

2.6°

45°

(5x

196

207

143

174

131

Ø1 10 M8

Ø 144

130

20°

90°

175

Ø8

)

45° 118

HiPaceTM 300, with TC 400, DN 100 CF-F

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Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 300, with TC 110, DN 100 ISO-K

HiPaceTM 300, with TC 110, DN 100 CF-F

HiPaceTM 300, with TC 110, DN 100 ISO-F

HiPaceTM 300, with TC 400, DN 100 ISO-K

HiPaceTM 300, with TC 400, DN 100 CF-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 CF-F DN 16 ISO-KF G 1/8"

DN 100 ISO-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 CF-F DN 16 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

Fore Vacuum max. for N2

15 mbar

20 mbar

Gas througput Gas throughput at full rotational speed for H2

> 14 mbar l/s

Gas throughput at full rotational speed for He

8 mbar l/s

20 mbar l/s

Gas throughput at full rotational speed for N2

5 mbar l/s

14 mbar l/s

Gas throughput at full rotational speed for Ar

2 mbar l/s

7 mbar l/s

Gas throughput at full rotational speed for CF4

2 mbar l/s

8 mbar l/s

< 1·10-7 mbar 60000 rpm 3.5 min Air Water 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.2 kg

< 5·10-10 mbar 60000 rpm 3.5 min Air Water 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 8.2 kg

< 1·10-7 mbar 60000 rpm 3.5 min Air Water 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.5 kg

< 1·10-7 mbar 60000 rpm 1.8 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.7 kg

< 5·10-10 mbar 60000 rpm 1.8 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 8.7 kg

Order number pump

PM P03 990

PM P03 991

PM P03 992

PM P03 900

PM P03 901

Technical data

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HiPaceTM 300, with TC 400, DN 100 ISO-F

HiPaceTM 300 C, with TC 400, DN 100 ISO-K

HiPaceTM 300 C, with TC 400, DN 100 ISO-F

HiPaceTM 300 C, with TC 400, DN 100 CF-F

HiPaceTM 300 for TCP 350, DN 100 ISO-K

HiPaceTM 300 for TCP 350, DN 100 CF-F

HiPaceTM 300 for TCP 350, DN 100 ISO-K

DN 100 ISO-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 ISO-F DN 16 ISO-KF G 1/8" l/s

DN 100 CF-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 CF-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

125 l/s 220 l/s 245 l/s 250 l/s 195 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

3·102 2.2·103 > 1·106 > 1·107 > 1·107

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

20 mbar

1 mbar

17 mbar

> 14 mbar l/s

> 50 mbar l/s, with backing pump 20 m3/h > 20 mbar l/s, with backing pump 20 m3/h 17 mbar l/s, with backing pump 20 m3/h 4.4 mbar l/s, with backing pump 20 m3/h 5.4 mbar l/s, with backing pump 20 m3/h

> 14 mbar l/s

11 mbar l/s

7 mbar l/s

4 mbar l/s

< 1·10-7 mbar 60000 rpm 1.8 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 7 kg

< 1·10-7 mbar 60000 rpm 1.2 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.4 kg

< 1·10-7 mbar 60000 rpm 1.2 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.7 kg

< 1·10-8 mbar 60000 rpm 1.2 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 8.4 kg

< 1·10-7 mbar 60000 rpm 2.5 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 5.8 kg

< 5·10-10 mbar 60000 rpm 2.5 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 7.8 kg

< 1·10-7 mbar 60000 rpm 2.5 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.1 kg

PM P03 902

PM P03 906

PM P03 907

PM P03 996

PM P03 993

PM P03 994

PM P03 995

20 mbar l/s

14 mbar l/s

7 mbar l/s

8 mbar l/s

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Turbopumps

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Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 300, with TC 110, DN 100 ISO-K PM P03 990

HiPaceTM 300, with TC 110, DN 100 CF-F PM P03 991

HiPaceTM 300, with TC 110, DN 100 ISO-F PM P03 992

HiPaceTM 300, with TC 400, DN 100 ISO-K PM P03 900

HiPaceTM 300, with TC 400, DN 100 CF-F PM P03 901

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 821 PM 061 341-T PM 061 345-T

PM C01 822 PM 061 342-T PM 061 346-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 351-T

PM 061 350-T

PM 061 352-T

Accessories

Connection cable, length 3 m between TC 110 / TPS/DCU 110/111/180/181 with accessory ports und RS-485, Connection cable for HiPace with TC 110 to power supply TPS/DCU 110/111/180/181 with bridges and RS-485 TC 400 / TPS/DCU 310/311/400/401 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet Venting accessories Venting valve Air drier TTV 001

PM Z01 290 PM Z00 121

PM Z01 291 PM Z00 121

Cooling accessories Air cooling Water cooling

PM Z01 301 PM 016 624-T

PM Z01 302

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PM 061 363-T PM 061 364-T PM 061 365-T

PM 061 366-T PM 061 367-T PM 061 368-T

PM 061 372-T PM 061 373-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr

HiPaceTM 300, with TC 400, DN 100 ISO-F PM P03 902

HiPaceTM 300 C, with TC 400, DN 100 ISO-K PM P03 906

HiPaceTM 300 C, with TC 400, DN 100 ISO-F PM P03 907

HiPaceTM 300 C, with TC 400, DN 100 CF-F PM P03 996

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 993

HiPaceTM 300 for TCP 350, DN 100 CF-F PM P03 994

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 995

PM C01 822 PM 061 342-T PM 061 346-T

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 352-T

PM 061 352-T PM 061 356-T

PM 061 356-T

PM C01 740 PM C01 741 PM C01 742

PM Z01 291 PM Z00 121

PM Z01 302

PM 061 366-T PM 061 367-T PM 061 368-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

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Turbopumps

OBJ_DOKU-1259-001.fm Seite 361 Dienstag, 12. August 2008 4:56 16

PM 061 366-T PM 061 367-T PM 061 368-T

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

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Vacuum generation

Turbopumps HiPaceTM

Accessories

Order number pump General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 362 362 Fussleiste Englisch.indd 362

HiPaceTM 300, with TC 110, DN 100 ISO-K PM P03 990

HiPaceTM 300, with TC 110, DN 100 CF-F PM P03 991

HiPaceTM 300, with TC 110, DN 100 ISO-F PM P03 992

HiPaceTM 300, with TC 400, DN 100 ISO-K PM P03 900

HiPaceTM 300, with TC 400, DN 100 CF-F PM P03 901

PM Z01 311 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 311 PM Z01 317

PM Z01 311 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010

PM 061 207-T PM 061 283-T P 4723 010

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 365-T

PM 016 367-T

PM 016 366-T

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 450-T PM 016 452-T PM 016 451-T PM 016 455-T PM 016 457-T PM 016 456-T PM 016 690-T PM 016 692 -T

PM 016 690-T PM 016 692 -T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr

HiPaceTM 300, with TC 400, DN 100 ISO-F PM P03 902

HiPaceTM 300 C, with TC 400, DN 100 ISO-K PM P03 906

HiPaceTM 300 C, with TC 400, DN 100 ISO-F PM P03 907

HiPaceTM 300 C, with TC 400, DN 100 CF-F PM P03 996

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 993

HiPaceTM 300 for TCP 350, DN 100 CF-F PM P03 994

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 995

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 459-X PM 061 207-T PM 061 283-T

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T

PM 061 207-T PM 061 283-T

PM 051 726-T

PM 016 365-T

PM 016 367-T

PM 016 366-T

PM 016 450-T PM 016 452-T

PM 016 451-T

PM 016 455-T PM 016 457-T

PM 016 456-T

PM 016 456-T PM 016 690-T PM 016 692 -T

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Turbopumps

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PM 016 690-T PM 016 692 -T

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Vacuum generation

HiPaceTM 400

Turbopumps HiPaceTM

Compact yet powerful turbopumps with pumping speeds of up to 350 l/s for N2, with a small DN 100 flange connection: HiPaceTM 400 X Maximum reliability in a compact design X Maximum pumping speed and high gas throughput X Suitable for industrial environments Protection class IP 54 X Semi S2 and UL/CSA certification X Monitoring of operating data

Pumping speed Pumping speed [l/s]

N2 He H2 Ar

600 500 400 300 200 100 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPace

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400

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OBJ_DOKU-1259-001.fm Seite 365 Dienstag, 12. August 2008 4:56 16

Dimensions

175

206.5

208

ø 208

130

117

230.5

HV DN 100 ISO-K

ø8

30°

239

16.7°

VV DN 25 ISO-KF / G1/4"

131

ø 15 0 M8 (6x) M8 (6x) 45°

45°

145.5

HiPaceTM 400, with TC 400, DN 100 ISO-K

131

239

175 208

ø 208

130

116.9

M8 (6x) M8 (6x) 45°

Turbopumps

HV DN 100 ISO-F

ø8

30°

230.5

16.7°

206.5

59 VV DN 25 ISO-KF / G1/4"

45°

145.5

HiPaceTM 400, with TC 400, DN 100 ISO-F

Ø8

239

208

175

DN 100 CF-F

208

130

117

Ø 15

30°

230.5

16.7°

206.5

VV DN 25 ISO-KF

131

M8 (6x)

45°

45° 145.5

HiPaceTM 400, with TC 400, DN 100 CF-F

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Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 400, with TC 400, DN 100 ISO-K

HiPaceTM 400, with TC 400, DN 100 CF-F

HiPaceTM 400, with TC 400, DN 100 ISO-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 100 ISO-K DN 25 ISO-KF G 1/8"

DN 100 CF-F DN 25 ISO-KF G 1/8"

DN 100 ISO-F DN 25 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

445 l/s 470 l/s 355 l/s 320 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

4·105 > 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

Fore Vacuum max. for N2

11 mbar

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.6 kg

< 5·10-10 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 17.5 kg

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 12 kg

Order number pump

PM P04 023

PM P04 024

PM P04 025

Technical data

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HiPaceTM 400, with TC 400, DN 100 ISO-K

HiPaceTM 400, with TC 400, DN 100 CF-F

HiPaceTM 400, with TC 400, DN 100 ISO-F

DN 100 ISO-K DN 25 ISO-KF G 1/8"

DN 100 CF-F DN 25 ISO-KF G 1/8"

DN 100 ISO-F DN 25 ISO-KF G 1/8"

445 l/s 470 l/s 355 l/s 320 l/s

4·105 3·107 > 1·1011 > 1·1011

10 mbar

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 10.9 kg

< 5·10-10 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 16.6 kg

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.1 kg

PM P04 026

PM P04 027

PM P04 028

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Turbopumps

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Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 400, with TC 400, DN 100 ISO-K PM P04 023

HiPaceTM 400, with TC 400, DN 100 CF-F PM P04 024

HiPaceTM 400, with TC 400, DN 100 ISO-F PM P04 025

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 823 PM 061 343-T PM 061 347-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 352-T

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

Cooling accessories Air cooling

PM Z01 303

Accessories

Connection cable, length 3 m between TC 400 / TPS/DCU 310/311/400/401 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet

SeitePage 368 368 Fussleiste Englisch.indd 368

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

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HiPaceTM 400 for TCP 350 DN 100 ISO-K PM P04 026

HiPaceTM 400 for TCP 350, DN 100 CF-F PM P04 027

HiPaceTM 400 for TCP 350, DN 100 ISO-F PM P04 028

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 356-T

PM C01 740 PM C01 741 PM C01 742

PM Z01 291 PM Z00 121

PM Z01 303

Turbopumps

OBJ_DOKU-1259-001.fm Seite 369 Dienstag, 12. August 2008 4:56 16

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

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PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

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Vacuum generation

Turbopumps HiPaceTM

Accessories

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HiPaceTM 400, with TC 400, DN 100 ISO-K PM P04 023

HiPaceTM 400, with TC 400, DN 100 CF-F PM P04 024

HiPaceTM 400, with TC 400, DN 100 ISO-F PM P04 025

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 380-T PM 016 382-T PM 016 381-T PM 016 450-T PM 016 452-T PM 016 451-T PM 016 455-T PM 016 457-T PM 016 456-T PM 016 690-T PM 016 692 -T

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HiPaceTM 400 for TCP 350 DN 100 ISO-K PM P04 026

HiPaceTM 400 for TCP 350, DN 100 CF-F PM P04 027

HiPaceTM 400 for TCP 350, DN 100 ISO-F PM P04 028

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 006 459-X PM 061 207-T

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T

PM 061 207-T

PM 051 726-T

PM 016 380-T Turbopumps

PM 016 382-T PM 016 381-T PM 016 450-T PM 016 452-T PM 016 451-T PM 016 455-T PM 016 457-T PM 016 456-T PM 016 690-T PM 016 692 -T

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Vacuum generation

HiPaceTM 700

Turbopumps HiPaceTM

Maximum vacuum performance in a compact design with a pumping speed of 685 l/s for N2: X Minimum footprint and maximum reliability

HiPaceTM 700

X High gas throughput and high pumping speed X Suitable for industrial environments Protection class IP 54 X Semi S2 and UL/CSA certification X Monitoring of operating data

Pumping speed [l/s]

Pumping speed

N2 He H2 Ar

800 700 600 500 400 300 200 100 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPace

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700

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OBJ_DOKU-1259-001.fm Seite 373 Dienstag, 12. August 2008 4:56 16

Dimensions 252 59

16.7°

30°

Ø8

HV DN 160 ISO-K

Ø 15

179

212

203.5

181 131

130

117

Ø208

148

VV DN 25 ISO-KF

M8 (6x)

45°

145.5

HiPaceTM 700, with TC 400, DN 160 ISO-K

Turbopumps

181 131

ø 208

130

116.9

ø 15

203.5

HV DN 160 ISO-F

ø8

212

30°

148

16.7°

179.5

59 VV DN 25 ISO-KF / G1/4"

M8 (6x) M8 (6x)

45°

145.5

45°

HiPaceTM 700, with TC 400, DN 160 ISO-F

215.5

224

130

116.9

ø 15

160

191.5

HV DN 160 CF-F

ø8

131

30°

ø 208

16.7°

193

59 VV DN 25 ISO-KF / G1/4"

M8 (6x) M8 (6x) 45°

45°

145.5

HiPaceTM 700, with TC 400, DN 160 CF-F

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Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 700, with TC 400, DN 160 ISO-K

HiPaceTM 700, with TC 400, DN 160 CF-F

HiPaceTM 700, with TC 400, DN 160 ISO-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 160 ISO-K DN 25 ISO-KF G 1/8"

DN 160 CF-F DN 25 ISO-KF G 1/8"

DN 160 ISO-F DN 25 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

555 l/s 655 l/s 685 l/s 665 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

4·105 3·107 > 1·1011 > 1·1011

Fore Vacuum max. for N2

11 mbar

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.5 kg

< 5·10-10 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 17.4 kg

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 12.1 kg

Order number pump

PM P03 933

PM P03 934

PM P03 935

Technical data

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HiPaceTM 700 for TCP 350, DN 160 ISO-K

HiPaceTM 700 for TCP 350, DN 160 CF-F

HiPaceTM 700 for TCP 350, DN 160 ISO-F

DN 160 ISO-K DN 25 ISO-KF G 1/8"

DN 160 CF-F DN 25 ISO-KF G 1/8"

DN 160 ISO-F DN 25 ISO-KF G 1/8"

555 l/s 655 l/s 685 l/s 665 l/s

4·105 3·107 > 1·1011 > 1·1011

10 mbar

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 10.6 kg

< 5·10-10 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 16.5 kg

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.2 kg

PM P04 080

PM P04 081

PM P04 082

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Turbopumps

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Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 700, with TC 400, DN 160 ISO-K PM P03 933

HiPaceTM 700, with TC 400, DN 160 CF-F PM P03 934

HiPaceTM 700, with TC 400, DN 160 ISO-F PM P03 935

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 823 PM 061 343-T PM 061 347-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 352-T

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

Cooling accessories Air cooling

PM Z01 303

Accessories

Connection cable, length 3 m between TC 400 / TPS/DCU 310/311/400/401 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet

SeitePage 376 376 Fussleiste Englisch.indd 376

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

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HiPaceTM 700 for TCP 350, DN 160 ISO-K PM P04 080

HiPaceTM 700 for TCP 350, DN 160 CF-F PM P04 081

HiPaceTM 700 for TCP 350, DN 160 ISO-F PM P04 082

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 356-T

PM C01 740 PM C01 741 PM C01 742

PM Z01 291 PM Z00 121

PM Z01 303

Turbopumps

OBJ_DOKU-1259-001.fm Seite 377 Dienstag, 12. August 2008 4:56 16

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

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PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

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Vacuum generation

Turbopumps HiPaceTM

Accessories

SeitePage 378 378 Fussleiste Englisch.indd 378

HiPaceTM 700, with TC 400, DN 160 ISO-K PM P03 933

HiPaceTM 700, with TC 400, DN 160 CF-F PM P03 934

HiPaceTM 700, with TC 400, DN 160 ISO-F PM P03 935

PM Z01 312 PM Z01 317 PM 016 216-U PM 016 218-U PM 016 217-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 216-U PM 016 218-U PM 016 217-U

PM 006 492-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 339 PM 016 318 PM 006 493-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 375-T PM 016 377-T PM 016 376-T PM 016 460-T PM 016 462-T PM 016 461-T PM 016 465-T PM 016 467-T PM 016 466-T PM 016 691-T PM 016 693-T

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OBJ_DOKU-1259-001.fm Seite 379 Dienstag, 12. August 2008 4:56 16

HiPaceTM 700 for TCP 350, DN 160 ISO-K PM P04 080

HiPaceTM 700 for TCP 350, DN 160 CF-F PM P04 081

HiPaceTM 700 for TCP 350, DN 160 ISO-F PM P04 082

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 006 492-X PM 061 207-T

PM 016 339 PM 016 318 PM 006 493-X PM 061 207-T

PM 061 207-T

PM 051 726-T

PM 016 375-T Turbopumps

PM 016 377-T PM 016 376-T PM 016 460-T PM 016 462-T PM 016 461-T PM 016 465-T PM 016 467-T PM 016 466-T PM 016 690-T PM 016 692 -T

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Vacuum generation

HiPaceTM 1200

Turbopumps HiPaceTM

Powerful turbopumps with pumping speeds of up to 1300 l/s. X High pumping speeds for both light and

HiPaceTM 1200

heavy gases X High process integrity, resistant to particulate matter X High gas throughputs, even for heavy gases

C = Corrosive gas version U = Upside-down installation orientation

N2 He H2 Ar CF4

Pumping speed [l/s]

Pumping speed 1400 1200 1000 800 600 400 200 0 10 -5

10 -4

10 -3

10 -2

10 -1

10 0 Pressure [mbar]

HiPaceTM 1200

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Dimensions Ø264 Ø240

203.1

123

189.5

40°

10°

358.8

45 °

213.8

G1/8"

237.8

DN 200 ISO-K HV

16 1. 12 5 Ø9

70 °

141.9

Ø230 DN 40 ISO-KF VV

HiPaceTM 1200 with TC 1200, DN 200 ISO-K Ø285 264

Turbopumps

210.1 244.8 365.8

220.8

130

1. 5

45°

Ø9

196.5

DN 200 ISO-F HV

G1/8"

10°

40 °

70 °

141.9 Ø230 DN 40 ISO-KF VV

HiPaceTM 1200 with TC 1200, DN 200 ISO-F Ø 264 Ø 253

40 °

10°

377.8

222.1 G1/8"

256.8

45°

144

1. 5

232.8

Ø9

208.5

DN 200 CF-F HV

70 °

142

DN 40 ISO-KF VV

Ø 230

HiPaceTM 1200, with TC 1200, DN 200 CF-F

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Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 1200 with TC 1200, DN 200 ISO-K

HiPaceTM 1200 with TC 1200, DN 200 ISO-F

HiPaceTM 1200, with TC 1200, DN 200 CF-F

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-F, upside down version

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

DN 200 CF-F DN 40 ISO-KF G 1/8"

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

6·103 2·105 > 1·108 > 1·108 > 1·108

Fore Vacuum max. for N2

2 mbar

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 27 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 28 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 40 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 27 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 28 kg

Order number pump

PM P03 910

PM P03 911

PM P03 912

PM P03 913

PM P03 914

Technical data

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HiPaceTM 1200 U, with TC 1200, DN 200 CF-F, upside down version

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-K, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-F, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 CF-F, corrosive

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive

HiPaceTM 1200 UC, with TC 1200, DN 200 CF-F, upside down version, corrosive