Issuu on Google+

Vacuum generation

Page 332 Turbopumpen_E.indd Fussleiste Englisch.indd2 332

Turbopumps

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:39 7:50:34 Uhr


Turbopumps Page

Selection aid

334

Turbopumps

336

Important information relating to the technical data

337

Safety is important

338

The HiPace™ innovation

339

Series 10 – 700 l / s

340

Series 1,000 – 2,000 l / s

342

- HiPace 10

344

- HiPace 80

348

- HiPace 300

356

- HiPace 400

364

- HiPace 700

372

- HiPace 1200

380

- HiPace 1500

388

- HiPace 1800

396

- HiPace 2300

404

The HiPace™ MC innovation

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumpen_E.indd Fussleiste Englisch.indd3 333

412

- HiPace 2400 MC

414

- HiPace 3400 MC

422

Turbopumps HiPace™ accessories

Turbopumps

Turbopumps

426

Page 333 14.08.2008 19.08.2008 12:46:39 7:50:49 Uhr


Vacuum generation

Turbopumps

Selection aid Analysis

Semiconductors & electronics

Hard drive coating

Load locks, transfer chambers, handling systems

MBE (Molecular Beam Epitaxy)

Bonding

Inspection

Implantation – Beamline

Implantation – Source

Plasma etching

CVD (Chemical Vapor Deposition)

PVD (Physical Vapor Deposition)

Lithography

Residual gas analysis

Plasma monitoring

Surface analysis

Mass spectrometry

Leak detection

Electron microscopy

Holweck stage

Recommended

Model HiPace 10 HiPace 80

¸

HiPace 300

¸

HiPace 300 C HiPace 400

¸

HiPace 400 C HiPace 700

¸

HiPace 700 C HiPace 1200 HiPace 1200 C HiPace 1500 HiPace 1500 C HiPace 1800 HiPace 1800 C HiPace 2300 HiPace 2300 C HiPace 2400 MC HiPace 3400 MC

Page 334 Turbopumpen_E.indd Fussleiste Englisch.indd4 334

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:39 7:50:49 Uhr


Turbopumpen_E.indd Fussleiste Englisch.indd5 335

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumps

Biotechnology

Nanotechnology

Elementary particle physics

Cryogenic research

Space simulation

Particle accelerators

Plasma research

Fusion technology

Industry

Nuclear research

Vacuum furnaces

Vacuum drying

Heat treatment

Incandescent and uorescent lamp production

Isolation vacuums

Electron beam welding

Industrial leak detection

Medical technology

Film coating (PVD)

Wear protection (PVD, CVD)

Optical coatings (PVD)

CD / DVD / Blu-ray production (PVD)

Glass coating (PVD)

Solar cell production (PECVD, CIS, CIGS, etc.)

Coating Research & development

Page 335

14.08.2008 19.08.2008 12:46:39 7:50:50 Uhr


Vacuum generation

Turbopumps

Turbopumps Pfeiffer Vacuum, the inventor of the turbopump, is again demonstrating its technology edge with the new HiPace innovation. It enables the entire spectrum of widely varying applications to be handled reliably, safely and cost-effectively.

Features The new HiPace family covers the 10 - 3,400 liters/second pumping speed classes. The outstanding features of the Pfeiffer Vacuum HiPace series are its unique rotor design with proven hybrid bearings. This represents a new class of industrial suitability, while simultaneously reducing operating costs. All Pfeiffer Vacuum turbopumps naturally incorporate integrated drive electronics. In fact, even the power supply is integrated in the HiPace 1200 to 2300. Its advanced design, which is rigorously geared to reliability and ruggedness, assures safe, dependable operation through integrated security concepts and patented venting mechanisms, even in difficult applications. All turbopumps in the HiPace series conform to the Semi S2 standard. This assures outstanding accessibility to all connections in a range of 120°.

Versions The turbopumps in the 80 - 700 l/s range are also offered with an integrated Holweck stage. The advantages of this design include: Better critical backing pressure Lower power consumption Higher compression From the 300 l/s pumping speed class onward, the HiPace is also available in a corrosive-gas version. These pumps have a highly developed rotor coating and come with an integrated sealing gas supply system with electrical shutoff valve as standard equipment. Corrosive-gas versions do not incorporate a Holweck stage. The HiPace MC series is characterized by a 5-axis, fully magnetic and thus maintenance-free bearing system. Thanks to its comprehensive diagnostic capabilities, users are always informed about the condition of their magnetically levitated turbomolecular pumps. In addition to the standard design with RS-485 interface, Pfeiffer Vacuum also offers optional versions with DeviceNet or Profibus in response to modern control concepts. Service The unique selling point of Pfeiffer Vacuum turbopumps is on-site maintenance by the Pfeiffer Vacuum field service organization. As a result of the unique bearing concept, maintenance intervals of up to 4 years are possible. This means that the maintenance costs amount to only a fraction of those for competition products.

Page 336 Turbopumpen_E.indd Fussleiste Englisch.indd6 336

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:39 7:50:50 Uhr


Important information relating to the technical data Pumping speed The pumping speed of a turbopump depends on its size and design. It is stated in liters per second and is a function of the intake pressure. The pumping speed characteristics are assigned to the products. Compression ratio The compression ratio of a turbopump is the ratio between forevacuum pressure measured at the forevacuum flange of the pump and the high vacuum pressure at the intake flange. Compression is stated for different types of gas and is determined without gas load. With the aid of this value it is possible to determine for a given backing pump the theoretical final pressure of the entire pumping station configuration.

Pend min =

Qtotal Seff

+

Pvv1 K01

+ ... +

Turbopumps

Final pressures The data stated for the final pressure apply for the conditions laid down in DIN 28428. These values are attained under clean conditions, using metal seals in the high vacuum area and after baking out or degassing the pump for 48 hours. Pumps with an aluminum housing are unsuitable for baking out and for this reason the final pressure is stated which is attained without baking the pump out and with clean FPM seals. The final pressures stated in the technical data are always practice related values which may be easily improved upon in the case of a corresponding pretreatment (venting with dry inert gas, degassing). The theoretically attainable minimum values depend on the gas-type specific compression ratios Koi and the partial pressures Pwi on the forevacuum side as well as the system-specific gas flows Qtotal like, for example, desorption from the surface being pumped down by a turbopump having an effective pumping speed of Seff. Pvvn K0n

As a rule, these theoretical final pressures can be attained only approximately since the system-specific conditions will generally have a significant influence on the final pressures. Final pressures for turbopumps depending on housing material, flange type, backing pump used and rotor coating: Ultimate pressure conforms to DIN 28 428, attained in a measuring dome 48 hours after bake-out. Rotary vane pump or dry backing pump with p < 0.05 mbar

Diaphragm vacuum pump with p < 0.05 mbar

Stainless-Steel housing with CF-F 1)

< 5 . 10 -10 mbar

< 1 . 10 -8 mbar

Corrosive gas version with rotary vane pump or dry backing pump with p < 0.05 mbar < 1 . 10 -8 mbar

Stainless-Steel housing with ISO-K 2)

< 5 . 10 -10 mbar

< 1 . 10 -8 mbar

< 1 . 10 -8 mbar

Aluminum housing with ISO-K 3)

< 1 . 10 -7 mbar

< 1 . 10 -7 mbar

< 1 . 10 -7 mbar

1)

Bakeable with copper seal, 2) Bakeable with aluminum seal, 3) Not bakeable, with elastomer seal

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumpen_E.indd Fussleiste Englisch.indd7 337

Page 337 14.08.2008 19.08.2008 12:46:39 7:50:50 Uhr


Vacuum generation

Turbopumps

Gas throughput The term gas throughput, is used to describe the ability of the turbopump to pump quantities of gas for a certain pressure level through the pump. Here there are dependencies which are also dependent on the specific application. All gas throughput data stated in the technical data apply under the following conditions: Operation with a backing pump which at least offers the performance data of the backing pump specified in connection with the gas load data Operation with water cooling at the specified water flow and a water supply temperature of 25° C, a maximum ambient temperature of 25° C and the employment of sealing gas (in connection with heavy gases) A turbopump cannot be operated simultaneously at its maximum gas load and at its maximum forevacuum pressure Maximum permissible forevacuum pressure The maximum permissible forevacuum pressure of the turbopump is the pressure at which the turbopump still produces a compression of 100. It depends on the gas load pumped through the turbopump and the pumping speed of the backing pump used. For gas load operation, the forevacuum pressure should not exceeded more than approximately 50 % of the maximum permissible forevacuum pressure.

Safety is important Notes relating to the mounting materials for turbopumps Our turbopumps excel by a high degree of safety. This is based on our own theoretical and practical analyses regarding the crash behavior and the high safety margins in the design of the pumps. And we must claim the same also for the interface between the pumps and the customer’s system. For this reason, we are offering a full line of installation components which ensure safe interface connections and which are presented together with the pump accessories.

Page 338 Turbopumpen_E.indd Fussleiste Englisch.indd8 338

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:39 7:50:50 Uhr


Turbopumps

The HiPace™ innovation

Picking up the pace in vacuum technology! Faster. Higher. Stronger.

What is HiPace? HiPace stands for a complete line of compact yet powerful turbopumps featuring pumping speeds that range from 10 – 2,000 liters per second. It offers a cost-effective yet flexible installation. This series offers convincing cost-effectiveness and flexibility, which also includes the ability to install the HiPace 1200 to 2300 in an upside-down orientation. The proven bearing system offers you unparalleled reliability. Thanks to its sophisticated rotor design, very high values are achieved with respect to both pumping speed, critical backing pressure and gas throughout as well as compression for light gases.

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumpen_E.indd Fussleiste Englisch.indd9 339

Page 339 14.08.2008 19.08.2008 12:46:39 7:51:01 Uhr


Vacuum generation

Turbopumps

Photovoltaic

Glass coating

Drive concepts Integrated – no cumbersome and costly cabling Small physical size – optimal integration options Expanded remote functions – greater flexibility Shorter run-up time – ready to service faster Modern pump management – operating parameter monitoring Suitable for industrial applications – Protection Class IP 54 Extremely low power consumption – top-efficiency performance Innovative electronics – maximum reliability

Series 10 – 700 l / s Advantages at a glance Robust engineering and proven bearing system offer maximum reliability Compact design makes for minimum footprint High gas throughputs and high pumping speeds Integrated, powerful cooling system Installation possible in any orientation Suitable for industrial environments thanks to Protection Class IP 54 Corrosive-gas version available Semi S2 and UL certification Complete line of accessories expands the range of potential applications Extended maintenance intervals On-site bearing change

Drive

TC 110

Pump model Nominal connection diameter

HiPace™ 10 DN 25

TC 110 / TC 400 TC 400 HiPace™ 80 DN 63 ISO-K DN 63 CF-F DN 40 ISO-KF

HiPace™ 300* DN 100 ISO-K DN 100 CF-F DN 100 ISO-F

HiPace™ 400 DN 100 ISO-K DN 100 CF-F DN 100 ISO-F

HiPace™ 700 DN 160 ISO-K DN 160 CF-F DN 160 ISO-F

* HiPace 300 C only availlable with TC 400

Page 340 Turbopumpen_E.indd Fussleiste Englisch.indd10340

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:39 7:51:04 Uhr


Pfeiffer Vacuum Permanent magnetic bearing

Competition

Oil-lubricated ceramic ball bearing

Grease-lubricated ball bearings

High-vacuum side

Turbopumps

Backing vacuum

Reliability

Highly reliable Robust bearing system Extremely low vibration Minimum wear Mean time to failure > 200,000 hours Extended service intervals

Dry high-vacuum pumping station with HiPace™ and XtraDry™

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumpen_E.indd Fussleiste Englisch.indd11341

Calibrating pumping station with HiPace™ and OnTool DryPump™

Residual gas analysis with HiPace™ and PrismaPlus™

Page 341 14.08.2008 19.08.2008 12:46:39 7:51:20 Uhr


Vacuum generation

Turbopumps

Series 1,000 – 2,000 l / s Advantages at a glance Four sizes offering pumping speeds of from 1,000 to 2,000 l / s High pumping speeds for light gases (H2, He) and heavy gases (Ar, CF4) High gas throughputs, even for heavy gases (Ar, CF4) Installation orientation available from 0° to 90° and from 90° to 180° Corrosive gas versions (C-models) available Integrated sealing gas system with throttle and valve Integrated, powerful cooling Integrated TC 1200 drive unit for direct mains connection Standard interfaces: RS-485 and Remote, Profibus or DeviceNet optional Compatible with Semi S2 Certified under UL, CSA and TÜV Suitable for industrial environments thanks to Protection Class IP 54 The utmost in process suitability, resistant to particles Robust rotor bearing system Simple installation

*approx. development of costs in Euro with use on an implanter

Cost of ownership

Factors for minimum operating costs of Pfeiffer Vacuum turbopumps: Simple maintenance offers Highest uptime Flexible service concepts Long service intervals On-site bearing change capability

Page 342 Turbopumpen_E.indd Fussleiste Englisch.indd12342

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:39 7:51:21 Uhr


Drive

TC 1200

Type of pump Nominal connection diameter

HiPace™ 1200 DN 200 ISO-K DN 200 ISO-F DN 200 CF-F up 0° – 90° upside down 90° – 180°

Orientation of flange

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumpen_E.indd Fussleiste Englisch.indd13343

Typical installation on a PVD system

HiPace™ 1500 DN 250 ISO-K DN 250 ISO-F DN 250 CF-F up 0° – 90° upside down 90° – 180°

HiPace™ 1800 DN 200 ISO-K DN 200 ISO-F up 0° – 90° upside down 90° – 180°

Turbopumps

Typical installation on a PVD system

HiPace™ 2300 DN 250 ISO-K DN 250 ISO-F DN 250 CF-F up 0° – 90° upside down 90° – 180°

Page 343 14.08.2008 19.08.2008 12:46:39 7:51:40 Uhr


OBJ_DOKU-1259-001.fm Seite 344 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 10

Turbopumps HiPaceTM

Small and robust turbopump with a pumping speed of 10 l/s for N2 X The small design makes for minimum

HiPaceTM 10

footprint X Integrated drive electronics, suitable for industrial environments - Protection class IP 54 X Semi S2- and UL/CSA certification X Maximum reliability through monitoring of operating data

N2 He H2 Ar

Pumping speed [l/s]

Pumping speed 12

9

6

3

0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPaceTM 10

SeitePage 344 344 Fussleiste Englisch.indd 344

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 345 Dienstag, 12. August 2008 4:56 16

Dimensions 55 55

45

M6, 6tief

DN 25 ISO-KF HV

M5, 8tief

DN 16 ISO-KF VV 59

45째

25

Turbopumps

45째

100

97.3

168.4

40

55

37.5

118

HiPaceTM 10, with TC 110, DN 25

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 345

Page 345345 Seite 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 346 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Technical data

Connection nominal diameter Flange (in) Flange (out)

DN 25 DN 16 ISO-KF

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

3.7 l/s 6 l/s 10 l/s 11.5 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

3·102 3·103 3·106 3·107

Fore Vacuum max. for N2

25 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar

0.15 mbar l/s 0.15 mbar l/s 0.15 mbar l/s 0.15 mbar l/s

Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 5·10-5 mbar 90000 rpm 0.9 min Convection cooling 3 mT < 45 dB (A) IP 54 RS-485, Remote 1.8 kg

Order number pump

PM P03 960

Ultimate pressure Rotation speed ±2% Run-up time Cooling method, standard

SeitePage 346 346 Fussleiste Englisch.indd 346

HiPaceTM 10, with TC 110, DN 25

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 347 Dienstag, 12. August 2008 4:56 16

Order number pump

HiPaceTM 10, with TC 110, DN 25 PM P03 960

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 820 PM 061 340-T PM 061 344-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

Connection cable, length 3 m between TC 110 / TPS/DCU 110/111/180/181 with accessory ports und RS-485, Connection cable for HiPace with TC 110 to power supply TPS/DCU 110/111/180/181 with bridges and RS-485

PM 061 350-T

Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

PM 061 372-T PM 061 373-T PM Z01 205 PM Z01 206

General accessories Connecting adapter DN 25 ISO-KF Centering ring Centering ring, with integrated mesh screen USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485

PM 093 315-T PF 110 125-T PF 113 225-T PM 061 207-T PM 061 283-T P 4723 010

Mounting materials Centering ring with 4 prackets, screws and U-washers

PM 016 627-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 347

PM 061 351-T

Turbopumps

Accessories

Page 347347 Seite 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 348 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 80

Turbopumps HiPaceTM

Compact yet powerful turbopumps with pumping speeds of up to 71 l/s for N2 X Compact design makes for minimum

HiPaceTM 80

footprint X High pumping speed and maximum compression for all gases X Integrated drive electronics, suitable for industrial environments Protection class IP 54 X Semi S2 and UL/CSA certification X Maximum reliability through monitoring of operating data

N2 He H2 Ar

Pumping speed [l/s]

Pumping speed 80 70 60 50 40 30 20 10 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPaceTM 80

SeitePage 348 348 Fussleiste Englisch.indd 348

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 349 Dienstag, 12. August 2008 4:56 16

Dimensions

HV

89.3

DN 63 ISO-K 33°

43°

Ø86

33° 40°

43°

149

91 100

55

Ø 97

65

119.5

30°

M5 - 10tief (6x) 37.5

VV DN 16 ISO-KF

HiPaceTM 80 with TC 110, DN 63 ISO-K HV DN 40 ISO-KF

89.3 33°

43°

100

Ø 86

Turbopumps

158

100

128..5 Ø 97

55

65

30°

M5 - 10tief (6x) 33° 40°

43°

37.5

VV DN 16 ISO-KF

HiPaceTM 80 with TC 110, DN 40 ISO-KF HV DN 63 CF-F

89.3

100

55

Ø 97

155.2

97.2

33°

125.7

30°

65

43°

Ø8

6

33° 40°

43°

M5 - 10 tief (6x) 37.5

VV DN 16 ISO-KF

HiPace

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 349

TM

80 with TC 110, DN 63 CF-F

Page 349349 Seite 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 350 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 80 with TC 110, DN 63 ISO-K

HiPaceTM 80 with TC 110, DN 63 CF-F

HiPaceTM 80 with TC 110, DN 40 ISO-KF

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 63 ISO-K DN 16 ISO-KF G 1/8"

DN 63 CF-F DN 16 ISO-KF G 1/8"

DN 40 ISO-KF DN 16 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

48 l/s 58 l/s 67 l/s 66 l/s

48 l/s 58 l/s 67 l/s 66 l/s

38 l/s 41 l/s 35 l/s 30 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

1.4·105 1.3·107 > 1011 > 1011

1.4·105 1.3·107 > 1·1011 > 1·1011

1.4·105 1.3·107 > 1·1011 > 1·1011

Fore Vacuum max. for N2

22 mbar

22 mbar

22 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling method, optional Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.4 kg

< 5·10-10 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 3.8 kg

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.4 kg

Order number pump

PM P03 940

PM P03 941

PM P03 942

Technical data

SeitePage 350 350 Fussleiste Englisch.indd 350

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:39 Uhr


HiPaceTM 80 for TCP 350, DN 63 ISO-K

HiPaceTM 80 for TCP 350, DN 63 CF-F

HiPaceTM 80 for TCP 350, DN 40 ISO-KF

DN 63 ISO-K DN 16 ISO-KF G 1/8"

DN 63 CF-F DN 16 ISO-KF G 1/8"

DN 40 ISO-KF DN 16 ISO-KF G 1/8"

48 l/s 58 l/s 67 l/s 66 l/s

48 l/s 58 l/s 67 l/s 66 l/s

38 l/s 41 l/s 35 l/s 30 l/s

1.4·105 1.3·107 > 1·1011 > 1·1011

1.4·105 1.3·107 > 1·1011 > 1·1011

1.4·105 1.3·107 > 1·1011 > 1·1011

22 mbar

22 mbar

22 mbar

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

15.3 mbar l/s 2.7 mbar l/s 1.3 mbar l/s 0.54 mbar l/s

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.1 kg

< 5·10-10 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 3.5 kg

< 1·10-7 mbar 90000 rpm 1.7 min Water Air 75 l/h 5-25 °C 3.3 mT < 48 dB (A) IP 54 RS-485, Remote 2.1 kg

PM P03 943

PM P03 944

PM P03 945

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 351

Turbopumps

OBJ_DOKU-1259-001.fm Seite 351 Dienstag, 12. August 2008 4:56 16

Page 351351 Seite 14.08.2008 12:46:39 Uhr


OBJ_DOKU-1259-001.fm Seite 352 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 80 with TC 110, DN 63 ISO-K PM P03 940

HiPaceTM 80 with TC 110, DN 63 CF-F PM P03 941

HiPaceTM 80 with TC 110, DN 40 ISO-KF PM P03 942

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 820 PM 061 340-T PM 061 344-T

PM C01 820 PM 061 340-T PM 061 344-T

PM C01 820 PM 061 340-T PM 061 344-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 351-T

PM 061 351-T

PM 061 351-T

PM 061 350-T

PM 061 350-T

PM 061 350-T

Venting accessories Venting valve Air drier TTV 001

PM Z01 290 PM Z00 121

PM Z01 290 PM Z00 121

PM Z01 290 PM Z00 121

Cooling accessories Air cooling Water cooling

PM Z01 300 PM 016 623-T

PM Z01 300 PM 016 623-T

PM Z01 300 PM 016 623-T

Accessories

Connection cable, length 3 m between TC 110 / TPS/DCU 110/111/180/181 with accessory ports und RS-485, Connection cable for HiPace with TC 110 to power supply TPS/DCU 110/111/180/181 with bridges and RS-485 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A Connection cable relaisbox - TCP 350 TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 352 352 Fussleiste Englisch.indd 352

PM 061 360-T PM 061 361-T PM 061 362-T

PM 061 372-T PM 061 373-T

PM 061 372-T PM 061 373-T

PM 061 372-T PM 061 373-T

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 80 for TCP 350, DN 63 ISO-K PM P03 943

HiPaceTM 80 for TCP 350, DN 63 CF-F PM P03 944

HiPaceTM 80 for TCP 350, DN 40 ISO-KF PM P03 945

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 353-T

PM 061 353-T

PM 061 353-T

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM Z01 290 PM Z00 121

PM Z01 290 PM Z00 121

PM Z01 290 PM Z00 121

PM Z01 300 PM 016 623-T

PM Z01 300 PM 016 623-T

PM Z01 300 PM 016 623-T

Turbopumps

OBJ_DOKU-1259-001.fm Seite 353 Dienstag, 12. August 2008 4:56 16

PM 061 360-T PM 061 361-T PM 061 362-T

PM 061 372-T PM 061 373-T PM 061 376-T PM Z01 205 PM Z01 206

PM 061 372-T PM 061 373-T PM 061 376-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 353

PM 061 372-T PM 061 373-T PM 061 376-T PM Z01 205 PM Z01 206

Page 353353 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 354 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

Order number pump General accessories Sealing gas Sealing gas throttle Centering ring Centering ring, with integrated mesh screen Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Set of hexagon bolts Set of stud screws Clamping ring with centering ring Clamping ring with centnering ring with splinter shield Coated centering ring DN 63 ISO-K, 4 claws M8 Coated centering ring DN 63 ISO-K, 4 claws M8, protection screen Coated centering ring DN 63 ISO-K, 4 claws M8, splinter shield

SeitePage 354 354 Fussleiste Englisch.indd 354

HiPaceTM 80 with TC 110, DN 63 ISO-K PM P03 940

HiPaceTM 80 with TC 110, DN 63 CF-F PM P03 941

HiPaceTM 80 with TC 110, DN 40 ISO-KF PM P03 942

PM Z01 310 PM Z01 316

PM Z01 310 PM Z01 316

PM Z01 310 PM Z01 316 PF 110 140-T PF 113 240-T

PM 016 206-U PM 016 208-U PM 016 207-U

PM 006 800-X PM 061 207-T PM 061 283-T P 4723 010

PM 006 375-X PM 016 333 PM 016 312 PM 006 801-X PM 061 207-T PM 061 283-T P 4723 010

PM 006 799-X PM 061 207-T PM 061 283-T P 4723 010

PM 016 360-T PM 016 362-T PM 016 361-T PM 016 683-T PM 016 684-T PM 016 625-T PM 016 626-T PM 016 510-T PM 016 512-T PM 016 511-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 355 Dienstag, 12. August 2008 4:56 16

HiPaceTM 80 for TCP 350, DN 63 ISO-K PM P03 943

HiPaceTM 80 for TCP 350, DN 63 CF-F PM P03 944

HiPaceTM 80 for TCP 350, DN 40 ISO-KF PM P03 945

PM Z01 310 PM Z01 316

PM Z01 310 PM Z01 316

PM Z01 310 PM Z01 316 PF 110 140-T PF 113 240-T

PM 016 206-U PM 016 208-U PM 016 207-U

PM 006 375-X

PM 006 800-X PM 061 207-T

PM 016 333 PM 016 312 PM 006 801-X PM 061 207-T

PM 006 799-X PM 061 207-T

PM 051 726-T

PM 051 726-T

PM 051 726-T

Turbopumps

PM 016 360-T PM 016 362-T PM 016 361-T PM 016 683-T PM 016 684-T PM 016 625-T PM 016 626-T PM 016 510-T PM 016 512-T PM 016 511-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 355

Page 355355 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 356 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 300

Turbopumps HiPaceTM

Compact yet powerful turbopumps with pumping speeds of up to 260 l/s for N2 HiPaceTM 300

X Maximum reliability in a compact design X High pumping speed and maximum compression for all gases X Semi S2 and UL/CSA certification X Ideal for industry and research X Integrated drive electronics, suitable for industrial environments Protection class IP 54 X Continuous monitoring of operating data

N2 He H2 Ar

Pumping speed [l/s]

Pumping speed 300 250 200 150 100 50 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

N2 He H2 Ar CF4

Pumping speed [l/s]

HiPaceTM 300, with TC 400 300 250 200 150 100 50 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPaceTM 300 C, with TC 400

SeitePage 356 356 Fussleiste Englisch.indd 356

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 357 Dienstag, 12. August 2008 4:56 16

Dimensions

HV

190

DN 100 ISO-K

18.6

VV DN 16 ISO-KF / G1/4"

2 .6 °

Ø1 M8

45°

184

195

162 131

130

Ø144

20°

90°

163

83

131

Ø8

10

(5x

)

45°

118

HiPaceTM 300, with TC 400, DN 100 ISO-K

VV

HV

18.6

DN 16 ISO-KF / G1/4"

DN 100 ISO-F

2.6°

45°

184

Turbopumps

(5x

195

131

163 131

Ø 144

90°

83 130

20° Ø1 10

M8

162

Ø8

)

45°

118

HiPaceTM 300, with TC 400, DN 100 ISO-F HV

VV

DN 100 CF-F

18.6

DN 16 ISO-KF / G1/4"

2.6°

45°

(5x

196

207

143

174

131

Ø1 10 M8

Ø 144

130

20°

90°

175

83

Ø8

)

45° 118

HiPaceTM 300, with TC 400, DN 100 CF-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 357

Page 357357 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 358 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 300, with TC 110, DN 100 ISO-K

HiPaceTM 300, with TC 110, DN 100 CF-F

HiPaceTM 300, with TC 110, DN 100 ISO-F

HiPaceTM 300, with TC 400, DN 100 ISO-K

HiPaceTM 300, with TC 400, DN 100 CF-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 CF-F DN 16 ISO-KF G 1/8"

DN 100 ISO-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 CF-F DN 16 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

Fore Vacuum max. for N2

15 mbar

15 mbar

15 mbar

20 mbar

20 mbar

Gas througput Gas throughput at full rotational speed for H2

> 14 mbar l/s

> 14 mbar l/s

> 14 mbar l/s

> 14 mbar l/s

> 14 mbar l/s

Gas throughput at full rotational speed for He

8 mbar l/s

8 mbar l/s

8 mbar l/s

20 mbar l/s

20 mbar l/s

Gas throughput at full rotational speed for N2

5 mbar l/s

5 mbar l/s

5 mbar l/s

14 mbar l/s

14 mbar l/s

Gas throughput at full rotational speed for Ar

2 mbar l/s

2 mbar l/s

2 mbar l/s

7 mbar l/s

7 mbar l/s

Gas throughput at full rotational speed for CF4

2 mbar l/s

2 mbar l/s

2 mbar l/s

8 mbar l/s

8 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling method, optional Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 60000 rpm 3.5 min Air Water 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.2 kg

< 5·10-10 mbar 60000 rpm 3.5 min Air Water 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 8.2 kg

< 1·10-7 mbar 60000 rpm 3.5 min Air Water 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.5 kg

< 1·10-7 mbar 60000 rpm 1.8 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.7 kg

< 5·10-10 mbar 60000 rpm 1.8 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 8.7 kg

Order number pump

PM P03 990

PM P03 991

PM P03 992

PM P03 900

PM P03 901

Technical data

SeitePage 358 358 Fussleiste Englisch.indd 358

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 300, with TC 400, DN 100 ISO-F

HiPaceTM 300 C, with TC 400, DN 100 ISO-K

HiPaceTM 300 C, with TC 400, DN 100 ISO-F

HiPaceTM 300 C, with TC 400, DN 100 CF-F

HiPaceTM 300 for TCP 350, DN 100 ISO-K

HiPaceTM 300 for TCP 350, DN 100 CF-F

HiPaceTM 300 for TCP 350, DN 100 ISO-K

DN 100 ISO-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 ISO-F DN 16 ISO-KF G 1/8" l/s

DN 100 CF-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

DN 100 CF-F DN 16 ISO-KF G 1/8"

DN 100 ISO-K DN 16 ISO-KF G 1/8"

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

125 l/s 220 l/s 245 l/s 250 l/s 195 l/s

125 l/s 220 l/s 245 l/s 250 l/s 195 l/s

125 l/s 220 l/s 245 l/s 250 l/s 195 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

220 l/s 255 l/s 260 l/s 255 l/s 200 l/s

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

3·102 2.2·103 > 1·106 > 1·107 > 1·107

3·102 2.2·103 > 1·106 > 1·107 > 1·107

3·102 2.2·103 > 1·106 > 1·107 > 1·107

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

9·105 > 1·108 > 1·1011 > 1·1011 > 1·1011

20 mbar

1 mbar

1 mbar

1 mbar

17 mbar

17 mbar

17 mbar

> 14 mbar l/s

> 50 mbar l/s, with backing pump 20 m3/h > 20 mbar l/s, with backing pump 20 m3/h 17 mbar l/s, with backing pump 20 m3/h 4.4 mbar l/s, with backing pump 20 m3/h 5.4 mbar l/s, with backing pump 20 m3/h

> 50 mbar l/s, with backing pump 20 m3/h > 20 mbar l/s, with backing pump 20 m3/h 17 mbar l/s, with backing pump 20 m3/h 4.4 mbar l/s, with backing pump 20 m3/h 5.4 mbar l/s, with backing pump 20 m3/h

> 50 mbar l/s, with backing pump 20 m3/h > 20 mbar l/s, with backing pump 20 m3/h 17 mbar l/s, with backing pump 20 m3/h 4.4 mbar l/s, with backing pump 20 m3/h 5.4 mbar l/s, with backing pump 20 m3/h

> 14 mbar l/s

> 14 mbar l/s

> 14 mbar l/s

11 mbar l/s

11 mbar l/s

11 mbar l/s

7 mbar l/s

7 mbar l/s

7 mbar l/s

4 mbar l/s

4 mbar l/s

4 mbar l/s

4 mbar l/s

4 mbar l/s

4 mbar l/s

< 1·10-7 mbar 60000 rpm 1.8 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 7 kg

< 1·10-7 mbar 60000 rpm 1.2 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.4 kg

< 1·10-7 mbar 60000 rpm 1.2 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.7 kg

< 1·10-8 mbar 60000 rpm 1.2 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 8.4 kg

< 1·10-7 mbar 60000 rpm 2.5 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 5.8 kg

< 5·10-10 mbar 60000 rpm 2.5 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 7.8 kg

< 1·10-7 mbar 60000 rpm 2.5 min Water Air 50 l/h 15-35 °C 5.5 mT ≤ 50 dB (A) IP 54 RS-485, Remote 6.1 kg

PM P03 902

PM P03 906

PM P03 907

PM P03 996

PM P03 993

PM P03 994

PM P03 995

20 mbar l/s

14 mbar l/s

7 mbar l/s

8 mbar l/s

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 359

Turbopumps

OBJ_DOKU-1259-001.fm Seite 359 Dienstag, 12. August 2008 4:56 16

Page 359359 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 360 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 300, with TC 110, DN 100 ISO-K PM P03 990

HiPaceTM 300, with TC 110, DN 100 CF-F PM P03 991

HiPaceTM 300, with TC 110, DN 100 ISO-F PM P03 992

HiPaceTM 300, with TC 400, DN 100 ISO-K PM P03 900

HiPaceTM 300, with TC 400, DN 100 CF-F PM P03 901

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 821 PM 061 341-T PM 061 345-T

PM C01 821 PM 061 341-T PM 061 345-T

PM C01 821 PM 061 341-T PM 061 345-T

PM C01 822 PM 061 342-T PM 061 346-T

PM C01 822 PM 061 342-T PM 061 346-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 351-T

PM 061 351-T

PM 061 351-T

PM 061 350-T

PM 061 350-T

PM 061 350-T

PM 061 352-T

PM 061 352-T

Accessories

Connection cable, length 3 m between TC 110 / TPS/DCU 110/111/180/181 with accessory ports und RS-485, Connection cable for HiPace with TC 110 to power supply TPS/DCU 110/111/180/181 with bridges and RS-485 TC 400 / TPS/DCU 310/311/400/401 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet Venting accessories Venting valve Air drier TTV 001

PM Z01 290 PM Z00 121

PM Z01 290 PM Z00 121

PM Z01 290 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

Cooling accessories Air cooling Water cooling

PM Z01 301 PM 016 624-T

PM Z01 301 PM 016 624-T

PM Z01 301 PM 016 624-T

PM Z01 302

PM Z01 302

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A Connection cable relaisbox - TCP 350 TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 360 360 Fussleiste Englisch.indd 360

PM 061 363-T PM 061 364-T PM 061 365-T

PM 061 366-T PM 061 367-T PM 061 368-T

PM 061 372-T PM 061 373-T

PM 061 372-T PM 061 373-T

PM 061 372-T PM 061 373-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 300, with TC 400, DN 100 ISO-F PM P03 902

HiPaceTM 300 C, with TC 400, DN 100 ISO-K PM P03 906

HiPaceTM 300 C, with TC 400, DN 100 ISO-F PM P03 907

HiPaceTM 300 C, with TC 400, DN 100 CF-F PM P03 996

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 993

HiPaceTM 300 for TCP 350, DN 100 CF-F PM P03 994

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 995

PM C01 822 PM 061 342-T PM 061 346-T

PM C01 822 PM 061 342-T PM 061 346-T

PM C01 822 PM 061 342-T PM 061 346-T

PM C01 822 PM 061 342-T PM 061 346-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 352-T

PM 061 352-T

PM 061 352-T

PM 061 352-T PM 061 356-T

PM 061 356-T

PM 061 356-T

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 302

PM Z01 302

PM Z01 302

PM Z01 302

PM Z01 302

PM Z01 302

PM Z01 302

PM 061 366-T PM 061 367-T PM 061 368-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 361

Turbopumps

OBJ_DOKU-1259-001.fm Seite 361 Dienstag, 12. August 2008 4:56 16

PM 061 366-T PM 061 367-T PM 061 368-T

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

Page 361361 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 362 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

Order number pump General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 362 362 Fussleiste Englisch.indd 362

HiPaceTM 300, with TC 110, DN 100 ISO-K PM P03 990

HiPaceTM 300, with TC 110, DN 100 CF-F PM P03 991

HiPaceTM 300, with TC 110, DN 100 ISO-F PM P03 992

HiPaceTM 300, with TC 400, DN 100 ISO-K PM P03 900

HiPaceTM 300, with TC 400, DN 100 CF-F PM P03 901

PM Z01 311 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 311 PM Z01 317

PM Z01 311 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010

PM 061 207-T PM 061 283-T P 4723 010

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 365-T

PM 016 365-T

PM 016 367-T

PM 016 367-T

PM 016 366-T

PM 016 366-T

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 450-T PM 016 452-T PM 016 451-T PM 016 455-T PM 016 457-T PM 016 456-T PM 016 690-T PM 016 692 -T

PM 016 690-T PM 016 692 -T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 300, with TC 400, DN 100 ISO-F PM P03 902

HiPaceTM 300 C, with TC 400, DN 100 ISO-K PM P03 906

HiPaceTM 300 C, with TC 400, DN 100 ISO-F PM P03 907

HiPaceTM 300 C, with TC 400, DN 100 CF-F PM P03 996

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 993

HiPaceTM 300 for TCP 350, DN 100 CF-F PM P03 994

HiPaceTM 300 for TCP 350, DN 100 ISO-K PM P03 995

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 459-X PM 061 207-T PM 061 283-T

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T

PM 061 207-T PM 061 283-T

PM 051 726-T

PM 051 726-T

PM 051 726-T

PM 016 365-T

PM 016 365-T

PM 016 367-T

PM 016 367-T

PM 016 366-T

PM 016 366-T

PM 016 450-T PM 016 452-T

PM 016 450-T PM 016 452-T

PM 016 450-T PM 016 452-T

PM 016 451-T

PM 016 451-T

PM 016 451-T

PM 016 455-T PM 016 457-T

PM 016 455-T PM 016 457-T

PM 016 455-T PM 016 457-T

PM 016 456-T

PM 016 456-T

PM 016 456-T PM 016 690-T PM 016 692 -T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 363

Turbopumps

OBJ_DOKU-1259-001.fm Seite 363 Dienstag, 12. August 2008 4:56 16

PM 016 690-T PM 016 692 -T

Page 363363 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 364 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 400

Turbopumps HiPaceTM

Compact yet powerful turbopumps with pumping speeds of up to 350 l/s for N2, with a small DN 100 flange connection: HiPaceTM 400 X Maximum reliability in a compact design X Maximum pumping speed and high gas throughput X Suitable for industrial environments Protection class IP 54 X Semi S2 and UL/CSA certification X Monitoring of operating data

Pumping speed Pumping speed [l/s]

N2 He H2 Ar

600 500 400 300 200 100 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPace

SeitePage 364 364 Fussleiste Englisch.indd 364

TM

400

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 365 Dienstag, 12. August 2008 4:56 16

Dimensions

175

206.5

208

ø 208

130

117

230.5

HV DN 100 ISO-K

ø8

30°

239

59

16.7°

VV DN 25 ISO-KF / G1/4"

131

ø 15 0 M8 (6x) M8 (6x) 45°

45°

145.5

HiPaceTM 400, with TC 400, DN 100 ISO-K

131

239

175 208

ø 208

130

116.9

M8 (6x) M8 (6x) 45°

Turbopumps

HV DN 100 ISO-F

ø8

30°

230.5

16.7°

206.5

59 VV DN 25 ISO-KF / G1/4"

45°

145.5

HiPaceTM 400, with TC 400, DN 100 ISO-F

Ø8

239

208

0

175

DN 100 CF-F

208

130

117

Ø 15

HV

30°

230.5

16.7°

206.5

59

VV DN 25 ISO-KF

131

M8 (6x)

45°

45° 145.5

HiPaceTM 400, with TC 400, DN 100 CF-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 365

Page 365365 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 366 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 400, with TC 400, DN 100 ISO-K

HiPaceTM 400, with TC 400, DN 100 CF-F

HiPaceTM 400, with TC 400, DN 100 ISO-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 100 ISO-K DN 25 ISO-KF G 1/8"

DN 100 CF-F DN 25 ISO-KF G 1/8"

DN 100 ISO-F DN 25 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

445 l/s 470 l/s 355 l/s 320 l/s

445 l/s 470 l/s 355 l/s 320 l/s

445 l/s 470 l/s 355 l/s 320 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

4·105 > 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

Fore Vacuum max. for N2

11 mbar

11 mbar

11 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling method, optional Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.6 kg

< 5·10-10 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 17.5 kg

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 12 kg

Order number pump

PM P04 023

PM P04 024

PM P04 025

Technical data

SeitePage 366 366 Fussleiste Englisch.indd 366

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 400, with TC 400, DN 100 ISO-K

HiPaceTM 400, with TC 400, DN 100 CF-F

HiPaceTM 400, with TC 400, DN 100 ISO-F

DN 100 ISO-K DN 25 ISO-KF G 1/8"

DN 100 CF-F DN 25 ISO-KF G 1/8"

DN 100 ISO-F DN 25 ISO-KF G 1/8"

445 l/s 470 l/s 355 l/s 320 l/s

445 l/s 470 l/s 355 l/s 320 l/s

445 l/s 470 l/s 355 l/s 320 l/s

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

10 mbar

10 mbar

10 mbar

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 10.9 kg

< 5·10-10 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 16.6 kg

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.1 kg

PM P04 026

PM P04 027

PM P04 028

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 367

Turbopumps

OBJ_DOKU-1259-001.fm Seite 367 Dienstag, 12. August 2008 4:56 16

Page 367367 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 368 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 400, with TC 400, DN 100 ISO-K PM P04 023

HiPaceTM 400, with TC 400, DN 100 CF-F PM P04 024

HiPaceTM 400, with TC 400, DN 100 ISO-F PM P04 025

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 823 PM 061 343-T PM 061 347-T

PM C01 823 PM 061 343-T PM 061 347-T

PM C01 823 PM 061 343-T PM 061 347-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 352-T

PM 061 352-T

PM 061 352-T

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

Cooling accessories Air cooling

PM Z01 303

PM Z01 303

PM Z01 303

Accessories

Connection cable, length 3 m between TC 400 / TPS/DCU 310/311/400/401 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A Connection cable relaisbox - TCP 350 TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 368 368 Fussleiste Englisch.indd 368

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 400 for TCP 350 DN 100 ISO-K PM P04 026

HiPaceTM 400 for TCP 350, DN 100 CF-F PM P04 027

HiPaceTM 400 for TCP 350, DN 100 ISO-F PM P04 028

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 356-T

PM 061 356-T

PM 061 356-T

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 303

PM Z01 303

PM Z01 303

Turbopumps

OBJ_DOKU-1259-001.fm Seite 369 Dienstag, 12. August 2008 4:56 16

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 369

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

Page 369369 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 370 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

Order number pump General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 370 370 Fussleiste Englisch.indd 370

HiPaceTM 400, with TC 400, DN 100 ISO-K PM P04 023

HiPaceTM 400, with TC 400, DN 100 CF-F PM P04 024

HiPaceTM 400, with TC 400, DN 100 ISO-F PM P04 025

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 006 459-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 380-T PM 016 382-T PM 016 381-T PM 016 450-T PM 016 452-T PM 016 451-T PM 016 455-T PM 016 457-T PM 016 456-T PM 016 690-T PM 016 692 -T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 371 Dienstag, 12. August 2008 4:56 16

HiPaceTM 400 for TCP 350 DN 100 ISO-K PM P04 026

HiPaceTM 400 for TCP 350, DN 100 CF-F PM P04 027

HiPaceTM 400 for TCP 350, DN 100 ISO-F PM P04 028

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 006 459-X PM 061 207-T

PM 016 336 PM 016 315 PM 006 488-X PM 061 207-T

PM 061 207-T

PM 051 726-T

PM 051 726-T

PM 051 726-T

PM 016 380-T Turbopumps

PM 016 382-T PM 016 381-T PM 016 450-T PM 016 452-T PM 016 451-T PM 016 455-T PM 016 457-T PM 016 456-T PM 016 690-T PM 016 692 -T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 371

Page 371371 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 372 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 700

Turbopumps HiPaceTM

Maximum vacuum performance in a compact design with a pumping speed of 685 l/s for N2: X Minimum footprint and maximum reliability

HiPaceTM 700

X High gas throughput and high pumping speed X Suitable for industrial environments Protection class IP 54 X Semi S2 and UL/CSA certification X Monitoring of operating data

Pumping speed [l/s]

Pumping speed

N2 He H2 Ar

800 700 600 500 400 300 200 100 0 10-6

10-5

10-4

10-3

10-2

10-1

100

Pressure [mbar]

HiPace

SeitePage 372 372 Fussleiste Englisch.indd 372

TM

700

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 373 Dienstag, 12. August 2008 4:56 16

Dimensions 252 59

16.7°

30°

Ø8

HV DN 160 ISO-K

Ø 15

179

212

203.5

181 131

130

117

Ø208

148

VV DN 25 ISO-KF

0

M8 (6x)

45°

45°

145.5

HiPaceTM 700, with TC 400, DN 160 ISO-K

Turbopumps

181 131

ø 208

130

116.9

ø 15

203.5

HV DN 160 ISO-F

ø8

212

30°

148

16.7°

179.5

59 VV DN 25 ISO-KF / G1/4"

0

M8 (6x) M8 (6x)

45°

145.5

45°

HiPaceTM 700, with TC 400, DN 160 ISO-F

0

215.5

224

130

116.9

ø 15

160

191.5

HV DN 160 CF-F

ø8

131

30°

ø 208

16.7°

193

59 VV DN 25 ISO-KF / G1/4"

M8 (6x) M8 (6x) 45°

45°

145.5

HiPaceTM 700, with TC 400, DN 160 CF-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 373

Page 373373 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 374 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 700, with TC 400, DN 160 ISO-K

HiPaceTM 700, with TC 400, DN 160 CF-F

HiPaceTM 700, with TC 400, DN 160 ISO-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 160 ISO-K DN 25 ISO-KF G 1/8"

DN 160 CF-F DN 25 ISO-KF G 1/8"

DN 160 ISO-F DN 25 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar

555 l/s 655 l/s 685 l/s 665 l/s

555 l/s 655 l/s 685 l/s 665 l/s

555 l/s 655 l/s 685 l/s 665 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

Fore Vacuum max. for N2

11 mbar

11 mbar

11 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

> 14 mbar l/s 10 mbar l/s 6.5 mbar l/s 3.5 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling method, optional Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.5 kg

< 5·10-10 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 17.4 kg

< 1·10-7 mbar 49200 rpm 2 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 12.1 kg

Order number pump

PM P03 933

PM P03 934

PM P03 935

Technical data

SeitePage 374 374 Fussleiste Englisch.indd 374

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:40 Uhr


HiPaceTM 700 for TCP 350, DN 160 ISO-K

HiPaceTM 700 for TCP 350, DN 160 CF-F

HiPaceTM 700 for TCP 350, DN 160 ISO-F

DN 160 ISO-K DN 25 ISO-KF G 1/8"

DN 160 CF-F DN 25 ISO-KF G 1/8"

DN 160 ISO-F DN 25 ISO-KF G 1/8"

555 l/s 655 l/s 685 l/s 665 l/s

555 l/s 655 l/s 685 l/s 665 l/s

555 l/s 655 l/s 685 l/s 665 l/s

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

4·105 3·107 > 1·1011 > 1·1011

10 mbar

10 mbar

10 mbar

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

> 8 mbar l/s 5 mbar l/s 3 mbar l/s 1.5 mbar l/s

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 10.6 kg

< 5·10-10 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 16.5 kg

< 1·10-7 mbar 49200 rpm 5.5 min Water Air 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 11.2 kg

PM P04 080

PM P04 081

PM P04 082

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 375

Turbopumps

OBJ_DOKU-1259-001.fm Seite 375 Dienstag, 12. August 2008 4:56 16

Page 375375 Seite 14.08.2008 12:46:40 Uhr


OBJ_DOKU-1259-001.fm Seite 376 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Order number pump

HiPaceTM 700, with TC 400, DN 160 ISO-K PM P03 933

HiPaceTM 700, with TC 400, DN 160 CF-F PM P03 934

HiPaceTM 700, with TC 400, DN 160 ISO-F PM P03 935

Power supplies/power DCU - power supply with display control unit TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 823 PM 061 343-T PM 061 347-T

PM C01 823 PM 061 343-T PM 061 347-T

PM C01 823 PM 061 343-T PM 061 347-T

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 352-T

PM 061 352-T

PM 061 352-T

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

Cooling accessories Air cooling

PM Z01 303

PM Z01 303

PM Z01 303

Accessories

Connection cable, length 3 m between TC 400 / TPS/DCU 310/311/400/401 TCP 350 - HiPace (for TC 400) External drive units TCP 350 TCP 350 PB - Profibus TCP 350 DN - DeviceNet

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A Connection cable relaisbox - TCP 350 TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 376 376 Fussleiste Englisch.indd 376

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM 061 374-T PM 061 375-T

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


HiPaceTM 700 for TCP 350, DN 160 ISO-K PM P04 080

HiPaceTM 700 for TCP 350, DN 160 CF-F PM P04 081

HiPaceTM 700 for TCP 350, DN 160 ISO-F PM P04 082

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

P 4564 309 ZA P 4564 309 ZE P 4564 309 ZF

PM 061 356-T

PM 061 356-T

PM 061 356-T

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM C01 740 PM C01 741 PM C01 742

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 303

PM Z01 303

PM Z01 303

Turbopumps

OBJ_DOKU-1259-001.fm Seite 377 Dienstag, 12. August 2008 4:56 16

PM 061 369-T PM 061 370-T PM 061 371-T

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 377

PM 061 374-T PM 061 375-T PM 061 377-T PM Z01 205 PM Z01 206

Page 377377 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 378 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

Order number pump General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 378 378 Fussleiste Englisch.indd 378

HiPaceTM 700, with TC 400, DN 160 ISO-K PM P03 933

HiPaceTM 700, with TC 400, DN 160 CF-F PM P03 934

HiPaceTM 700, with TC 400, DN 160 ISO-F PM P03 935

PM Z01 312 PM Z01 317 PM 016 216-U PM 016 218-U PM 016 217-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 216-U PM 016 218-U PM 016 217-U

PM 006 492-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 339 PM 016 318 PM 006 493-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 375-T PM 016 377-T PM 016 376-T PM 016 460-T PM 016 462-T PM 016 461-T PM 016 465-T PM 016 467-T PM 016 466-T PM 016 691-T PM 016 693-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 379 Dienstag, 12. August 2008 4:56 16

HiPaceTM 700 for TCP 350, DN 160 ISO-K PM P04 080

HiPaceTM 700 for TCP 350, DN 160 CF-F PM P04 081

HiPaceTM 700 for TCP 350, DN 160 ISO-F PM P04 082

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM Z01 312 PM Z01 317

PM Z01 312 PM Z01 317 PM 016 210-U PM 016 212-U PM 016 211-U

PM 006 492-X PM 061 207-T

PM 016 339 PM 016 318 PM 006 493-X PM 061 207-T

PM 061 207-T

PM 051 726-T

PM 051 726-T

PM 051 726-T

PM 016 375-T Turbopumps

PM 016 377-T PM 016 376-T PM 016 460-T PM 016 462-T PM 016 461-T PM 016 465-T PM 016 467-T PM 016 466-T PM 016 690-T PM 016 692 -T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 379

Page 379379 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 380 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 1200

Turbopumps HiPaceTM

Powerful turbopumps with pumping speeds of up to 1300 l/s. X High pumping speeds for both light and

HiPaceTM 1200

heavy gases X High process integrity, resistant to particulate matter X High gas throughputs, even for heavy gases

C = Corrosive gas version U = Upside-down installation orientation

N2 He H2 Ar CF4

Pumping speed [l/s]

Pumping speed 1400 1200 1000 800 600 400 200 0 10 -5

10 -4

10 -3

10 -2

10 -1

10 0 Pressure [mbar]

HiPaceTM 1200

SeitePage 380 380 Fussleiste Englisch.indd 380

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 381 Dienstag, 12. August 2008 4:56 16

Dimensions Ø264 Ø240

203.1

123

189.5

24

40°

10°

358.8

45 °

213.8

G1/8"

237.8

DN 200 ISO-K HV

16 1. 12 5 Ø9

70 °

141.9

Ø230 DN 40 ISO-KF VV

HiPaceTM 1200 with TC 1200, DN 200 ISO-K Ø285 264

Turbopumps

210.1 244.8 365.8

220.8

130

1. 5

45°

Ø9

196.5

16

12

DN 200 ISO-F HV

G1/8"

10°

40 °

24

70 °

141.9 Ø230 DN 40 ISO-KF VV

HiPaceTM 1200 with TC 1200, DN 200 ISO-F Ø 264 Ø 253

40 °

24

10°

377.8

222.1 G1/8"

256.8

45°

144

1. 5

232.8

Ø9

208.5

16

12

DN 200 CF-F HV

70 °

142

DN 40 ISO-KF VV

Ø 230

HiPaceTM 1200, with TC 1200, DN 200 CF-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 381

Page 381381 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 382 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 1200 with TC 1200, DN 200 ISO-K

HiPaceTM 1200 with TC 1200, DN 200 ISO-F

HiPaceTM 1200, with TC 1200, DN 200 CF-F

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-F, upside down version

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

DN 200 CF-F DN 40 ISO-KF G 1/8"

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

Fore Vacuum max. for N2

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for CF4

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 27 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 28 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 40 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 27 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 28 kg

Order number pump

PM P03 910

PM P03 911

PM P03 912

PM P03 913

PM P03 914

Technical data

SeitePage 382 382 Fussleiste Englisch.indd 382

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


HiPaceTM 1200 U, with TC 1200, DN 200 CF-F, upside down version

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-K, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-F, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 CF-F, corrosive

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive

HiPaceTM 1200 UC, with TC 1200, DN 200 CF-F, upside down version, corrosive

DN 200 CF-F DN 40 ISO-KF G 1/8"

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

DN 200 CF-F DN 40 ISO-KF G 1/8"

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

DN 200 CF-F DN 40 ISO-KF G 1/8"

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

1100 l/s 1300 l/s 1250 l/s 1200 l/s 950 l/s

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 40 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 27 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 28 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 40 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 27 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 28 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 40 kg

PM P03 915

PM P03 916

PM P03 917

PM P04 190

PM P03 918

PM P03 919

PM P04 191

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 383

Turbopumps

OBJ_DOKU-1259-001.fm Seite 383 Dienstag, 12. August 2008 4:56 16

Page 383383 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 384 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 1200 with TC 1200, DN 200 ISO-K

HiPaceTM 1200 with TC 1200, DN 200 ISO-F

HiPaceTM 1200, with TC 1200, DN 200 CF-F

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-F, upside down version

Order number pump

PM P03 910

PM P03 911

PM P03 912

PM P03 913

PM P03 914

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 384 384 Fussleiste Englisch.indd 384

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


HiPaceTM 1200 U, with TC 1200, DN 200 CF-F, upside down version

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-K, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-F, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 CF-F, corrosive

PM P04 190

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive PM P03 918

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive PM P03 919

HiPaceTM 1200 UC, with TC 1200, DN 200 CF-F, upside down version, corrosive PM P04 191

PM P03 915

PM P03 916

PM P03 917

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 385

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Turbopumps

OBJ_DOKU-1259-001.fm Seite 385 Dienstag, 12. August 2008 4:56 16

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Page 385385 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 386 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 1200 with TC 1200, DN 200 ISO-K

HiPaceTM 1200 with TC 1200, DN 200 ISO-F

HiPaceTM 1200, with TC 1200, DN 200 CF-F

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1200 U, with TC 1200, DN 200 ISO-F, upside down version

Order number pump

PM P03 910

PM P03 911

PM P03 912

PM P03 913

PM P03 914

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 386 386 Fussleiste Englisch.indd 386

PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 342 PM 016 321 PM 006 669-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 390-T

PM 016 390-T

PM 016 392-T

PM 016 392-T

PM 016 391-T

PM 016 391-T PM 016 470-T PM 016 472-T

PM 016 470-T PM 016 472-T

PM 016 471-T

PM 016 471-T

PM 016 475-T PM 016 477-T

PM 016 475-T PM 016 477-T

PM 016 476-T

PM 016 476-T PM 016 687-T PM 016 688-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 387 Dienstag, 12. August 2008 4:56 16

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-K, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 ISO-F, corrosive

HiPaceTM 1200 C, with TC 1200, DN 200 CF-F, corrosive

PM P03 915

PM P03 916

PM P03 917

PM P04 190

PM Z01 313 PM Z01 318

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318

PM 016 342 PM 016 321 PM 006 669-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 342 PM 016 321 PM 006 669-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive PM P03 919

HiPaceTM 1200 UC, with TC 1200, DN 200 CF-F, upside down version, corrosive PM P04 191

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318

PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 390-T

PM 016 390-T

PM 016 392-T

PM 016 392-T

PM 016 391-T

PM 016 391-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 470-T PM 016 472-T

PM 016 470-T PM 016 472-T

PM 016 471-T

PM 016 471-T

PM 016 475-T PM 016 477-T

PM 016 475-T PM 016 477-T

PM 016 476-T PM 016 687-T PM 016 688-T

Fussleiste Englisch.indd 387

HiPaceTM 1200 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive PM P03 918

PM 016 342 PM 016 321 PM 006 669-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

Turbopumps

HiPaceTM 1200 U, with TC 1200, DN 200 CF-F, upside down version

PM 016 476-T PM 016 687-T PM 016 688-T

PM 016 687-T PM 016 688-T

Page 387387 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 388 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 1500

Turbopumps HiPaceTM

Powerful turbopumps with pumping speeds of up to 1450 l/s. X High pumping speeds for both light and

HiPaceTM 1500

heavy gases X High process integrity, resistant to particulate matter X High gas throughputs, even for heavy gases

C = Corrosive gas version U = Upside-down installation orientation

N2 He H2 Ar CF4

Pumping speed [l/s]

Pumping speed 1600 1400 1200 1000 800 600 400 200 0 10 -5

10 -4

10 -3

10 -2

10 -1

10 0

Pressure [mbar]

HiPaceTM 1500

SeitePage 388 388 Fussleiste Englisch.indd 388

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 389 Dienstag, 12. August 2008 4:56 16

Dimensions Ø290 264 .5

202.3

45°

Ø9

191.6 226.3 347.3

12

DN 250 ISO-K HV

178 111.5

16 1

40 °

24

10°

G1/8"

70 °

141.9 230 DN 40 ISO-KF VV

HiPaceTM 1500 with TC 1200, DN 250 ISO-K Ø335 Ø264

202.3

Turbopumps

DN 250 ISO-F HV

5

191.6 226.3 347.3

16 1.

45°

Ø9

178 113.5

12

40°

24

10°

G1/8"

70 °

141.9 Ø230 DN 40 ISO-KF VV

HiPaceTM 1500 with TC 1200, DN 250 ISO-F Ø305 Ø264

191.6

202.3

45° 40 °

24

10°

G1/8"

347.3

DN 250 CF-F HV

1. 5

226.3

16

Ø9

178 111.5

12

70 °

141.9 Ø230 DN 40 ISO-KF VV

HiPaceTM 1500 with TC 1200, DN 250 CF-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 389

Page 389389 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 390 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 1500 with TC 1200, DN 250 ISO-K

HiPaceTM 1500 with TC 1200, DN 250 ISO-F

HiPaceTM 1500 with TC 1200, DN 250 CF-F

HiPaceTM 1500 U, with TC 1200, DN 250 ISO-K, upside down version

HiPaceTM 1500 U with TC 1200, DN 250 ISO-F, upside down version

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G 1/8"

DN 250 CF-F DN 40 ISO-KF G 1/8"

DN 250-ISO-K DN 40 ISO-KF G 1/8"

DN 250-ISO-F DN 40 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

Fore Vacuum max. for N2

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for CF4

> 30 mbar l/s > 30 mbar l/s 2 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 29 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 30 kg

> 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 41 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 29 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 30 kg

Order number pump

PM P04 060

PM P04 061

PM P04 062

PM P04 063

PM P04 064

Technical data

SeitePage 390 390 Fussleiste Englisch.indd 390

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


HiPaceTM 1500 U, with TC 1200, DN 250 CF-F, upside down version

HiPaceTM 1500 C, with TC 1200, DN 250 ISO-K, corrosive

HiPaceTM 1500 C, with TC 1200, DN 250 ISO-F, corrosive

HiPaceTM 1500 C, with TC 1200, DN 250 CF-F, corrosive

HiPaceTM 1500 UC, with TC 1200, DN 250 ISO-K, upside down version, corrosive

HiPaceTM 1500 UC, with TC 1200, DN 250 ISO-F, upside down version, corrosive

HiPaceTM 1500 UC, with TC 1200, DN 250 CF-F, upside down version, corrosive

DN 250 CF-F DN 40 ISO-KF G 1/8"

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G 1/8"

DN 250 CF-F DN 40 ISO-KF G 1/8"

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G /18"

DN 250 CF-F DN 40 ISO-KF G 1/8"

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

1150 l/s 1350 l/s 1450 l/s 1400 l/s 1100 l/s

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103/ 2·105 > 1·108 > 1·108 >1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

6·103 2·105 > 1·108 > 1·108 > 1·108

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

2 mbar

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

> 30 mbar l/s > 30 mbar l/s 20 mbar l/s 11 mbar l/s 12 mbar l/s

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 41 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 29 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 30 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 41 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 29 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 ≤ 50 dB (A) IP 54 RS-485, Remote 30 kg

< 1·10-7 mbar 37800 rpm 2.5 min Water 100 l/h 15-35 °C 6 mT ≤ 50 dB (A) IP 54 RS-485, Remote 41 kg

PM P04 065

PM P04 066

PM P04 067

PM P04 192

PM P04 068

PM P04 069

PM P04 193

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 391

Turbopumps

OBJ_DOKU-1259-001.fm Seite 391 Dienstag, 12. August 2008 4:56 16

Page 391391 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 392 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 1500 with TC 1200, DN 250 ISO-K

HiPaceTM 1500 with TC 1200, DN 250 ISO-F

HiPaceTM 1500 with TC 1200, DN 250 CF-F

HiPaceTM 1500 U, with TC 1200, DN 250 ISO-K, upside down version

HiPaceTM 1500 U with TC 1200, DN 250 ISO-F, upside down version

Order number pump

PM P04 060

PM P04 061

PM P04 062

PM P04 063

PM P04 064

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 392 392 Fussleiste Englisch.indd 392

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


HiPaceTM 1500 U, with TC 1200, DN 250 CF-F, upside down version

HiPaceTM 1500 C, with TC 1200, DN 250 ISO-K, corrosive

HiPaceTM 1500 C, with TC 1200, DN 250 ISO-F, corrosive

HiPaceTM 1500 C, with TC 1200, DN 250 CF-F, corrosive

PM P04 192

HiPaceTM 1500 UC, with TC 1200, DN 250 ISO-K, upside down version, corrosive PM P04 068

HiPaceTM 1500 UC, with TC 1200, DN 250 ISO-F, upside down version, corrosive PM P04 069

HiPaceTM 1500 UC, with TC 1200, DN 250 CF-F, upside down version, corrosive PM P04 193

PM P04 065

PM P04 066

PM P04 067

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 393

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 560-T PM 061 561-T PM 061 562-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Turbopumps

OBJ_DOKU-1259-001.fm Seite 393 Dienstag, 12. August 2008 4:56 16

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Page 393393 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 394 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 1500 with TC 1200, DN 250 ISO-K

HiPaceTM 1500 with TC 1200, DN 250 ISO-F

HiPaceTM 1500 with TC 1200, DN 250 CF-F

HiPaceTM 1500 U, with TC 1200, DN 250 ISO-K, upside down version

HiPaceTM 1500 U with TC 1200, DN 250 ISO-F, upside down version

Order number pump

PM P04 060

PM P04 061

PM P04 062

PM P04 063

PM P04 064

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 394 394 Fussleiste Englisch.indd 394

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 395-T

PM 016 395-T

PM 016 397-T

PM 016 397-T

PM 016 396-T

PM 016 396-T PM 016 480-T PM 016 482-T

PM 016 480-T PM 016 482-T

PM 016 481-T

PM 016 481-T

PM 016 485-T PM 016 487-T

PM 016 485-T PM 016 487-T

PM 016 486-T

PM 016 486-T PM 016 694-T PM 016 695-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 395 Dienstag, 12. August 2008 4:56 16

HiPaceTM 1500 C, with TC 1200, DN 250 ISO-K, corrosive

HiPaceTM 1500 C, with TC 1200, DN 250 ISO-F, corrosive

HiPaceTM 1500 C, with TC 1200, DN 250 CF-F, corrosive

PM P04 065

PM P04 066

PM P04 067

PM P04 192

PM Z01 313 PM Z01 318

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

HiPaceTM 1500 UC, with TC 1200, DN 250 ISO-F, upside down version, corrosive PM P04 069

HiPaceTM 1500 UC, with TC 1200, DN 250 CF-F, upside down version, corrosive PM P04 193

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 395-T

PM 016 395-T

PM 016 397-T

PM 016 397-T

PM 016 396-T

PM 016 396-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 480-T PM 016 482-T

PM 016 480-T PM 016 482-T

PM 016 481-T

PM 016 481-T

PM 016 485-T PM 016 487-T

PM 016 485-T PM 016 487-T

PM 016 486-T PM 016 694-T PM 016 695-T

Fussleiste Englisch.indd 395

HiPaceTM 1500 UC, with TC 1200, DN 250 ISO-K, upside down version, corrosive PM P04 068

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

Turbopumps

HiPaceTM 1500 U, with TC 1200, DN 250 CF-F, upside down version

PM 016 486-T PM 016 694-T PM 016 695-T

PM 016 694-T PM 016 695-T

Page 395395 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 396 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 1800

Turbopumps HiPaceTM

Powerful turbopumps with pumping speeds of up to 1700 l/s. X High pumping speeds for both light and

HiPaceTM 1800

heavy gases X High process integrity, resistant to particulate matter X High gas throughputs, even for heavy gases

C = Corrosive gas version U = Upside-down installation orientation

N2 He H2 Ar CF4

Pumping speed [l/s]

Pumping speed 2000 1800 1600 1400 1200 1000 800 600 400 200 0 10 -5

10 -4

10 -3

10 -2

10 0 10 -1 Pressure [mbar]

HiPaceTM 1800

SeitePage 396 396 Fussleiste Englisch.indd 396

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 397 Dienstag, 12. August 2008 4:56 16

Dimensions Ø311 Ø240 DN 200 ISO-K HV 5

278 399

248.5

43°

162

16 1.

256

Ø9

241.4

12

G1/8"

24

10°

40 °

48 ° 151.1 Ø230 DN 40 ISO-KF VV

HiPaceTM 1800, with TC 1200, DN 200 ISO-K Ø311 Ø285 DN 200 ISO-F HV 16 1. 5

Turbopumps

12

286

256.5

407

264

43°

249.4 172.5

Ø9

24

40°

10°

G1/8"

48

°

151.1

Ø230 DN 40 ISO-KF VV

HiPaceTM 1800 with TC 1200, DN 200 ISO-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 397

Page 397397 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 398 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 1800, with TC 1200, DN 200 ISO-K

HiPaceTM 1800 with TC 1200, DN 200 ISO-F

HiPaceTM 1800 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1800 U, with TC 1200, DN 200 ISO-F, upside down version

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

Fore Vacuum max. for N2

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for CF4

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 33 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 33 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

Order number pump

PM P04 070

PM P04 071

PM P04 073

PM P04 070

Technical data

SeitePage 398 398 Fussleiste Englisch.indd 398

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:41 Uhr


HiPaceTM 1800 C, with TC 1200, DN 200 ISO-K, corrosive

HiPaceTM 1800 C, with TC 1200, DN 200 ISO-F, corrosive

HiPaceTM 1800 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive

HiPaceTM 1800 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

DN 200 ISO-K DN 40 ISO-KF G 1/8"

DN 200 ISO-F DN 40 ISO-KF G 1/8"

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

1700 l/s 1650 l/s 1450 l/s 1370 l/s 1050 l/s

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 33 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 33 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

PM P04 076

PM P04 077

PM P04 078

PM P04 079

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 399

Turbopumps

OBJ_DOKU-1259-001.fm Seite 399 Dienstag, 12. August 2008 4:56 16

Page 399399 Seite 14.08.2008 12:46:41 Uhr


OBJ_DOKU-1259-001.fm Seite 400 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 1800, with TC 1200, DN 200 ISO-K

HiPaceTM 1800 with TC 1200, DN 200 ISO-F

HiPaceTM 1800 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1800 U, with TC 1200, DN 200 ISO-F, upside down version

Order number pump

PM P04 070

PM P04 071

PM P04 073

PM P04 070

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

SeitePage 400 400 Fussleiste Englisch.indd 400

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


HiPaceTM 1800 C, with TC 1200, DN 200 ISO-K, corrosive

HiPaceTM 1800 C, with TC 1200, DN 200 ISO-F, corrosive

PM P04 077

HiPaceTM 1800 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive PM P04 078

HiPaceTM 1800 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive PM P04 079

PM P04 076

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 401

Turbopumps

OBJ_DOKU-1259-001.fm Seite 401 Dienstag, 12. August 2008 4:56 16

Page 401401 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 402 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 1800, with TC 1200, DN 200 ISO-K

HiPaceTM 1800 with TC 1200, DN 200 ISO-F

HiPaceTM 1800 U, with TC 1200, DN 200 ISO-K, upside down version

HiPaceTM 1800 U, with TC 1200, DN 200 ISO-F, upside down version

Order number pump

PM P04 070

PM P04 071

PM P04 073

PM P04 070

General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws

SeitePage 402 402 Fussleiste Englisch.indd 402

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 410-T

PM 016 410-T

PM 016 412-T

PM 016 412-T

PM 016 411-T

PM 016 411-T

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 470-T PM 016 472-T

PM 016 470-T PM 016 472-T

PM 016 471-T

PM 016 471-T

PM 016 475-T PM 016 477-T

PM 016 475-T PM 016 477-T

PM 016 476-T

PM 016 476-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 403 Dienstag, 12. August 2008 4:56 16

HiPaceTM 1800 C, with TC 1200, DN 200 ISO-F, corrosive

PM P04 076

PM P04 077

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

HiPaceTM 1800 UC, with TC 1200, DN 200 ISO-K, upside down version, corrosive PM P04 078

HiPaceTM 1800 UC, with TC 1200, DN 200 ISO-F, upside down version, corrosive PM P04 079

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U PM 006 668-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM Z01 313 PM Z01 318 PM 016 220-U PM 016 222-U PM 016 221-U

PM 016 410-T

PM 016 410-T

PM 016 412-T

PM 016 412-T

PM 016 411-T

PM 016 411-T PM 016 470-T PM 016 472-T

PM 016 470-T PM 016 472-T

PM 016 471-T

PM 016 471-T

PM 016 475-T PM 016 477-T

PM 016 475-T PM 016 477-T

PM 016 476-T

PM 016 476-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 403

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

Turbopumps

HiPaceTM 1800 C, with TC 1200, DN 200 ISO-K, corrosive

Page 403403 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 404 Dienstag, 12. August 2008 4:56 16

Vacuum generation

HiPaceTM 2300

Turbopumps HiPaceTM

Powerful turbopumps with pumping speeds of up to 2050 l/s. X High pumping speeds for both light and

HiPaceTM 2300

heavy gases X High process integrity, resistant to particulate matter X High gas throughputs, even for heavy gases

C=Corrosive gas version U=Upside-down installation orientation

N2 He H2 Ar CF4

Pumping speed [l/s]

Pumping speed 2400 2200 2000 1800 1600 1400 1200 1000 800 600 400 200 0 10 -5

10 -4

10 -3

10 -2

10 0 10 -1 Pressure [mbar]

HiPaceTM 2300

SeitePage 404 404 Fussleiste Englisch.indd 404

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 405 Dienstag, 12. August 2008 4:56 16

Dimensions Ø311 Ø290

192 258

236

142

.5

43°

Ø9

221.4

16 1

12

DN 250 ISO-K HV

40 °

24

10°

379

G1/8"

48 °

151.1 Ø230 DN 40 ISO-KF VV

HiPaceTM 2300 with TC 1200, DN 250 ISO-K Ø335 Ø311

266

236.5

152.5

G1/8"

40°

24

10°

387

244

Turbopumps

DN 250 ISO-F HV

1. 5

43°

Ø9

229

16

12

48 °

151.1 Ø230 DN 40 ISO-KF VV

HiPaceTM 2300 with TC 1200, DN 250 ISO-F Ø311 Ø305 DN 250 CF-F HV

251.5 281

43°

259

Ø9

1. 5

402

16

244.4 167.5

12

G1/8"

24

10°

40 °

151.1

48 °

Ø230 DN 40 ISO-KF VV

HiPaceTM 2300 with TC 1200, DN 250 CF-F

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 405

Page 405405 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 406 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

HiPaceTM 2300 with TC 1200, DN 250 ISO-K

HiPaceTM 2300 with TC 1200, DN 250 ISO-F

HiPaceTM 2300 with TC 1200, DN 250 CF-F

HiPaceTM 2300 U, with TC 1200, DN 250 ISO-K, upside down version

HiPaceTM 2300 U, with TC 1200, DN 250 ISO-F, upside down version

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G 1/8"

DN 250 CF-F DN 40 ISO-KF G 1/8"

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G 1/8"

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

Fore Vacuum max. for N2

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

Gas througput Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for CF4

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces Weight

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 35 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 47 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 IP 54 RS-485, Remote 35 kg

Order number pump

PM P03 920

PM P03 921

PM P03 922

PM P03 923

PM P03 924

Technical data

SeitePage 406 406 Fussleiste Englisch.indd 406

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


HiPaceTM 2300 U, with TC 1200, DN 250 CF-F, upside down version

HiPaceTM 2300 C, with TC 1200, DN 250 ISO-K, corrosive

HiPaceTM 2300 C, with TC 1200, DN 250 ISO-F, corrosive

HiPaceTM 2300 C, with TC 1200, DN 250 CF-F, corrosive

HiPaceTM 2300 UC, with TC 1200, DN 250 ISO-K, upside down version, corrosive

HiPaceTM 2300 UC, with TC 1200, DN 250 ISO-F, upside down version, corrosive

HiPaceTM 2300 UC, with TC 1200, DN 250 CF-F, upside down version, corrosive

DN 250 CF-F DN 40 ISO-KF G 1/8"

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G 1/8"

DN 250 CF-F DN 40 ISO-KF G 1/8"

DN 250 ISO-K DN 40 ISO-KF G 1/8"

DN 250 ISO-F DN 40 ISO-KF G 1/8"

DN 250 CF-F DN 40 ISO-KF G 1/8"

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

1850 l/s 2050 l/s 1900 l/s 1850 l/s 1450 l/s

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

2·104 3·105 > 1·108 > 1·108 > 1·108

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

1.8 mbar

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

> 30 mbar l/s 20 mbar l/s 20 mbar l/s 16 mbar l/s 14 mbar l/s

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 47 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 35 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 47 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 34 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 35 kg

< 1·10-7 mbar 31500 rpm 4 min Water 100 l/h 15-35 °C 7 mT ≤ 50 dB (A) IP 54 RS-485, Remote 47 kg

PM P03 925

PM P03 926

PM P03 927

PM P04 194

PM P03 928

PM P03 929

PM P04 195

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 407

Turbopumps

OBJ_DOKU-1259-001.fm Seite 407 Dienstag, 12. August 2008 4:56 16

Page 407407 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 408 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 2300 with TC 1200, DN 250 ISO-K

HiPaceTM 2300 with TC 1200, DN 250 ISO-F

HiPaceTM 2300 with TC 1200, DN 250 CF-F

HiPaceTM 2300 U, with TC 1200, DN 250 ISO-K, upside down version

HiPaceTM 2300 U, with TC 1200, DN 250 ISO-F, upside down version

Order number pump

PM P03 920

PM P03 921

PM P03 922

PM P03 923

PM P03 924

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 115 V AC mains cable with UL plug 208 V AC mains cable with UL plug

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

Venting accessories Venting valve Air drier TTV 001

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Heating jacket 115 V AC, UL plug Backing pump control Backing pump relay box, single phase 5 A Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 408 408 Fussleiste Englisch.indd 408

PM 061 563-T PM 061 564-T PM 061 565-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


HiPaceTM 2300 U, with TC 1200, DN 250 CF-F, upside down version

HiPaceTM 2300 C, with TC 1200, DN 250 ISO-K, corrosive

HiPaceTM 2300 C, with TC 1200, DN 250 ISO-F, corrosive

HiPaceTM 2300 C, with TC 1200, DN 250 CF-F, corrosive

PM P04 194

HiPaceTM 2300 UC, with TC 1200, DN 250 ISO-K, upside down version, corrosive PM P03 928

HiPaceTM 2300 UC, with TC 1200, DN 250 ISO-F, upside down version, corrosive PM P03 929

HiPaceTM 2300 UC, with TC 1200, DN 250 CF-F, upside down version, corrosive PM P04 195

PM P03 925

PM P03 926

PM P03 927

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

P4 564 309 HA P 4564 309 ZE P4 564 309 HB

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM Z01 291 PM Z00 121

PM 061 563-T PM 061 564-T PM 061 565-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 563-T PM 061 564-T PM 061 565-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 409

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 563-T PM 061 564-T PM 061 565-T

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Turbopumps

OBJ_DOKU-1259-001.fm Seite 409 Dienstag, 12. August 2008 4:56 16

PM 061 374-T PM 061 375-T PM Z01 205 PM Z01 206

Page 409409 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 410 Dienstag, 12. August 2008 4:56 16

Vacuum generation

Turbopumps HiPaceTM

Accessories

HiPaceTM 2300 with TC 1200, DN 250 ISO-K

HiPaceTM 2300 with TC 1200, DN 250 ISO-F

HiPaceTM 2300 with TC 1200, DN 250 CF-F

HiPaceTM 2300 U, with TC 1200, DN 250 ISO-K, upside down version

HiPaceTM 2300 U, with TC 1200, DN 250 ISO-F, upside down version

Order number pump

PM P03 920

PM P03 921

PM P03 922

PM P03 923

PM P03 924

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

General accessories Sealing gas Sealing gas throttle Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 410 410 Fussleiste Englisch.indd 410

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 415-T

PM 016 415-T

PM 016 417-T

PM 016 417-T

PM 016 416-T

PM 016 416-T PM 016 480-T PM 016 482-T

PM 016 480-T PM 016 482-T

PM 016 481-T

PM 016 481-T

PM 016 485-T PM 016 487-T

PM 016 485-T PM 016 487-T

PM 016 486-T

PM 016 486-T PM 016 694-T PM 016 695-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1259-001.fm Seite 411 Dienstag, 12. August 2008 4:56 16

HiPaceTM 2300 C, with TC 1200, DN 250 ISO-K, corrosive

HiPaceTM 2300 C, with TC 1200, DN 250 ISO-F, corrosive

HiPaceTM 2300 C, with TC 1200, DN 250 CF-F, corrosive

PM P03 925

PM P03 926

PM P03 927

PM P04 194

PM Z01 313 PM Z01 318

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

HiPaceTM 2300 UC, with TC 1200, DN 250 ISO-F, upside down version, corrosive PM P03 929

HiPaceTM 2300 UC, with TC 1200, DN 250 CF-F, upside down version, corrosive PM P04 195

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318 PM 016 225-U PM 016 227-U PM 016 226-U

PM Z01 313 PM Z01 318

PM 006 670-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 415-T

PM 016 415-T

PM 016 417-T

PM 016 417-T

PM 016 416-T

PM 016 416-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net

PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

PM 016 480-T PM 016 482-T

PM 016 480-T PM 016 482-T

PM 016 481-T

PM 016 481-T

PM 016 485-T PM 016 487-T

PM 016 485-T PM 016 487-T

PM 016 486-T PM 016 694-T PM 016 695-T

Fussleiste Englisch.indd 411

HiPaceTM 2300 UC, with TC 1200, DN 250 ISO-K, upside down version, corrosive PM P03 928

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T P 4723 010 P 4723 012

Turbopumps

HiPaceTM 2300 U, with TC 1200, DN 250 CF-F, upside down version

PM 016 486-T PM 016 694-T PM 016 695-T

PM 016 694-T PM 016 695-T

Page 411411 Seite 14.08.2008 12:46:42 Uhr


Vacuum generation

Turbopumps

The HiPaceâ&#x201E;˘ MC innovation

Magnetically levitated turbopumps with integrated drive electronics.

What is HiPace MC? HiPace MC is a line of magnetically levitated turbopumps with integrated drive electronics that set a milestone. This not only applies with respect to their especially high pumping speeds, high compression and high gas throughput. Their magnetically levitated bearings, which assure extremely low vibration and maintenance-free operation, are the embodiment of top class technology. Advantages at a glance Integrated drive electronics eliminate the need for cumbersome and costly cabling Suitable for most applications thanks to high pumping speed and high gas throughput Extremely low vibration and noise for sensitive applications

Page 412 Turbopumpen_E.indd Fussleiste Englisch.indd14412

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 19.08.2008 12:46:42 7:51:56 Uhr


Highly reliable thanks to permanent rotor monitoring Suitable for industrial applications thanks to Protection Class IP 54 Robust, long-life safety bearing concept Water cooling affords long service life of electronic components Reliable operation with cooling water compatibility of up to 35 °C Patented centering ring with anti-slip coating to enhance system reliability 5-axis active magnetic bearing Any desired installation orientation Profibus or DeviceNet interfaces (optional) Semi S2, F47 and E74 certification

Semiconductor industry

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Turbopumpen_E.indd Fussleiste Englisch.indd15413

Turbopumps

Applications Semiconductor industry EUV lithography Chemical vapor deposition (CVD) Physical vapor deposition (PVD) Ion beam etching Ion implantation Coating Glass coating Thin films Ophthalmics Solar cell coating Industrial Metallurgy Electron beam welding Research & development Physical equipment Space simulation

Wafer production

Page 413 14.08.2008 19.08.2008 12:46:42 7:52:01 Uhr


OBJ_DOKU-1264-001.fm Seite 414 Dienstag, 12. August 2008 8:42 08

Vacuum generation

HiPaceTM 2400 MC

Turbopumps HiPaceTM MC

Magnetically levitated turbopumps with pumping speeds of 2100 l/s. X Active 5-axis magnetic levitation system

HiPaceTM 2400 MC

X Maintenance-free, hydrocarbon-free X Very low vibration and noise levels X High pumping speed and gas throughput for both light and heavy gases

M = Magnetically levitated C = Suitable for corrosive gases Systems with DeviceNet fieldbus interface instead of Profibus available upon request.

Pumping speed [l/s]

Pumping speed

N2 He H2 Ar CF4

2300 2000

1500

1000

500 200 0

10 -3

10 -4

10 -5

10 -2

10 0 10 -1 Pressure [mbar]

HiPaceTM 2400 MC

Gas througput

Gases with molecular mass of < 40

Gases with molecular mass of

at nominal speed, cooling water throughput 100 l/h

at nominal speed, sealing gas 20 sccm, cooling water throughput 100 l/h 40

6,000

110

2,000

100

35

60

25 ˚C

50

35 ˚C

40 30

coo ling

cool ing cooli

wat er

4,000 t em p er a tu r e

wate r tem

ng w ater te

pera t

mpe

20

3,000

ure

2,000

ratu re

30

15

25

1,500 ˚C °

25 ˚C

20 35

15 10

1,000

˚C °

co o ling

°c

coo ling

oo lin

wa ter tem per

gw

wa t er

1,000

at u re tem pe rat ure per atu re

ate r

tem

Gas throughput [sccm]

15 ˚C

70

Gas throughput [mbar l/s]

Gas throughput [mbar l/s]

80

Gas throughput [sccm]

5,000

90

500

5

10 0 0.2

40

0.3

0.4

0.5

0.6

0.7 0.8 0.9 1.0 1.1 Backing vacuum [mbar]

1.2

1.3

1.4

1.5

0 1.6

0 0.2

0.3

0.4

0.5

0.6

0.7 0.8 0.9 1.0 1.1 Backing vacuum [mbar]

1.2

1.3

1.4

1.5

0 1.6

HiPaceTM 2400 MC1) 1)

SeitePage 414 414 Fussleiste Englisch.indd 414

Gas throughput relative to backing vacuum and kind of gas

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 415 Dienstag, 12. August 2008 8:42 08

Dimensions

D (COG)* 254

37

3

356

ø 324

96

Wasserkühlung Water cooling G1/4" DN 40 ISO-KF

30˚ A

17

4

178

B

Flut-/Sperrgasventil Venting/sealing gas valve DN 10 ISO-KF

C

HiPaceTM 2400 MC, with TM 3000 DN 250 ISO-F 244 mm 297 mm 346 mm 191 mm

DN 250 CF-F 268 mm 322 mm 370 mm 194 mm

Turbopumps

DN 250 ISO-K 244 mm 297 mm 346 mm 199 mm

A B C D Dimensions

D (COG)*

Wasserkühlung Water cooling G1/4"

254

37

3

30˚

ø 324

356

96

DN 40 ISO-KF

178 Flut-/Sperrgasventil Venting/sealing gas valve DN 10 ISO-KF

A

17

4

B C

HiPaceTM 2400 MC, with TM 3000 and integrated power supply

A B C D

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 415

DN 250 ISO-K 244 mm 297 mm 411 mm 210 mm

DN 250 ISO-F 244 mm 297 mm 411 mm 202 mm

DN 250 CF-F 268 mm 322 mm 436 mm 205 mm

Page 415415 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 416 Dienstag, 12. August 2008 8:42 08

Vacuum generation

Turbopumps HiPaceTM MC

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F, Profibus

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 250 ISO-K DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-F DN 40 ISO-KF DN 10 ISO-KF

DN 250 CF-F DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-K DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-F DN 40 ISO-KF DN 10 ISO-KF

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

1·104 2·105 > 1·109 > 1·109 > 1·109

1·104 2·105 > 1·109 > 1·109 > 1·109

> 1·104 2·105 > 1·109 > 1·109 > 1·109

> 1·104 2·105 > 1·109 > 1·109 > 1·109

1·104 2·105 > 1·109 > 1·109 > 1·109

Fore Vacuum max. for N2

3 mbar

3 mbar

3 mbar

3 mbar

3 mbar

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces

< 1·10-9 mbar 29400 rpm 6 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

< 1·10-9 mabr 29400 rpm 6 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

< 1·10-9 mbar 29400 rpm 6 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

Weight

71 kg

75 kg

75 kg

< 1·10-9 mbar 29400 rpm 6 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote, Profibus 71 kg

< 1·10-9 mbar 29400 rpm 6 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote, Profibus 75 kg

Order number pump

PM P03 490

PM P03 491

PM P03 492

PM P03 493

PM P03 494

Technical data

SeitePage 416 416 Fussleiste Englisch.indd 416

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K and integrated power supply, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F and integrated power supply, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F and integrated power supply, Profibus

DN 250 CF-F DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-K DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-F DN 40 ISO-KF DN 10 ISO-KF

DN 250 CF-F DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-K DN 40 ISO-KF DN 10 ISO-KF

DN 250 ISO-F DN 40 ISO-KF DN 10 ISO-KF

DN 250 CF-F DN 40 ISO-KF DN 10 ISO-KF

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1600 l/s 2100 l/s 1900 l/s 1900 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1800 l/s 1900 l/s 2100 l/s 1900 l/s 1600 l/s

1·104 > 1·109 > 1·109 > 1·109 2·105

> 1·104 2·105 > 1·109 > 1·109 > 1·109

1·104 2·105 > 1·109 > 1·109 > 1·109

1·104 > 1·109 > 1·109 > 1·109 2·105

2·105 1·104 > 1·109 > 1·109 > 1·109

> 1·104 2·105 > 1·109 > 1·109 > 1·109

1·104 > 1·109 > 1·109 > 1·109 2·105

3 mbar

1.5 mbar

1.5 mbar

1.5 mbar

1.5 mbar

1.5 mbar

1.5 mbar

< 1·10-9 mbar 29400 rpm 6 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote, Profibus 75 kg

< 1·10-9 mbar 29400 rpm 7 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

< 1·10-9 mbar 29400 rpm 7 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

< 1·10-9 mbar 29400 rpm 7 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

< 1·10-9 mbar 29400 rpm 7 min Water 100 l/h 15-35 °C 10 mT 45 db (A) IP 54 RS-485, Profibus

< 1·10-9 mbar 29400 rpm 7 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Profibus

< 1·10-9 mbar 29400 rpm 7 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Profibus

77 kg

81 kg

81 kg

77 kg

81 kg

81 kg

PM P03 495

PM P03 710

PM P03 711

PM P03 712

PM P03 713

PM P03 714

PM P03 715

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 417

Turbopumps

OBJ_DOKU-1264-001.fm Seite 417 Dienstag, 12. August 2008 8:42 08

Page 417417 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 418 Dienstag, 12. August 2008 8:42 08

Vacuum generation

Turbopumps HiPaceTM MC

Accessories

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F, Profibus

Order number pump

PM P03 490

PM P03 491

PM P03 492

PM P03 493

PM P03 494

Power supplies/power TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 760 PM C01 761

PM C01 760 PM C01 761

PM C01 760 PM C01 761

PM C01 760 PM C01 761

PM C01 760 PM C01 761

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 208 V AC mains cable with UL plug

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

PM 051 983-T PM 061 630-X

PM 051 983-T PM 061 630-X

PM 051 983-T PM 061 630-X

PM 051 983-T PM 061 630-X

PM 051 983-T PM 061 630-X

PM Z00 121

PM Z00 121

PM Z00 121

PM Z00 121

PM Z00 121

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

Connection cable, length 3 m between TPS 1400 - TM 3000 Connection cable TM 3000 - backing pump relay box, Length 2 m Venting accessories Air drier TTV 001 Heating accessories Heating jacket 230 V AC, Euro-style safety plug Heating jacket 208 V AC, UL plug Backing pump control Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

SeitePage 418 418 Fussleiste Englisch.indd 418

PM 061 154-T PM 061 155-T

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 419 Dienstag, 12. August 2008 8:42 08

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F and integrated power supply PM P03 712

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K and integrated power supply, Profibus PM P03 713

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F and integrated power supply, Profibus PM P03 714

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F and integrated power supply, Profibus PM P03 715

PM P03 495

PM P03 710

PM P03 711

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

PM 051 983-T PM 061 630-X

PM 061 630-X

PM 061 630-X

PM 061 630-X

PM 061 630-X

PM 061 630-X

PM 061 630-X

PM Z00 121

PM Z00 121

PM Z00 121

PM Z00 121

PM Z00 121

PM Z00 121

PM Z00 121

PM 061 154-T PM 061 155-T

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 154-T PM 061 155-T

PM 061 375-T PM Z01 205 PM Z01 206

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 419

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

Turbopumps

PM C01 760 PM C01 761

PM 061 154-T PM 061 155-T

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

Page 419419 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 420 Dienstag, 12. August 2008 8:42 08

Vacuum generation

Turbopumps HiPaceTM MC

Accessories

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K, Profibus

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F, Profibus

Order number pump

PM P03 490

PM P03 491

PM P03 492

PM P03 493

PM P03 494

PM 016 225-U PM 016 227-U PM 016 226-U

PM 016 225-U PM 016 227-U PM 016 226-U

PM 016 225-U PM 016 227-U PM 016 226-U

PM 016 225-U PM 016 227-U PM 016 226-U

PM 006 670-X PM 061 207-T PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 061 207-T PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

General accessories Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Protection screen Splinter shield Vibration dampers USB converter Interface cable, 3 m, M 12 Connection cable for HiPace MC with TM 3000, 3 m TIC 001, Serial Interface Converter RS-232/RS-485 Connection cable, RJ 45 on M12 Mounting materials Mounting kit including coated centering ring, bracket screws Coated centering ring, with protection screen, clamping screws Coated centering ring with splinter shield, bracket screws Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws Coated centering ring with splinter shield, stud screws Set of hexagon bolts Set of stud screws

SeitePage 420 420 Fussleiste Englisch.indd 420

PM 006 670-X PM 061 207-T PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 061 207-T PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 016 420-T

PM 016 420-T

PM 016 422-T

PM 016 422-T

PM 016 421-T

PM 016 421-T PM 016 480-T PM 016 482-T

PM 016 480-T PM 016 482-T

PM 016 481-T

PM 016 481-T

PM 016 485-T PM 016 487-T

PM 016 485-T PM 016 487-T

PM 016 486-T

PM 016 486-T PM 016 694-T PM 016 695-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 421 Dienstag, 12. August 2008 8:42 08

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F and integrated power supply

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F and integrated power supply

PM P03 495

PM P03 710

PM P03 711

PM P03 712

PM 016 225-U PM 016 227-U PM 016 226-U

PM 016 225-U PM 016 227-U PM 016 226-U

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 006 670-X PM 061 207-T PM 061 283-T

PM 061 207-T PM 061 283-T

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T

PM 051 054-T PM 051 726-T

PM 051 054-T PM 051 726-T

PM 051 054-T PM 051 726-T

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-F and integrated power supply, Profibus PM P03 714

PM 016 225-U PM 016 227-U PM 016 226-U

PM 016 225-U PM 016 227-U PM 016 226-U

PM 006 670-X PM 061 207-T PM 061 283-T

PM 061 207-T PM 061 283-T

PM 051 054-T PM 051 726-T

PM 051 054-T PM 051 726-T

PM 051 054-T PM 051 726-T

PM 016 420-T

PM 016 422-T

PM 016 422-T

PM 016 421-T

PM 016 421-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net

PM 016 480-T PM 016 482-T

PM 016 480-T PM 016 482-T

PM 016 481-T

PM 016 481-T

PM 016 485-T PM 016 487-T PM 016 486-T

PM 016 485-T PM 016 487-T PM 016 486-T PM 016 694-T PM 016 695-T

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F and integrated power supply, Profibus PM P03 715

PM 016 345 PM 016 324 PM 006 671-X PM 061 207-T PM 061 283-T

PM 016 420-T

PM 016 694-T PM 016 695-T

Fussleiste Englisch.indd 421

HiPaceTM 2400 MC, with TM 3000, DN 250 ISO-K and integrated power supply, Profibus PM P03 713

Turbopumps

HiPaceTM 2400 MC, with TM 3000, DN 250 CF-F, Profibus

PM 016 694-T PM 016 695-T

Page 421421 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 422 Dienstag, 12. August 2008 8:42 08

Vacuum generation

HiPaceTM 3400 MC

Turbopumps HiPaceTM MC

Powerful magnetically levitated turbopumps with pumping speeds of 3000 l/s. X Active 5-axis magnetic levitation system

HiPaceTM 3400 MC

X Maintenance-free, hydrocarbon-free X Very low vibration and noise levels X High pumping speed and gas throughput for both light and heavy gases

M = Magnetically levitated C = Suitable for corrosive gases Systems with DeviceNet fieldbus interface instead of Profibus available upon request.

Pumping speed [l/s]

Pumping speed

N2 He H2 Ar CF4

3400

2400

1600

800

0

10 -3

10 -4

10 -5

10 -2

10 0 10 -1 Pressure [mbar]

HiPaceTM 3400 MC

Gas througput

Gases with molecular mass of

at nominal speed, cooling water throughput 100 l/h

at nominal speed, sealing gas 20 sccm, cooling water throughput 100 l/h

100

5,500

90

4,950

15 ˚C

60

coo ling

3,850 wat er

3,300

t em per a tu r e wate r tem 35 ˚C pera cooli ture ng w ater temp erat ure 25 ˚C

50 40 30

cool ing

2,750 2,200 1,650

20

1,100

10

550

0 0.2

0.3

0.4

0.5

0.6

0.7 0.8 0.9 1.0 1.1 Backing vacuum [mbar]

1.2

1.3

1.4

1.5

0 1.6

Gas throughput [mbar l/s]

4,400

70

Gas throughput [sccm]

Gas throughput [mbar l/s]

80

40

60

3,300

50

2,750

40

2,200

15 ˚C

cooli ng

wate 25 ˚C r tem pera cooli ture ng w 35 ˚C ater cool tem ing pera wat ture er te mpe ratu re

30

20

1,650

1,100

10

0 0.2

Gas throughput [sccm]

Gases with molecular mass of < 40

550

0.3

0.4

0.5

0.6

0.7 0.8 0.9 1.0 1.1 Backing vacuum [mbar]

1.2

1.3

1.4

1.5

0 1.6

HiPaceTM 3400 MC, DN 320 ISO-F1) 1)

SeitePage 422 422 Fussleiste Englisch.indd 422

Gas throughput relative to backing vacuum and kind of gas

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 423 Dienstag, 12. August 2008 8:42 08

Dimensions 251

104

202

142.5

241.2 349.8

207.5 383

Wasserk체hlung Watercooling G1/4" VV DN 40 ISO-K

47.2

115.8

257.3

HV DN 320 ISO-F

Turbopumps

174 (COG)

3 0째

0 35 20 5.5

Fussleiste Englisch.indd 423

24x15째

39 5

14

425

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net

Page 423423 Seite 14.08.2008 12:46:42 Uhr


OBJ_DOKU-1264-001.fm Seite 424 Dienstag, 12. August 2008 8:42 08

Vacuum generation

Turbopumps HiPaceTM MC

HiPaceTM 3400, with TM 3000, DN 320 ISO-F

HiPaceTM 3400 MC, with TM 3000, DN 320 ISO-F

Connection nominal diameter Flange (in) Flange (out) Venting connection

DN 320 ISO-F DN 40 ISO-KF DN 10 ISO-KF

DN 320 ISO-F DN 40 ISO-KF DN 10 ISO-KF

Pumping speed Pumping speed for H2 Pumping speed for He Pumping speed for N2 Pumping speed for Ar Pumping speed for CF4

2850 l/s 2950 l/s 2950 l/s 2850 l/s 2200 l/s

2850 l/s 2850 l/s 2950 l/s 2850 l/s 2200 l/s

Compression Compression ratio for H2 Compression ratio for He Compression ratio for N2 Compression ratio for Ar Compression ratio for CF4

4·104 4·105 > 1·109 > 1·109 > 1·109

4·104 4·105 > 1·109 > 1·109 > 1·109

Fore Vacuum max. for N2

2 mbar

2 mbar

Ultimate pressure with OnToolTM DryPump Rotation speed ±2% Run-up time Cooling method, standard Cooling water consumption Cooling water temperature Permissible magnetic field max. Sound pressure level Protection category Interfaces

< 1·10-9 mbar 24000 rpm 11 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote

Weight

94 kg

< 1·10-9 mbar 24000 rpm 11 min Water 100 l/h 15-35 °C 10 mT 45 dB (A) IP 54 RS-485, Remote, Profibus 94 kg

Order number pump

PM P03 501

PM P03 504

Technical data

SeitePage 424 424 Fussleiste Englisch.indd 424

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


Order number pump

HiPaceTM 3400, with TM 3000, DN 320 ISO-F PM P03 501

HiPaceTM 3400 MC, with TM 3000, DN 320 ISO-F PM P03 504

Power supplies/power TPS - mains pack for wall/standard rail fitting TPS - mains pack 19" rack module 3 RU

PM C01 760 PM C01 761

PM C01 760 PM C01 761

Control units DCU - Display Control Unit HPU - Handheld Programming Unit Accessories for HPU

PM 061 348-T PM 051 510-T PM 061 005-T

PM 061 348-T PM 051 510-T PM 061 005-T

Mains cable DCU/TPS/TCP, 3 m 230 V AC mains cable with Euro-style safety plug 208 V AC mains cable with UL plug

P4 564 309 HA P4 564 309 HB

P4 564 309 HA P4 564 309 HB

PM 051 983-T PM 061 630-X

PM 051 983-T PM 061 630-X

Venting accessories Air drier TTV 001

PM Z00 121

PM Z00 121

Backing pump control Backing pump relay box, single phase 20 A TVV 001 backing vacuum safety valve, 230 V AC TVV 001 backing vacuum safety valve, 115 V AC

PM 061 375-T PM Z01 205 PM Z01 206

PM 061 375-T PM Z01 205 PM Z01 206

General accessories Coated centering ring Coated centering ring with protection screen Coated centering ring with integrated splinter shield Interface cable, 3 m, M 12 Connection cable for HiPace MC with TM 3000, 3 m TIC 001, Serial Interface Converter RS-232/RS-485 Connection cable, RJ 45 on M12

PM 016 232 AU PM 016 234-U PM 016 233-U PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 016 232 AU PM 016 234-U PM 016 233-U PM 061 283-T PM 051 983-T PM 051 054-T PM 051 726-T

PM 016 490-T PM 016 492-T

PM 016 490-T PM 016 492-T

PM 016 491 -T

PM 016 491 -T

PM 016 495-T PM 016 497-T

PM 016 495-T PM 016 497-T

Accessories

Connection cable, length 3 m between TPS 1400 - TM 3000 Connection cable TM 3000 - backing pump relay box, Length 2 m

Mounting materials Coated centering ring, hexagon bolts Coated centering ring with protection screen, hexagon bolts Coated centering ring with splinter shield, hexagon bolts Coated centering ring, stud screws Coated centering ring with protection screen, stud screws

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 425

Turbopumps

OBJ_DOKU-1264-001.fm Seite 425 Dienstag, 12. August 2008 8:42 08

Page 425425 Seite 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 426 Dienstag, 12. August 2008 3:14 15

Vakuum generation

TPS wall rail fitting

Turbopumps HiPaceTM accessories

Power supplies for wall and standard-rail mounting. Simple integration and Plug and Play-ready. Performance ideally matched to the respective pump model. Satisfies international standards. X Power supply for wall or standard-rail

TPS wall rail fitting

mounting

Dimensions A B

D

C

F

E

G

TPS 110 TPS 180 TPS 310 TPS 400 TPS 110 169 mm 120 mm 142 mm 111.2 mm 48.7 mm 130 mm 56.6 mm

TPS 180 190 mm 120 mm 142 mm 111.2 mm 58.4 mm 130 mm 66.5 mm

TPS 310 190 mm 120 mm 142 mm 111.2 mm 67.3 mm 130 mm 75.5 mm

TPS 400 190 mm 120 mm 142 mm 111.2 mm 104.6 mm 130 mm 112.5 mm

Luftrichtung/ Air flow

35

Tmax OK

111.6

35

A B C D E F G

231

32

32 130.2

TPS 1400

SeitePage 426 426 Fussleiste Englisch.indd 426

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 427 Dienstag, 12. August 2008 3:14 15

Protection category Ambient temperature

TPS 110 24 +/-2% V DC 4.6 A 0.7 kg 50/60 Hz 130 VA 115-230 -20/+15% V AC IP 20 5-50 °C

TPS 180 24 +/-2% V DC 7.5 A 1.0 kg 50/60 Hz 210 VA 115-230 -20/+15% V AC IP 20 5-50 °C

TPS 310 24 +/-2% V DC 12.5 A 1.1 kg 50/60 Hz 340 VA 115-230 -20/+15% V AC IP 20 5-50 °C

TPS 400 48 +/-2% V DC 8.4 A 1.75 kg 50/60 Hz 450 VA 115-230 -20/+15% V AC IP 20 5-50 °C

Order number TPS wall rail fitting

TPS 110 PM 061 340-T

TPS 180 PM 061 341-T

TPS 310 PM 061 342-T

TPS 400 PM 061 343-T

P 4564 309 ZA

P 4564 309 ZA

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZF

P 4564 309 ZF

P 4564 309 ZF

P 4564 309 ZF

P 4564 309 ZA

Accessories 230 V AC mains cable with Euro-style safety plug, IEC power socket (straight), 3 m 115 V AC mains cable with UL plug, IEC power socket (straight), 3 m 208 V AC mains cable with UL plug, 3 m Technical data Output voltage Output current Weight Mains requirement: power consumption Mains requirement: voltage (range) Protection category Ambient temperature

TPS 1400 140 V DC 10 A 3.4 kg 1700 VA 187 - 265 V AC, 50/60 Hz IP 20 5-40 ºC

Order number TPS wall rail fitting

TPS 1400 PM C01 760

Accessories Connection cable for linking HiPace MC with TM 3000 to TPS 1400/1401 230 V AC mains cable with Euro-style safety plug, VII-HAN 3A, 3 m 208 V AC mains cable with UL plug, NEMA-HAN 3A, 3m

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 427

Turbopumps

Technical data Output voltage Output current Weight Mains requirement: frequency (range) Mains requirement: power consumption Mains requirement: voltage (range)

PM 051 983-T P4 564 309 HA P4 564 309 HB

Seite Page 427427 Seite 427 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 428 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Turbopumps HiPaceTM accessories

TPS-19" Power supply in the form of a 3 RU 19" rack rack modu- module with front panel; for installation directly in 19" rack systems. Performance le

ideally matched to the respective HiPace pump model. Plug and Play-ready. Satisfies international standards. TPS-19" rack module

X Power supply in the form of a 3 RU 19" rack module with front panel

Dimensions A B

D

C

F

E

G

TPS 111 TPS 181 TPS 311 TPS 401 TPS 181 187.5 mm 190 mm 128.4 mm 111.2 mm 58.4 mm 60.7 mm

TPS 311 187.5 mm 190 mm 128.4 mm 111.2 mm 67.3 mm 70.8 mm

TPS 401 187.5 mm 190 mm 128.4 mm 111.2 mm 104.6 mm 106.4 mm

111.6

3HE (128.5)

35

TPS 111 161.5 mm 164 mm 128.4 mm 111.2 mm 48.7 mm 50.5 mm

A B C D E F

32 Luftrichtung/ Air flow

32 35

Tmax OK

26TE (132.1)

2.5

130.2

231.5

TPS 1400

SeitePage 428 428 Fussleiste Englisch.indd 428

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 429 Dienstag, 12. August 2008 3:14 15

Protection category Ambient temperature

TPS 111 24 +/-2% V DC 4.6 A 0.7 kg 50/60 Hz 130 VA 115-230 -20/+15% V AC IP 20 5-50 °C

TPS 181 24 +/-2% V DC 7.5 A 1.0 kg 50/60 Hz 210 VA 115-230 -20/+15% V AC IP 20 5-50 °C

TPS 311 24 +/-2% V DC 12.5 A 1.1 kg 50/60 Hz 340 VA 115-230 -20/+15% V AC IP 20 5-50 °C

TPS 401 48 +/-2% V DC 8.4 A 1.75 kg 50/60 Hz 450 VA 115-230 -20/+15% V AC IP 20 5-50 °C

Order number TPS-19" rack module

TPS 111 PM 061 344-T

TPS 181 PM 061 345-T

TPS 311 PM 061 346-T

TPS 401 PM 061 347-T

P 4564 309 ZA

P 4564 309 ZA

P 4564 309 ZA

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZF

P 4564 309 ZF

P 4564 309 ZF

P 4564 309 ZF

Accessories 230 V AC mains cable with Euro-style safety plug, IEC power socket (straight), 3 m 115 V AC mains cable with UL plug, IEC power socket (straight), 3 m 208 V AC mains cable with UL plug, 3 m Technical data Output voltage Output current Weight Mains requirement: power consumption Mains requirement: voltage (range) Protection category Ambient temperature

TPS 1401 140 V DC 10 A 3.4 kg 1700 VA 187 - 265 V AC, 50/60 Hz IP 20 5-40 ºC

Order number TPS-19" rack module

TPS 1401 PM C01 761

Accessories Connection cable for linking HiPace MC with TM 3000 to TPS 1400/1401 230 V AC mains cable with Euro-style safety plug, VII-HAN 3A, 3 m 208 V AC mains cable with UL plug, NEMA-HAN 3A, 3m

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 429

Turbopumps

Technical data Output voltage Output current Weight Mains requirement: frequency (range) Mains requirement: power consumption Mains requirement: voltage (range)

PM 051 983-T P4 564 309 HA P4 564 309 HB

Seite Page 429429 Seite 429 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 430 Dienstag, 12. August 2008 3:14 15

Vakuum generation

DCU with integrated power supply

Turbopumps HiPaceTM accessories

Display Control Unit (DCU) with integrated power supply for electrical supply to the HiPace series of pumps. 3 RU 19" rack module with easy-to-read, backlit display. The DCU affords operation and monitoring of all parameters of the HiPace turbopumps. X To control and monitor all parameters of the

DCU with integrated power supply

drive electronics X With integrated power supply X The operating voltage is securely isolated from the power supply in accordance with EN60742. X Pressure measurement with Pfeiffer Vacuum gauge heads is possible.

C

D

Dimensions

A B

E F

DCU with integrated power supply

A B C D E F

SeitePage 430 430 Fussleiste Englisch.indd 430

DCU 110 197.5 mm 200 mm 128.5 mm 111.2 mm 106 mm 106.4 mm

DCU 180 227.5 mm 230 mm 128.5 mm 111.2 mm 106 mm 106.4 mm

DCU 310 227.5 mm 230 mm 128.5 mm 111.2 mm 106 mm 106.4 mm

DCU 400 227.5 mm 230 mm 128.5 mm 111.2 mm 106 mm 106.4 mm

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 431 Dienstag, 12. August 2008 3:14 15

Technical data Output voltage Output current Weight Mains requirement: frequency (range) Mains requirement: power consumption Mains requirement: voltage (range) Protection category Ambient temperature

DCU 110 24 +/-2% V DC 4.6 A 1.2 kg 50/60 Hz 130 VA 115-230 -20/+15% V AC IP 20 5-50 째C

DCU 180 24 +/-2% V DC 7.5 A 1.7 kg 50/60 Hz 210 VA 115-230 -20/+15% V AC IP 20 5-50 째C

DCU 310 24 +/-2% V DC 12.5 A 1.85 kg 50/60 Hz 340 VA 115-230 -20/+15% V AC IP 20 5-50 째C

DCU 400 48 +/-2% V DC 8.4 A 2.3 kg 50/60 Hz 450 VA 115-230 -20/+15% V AC IP 20 5-50 째C

Order number DCU with integrated power supply

DCU 110 PM C01 820

DCU 180 PM C01 821

DCU 310 PM C01 822

DCU 400 PM C01 823

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZA

P 4564 309 ZA

P 4564 309 ZE

P 4564 309 ZF

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZF

P 4564 309 ZA

P 4564 309 ZF

P 4564 309 ZF

Turbopumps

Accessories 230 V AC mains cable with Euro-style safety plug, IEC power socket (straight), 3 m 115 V AC mains cable with UL plug, IEC power socket (straight), 3 m 208 V AC mains cable with UL plug, 3 m

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 431

Seite Page 431431 Seite 431 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 432 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Turbopumps HiPaceTM accessories

Control Control and display units for setting and and display monitoring the operating parameters of the turbopumps. units HPU 001, handheld programming unit X The ideal assistant for controlling and moni-

HPU 001

toring the pump parameters X Administration of complete pump configurations / parameter records X Connects to the pump's drive electronics via RS-485 interface X Connection cable (3 m) for drive electronics included in scope of delivery X Multilingual menus X For loading and copying parameter records Technical data Dimensions (l x w x h) Connection Weight Power consumption Protection category Ambient temperature

X Graphical display HPU 001 150 x 80 x 30 mm 9 - 24 V DC 0.25 kg 2W IP 20 5-40 째C

Order number Control and display units

HPU 001 PM 051 510-T

Accessories Connection cable, plug M12, RJ 45 Accessories package for HPU - Power supply, software and PC cable

PM 051 726-T PM 061 005-T

X Scope of delivery: CD (with HPU Communi-

Accessories package for HPU

cator software), HPU-PC connection cable, power supply for HPU, 3 power cord plug adapters (America, UK, Southern Europe) X The HPU Communicator software enables the pump parameter records to be displayed and administered on the PC and/or sent via e-mail X The HPU-PC connection cable is used to exchange data between PC and HPU

Order number Accessories package for HPU - Power supply, software and PC cable

SeitePage 432 432 Fussleiste Englisch.indd 432

PM 061 005-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 433 Dienstag, 12. August 2008 3:14 15

DCU 002

DCU 002, Display control unit XFor operating and monitoring all parameters of the drive electronics XPower supplied exclusively from the drive electronics XSuitable for all HiPace turbopumps X19" rack module, 3 RU XConnects to the pump´s drive electronics via RS-485 interface XConnection cable (3 m) for drive electronics included in scope of delivery XVarious Pfeiffer Vacuum gauges can be connected and read

Turbopumps

Dimensions

DCU 002, Display control unit

A B C D E

Technical data Connection Weight Power consumption Protection category Ambient temperature

DCU 002 12-30 V DC 0.4 kg 5 VA IP 20 5-40 °C

Order number Control and display units

DCU 002 PM 061 348-T

Accessories Connection cable, plug M12, RJ 45

PM 051 726-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 433

DCU 002 50 mm 52.5 mm 128.5 mm 106 mm 106.3 mm

Seite Page 433433 Seite 433 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 434 Dienstag, 12. August 2008 3:14 15

Vakuum generation

External drive units

Turbopumps HiPaceTM accessories

External drives for HiPace pumps via connection cables. X The TCP 350 drive electronics unit is emplo-

External drive units

yed for driving and monitoring the HiPace 80, 300, 400 and 700 X Complete electronics in a single unit X Mating plug for "Remote" connector included in scope of delivery

Dimensions

A B C D

SeitePage 434 434 Fussleiste Englisch.indd 434

TCP 350 drive electronics 128.5 mm 141.9 mm 120 mm 232 mm

TCP 350 PB, drive electronics 128.5 mm 141.9 mm 120 mm 232 mm

TCP 350 DN, drive electronics 128.5 mm 141.9 mm 120 mm 232 mm

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 435 Dienstag, 12. August 2008 3:14 15

TCP 350 drive electronics

Frequency Weight Cable length Turbo-TCP-max. Mains requirement: power consumption Mains requirement: voltage (range) Interface

50-60 Hz 2.8 kg 100 m 400 VA 95-265 V AC RS-485 / RS-232 / Remote (SPS-compatible)

Protection category Ambient temperature

IP 20 5-40 ยบC

Order number

TCP 350 drive electronics

External drive units

Accessories 115 V AC mains cable with UL plug, IEC power socket (straight), 3 m 208 V AC mains cable with UL plug, 3 m 230 V AC mains cable with Euro-style safety plug, IEC power socket (straight), 3 m

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 435

TCP 350 PB, drive electronics - Profibus 50-60 Hz 2.8 kg 100 m 400 VA 95-265 V AC RS-485 / RS-232 / Remote (SPS-compatible) Profibus IP 20 5-40 ยบC

TCP 350 DN, drive electronics - DeviceNet 50-60 Hz 2.8 kg 100 m 400 VA 95-265 V AC RS-485 / RS-232 / Remote and DeviceNet

PM C01 740

TCP 350 PB, drive electronics - Profibus PM C01 741

TCP 350 DN, drive electronics - DeviceNet PM C01 742

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZE

P 4564 309 ZF P 4564 309 ZA

P 4564 309 ZF P 4564 309 ZA

P 4564 309 ZF P 4564 309 ZA

IP 20 5-40 ยบC

Turbopumps

Technical data

Seite Page 435435 Seite 435 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 436 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Turbopumps HiPaceTM accessories

Venting Accessories for safe and secure venting accessories of the HiPace turbopumps. For secure processes and maximum reliability.

24 V DC venting valve, G 1/8", for connection to TC 110 X Cable with M8 plug for connection to TC

Venting accessories

110 included in scope of delivery X Venting mode, venting time and venting duration set by means of drive electronics and DCU/HPU X G 1/8" connection X Normally closed valve X Connects directly to connection cable PM061351-T

24 V DC venting valve, G 1/8", for connection to TC 400 X Cable with M12 plug for connection to TC 400 included in scope of delivery X Venting mode, venting time and venting duration set by means of drive electronics and DCU/HPU X G 1/8" connection X Normally closed valve Technical data

24 V DC venting valve, G 1/8", for connection to TC 110 G 1/8" G 1/8" 1.5 bar (absolute) 130 mbar l/s 100 g <1路10-8 mbar l/s 24 V DC

24 V DC venting valve, G 1/8", for connection to TC 400 G 1/8" G 1/8" 1.5 bar (absolute) 130 mbar l/s 100 g <1路10-8 mbar l/s 24 V DC

Venting accessories

24 V DC venting valve, G 1/8", for connection to TC 110 PM Z01 290

24 V DC venting valve, G 1/8", for connection to TC 400 PM Z01 291

Accessories TTV 001, air drier for venting turbopumps

PM Z00 121

PM Z00 121

Flange (in) Flange (out) Venting gas excess pressure, max. Gas flow at atmospheric pressure Weight Leak rate Control voltage Order number

SeitePage 436 436 Fussleiste Englisch.indd 436

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 437 Dienstag, 12. August 2008 3:14 15

TTV 001

TTV 001, air drier for venting turbopumps XDries air securely when venting the turbopumps XShortens pump-down time XColor indicator shows saturation of drying agent XSimple connection to venting valves

Turbopumps

Dimensions

TTV 001

A B C D E

TTV 001 235 mm 59 mm 206 mm 9 mm 57 mm

Order number

Venting accessories

TTV 001, air drier for venting turbopumps PM Z00 121

Accessories Filling for air drier, TTV 001, approx. 260 cm続

PM 006 786-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 437

Seite Page 437437 Seite 437 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 438 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Turbopumps HiPaceTM accessories

Cooling Accessories for cooling. For maximum accessories reliability and process flexibility. Cooling accessories

Air cooling Ideal for systems integration, does not require additional water supply. Air cooling Air cooling for HiPace 80 with TC 110 Air cooling for HiPace 300 with TC 110 Air cooling for HiPace 300 with TC 400 Air cooling for HiPace 400 and HiPace 700 with TC 400

Control voltage 24 V DC 24 V DC 24 V DC 24 V DC

Order number PM Z01 300 PM Z01 301 PM Z01 302 PM Z01 303

Water cooling For maximum performance and additional process flexibility. Required for maximum performance and fast cycling. Indispensable for UHV applications when pump is heated. Water cooling Water cooling for HiPace 80, TC 110 Water cooling for HiPace 300, TC 110

SeitePage 438 438 Fussleiste Englisch.indd 438

Order number PM 016 623-T PM 016 624-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 439 Dienstag, 12. August 2008 3:14 15

Heating In many cases, it is necessary to condition accessories the turbopump for cleaning in UHV operation or for process adaptation. Matching heating elements are available. Automatic control by means of integrated TC 110 and TC 400 drive electronics.

Heating accessories Heating jacket for HiPace 80 with TC 110/TCP 350, 230 V AC, Euro-style safety plug Heating jacket for HiPace 80 with TC 110/TCP 350, 208 V AC, UL plug Heating jacket for HiPace 80 with TC 110/TCP 350, 115 V AC, UL plug Heating jacket for HiPace 300 with TC 110/TCP 350, 230 V AC, Euro-style safety plug Heating jacket for HiPace 300 with TC 110/TCP 350, 208 V AC, UL plug Heating jacket for HiPace 300 with TC 110/TCP 350,115 V AC, UL plug Heating jacket for HiPace 300 with TC 400/TCP 350, 230 V AC, Euro-style safety plug Heating jacket for HiPace 300 with TC 400/TCP 350, 208 V AC, UL plug Heating jacket for HiPace 300 with TC 400/TCP 350,115 V AC, UL plug Heating jacket for HiPace 400/700 with TC 400/TCP 350, 230 V AC, Euro-style safety plug Heating jacket for HiPace 400/700 with TC 400/TCP 350, 208 V AC, UL plug Heating jacket for HiPace 400/700 with TC 400/TCP 350, 115 V AC, UL plug Heating jacket for HiPace 1200/1500 with TC 1200, 230 V AC, Euro-style safety plug Heating jacket for HiPace 1200/1500 with TC 1200, 208 V AC, UL plug Heating jacket for HiPace 1200/1500 with TC 1200, 115 V AC, UL plug Heating jacket for HiPace 1800/2300 with TC 1200, 230 V AC, Euro-style safety plug Heating jacket for HiPace 1800/2300 with TC 1200, 208 V AC, UL plug Heating jacket for HiPace 1800/2300 with TC 1200, 115 V AC, UL plug Heating jacket for HiPace 2400 MC with TM 3000, 230 V AC, Euro-style safety plug Heating jacket for HiPace 2400 MC with TM 3000, 208 V AC, UL plug

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 439

Order number PM 061 360-T PM 061 361-T PM 061 362-T PM 061 363-T PM 061 364-T PM 061 365-T PM 061 366-T PM 061 367-T PM 061 368-T PM 061 369-T PM 061 370-T PM 061 371-T PM 061 560-T PM 061 561-T PM 061 562-T PM 061 563-T PM 061 564-T PM 061 565-T PM 061 154-T PM 061 155-T

Turbopumps

Heating accessories

Seite Page 439439 Seite 439 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 440 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Backing pump control

Turbopumps HiPaceTM accessories

HiPace turbopumps afford meaningful control of backing pumps. Pumping station control is effected via TC 110 and TC 400 and TC 1200. Parameter setting with DCU. Process adaptation performed in interval mode. Backing pump control

Dimensions

TVV 001

A B

SeitePage 440 440 Fussleiste Englisch.indd 440

TVV 001 backing vacuum safety valve, 230 V AC 117 mm 83 mm

TVV 001 backing vacuum safety valve, 115 V AC 117 mm 83 mm

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 441 Dienstag, 12. August 2008 3:14 15

TVV 001 backing vacuum safety valve, 230 V AC DN 16 ISO-KF DN 16 ISO-KF 064 A 0.4 kg 1·10-4 mbar l/s 230 V AC, 50/60 Hz IP 65 0-55 ºC 0.5-35 s

TVV 001 backing vacuum safety valve, 115 V AC DN 16 ISO-KF DN 16 ISO-KF 0.6 A 0.4 kg 1·10-4 mbar l/s 115 V AC, 50/60 Hz

TVV 001 backing vacuum safety valve, 230 V AC PM Z01 205

TVV 001 backing vacuum safety valve, 115 V AC PM Z01 206

Technical data

Backing pump relay box, single phase 5 A, for TC 110/TCP 350

Backing pump relay box, single phase 20 A, for TC 110/TCP 350

Backing pump relay box, single phase 5 A, for TC 400/TCP 350

Contact rating Mains requirement: voltage (range)

5.0 A 100-240 V AC, ±10%, 50/60 Hz 24 V DC

20 A 100-240 V AC, ±10%, 50/60 Hz 24 V DC

5.0 A 100-240 V AC, ±10%, 50/60 Hz 24 V DC

Order number

Backing pump relay box, single phase 5 A, for TC 110/TCP 350

Backing pump relay box, single phase 20 A, for TC 110/TCP 350

Backing pump relay box, single phase 5 A, for TC 400/TCP 350

Backing pump control

PM 061 372-T

PM 061 373-T

PM 061 374-T

PM 061 376-T

PM 061 376-T

Flange (in) Flange (out) Permanent current Weight Leak rate Mains requirement: voltage Protection category Ambient temperature Time delay Order number

Backing pump control

Control voltage

Accessories Connection cable from M8 socket on relay box to TCP 350 Connection cable from M12 socket on relay box to TCP 350 Connection cable from M12 socket on relay box to TM 3000

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 441

IP 65 0-55 °C 0.5 - 35 s

Backing pump relay box, single phase 20 A, for TC 400/TCP 350 and TM 3000 20 A 100-240 V AC, ±10%, 50/60 Hz 24 V DC

Turbopumps

Technical data

Backing pump relay box, single phase 20 A, for TC 400/TCP 350 and TM 3000 PM 061 375-T

PM 061 377-T PM 061 630-X

Seite Page 441441 Seite 441 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 442 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Mounting materials

Turbopumps HiPaceTM accessories

Mounting materials

Mounting kits Installation materials for the safest possible mounting of turbopumps. Mounting kits Mounting kit for HiPace 10, DN 25 ISO-KF, including centering ring with 4 claws, screws and U-washers Mounting kit for HiPace 80, DN 40 ISO-KF, including centering ring and clamping ring Mounting kit for HiPace 80, DN 63 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 300, DN 100 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering ring Mounting kit for HiPace 700, DN 160 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 1200, DN 200 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 1500, DN 250 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 1800, DN 200 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 2300, DN 250 ISO-K, including coated centering ring, bracket screws Mounting kit for HiPace 2400 MC, DN 250 ISO-K, including coated centering ring, bracket screws

Order number PM 016 627-T PM 016 625-T PM 016 360-T PM 016 365-T PM 016 380-T PM 016 375-T PM 016 390-T PM 016 395-T PM 016 410-T PM 016 415-T PM 016 420-T

Mounting kit for HiPace 80, DN 63 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 300, DN 100 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 700, DN 160 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 1200, DN 200 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 1500, DN 250 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 1800, DN 200 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 2300, DN 250 ISO-K, including coated centering ring, protection screen, clamping screws Mounting kit for HiPace 2400 MC, DN 250 ISO-K, including coated centering ring, protection screen, clamping screws

PM 016 362-T PM 016 367-T PM 016 382-T PM 016 377-T PM 016 392-T PM 016 397-T PM 016 412-T PM 016 417-T PM 016 422-T

Mounting kit for HiPace 80, DN 40 ISO-KF, splinter shield, clamping ring Mounting kit for HiPace 80, DN 63 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 300, DN 100 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 700, DN 160 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 1200, DN 200 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 1500, DN 250 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 1800, DN 200 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 2300, DN 250 ISO-K, including coated centering ring, splinter shield, bracket screws Mounting kit for HiPace 2400 MC, DN 250 ISO-K, including coated centering ring, splinter shield, bracket screws

PM 016 626-T PM 016 361-T PM 016 366-T PM 016 381-T PM 016 376-T PM 016 391-T PM 016 396-T PM 016 411-T PM 016 416-T PM 016 421-T

SeitePage 442 442 Fussleiste Englisch.indd 442

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 443 Dienstag, 12. August 2008 3:14 15

Mounting kits

Order number

Mounting kit for HiPace 80, DN 63 ISO-K to DN 63 ISO-F, including coated centering ring, claws Mounting kit for HiPace 300 and HiPace 400, DN 100 ISO-F, including coated centering ring, hexagon screws Mounting kit for HiPace 700, DN 160 ISO-F, including coated centering ring, hexagon screws Mounting kit for HiPace 1200 and HiPace 1800, DN 200 ISO-F, including coated centering ring, hexagon screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-F, including coated centering ring, hexagon screws Mounting kit for HiPace 3400 MC, DN 320 ISO-F, including coated centering ring, hexagon screws

PM 016 510-T PM 016 450-T PM 016 460-T PM 016 470-T PM 016 480-T

Mounting kit for HiPace 80, DN 63 ISO-K to DN 63 ISO-F, including coating centering ring, protection screen, claws Mounting kit for HiPace 300 und HiPace 400, DN 100 ISO-F, including coated centering ring, protection screen, hexagon screws Mounting kit for HiPace 700, DN 160 ISO-F, including coated centering ring, protection screen, hexagon screws Mounting kit for HiPace 1200 and HiPace 1800, DN 200 ISO-F, including coated centering ring, protection screen, hexagon screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400MC, DN 250 ISO-F, including coated centering ring, protection screen, hexagon screws Mounting kit for HiPace 3400 MC, DN 320 ISO-F, including coated centering ring, protection screen, hexagon screws

PM 016 512-T PM 016 452-T

Mounting kit for HiPace 80, from DN 63 ISO-K to DN 63 ISO-F, including coated centering ring, splinter and claws Mounting kit for HiPace 300 and HiPace 400, DN 100 ISO-F, including coated centering ring, splinter shield, hexagon screws Mounting kit for HiPace 700, DN 160 ISO-F, including coated centering ring, splinter shield, hexagon screws Mounting kit for HiPace 1200 and HiPace 1800, DN 200 ISO-F, including coated centering ring, splinter shield, hexagon screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-F, including coated centering ring, splinter shield, hexagon screws Mounting kit for HiPace 3400 MC, DN 320 ISO-F, including coated centering ring, splinter shield, hexagon screws

PM 016 511-T PM 016 451-T

Mounting kit for HiPace 300 and HiPace 400, DN 100 ISO-F, including coated centering ring, stud screws Mounting kit for HiPace 700, DN 160 ISO-F, including coated centering ring, stud screws Mounting kit for HiPace 1200 and HiPace 1800, DN 200 ISO-F, including coated centering ring, stud screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-F, including coated centering ring, stud screws Mounting kit for HiPace 3400 MC, DN 320 ISO-F, including coated centering ring, stud screws

PM 016 455-T PM 016 465-T PM 016 475-T PM 016 485-T

Mounting kit for HiPace 300 and HiPace 400, DN 100 ISO-F, including coated centering ring, protection screen, stud screws Mounting kit for HiPace 700, DN 160 ISO-F, including coated centering ring, protection screen, stud screws Mounting kit for HiPace 1200 and HiPace 1800, DN 200 ISO-F, including coated centering ring, protection screen, stud screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-F, including coated centering ring, protection screen, stud screws Mounting kit for HiPace 3400 MC, DN 320 ISO-F, including coated centering ring, protection screen, stud screws

PM 016 457-T

Mounting kit for HiPace 300 and HiPace 400, DN 100 ISO-F, including coated centering ring, splinter shield, stud screws Mounting kit for HiPace 700, DN 160 ISO-F, including coated centering ring, splinter shield, stud screws Mounting kit for HiPace 1200 and HiPace 1800, DN 200 ISO-F, including coated centering ring, splinter shield, stud screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-F, including coated centering ring, splinter shield, stud screws Mounting kit for HiPace 3400 MC, DN 320 ISO-F, including coated centering ring, splinter shield, stud screws

PM 016 456-T PM 016 466-T PM 016 476-T PM 016 486-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 443

PM 016 490-T

PM 016 462-T PM 016 472-T PM 016 482-T

PM 016 461-T PM 016 471-T PM 016 481-T

Turbopumps

PM 016 492-T

PM 016 491 -T

PM 016 495-T

PM 016 467-T PM 016 477-T PM 016 487-T PM 016 497-T

PM 016 496-T

Seite Page 443443 Seite 443 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 444 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Mounting materials

Turbopumps HiPaceTM accessories

Mounting materials

Set of hexagon screws Required torque 22 Nm

Dimensions

Material Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel C = quantity delivered

Nominal diameter DN 63 CF DN 100 CF DN 160 CF DN 200 CF DN 250 CF

A 45 50 55 60 60

B M8 M8 M8 M8 M8

C 8 16 20 24 32

Order number PM 016 683-T PM 016 690-T PM 016 691-T PM 016 687-T PM 016 694-T

Nominal diameter DN 63 CF DN 100 CF DN 160 CF DN 200 CF DN 250 CF

A 39 39 44 47 47

B M8 M8 M8 M8 M8

C 8 16 20 24 32

Order number PM 016 684-T PM 016 692-T PM 016 693-T PM 016 688-T PM 016 695-T

Set of stud screws Required torque 22 Nm

Dimensions

SeitePage 444 444 Fussleiste Englisch.indd 444

Material Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel C = quantity delivered

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 445 Dienstag, 12. August 2008 3:14 15

General These accessories broaden the range accessories of potential applications and offer maximum reliability. General accessories

General accessories Sealing gas valve for HiPace 80 Sealing gas valve for HiPace 300 with TC 110 Sealing gas valve for HiPace 300, 400 and 700 with TC 400 Sealing gas valve for HiPace 1200,1500,1800,2300 Sealing gas throttle for HiPace 80 Sealing gas throttle for HiPace 300,400 and 700 Sealing gas throttle for HiPace 1200,1500,1800,2300 Connecting adapter TPD 011 - DN 25 ISO-KF USB Converter to RS-485 interface TIC 001, Serial Interface Converter RS-232/RS-485 Connection cable, plug M12, RJ 45 Interface cable, 3 m, M 12 Y-connector, M12, for RS-485 Y-connector, M12 for accessories

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 445

Order number PM Z01 310 PM Z01 311 PM Z01 312 PM Z01 313 PM Z01 316 PM Z01 317 PM Z01 318 PM 093 315-T PM 061 207-T PM 051 054-T PM 051 726-T PM 061 283-T P 4723 010 P 4723 012

Turbopumps

A maximum of 4 controllable accessories can be connected to HiPace turbopumps with TC 400 and TC 1200 drive electronics. A maximum of 2 controllable accessories can be connected to HiPace turbopumps with TC 110 drive electronics. Connection cable PM061351-T is required for connecting accessories.

Seite Page 445445 Seite 445 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 446 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Centering rings, protection screens, splinter shields

Turbopumps HiPaceTM accessories

These elements offer maximum protection against foreign objects with the lowest conductivity losses. Optimally matched to the respective pump size, engineered in accordance with the latest containment analysis findings. Centering rings, protection screens, splinter shields

Dimensions

Centering ring

Centering ring Centering ring Centering ring, DN 25 ISO-KF pumps Centering ring, DN 40 ISO-KF pumps

Material FPM/ aluminium Neoprene/ aluminium

Nominal diameter DN 25 ISO-KF

A 26

B 25

C 8

D 3.9

Order number PF 110 125-T

DN 40 ISO-KF

41

40

8

3.9

PF 110 140-T

Centering ring, with integrated mesh screen Centering ring, with integrated mesh screen Centering ring, with integrated mesh screen, DN 25 ISO-KF Centering ring, with integrated mesh screen, DN 40 ISO-KF

SeitePage 446 446 Fussleiste Englisch.indd 446

Material

Nominal diameter

A

B

C

D

Order number

FPM/stainless steel

DN 25 ISO-KF

26

19.5

8

3.9

PF 113 225-T

FPM/stainless steel

DN 40 ISO-KF

41

32

8

3.9

PF 113 240-T

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 447 Dienstag, 12. August 2008 3:14 15

Centering rings, protection screens, splinter shields Screen conductance l/s for N2

PM 016 206-U PM 016 210-U PM 016 216-U PM 016 220-U PM 016 225-U PM 016 232-U

Centering ring, with multifunction coating, DN 63 ISO-K/-F pumps Centering ring, with multifunction coating, DN 100 ISO-K/-F pumps Centering ring, with multifunction coating, DN 160 ISO-K/-F pumps Centering ring, with multifunction coating, DN 200 ISO-K/-F pumps Centering ring, with multifunction coating, DN 250 ISO-K/-F pumps Centering ring, with multifunction coating, DN 250 ISO-K/-F pumps Centering ring, with multifunction coating and integrated protection screen, DN 63 ISO-K/-F Centering ring, with multifunction coating and integrated protection screen, DN 100 ISO-K/-F Centering ring, with multifunction coating and integrated protection screen, DN 160 ISO-K/-F Centering ring, with multifunction coating and integrated protection screen, DN 200 ISO-K/-F Centering ring, with multifunction coating and integrated protection screen, DN 250 ISO-K/-F Zentrierring, mit Multifunktionsbeschichtung und integriertem Schutzgitter, DN 320 ISO-K/-F

303

PM 016 208-U

763

PM 016 212-U

1952

PM 016 218-U

3051

PM 016 222-U

4767

PM 016 227-U

1250

PM 016 234-U

Centering ring, with integrated splinter shield, DN 40 ISO-KF Centering ring, with multifunction coating and integrated splinter shield, DN 63 ISO-K/-F Centering ring, with multifunction coating and integrated splinter shield, DN 100 ISO-K/-F Centering ring, with multifunction coating and integrated splinter shield, DN 160 ISO-K/-F Centering ring, with multifunction coating and integrated splinter shield, DN 200 ISO-K/-F Centering ring, with multifunction coating and integrated splinter shield, DN 250 ISO-K/-F Centering ring, with multifunction coating and integrated splinter shield, DN 320 ISO-K/-F

41 194

PM 006 375-X PM 016 207-U

488

PM 016 211-U

1250

PM 016 217-U

1952

PM 016 221-U

3051

PM 016 226-U

3051

PM 016 333-U

Protection screen, DN 63 CF-F Protection screen, DN 100 CF-F Protection screen, DN 160 CF-F Protection screen, DN 200 CF-F Protection screen, DN 250 CF-F

303 763 1952 3051 4767

PM 016 333 PM 016 336 PM 016 339 PM 016 342 PM 016 345

Splinter screen, DN 63 CF-F Splinter screen, DN 100 CF-F Splinter screen, DN 160 CF-F Splinter screen, DN 200 CF-F Splinter screen, DN 250 CF-F

194 488 1250 1952 3051

PM 016 312 PM 016 315 PM 016 318 PM 016 321 PM 016 324

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 447

Order number

Turbopumps

Centering rings, protection screens, splinter shields

Seite Page 447447 Seite 447 14.08.2008 12:46:43 Uhr


OBJ_DOKU-1329-001.fm Seite 448 Dienstag, 12. August 2008 3:14 15

Vakuum generation

Vibration dampers

Turbopumps HiPaceTM accessories

For employment of turbopumps on systems and plants that are extremely sensitive to vibration. Reliable damping in vertical attitude. Integral securing means eliminate the need for support. Vibration dampers

X For the employment of turbopumps on systems and plants that are extremely sensitive to vibration X The reduced conductivity must be taken into consideration in dimensioning the pump system

Dimensions

Vibration dampers

Vibration dampers Vibration damper for HiPace 80, DN 63 ISO-K Vibration damper for HiPace 80, DN 63 CF-F Vibration damper for HiPace 80, DN 40 ISO-KF Vibration damper for HiPace 300 and HiPace 400, DN 100 ISO-K Vibration damper for HiPace 300 and HiPace 400, DN 100 CF-F Vibration damper for HiPace 700, DN 160 ISO-K Vibration damper for HiPace 700, DN 160 CF-F Vibration damper for HiPace 1200 and HiPace 1800, DN 200 ISO-K Vibration damper for HiPace 1200, DN 200 CF-F Vibration damper for HiPace 1500 and HiPace 2300, DN 250 ISO-K Vibration damper for HiPace 1500 and HiPace 2300, DN 250 CF-F

SeitePage 448 448 Fussleiste Englisch.indd 448

A 87 mm 98 mm 85 mm 84 mm 99 mm 84 mm 104 mm 83 mm 108 mm 84 mm 112 mm

Order number PM 006 800-X PM 006 801-X PM 006 799-X PM 006 459-X PM 006 488-X PM 006 492-X PM 006 493-X PM 006 668-X PM 006 669-X PM 006 670-X PM 006 671-X

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net 14.08.2008 12:46:44 Uhr


OBJ_DOKU-1329-001.fm Seite 449 Dienstag, 12. August 2008 3:14 15

Turbopumps

Notes

www.pfeiffer-vacuum.net www.pfeiffer-vacuum.net Fussleiste Englisch.indd 449

Seite Page 449449 Seite 449 14.08.2008 12:46:44 Uhr


Pfeiffer Vacuum Turbo pumps