Hot Filament Chemical Vapor Deposition With widespread use of electronic devices the semiconductor industry has seen a lot of changes in manufacture of semiconductor devices. Out of various stages for semiconductor manufacturing, fabrication process is one of the most important steps. For fabrication of functional layers over a substrate, the most commonly used technique is CVD (Chemical vapor Deposition).
CVD is done in various processes. One of them is HFCVD (Hot Filament Chemical Vapor Deposition). The Blue Wave hot filament chemical vapor deposition system was built to produce concentrated, dense, adherent and coherent poly-crystalline diamond films on silicon, metallic and ceramic substrates.
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