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THREE ZONES CVD TUBE FURNACE MODEL NO. - ACM- FT-73215
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THREE ZONE CVD TUBE FURNACE Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100 0C, which is controlled by a precision controller with accuracy +/-1°C. Furnace is made up of Double wall steel casing with forced air cooling. Two cooling fan inside to keep temperature of outside case < 70 ºC. High purity alumina fibrous insulation for max energy saving. One sliding rail to support flange to load sample with ease. Three heating zone to achieve longer constant temperature zone or a certain temperature gradient.
One extra temperature monitor is built in to shut down power when temperature out of control by accident Double K type thermal couple installed. Temperature accuracy is +/-1°C. RS485 port is installed and allows remote control temperature profile by PC. It Use dual tube for CVD growth on metal foil which is wrapped on inside tube surface. One pair of SS304 flanges to seal both the outside tube and the space between the outside tube and inside tube. Left side flange is Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10-4 to 10-4 torr, water cooling inlet/outlet included.
SALIENT FEATURES Ÿ Top quality SiC heating elements are used in these furnaces.
Ÿ Temperature control unit can be separated from furnace, and make moving at easy.
TECHNOCRACY PVT. LTD.
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Ÿ Its PID automatic control via current limiting phase angle fired the resistor, e.g. SCR
(Silicon Controlled Rectifier).
Ÿ It has a Power control with 30 segments programmable. High quality Ni-Cr-Al resistance
wire serves as heating element and can be heated up to 1200oC.
Ÿ This furnace has a Built in protection for over-heated and broken Thermal couple.
Ÿ Three precision temperature controllers with PID function and 30 segments
programmable
Ÿ Max. heating temperature is 1100°C. Continuous working temperature is 400 -1000°C.
Ÿ Max. Heating /cooling rate is 10°C/min.
TECHNOCRACY PVT. LTD.
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TECHNICAL SPECIFICATIONS Furnace structure
Double wall steel casing with forced air cooling. Two cooling fan inside to keep temperature of outside case < 70 ºC. High purity alumina fibrous insulation for max energy saving One sliding rail to support flange to load sample with ease Three heating zone to achieve longer constant temperature zone or a certain temperature gradient
Input voltage
220VAC Single phase
power
8kW
Fused quartz tube size
8.5" O.D x 8.2" I.D x 51" Length One quartz tube is included, and spare tube is available as option
Heating element
NiCrAl Resistance Wire
Working Temperature
Max. heating temperature: 1100°C Continuous working temperature: 400 -1000°C Max. heating/cooling rate: 10°C/min
Heating zone
Total heating zone length 900 mm (36") Three zones: 300 mm + 300 mm + 300mm (12" per zone) Constant temperature zone: 500 mm (if three zones are in the same temperature)
Temperature controller
Three precision temperature controller with PID function and 30 segments programmable One extra temperature monitor is built in to shut down power when temperature out of control by accident Double K type thermal couple installed. Temperature accuracy: +/-1°C Software and PC interface module is available at extra cost. Optional: PC interface & software
TECHNOCRACY PVT. LTD.
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TECHNICAL SPECIFICATIONS Vacuum Flange and gas
Vacuum sealed stainless steel flanges with double high temperature
feed though ports
silicone O-ring are included to achieve high vacuum (Usually 10-2 torr by mechanical pump and 10-4 torr by molecular pump ). Vacuum pump is not included. Right-side flange is hinge-type and Vacuum Right-Angle Valve
KF25 vacuum port. KF25
and 1.2 meter long KF-40 Flexible
Stainless Steel Vacuum Hose ( Bellows ), are included. One 1/4" diameter feed though port is in built one flange for insert a thermal couple to calibrate furnace temperature. ( please order 36" length x 1/4"dia K type thermal couple to insert the feed though at related product or click underlined). One quartz block is included, which must put right end of tube to block heat radiation. Left-side flange is install on slidable table to make moving at easy. There are five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases. 4 pcs quartz plate is built in leftside flange for thermal block is built in left-side flange.
Please use a recirculating water chiller for water
cooling to save environmental Product dimension
Furnace: 1300 L x 680 W x 920 H mm Sliding Table: 600mm L Note: You must put furnace and sliding table on flat surface. Must make good alignment between sliding flange and furnace ( We ship sliding table and furnace separately
Net weight
354Kg
Shipping dimension
70" x 70" x 65"
Shipping weight
354Kg
Warranty
One year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user
Certificate
CE certified TECHNOCRACY PVT. LTD.
An ISO 9001 : 2208 | ISO 14001 : 2008 | ISO 13485 WHO: GMP Products | GLP Compliant Products
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TECHNOCRACY PVT. LTD. SALES OFFICE (INDIA) Office no. 506 & 507, 5th Floor, Plot no.- C-9, Pearls Best Height-II, Netaji Subhash Place, Pitam Pura, Delhi- 110034 Land Line No.: +91 - 11- 47619688, Fax: +91-11-47619788 E-mail.: info@acmasindia.com
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