Optical metrology is the science and technology concerned with measurement using light. These measurements can focus on the properties of the light itself or on other properties such as distance.
Research Using Optical Metrology Global optics specialist, Olympus Corporation offers a wide range of optical measurement products, some of which have been used in successful research studies.
Professor Robert Wood, working at the Harvard School of Engineering and Applied Sciences, and his team chose the Olympus Lext OLS4000 Laser Scanning Confocal Microscope as their optical metrology tool over other measurement tool. The idea of using SEM was abandoned because it could not measure height, and the stylus profilometer was not used because it could not measure vertical profiles such as the critical wall because of its square pyramid on its side wall. Shaped stylus tip. He collided with her and could not reach the bottom.