MESA+ Highlights 2023 by University of Twente

MESA+ HIGHLIGHTS 2023

1 PREFACE 2 NANOLAB 3 CENTRES OF EXPERTISE 4 HIGHLIGHTS PI’S

PREFACE Dear MESA+ colleagues,

With only a few days left this year, the Christmas break is just around the corner. It is time to reflect on the past year, in which many results were achieved. As in last year, we want to look back at the highlights of the year with this digital magazine: an overview with highlights of the research within the MESA+ Institute and the NanoLab.

On 25 September 2023, we organised the MESA+ Meeting at Kinepolis in Enschede. We enjoyed a day full of knowledge exchange, inspiration, networking, and meeting socially. It was the best visited MESA+ day so far! We look back on a successful edition of this meeting and hope to see you again at the next MESA+ Meeting on

30 September 2024 Save the date!

National Growth Funds We put much time and energy into writing the National Growth Fund proposals. And we had success! Not only in round 1 and round 2, but also in round 3. We have a significant role in Quantum Delta NL (round 1), PhotonDelta (round 2), NXTGEN Hightech (round 2), Polaris (round 3), circular batteries (round 3) and circular solar panels (round 3). The total budget for the UT within these proposals is in the order of 175M€! Implementation and operationalisation of these mega sized programmes is currently in full swing. We want to congratulate and thank everyone who has been contributing to these proposals for the National Growth Fund for their time, energy, and enthusiasm. It is great to see that joining effort is indeed successful. With the proposals approved in the first three rounds, MESA+ has firmly positioned itself on all these fronts. Currently we are preparing a fourth round proposal, in close collaboration with Brainport. These proposals will offer great opportunities for the near future.

High Tech Foundry In the past decades a variety of companies have spun-out from MESA+. A number of these have always relied on the services of the MESA+ NanoLab for research and development as well as chip production. As a number of these companies are maturing we are seeing a steady increase in cleanroom use associated with commercial production. This is a success story but also presents us and our ecosystem with the challenge that continued expansion of production capacity must be accommodated. The MESA+ NanoLab will not be able nor is established to fulfill this role. We have therefore initiated plans to expand our local ecosystem with a High Tech Foundry where commercial chip production can take place. Gradually, these ambitions have expanded to the recent foundation of the high tech foundry NEW ORIGIN. NEW ORIGIN will run with professional performance in quality and cycle time, is flexible in running new processes and materials, can absorb new technology from knowledge institutes, and can transfer mature processes for high volume to partners. NEW ORIGIN will be embedded in the chip technology cluster Chip Tech Twente, which focuses on chip design, chip fabrication and heterogeneous integration.

Chip Tech Twente Chip Tech Twente is a joint effort of the key regional players in chip technology, a.o. MESA+, Kennispark, OostNL, Twenteboard, NovelT and numerous chip tech companies. MESA+ has taken the lead in establishing ChipTech Twente and will continue to do so. This initiative brings several key expertises of MESA+ together: Chip design, integrated photonics, microfluidics and quantum technology. Together with our state of the art infrastructure and our ambitious and realistic plan for establishing a high tech foundry, we have all ingredients available to position Twente as Europe’s gateway for innovative chip design and heterogeneous systems. The MESA+ NanoLab will continue to be the center for academic research as well as a place where established and newly started companies can conduct research and development and pilot production with the possibility to obtain the services of the The High Tech Foundry for required production capacity.

ORGAN ON CHIP

INTEGRATED PHOTONICS

QUANT

BRAINS

SOLAR

MESA+ Profiling centres MESA+ has various centres of expertise which provide PI’s with the opportunity to raise the profile of their research within and outside the University of Twente as well as the tools for bottom-up organisation and management. MESA+ can offer support to enable centres to develop themselves, provided that the centres align with the heart of the research strategy of MESA+ and they have sufficient focus and mass. This year we started to evaluate the centres and support them to make the centres more impact full. We are proud of these centres and we will help them in reaching their goals.

BATTERIES

PIEZO MEMS MOLECULES

We hope to offer a nice way of looking back on 2023 with this magazine, because it was a year in which great results were achieved, and we are proud of that! This magazine will offer everyone a stage to share their highlight of the year, so that we within the MESA+ family know what everyone has been working on and be able to show how much talent we accommodate. We look back on 2023 with pride and want to thank you all for your ongoing dedication, flexibility, and commitment. And in 2024 we will welcome new blood in the Management team of MESA+. In January Rob Legtenberg, our new Director NanoLab, will start. But also Guus and Albert will stop as Scientific Directors of MESA+. After serving the institute for several years, they will passing the baton in February to Hans Hilgenkamp, the new Scientific Director of MESA+. Enjoy reading! Merry Christmas and a happy and prosperous new year!

Albert, Guus, and Timo

Happy Holidays and all the best for 2024!

NANOLAB NanoLab's positioning is becoming increasingly stronger, both within and outside the UT. This is due to a motivated team working daily on the growth and further development of the NanoLab. On the following pages, you'll find an overview of five new facilities that have been installed this year.

UV flood exposure system This system, a flood exposure tool with UV-light (UV-KUB9 from KLOÉ), can handle dicing-frames and all substratesizes upon 9”. The thickness is restricted to 2 mm (in combination with a dicing-frame), and is 7 mm from the bottom of the substrate-holder. The intensity ranges from 20 mW/cm2 to 180 mW/cm2.

3D Nanoscribe lithography system Three updates are installed on the Nanoscribe 3D laser lithography system for 3D micro- and nanostructuring of photosensitive media capable of 2-photon polymerization: the laser is replaced, the machine is now a PP-GT+ system, and a Heteromerge MERGE ONE kit is added.

Keyence VHX7000 digital microscope This 4K High Accuracy digital microscope (VHX7000, Keyence) is capable of capturing high resolution images and measurement data for (inline) inspection and failure analysis.

Automated coater and developer A Süss MicroTech ACS200 Gen3 automated coater and developer system for processing of batches of wafers (100 mm and 150 mm diameter) is ready for use. This system is a cassette-to cassette automated system for spin coating or developing of positive photoresists.

Upgrades of wet benches All wet benches are/will be upgraded, with for example new control screens, new safety panels (and lifting motors) and implementation of new rinser-dryer tools.

MESA+ CENTRES

MUST Battery School

January 2023

Advanced Manufacturing Centre October 2023

Material Independence & Circular Batteries National Growth Fund

Battery Centre Twente Cross-Faculty Research Centre on Innovative Battery Systems

NL-ECO Netherlands Initiative for Energy Efficient Computing Researchers from the MESA+ BRAINS Center have taken the initiative to coordinate a large scale program in the framework of the National Science Agenda (NWA) on Novel Materials and Concepts for Energy Efficient Computing, The 5-year ’NL-ECO’ program has started on November 1, 2023. ( www.nl-eco.nl )

CENTRE FOR INTEGRATED PHOTONICS NOVEL PHYSICAL CONCEPTS, MATERIALS, INTEGRATION TECHNOLOGIES AND SYSTEM INTEGRATION FOR A BETTER SOCIETY Sonia M. Garcia Blanco, David Marpaung, Pepijn Pinkse, Jelmer Renema

Al2O3 spirals in the UV

SiN-on-sapphire platform APPLICATIONS: • Quantum technology • LIDAR • Datacom/telecom • Microwave photonics • Optical sensing TFLN spirals for SBS

Erbium doped Al2O3 spirals for on-chip amplification

SCIENCE • Intelligent Molecules • Life-like Materials • Interfacing Chemistry

NEIGHBOURSHIP • •

A community for sharing ideas and opportunities Regional ecosystem

IMPACT • •

Connecting researchers and strategic partner Addressing societal challenges in health and sustainability

MOLECULES CENTRE Image shows the surface of an electrochemical perchlorate sensor. From Christian Nijhuis and Jurriaan Huskens. Jeroen Cornelissen, Christian Nijhuis, Nico Overeem

Towards an open facility for molecular fabrication

ORGAN-ON-CHIP CENTRE TWENTE Andries van der Meer, Liliana Moreira Teixeira, Sanne de Wit • National hDMT facility Organ-on-Chip Development Centre (“OoCDev”) will be established at University of Twente! • University of Twente is the #1 institute in Europe for scientific output on organs-on-chips! • Our OoC community is growing and with three symposia this year we were able to exchange exiting ideas!

QUANT Centre for Quantum Nanotechnology in Twente “Materials for the quantum age” is the name of the national Zwaartekracht program with more than 30 PhD students. All UT positions have been filled in 2023 and the program is in full swing. This schematic figure depicts the helical quantum states that can arise at the edges of topological matter.

UT Open House 2023

HIGHLIGHTS PI’S

Characterization of nano-gratings with 3D X-ray Standing Waves Igor A. Makhotkin, XUV Optics

Photo credits: Bob Bronshoff / New Scientist

GALA VAN DE WETENSCHAP Loes Segerink - BIOS

Real time Single-Entity Stochastic Biosensing on CMOS Nanocapacitor Arrays prof. dr. S.J.G. Lemay, Bioelectronics Group

SuperCAPACITORS Ranisha Sitlapersad, Anthony Thornton and Wouter den Otter, Department of Thermal Fluid and Engineering In this PhD project, a Molecular Dynamics model was developed for supercapacitors. These store energy in Coulombic interactions between rigid electrodes (grey) and mobile ions (green and blue) dissolved in a liquid (not shown). In our novel simulation approach, the motions of the ions inside the supercapacitor are coupled with the flow of current in the external (dis)charging circuit. This enables in silico prediction of the energy delivered.

Biodegradable polyphosphoester micelles act as both 31 background-free P Magnetic Resonance Imaging agents and drug nanocarriers Frederik R. Wurm, Sustainable Polymer Chemistry, Department of Molecules and Materials Nat. Commun. 2023, 4351

40 µm

Superconductor Science & Technology BSCCO-2212 high temperature superconductor after transverse stress measurement Anna Kario, Simon Otten

In situ and operando characterization of faceted semiconductor nanoparticles for improved H-production Dr. Igor Siretanu- Physics of Complex Fluids (in collaboration with PCS and IMS group)

• advanced atomic force microscopy-based techniques • sub-particle resolution • facet-dependent surface charges and hydration structure • surface defects and atomic resolution in liquids • surface charge mapping in the dark and under illumination • rational design of materials and optimized operation conditions

Engulfment of flexible vesicles Dr. H.R. Vutukuri Active Soft Matter and Bio-inspired Materials Lab

“Stimulus-Responsive Control of Transition States on Nanohybrid Polymer-Metal Catalysts” Front cover ACS Catalysis, 2023, 13, 10, 6590-6602. Prof. ir. J. A. Faria – Catalytic Processes and Materials group

Context & Uniqueness • Electrocatalysts for green hydrogen and beyond • Model electrode surfaces for fundamental understanding • Operando spectroscopy • Emerging phenomena (high-entropy materials, magnetic catalysts)

Artist’s rendering • Schematic catalyst crystal surface • Interface with water • Creation of “green” hydrogen

Electrified solid-liquid interfaces Electrocatalysts for green chemistry

Chris Baeumer, Electrochemical Thin Films and Interfaces (IMS)

CONTOURS OF GIZEH 3D Integrated Nano-Systems – Mesoscale Chemical System Silicon pyramidal templates were etched using a lateral self-aligned 3D fractal fabrication approach, and subsequently duplicated in silicon nitride nanowires through corner lithography.

IEEE MEMS 2023 “Art in Microtechnology” Award Winner

Green Perspectives for CO2 mitigation Frieder Mugele (PCF) in collaboration with Michel Duits (PCF), Igor Siretanu (PCF) CO2 mineralization and reduction considered a key requirement to reduced the concentration of atmospheric CO2 in the second half of this century. Chemical fixation in the form of carbonate minerals and its reduction are possible routes to achieve this goal, either for the permanent storage or for making new products. Yet, the microscopic physico- and electrochemical processes controlling this conversion are often poorly understood. We characterize reaction mechanisms at mineral- and catalyst electrolyte interfaces using techniques such as high resolution Atomic Force Microscopy and optical spectroscopies to elucidate these processes that may lead to new strategies for a developing circular carbon economy.

THIN FILMS • 30 nm • Protective inert coating (wear, chemical,…)

TEM: FOR AS-DEPO Nb-Mo

TEM: 450 oC OXIDIZED Nb-Mo

Fully intermixed and polycrystalline as-deposited

Fully oxidized, stable and … amorphous!

MEDIUM ENTROPY ALLOY THIN FILMS • • •

Co-deposition of Refractory Metals: Ti, V, Y, Zr, Nb, Mo, W, … Equiatomic composition Hume-Rothery rules predict glass structure.

Oxidation of Enhanced Entropy Alloy layers Thin film amorphization of binary alloys via oxidation in ambient conditions W.T.E van den Beld ; Industrial Focus Group XUV Optics ; S&T

J. Chem. Phys. 158, 195102 (2023)

COVER IMAGE J. Chem. Phys. Linn Leppert (Computational Chemical Physics)

• Delocalized electronic excitations and their role in directional charge transfer in the reaction center of Rhodobacter spaeroides • Lead by Sabrina Volpert and dr. Zohreh Hashemi

• Appeared in JCP Emerging Investigators Special Collection 2023

Superconductor Science & Technology Successful Magnetic Density Separation test Marc Dhalle, Gonsalo Thomas, Jaap Kosse, Erik Krooshoop, Sander Wessel

‘GRAND’ CANYON - Thick Si3N4 waveguides J.J. Renema, Adaptive Quantum Optics – Quantum Information Processing

HEART ON A CHIP Robert Passier & Andries van der Meer - AST | Loes Segerink - BIOS

Solid-state Nanostructuring Marco Altomare – PCS group

Dewetted nanomaterials • By physical vapor deposition & controlled solid-state dewetting • As model photo- & electro-catalysts • To unveil structure-performance relationship

A compact permanent magnet for microflow NMR relaxometry Han Gardeniers, Mesoscale Chemical Systems Within the NWO PPS programme FLOW+, in collabroration with the Makinwa group at TU Delft, a miniaturized magnetic resonance system was developed aimed at flow rate measurements at the microliter per minute level. Postdoc Dmytro Polishchuk modeled, designed, manufactured and tested a compact magnet, feasible for obtaining accurate flow rate values of pure water and oil, and oil-water two-phase systems. The research has been published as: D. Polishchuk & H. Gardeniers. Journal of Magnetic Resonance 2023, 347, 107364. https://doi.org/10.1016/j.jmr.2022.107364

MICRO SENSOR INTEGRATION Dennis Alveringh − Integrated Devices and Systems Microtechnology allows us to fabricate sensors with better specifications. This device is designed for fluid (composition) sensing by measuring the relative permittivity. We are currently working on the integration of such sensors, electronics and machine learning: a single chip that – in the future – translates any physical parameter from the real world into a useful digital signal for its application.

Improving stability of Ni-YSZ electrodes for NXT GEN Solid Oxide Electrolysers

Mechanical Reliability Modelling of Solid Oxide Electrolysers

Fuel-Flexible and Reversible Protonic Ceramic Fuel Cells

Direct CO2 methanation inside Protonic Ceramic Electrolysers

CERAMIC FUEL CELLS & ELECTROLYSERS Aayan Banerjee, Arian Nijmeijer – Sustainable Electrochemical Engineering & Digitalisation (CPM & IM)

Fluorescence Microscopy Spectrally Resolved Image of Multibubble-Based Acoustic Microrobot and HeLa Cell Spheroid Surgical Robotics Laboratory, Department of Biomechanical Engineering

Molecular-electronic devices that emulate synapses

Christian A. Nijhuis – Hybrid Materials for OptoElectronics

• • • •

Spike-timing dependent switching Reconfigurable logic Multi-functional devices Energy efficiency Nat. Mater. 2022, 21, 1403-1411

Etching cylindrical nanopores for photonic crystals Willem Vos, Melissa Goodwin, Ad Lagendijk and Bill Barnes, Complex Photonic Systems A deep reactive ion etching process was developed, focusing on as close to cylindrical as possible nanopores. These cylindrical nanopores, of 320 nm diameter, are ideal for fabricating 2D and 3D photonic crystals in silicon. (Goodwin et al. Nanotechnology, 2023)

Cryogenic Test Facility at UT (HDL) for Einstein Telescope (Pathfinder)

Advanced Cryogenic Technologies Marcel ter Brake, Michiel van Limbeek, Cris Vermeer et al.: Vibration-free cooling for Big Science projects, Quantum Technology, Cryo-EM, Space and ground-based optical instruments

Superconductor Science & Technology Successful measurement of first cloverleaf ReBCO accelerator type coil Herman ten Kate, Anna Kario, Thomas Nes

W/Si

0,5

0,5 0,4

0,3

0,2

0,1

Axis Title

0,4

W/B4C/Si/B4C

0,82

0,83

0,84

0,85

Axis Title

0,82

0,83

0,84

0,85

Axis Title

Ultra-short period 1 nm W/Si multilayers Andrey Yakshin – XUV Optics group

• Bridging the gap between traditional X-ray multilayer optics and natural crystals • 0.1 nm B4C barrier layers • Pushing the limits of what is physically achievable at the atomic scale

1 nm

Biobased Agents for Single-Particle Detection with Optoacoustics Olga Koshkina, Sustainable Polymer Chemistry, Department of Molecules and Materials Small 2023, 2207199

COGNITIVE MATTER Wilfred van der Wiel | NanoElectronics Group

• Perspective in Nature Communications • Plenary at Memrisys 2023 • 5 year BRAINS

GERMANENE INPUT • • •

•

… … …

•

Germanene = germanium analogue of graphene Germanene has a honeycomb lattice ( 2 atoms per unit cell; an A and a B atom)

TWISTED GERMANENE • • • •

Moiré-modulated bandgap in twisted bilayer germanene Harold Zandvliet, Pantelis Bampoulis and Dennis Klaassen PIN

•

Stacking 2 germanene layers on top of each other results in a moiré superlattice (blue hexagon) There are AA/BB (corners of the blue triangles) and AB/BA (center of the blue triangles) stacked regions The periodicity depends on the twist angle between the 2 layers We found a moiré-modulated band gap (electric field induced bandgap) in the twisted bilayer Left image: 21.8o twisted germanene

Fast, flexible, accurate particle simulations

Mixing

Available open-source at mercurydpm.org

Goal understand

and control segregation Methods combine experiments, theory and simulation Applications Mixers & geophysics

MercuryDPM Particle Simulations

TFE: MSM & Granular Materials groups - T Weinhart, AR Thornton, I Ostanin, T Plath

Virtual Prototyping Goal design/optimise

machinery on the computer Methods multiscale simulations with opensource software Applications

Additive Manufacturing, Granulation

PHOTONIC INTEGRATED CIRCUITS MATERIALS AND INTEGRATION TECHNOLOGIES Integrated Optical Systems (IOS) Sonia M. García Blanco and Lantian Chang Novel material platforms and integration technologies to enhance the performance of photonic integrated circuits will open up new possibilities in quantum technology, microscopy, metrology, spectroscopy, sensing and datacom/telecom.

Superconductor Science & Technology Successful measurement of BSCCO-2223 based bean shape coil for future proton therapy Arend Nijhuis, Ruben Lubkemann, Cris Vermeer

DNA-origami-directed virus capsid polymorphism Jeroen J.L.M. Cornelissen, Biomolecular Nanotechnology, Department of Molecules & Materials In collaboration with colleagues from Finland and Australia, virus protein assembly was redirected by DNA origami templates. The work was carried out at Aalto University in collaboration with Regine van der Hee and Jeroen Cornelissen and is published in Nature Nanotechnology 2023, 18, 1205-1212

Catalyst support engineering Leon Lefferts, Catalytic Processes and Materials

• Easy transport of molecules in hyper-porous materials based on carbon-nano-fibers • Optimal contact with liquid and gas phase via wetting

Broad and colossal edge supercurrent in Dirac semimetal Cd3As2 Josephson junctions Our work reports the first experimental observation of the possible non-Hermitian states in Dirac semimetal-based Josephson junctions.

Nature Communications 14, 6162 (2023).

Chuan Li – ICE/QTM

Pulsed Laser Deposition of Hybrid Metal Halide Perovskites PI: Monica Morales-Masis M3 Team, IMS, TNW Soto-Montero, T. et al. Single-Source VaporDeposition of MA1–xFAxPbI3 Perovskite Absorbers for Solar Cells. Adv. Funct. Mater. 2300588 (2023)

405nm INTEGRATED LASER Prof. K.-J. Boller, Laser Physics and Nonlinear Optics group

Calculation:

Goals:

Materials

• To simulate heat flow in thin films • To calculate the emissivity of those films

Si|MoxSiy interfaces MoxSiy Si

Electronic structure Dielectric function & emissivity Interface thermal resistance Thermal conductivity

Methods: Density functional perturbation theory Machine learning force fields

Emissivity & Heat transport Zahra Golsanamlou & Menno Bokdam

Results:

Relation between MoxSiy stoichiometry and Separate contribution thinoffilm emissivity electrons and Polycrystallinity can phonons to e(w) affect heat transport of the films

Phase segregation in thin film tellurides Quantum Transport in Matter – Alexander Brinkman The material VBi2Te4 is predicted to be a magnetic topological insulator and to host quantum anomalous Hall edge and axion states. We have deposited thin films by molecular beam epitaxy. X-ray diffraction and in-house transmission electron microscopy reveal that the material is unstable against phase segregation into Bi2Te3 quintuple layers and VTe2. This is not useful for topological applications but the obtained lamellae provide a beautiful image and a great example for next year’s materials science course. Subm. to Nanomaterials (2023).

Superconductor Science & Technology Bonding Experiment as tool for future training free Nb3Sn based superconducting magnets Hans van Oort , Anna Kario, Simon Otten, Jorick Leferink, Jan van Steenlandt

Multilayer of PbZrO3/Pb0.9La0.1Zr0.52Ti0.48O3 Nguyen, M. D., Birkhölzer, Y. A., Houwman, E. P., Koster, G., Rijnders, G., Adv. Energy Mater. 2022, 12, 2200517. https://doi.org/10.1002/aenm.202200517

Record breaking energy-storage density and breakdown strength Koster, Rijnders IMS

a–e) Polarization hysteresis (P–E) loops, f) Pm, and Pr, g) volumetric energy-storage density (Us), recoverable energystorage density (Ur), energy-loss density (Ul), and h) energystorage efficiency (η) of multilayer structures, measured at the corresponding i) EBD values. The P– E measurements were performed at 1 kHz and room temperature.

Metal 10 nm SiN

Thin film crystal structure Plane view TEM imaging Marko Sturm, XUV Optics

DISENTANGLING HOT CARRIER DECAY AND THE NATURE OF LOW-N TO HIGH-N TRANSFER PROCESSES IN QUASITWO-DIMENSIONAL LAYERED PEROVSKITES Einhaus, Zhang, Zhu, Korterik, Molenaar, Askes, Mul, Ten Elshof, Huijser, PhotoCatalytic Synthesis group We disentangle hot carrier cooling from exciton transfer between low-n and high-n phases in Dion-Jacobson type metal halide perovskites layers using time-resolved photoluminescence and transient absorption spectroscopy.

https://doi.org/10.1021/acs.jpcc.3c05415

Skiing droplets

• Pt and Ge form an eutectic liquid above 1050 K

Arie van Houselt, PIN

• This droplets to the hottest point

• ~ 1140 K a solid forms under the droplets, enabling them to ski •

Phys. Rev. Lett. 131, 106201 (2023)

They change shape and direction, like in skiing

FIBER TAPERING H.L. Offerhaus J.A. Alvarez-Chavez Optical Sciences group

• Comprehensive mode calculations (Verouden) • Dispersion, mode profiles, overlap integrals • Different tapering rigs for fast and slow tapers • Application in sensing and chip-coupling

Luminescent perovskite nanocrystals Mathis van de Voorde, Saive group – Inorganic Materials Science, in collaboration with KIT

1 nm

Fast lithium storage

(Small 2023, 202301967)

Prof. dr. ir. Mark Huijben, Nanomaterials for Energy Conversion and Storage Prof. dr. ir. Andre ten Elshof, Inorganic and Hybrid Nanomaterials Chemistry

Air-coated particles for ultrasound-triggered release Jieke Jiang, […], Kees Venner, Claas Willem Visser Engineering Fluid Dynamics group Producing microparticles with an aqueous core and a controlled nanoparticle- or polymer-laden hydrophobic shell at scale is highly challenging. We developed a platform, called “jetting through a liquid layer” (JetALL), to produce Pickering emulsions, microcapsules, and even air-coated antibubbles at high-throughput. The photo shows an air-coated particle. It was selected as cover image of Advanced Materials (2370095).

In-situ opto- and spectroelectrochemistry

Ivana Q. Lin – Hybrid Materials for OptoElectronics

• • • •

Single- to few- molecule sensitivity 2 in 1: catalysis and plasmonics Spectral fingerprint Curr. Opin. Electrochem. 2023, 37:101201 Reaction monitor

3D Printed Micro Optics Lantian Chang, Integrated Optical Systems (IOS) group

• • • •

Two photon polymerization 3d printing Metallic coated reflection layer Combined with Optical waveguides …

QUANTUM SIMULATION We observed the emergence of thermalization in a certified closed photonic quantum system. P.W.H. Pinkse & Adaptive Quantum Optics

SOFT & WEAK = POWERFUL Jurriaan Huskens, Molecular NanoFabrication group

Area selective GaN ALD • • • •

Is enabled by ASALD of AlN Purely thermal High-pressure Intrinsic incubation

ALD in the IDS group Alexey Kovalgin, Integrated Devices and Systems (IDS) One of the research activities of the IDS group is exploring novel features of atomic layer deposition (ALD) technique. Recently, a novel hot-wire assisted ALD (HWALD) process is developed for pure molybdenum (Mo) thin films, for being applied in new generations of chips with longer, narrower, and more closely packed interconnects. Next, intrinsic area-selective ALD (ASALD) of polycrystalline AlN and GaN films is established, with a thickness ratio up to 1:22 on SiO2 and sputtered AlN, respectively.

ALD of pure Mo • •

• •

Up to 98 at.% of Mo Low-resistivity of 18.6 μΩ·cm for a 24-nm film Excellent conformality and thickness control Outperforms CVD Mo

3D-Architected Alkaline-Earth Perovskites Arturo Susarrey-Arce, Mesoscale Chemical Systems A newly developed approach enabling custom-made photoresists suited for additive manufacturing using two-photon lithography is introduced. The approach permits the production of 3D alkaline-earth perovskite (BaZrO3, CaZrO3, and SrZrO3) microarchitectures with submicrometer precision. The optical properties of such perovskite architectures are investigated using cathodoluminescence and wide-field photoluminescence emission to understand the defects and determine photoluminescence lifetimes. J.P. Winczewski et al. Advanced Materials (accepted), DOI: 10.1002/adma.202307077

Thin-film lithium niobate modulators David Marpaung | Nonlinear Nanophotonics

We characterize the performance of the thin film lithium niobate modulators.

Metallic bottom layer forming pins during high temperature deposition of subsequent layers Muharrem Bayraktar XUV Optic Group

Imaging the selective suppression of ferromagnetism in LaMnO3 Hans Hilgenkamp - Interfaces and Correlated Electrons (ICE) Scanning SQUID microscopy is used to image the local effect of covering ferromagnetic LaMnO3 with metallic overlayers. A suppression of ferromagnetism is observed for regions of LaMnO3 covered by titanium. Using lithography and lift-off of the titanium layer, ferromagnetism can be selectively patterned in the LaMnO3 oxide. By playing with different sizeand shape constraints spatial magnetic field images as seen here can be constructed.