SINGULUS TECHNOLOGIES - Sputtering Targets

SPUTTERING TARGETS PVD Sputtering Competence

by SINGULUS TECHNOLOGIES

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Targets & Shields for Advanced Sputtering Processes ... for Solar, Display, Glass, Semiconductor, Hydrogen, Decorative & Functional Coatings

Photovoltaics

Semiconductor

Packaging Industry

Glass / Automotive

Medical Technology

Battery / Hydrogen

PVD Sputtering Competence by SINGULUS TECHNOLOGIES SINGULUS TECHNOLOGIES, a pioneer in vacuum sputtering systems since its establishment in 1995, has successfully delivered over 8,500 systems globally. From ultra-high vacuum deposition for the semiconductor industry to high-throughput sputter machines for rapid metallization in as little as 0.3 seconds, our machines cater to diverse industry needs.

Our PVD systems find applications in photovoltaics, data storage, sensor technology, decorative coatings, as well as emerging fields like hydrogen, battery technology, automotive, electrical shielding, and advanced packaging in the semiconductor industry.

VERSATILE SPUTTERING METHODS

Known sputtering methods, including direct current (DC) sputtering for electrically conductive targets, radio frequency (RF) sputtering for non-conductive targets, and

various modes of magnetron sputtering, underline the versatility and broad applicability of our sputter deposition technologies. With the ability to control processes conveniently and apply them on a large scale at a low cost, sputtering remains a preferred choice in numerous industries and R&D applications.

SPUTTERING TARGETS FROM SINGULUS TECHNOLOGIES

SINGULUS TECHNOLOGIES Customer Service leverages a well-established global supplier network, ensuring the provision of top-quality sputtering targets not only for our machines but also for your specific requirements. Through our extensive partnerships, we guarantee minimal delivery times at highly competitive prices. Each sputtering target comes in a specially adapted, reusable case, ensuring secure storage and transport.

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COMPREHENSIVE OFFERINGS

» Sputtering targets in a diverse range of compositions, sizes, and purities » Bonding services » Backingplates » Secure transport and storage solutions » Recycling services » Traceability features » Quality standard documents

» Innovation in Design: Our commitment to innovation ensures that you receive sputter targets with optimal structural integrity and performance.

At SINGULUS TECHNOLOGIES, we redefine possibilities in sputtering target solutions, providing you with the diversity, precision, and technical ingenuity essential for advancing your applications in thin film deposition.

Choose Singulus Technologies for a comprehensive solution, from advanced sputtering processes to high-quality sputtering targets, all delivered with excellence and innovation.

WHY CHOOSE SINGULUS TECHNOLOGIES FOR SPUTTER TARGETS

» Unparalleled Variety: Explore an extensive selection of sputtering target materials, catering to diverse applications. » Geometric Flexibility: Choose from a spectrum of shapes and sizes, meeting the demands of conventional and customized requirements. » Technical Expertise: Benefit from our technical prowess in overcoming size limitations through the production of multi-segmented targets with precision joints.

 C O N TA C T U S TARGETS & SHIELDS

+49 6188 440 - 1143 targets@singulus.de

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Exceptional Sputtering Targets for

Decorative Coatings Due to its versatile use, the SINGULUS TECHNOLOGIES sputtering system POLYCOATER offers the possibility to apply sputtered finishing on various products. Based on a long experience SINGULUS TECHNOLOGIES offers a wide range of sputtering targets for 3-dimensional coating of parts for decorative and functional applications.

SINGULUS TECHNOLOGIES takes pride in offering reliable and high-quality sputtering targets specifically designed for decorative coatings. Our commitment to excellence, precision engineering, and versatility ensures that your decorative coating applications achieve superior results with a touch of aesthetic finesse.

SPUTTERING TARGETS MATERIALS AND QUALITY

» Consistent quality with fine and homogeneous grain size

» Complete traceability through serial number tracking » Depending on material bonded or monolithic targets available incl. carrier plates » Different bonding variants depending on material » Target materials e.g., Al, Cu, Cr, Zr, CuAl, Ag, Au, Stainless steel and many more » Different gold/rosé-colored targets available

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High Purity Targets up to 99.9999 %

Semiconductor

As a renowned manufacturer of advanced vacuum deposition equipment, we offer a wide range of sputtering targets for your semiconductor machine in purity grades from 99.9 to 99.9999 %.

SINGULUS TECHNOLOGIES stands at the forefront of semiconductor manufacturing, offering advanced sputtering targets designed to meet the exacting demands of the industry.

Our commitment to excellence, technological innovation, and collaborative partnerships ensures that our sputtering targets play a crucial role in enhancing semiconductor device performance.

BENEFIT FROM OUR QUALIFIED MATERIAL SUPPLIERS TO MEET THE POR (PROCESS OF RECORDS) SPECIFICATION

» Standard and exotic alloys » Precious and non-precious metals » Various shapes and designs » Multi-part, bonded or monolithic » Suitable bonding technology

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Advanced Sputter Targets for

Solar Cell Production With a rich history in photovoltaic technologies, we bring unparalleled expertise to the production of sputter targets for solar cells. Our commitment to excellence, precision, and innovation ensures that your solar cell manufacturing processes benefit from the highest quality materials.

SINGULUS TECHNOLOGIES offers targets for the different PVD sputtering systems like GENERIS PVD, HISTARIS PVD or VISTARIS PVD.

We cooperate with the world’s leading suppliers of advanced planar and rotary targets to provide you with high quality sputtering targets!

Monolithic or carrier bonded rotary and planar targets have a purity from 99.9 % to 99.9999 %.

Our sputtering targets have a homogeneous and fine grain structure with a high density for optimal sputtering results.

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Environmental excellence through

Target Recycling

Sustainability is important to us. We take back all sputtering targets purchased from us for recycling (third-party targets gladly on request). You inform us in advance which materials you want to return and with a RMA number (return number) assigned by us, you then send us your used sputtering target with or without back plate. On request, we can also organize a pickup for you.

After recycling, you will receive a credit note for the remaining material, which you can simply use to offset your new order. You do not need to worry about anything else. Your return plate will be gladly returned to you, or it can be kept with us as your property until you place a new order.

SINGULUS TECHNOLOGIES champions sustainability in thin-film deposition with our target recycling program.

KEY FEATURES INCLUDE:

» Circular Economy Contribution Actively participate in a circular economy by recycling sputtering targets, reducing environmental impact » Closed-Loop Process Efficiently recover and reintegrate materials into new targets, minimizing the need for virgin resources » Customized Solutions Tailored recycling programs to meet the unique needs of various industries and applications » Environmental Impact Reduction Contribute to reducing waste and achieving more sustainable thin-film deposition practices » Compliance and Standards Adherence to the highest environmental standards ensures responsible and ethical recycling

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Headquarters Subsidiaries

Headquarters SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 63796 Kahl, Germany Tel. +49 6188 440-0 sales@singulus.de www.singulus.com Subsidiaries China SINGULUS TECHNOLOGIES (SHANGHAI) Co. Ltd. Tel. +86 21 61073997 sales@singulus.cn

South America SINGULUS TECHNOLOGIES LATIN AMERICA LTDA. Tel. +55 11 2165 2410 sales@singulus.com.br

SINGULUS TECHNOLOGIES Guangzhou Office Tel. +86 13822138376 sales@singulus.cn

South East Asia SINGULUS TECHNOLOGIES ASIA PACIFIC PTE LTD. Tel. +65 67411912 sales@singulus.com.sg

France SINGULUS TECHNOLOGIES FRANCE S.A.R.L. Tel. +33 3 89 31 11 29 sales@singulus.fr North America SINGULUS TECHNOLOGIES INC. Tel. +1 860 683 8000 sales@singulus.com

THIN FILM DEPOSITION

Taipei Office SINGULUS TECHNOLOGIES TAIWAN LIMITED Tel. +886 2 8692 6996 sales@singulus.com.tw

SURFACE ENGINEERING

THERMAL PROCESSING

WET CHEMICAL

SINGULUS TECHNOLOGIES - Thin-Film Coating and Surface Treatment SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient thin-film coating and surface treatment processes, which are used worldwide in the Photovoltaics, Semiconductor, Medical Technology, Packaging, Glass & Automotive as well as Battery & Hydrogen markets.

The company’s core competencies include various processes of coating technology, surface treatment as well as wet-chemical and thermal production processes.

SINGULUS TECHNOLOGIES sees sustainability as an opportunity to position itself with innovative products. In the focus are environmental awareness, efficient use of resources as well as avoidance of unnecessary CO₂ pollution SINGULUS TECHNOLOGIES attaches great importance to responsible and sustainable corporate governance.

12/2023 Studio Krause - Printed in Germany - Technical alterations reserved

Your direct contact: www.singulus.com