NEW Products and standard products Small Motorized Stage
Driver Integrated Motorized Stages
Small Motorized X Axis Stage / OSCM25-10X Small Motorized Flat Z Axis Stage / OSCM25-5ZF Small Motorized Rotation Stage / OSCM-25YAW Small Motorized Goniometer / GOHM-25A40
X-axis Driver Integrated Motorized Stages / SBIS-X Z-axis Driver Integrated Motorized Stages / SBIS-Z
Feedback Stages
OSMS Series Motorized Stages – Standard Type-
1nm Feedback Stage / NFS-UPX 10nm Feedback Stage / NFS-PX 50nm Feedback Stage / NFS-X Cable for NFS Feedback Stage / NFS-CABLE
Linear Motorized Stages / OSMS series Rotation Motorized Stages - 5 Phase Stepping Motor / OSMS-YAW Motorized Extended Guide Goniometer / OSMS-A and OSMS-B
3 Axis Stage Controller / SHRC-203 https://www.optosigma-sea.com Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Operating Environment of Motorized Stages
Use motorized positioning stages within the following operational environment temperature range. Contact our International Sales Division separately if you desire to use the stages outside the operational environment temperature range. *Operating environment Temperature: 5°C − 40°C Humidity: 30% − 80% (without condensation)
*Recommended environment Temperature: 23°C ±5° Humidity: 60±10% (without condensation)
Operational environment temperature changes depending on various conditions such as the type of motorized positioning stage, installation and operation conditions. Avoid use of the stages in the following sites. ◦Sites subject to water or oil ◦Sites subject to direct sunlight or radiant heat ◦Sites subject to dirt and dust
Life Cycle
Although the life cycle varies depending on intended use or application, 2,000 to 3,000 hours for linear systems and 1,000 to 1,500 hours/year (about 3 to 4 hours/day) for rotation/goniometer systems are assumed. Note that the above assumption may not apply to repeated operations (high-speed drive or high-load drive). Careful maintenance or supply of grease is important for using the products for a long time without a problem.
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
◦Sites subject to vibration or impact ◦Sites close to fire ◦Sites subject to inflammable gas and corrosive gas
Storage
When not using motorized stages for a long time, store motorized stages wrapped with anti-rust paper, or store in a plastic bag with a desiccant. Storage Temperature: 0°C − 40°C Humidity: 10% − 85% (without condensation)
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Motorized Stages – Standard Type– Linear – OSMS Series
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools for which high stiffness and high precision are required. These stages are our standard CE-compliant motorized stages, covering motors neatly. (excluding OSMS33-800) Stepping motor stages compatible with versatile travel range between 35 to 500mm and can be used in any orientation.
Lineup Axis; X, Y, Z, XYZ
Please review the reference product list for the OSMS series (X-axis). (see below).
M4
OSMS20-35(X) OSMS20-85(X)
Part Number Top Plate Mounting Hole Type M6 INCH OSMS20-35(X)-M6
OSMS20-35(X)-INCH
OSMS20-85(X)-M6
OSMS20-85(X)-INCH
Stage Size (M6, INCH)
Width (M6, INCH)
Stage Height
Travel
Load Capacity
85x85mm
85mm
35.7mm
35mm
78.4N (8.0kgf)
85mm
35.7mm
85mm
78.4N (8.0kgf)
43mm
50mm
117N (12.0kgf)
43mm
100mm 117N (12.0kgf)
43mm
200mm 117N (12.0kgf)
43mm
300mm 117N (12.0kgf)
85x85mm
100x100mm (120x120mm) 100x100mm (120x120mm) 100x100mm (120x120mm) 100x100mm (120x120mm)
100mm (120mm) 100mm (120mm) 100mm (120mm) 100mm (120mm) 120mm
56.7mm
300mm 196N (20.0kgf)
OSMS26-50(X)
OSMS26-50(X)-M6
OSMS26-50(X)-INCH
OSMS26-100(X)
OSMS26-100(X)-M6
OSMS26-100(X)-INCH
OSMS26-200(X)
OSMS26-200(X)-M6
OSMS26-200(X)-INCH
OSMS26-300(X)
OSMS26-300(X)-M6
OSMS26-300(X)-INCH
OSMS33-300(X)
OSMS33-300(X)-M6
OSMS33-300(X)-INCH
OSMS33-500(X)
OSMS33-500(X)-M6
OSMS33-500(X)-INCH
120x120mm
120mm
56.7mm
500mm 196N (20.0kgf)
OSMS33-800(X)
OSMS33-800(X)-M6
OSMS33-800(X)-INCH
120x120mm
120mm
66.7mm
800mm 196N (20.0kgf)
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
120x120mm
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
– Rotation – OSMS-YAW Series
Stepping motor driven rotation stages utilizing precision bearings and worm gear drive mechanisms. Suitable for rotating optics aout the optical axis, measuring, inspection and evaluation instruments.
Lineup Axis; θ Please review the reference product list for the OSMS series (θ-axis). (see below).
Part Number
Stage Size
Rotation Range
Load Capacity
Travel Mechanism
(reduction ratio)
Positioning Slide
Stage Material
Weight
OSMS-40YAW
φ40mm
19.6N (2.0kgf)
Bearing method
0.35kg
OSMS-60YAW
φ60mm
29.4N (3.0kgf)
Bearing method
0.45kg
OSMS-60YAW-W
φ60mm
29.4N (3.0kgf)
Bearing method
OSMS-80YAW
φ80mm
OSMS-120YAW
φ120mm
OSMS-160YAW OSMS-120YAW-W
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
98N (10.0kgf)
Worm gear (1:144)
Bearing method
1.0kg Aluminum / Aluminum bronze
1.1kg
196N (20.0kgf)
Crossed roller
φ160mm
196N (20.0kgf)
Crossed roller
2.5kg
φ120mm
196N (20.0kgf)
Crossed roller
5.5kg
2.0kg
– Goniometer – OSMS-A/B Series
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability. Their smooth movement is ideal for frequent angle adjustment. Extended Contact bearing ways are machined directly into the main body reduce the number of parts and assembly time, making these very durable and cost effective.
Lineup Axis; α, αβ Please review the reference product list for the OSMS series (α-axis). (see below).
Part Number
(Opposite Model)
Stage Size Travel
Travel Mechanism Stage Rotation Center Height (reduction ratio) Height
Rotation Center Deflection Load Capacity Accuracy
Weight
OSMS-40A60 OSMS-40A60R
40x40mm
±5°
Worm gear (1 : 332)
15mm
60±0.1mm
Within φ0.01mm
19.6N(2.0kgf)
0.4kg
OSMS-40A75 OSMS-40A75R
40x40mm
±4°
Worm gear (1 : 406)
15mm
75±0.1mm
Within φ0.01mm
19.6N(2.0kgf)
0.4kg
OSMS-60A60 OSMS-60A60R
60x60mm
±14° Worm gear (1 : 246)
25mm
60±0.1mm
Within φ0.01mm
29.4N(3.0kgf)
0.85kg
OSMS-60A85 OSMS-60A85R
60x60mm
±9°
Worm gear (1 : 314)
20mm
85±0.1mm
Within φ0.01mm
29.4N(3.0kgf)
0.75kg
OSMS-60A105 OSMS-60A105R 60x60mm
±7°
Worm gear (1 : 380)
20mm
105±0.1mm
Within φ0.01mm
29.4N(3.0kgf)
0.75kg
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Small Motorized Stage OSCM
Small table size stage with stepping motor. The table size is 25*25mm. Ideal for production and experimental applications require significantly smaller size. ・X-axis, Z-axis, Rotation and Goniometer available. ・High precision stepping motor is used to achieve precision positioning.
Small motorized rotation stage OSCM-25YAW
Small motorized flat Z axis stage OSCM25-5ZF
Small motorized X axis stage OSCM25-10X
W9104
W9105
W9106
・SigmaKoki’s standard controller and cables compatible. ・Please select D15RP-CA series or MINI-CA-SG series depending on the controller. Specifications Part Number
Travel [mm] Mechanical Specifications
Stage Size [mm] Feed Screw, Positioning Slide Positioning Slide Giude Method Finish Weight [kg] Resolution MAX Speed Positioning Accuracy Positional Repeatability Load Capacity [N]
Accuracy Specifications
Moment Stiffness
(Full) (Half)
Pitch [″/N・cm] Yaw [″/N・cm] Roll [″/N・cm]
Lost Motion Backlash [μm] Parallelism [μm] Wobble [μm] Running Parallelism [μm] Pitch [″]/ Yaw [″] Sensor
Sensor Part Number Limit Sensor Origin Sensor
Motor / Sensor Specifications Motor
Sensor
Type Motor Part Number Step Angle Power Voltage Current Consumption Control Output Output Logic
Compatible Driver / Controller Compatible Driver Control System Compatible Controller Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
OSCM25-10X
OSCM25-5ZF
10
5
OSCM-25YAW
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction φ25mm
25x25mm 25x25mm Ball screw diameter Precision ground screw Worm gear (1:72) φ3mm, 1mm lead φ4mm, 0.5mm lead Crossed roller Crossed roller Bearing method Steel Aluminum Aluminum / Aluminum bronze Black chrome Black anodized Black anodized 0.25 0.3 0.25 2μm/pulse 1μm/pulse 0.01°/pulse 1μm/pulse 0.5μm/pulse 0.005°/pulse 10mm/sec 1mm/sec 30°/sec 15μm 0.2° 3μm 5μm 0.02° 19.6 (2.0kgf) 9.8 (1.0kgf) 9.8 (1.0kgf) 10 25 10 10 15 5 25 5μm 10μm 0.05° 1 1 1 30 60 50 30 20 30 100/60 60/ Micro photo sensor: GP1S092HCPIF BP4SWA (Sharp Corporation) (Metrol Co., Ltd.) Equipped (NORMAL CLOSE) Touch sensor (NORMAL OPEN) None 5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.) PK513PB-C9 (□20mm) 0.72° DC5 - 24V±10% 40mA or lower (20mA or lower per sensor) 20mA or lower NPN open collector output DC30V or lower, Touch sensor 50mA or lower When shaded: Output transistor OFF NORMAL OPEN (no conduction) SG-5MA、MC-S0514ZU、SG-514MSC GSC-01、GSC-02A、SHOT-302GS、SHOT-304GS、 SHOT-702H、HIT-MA/HIT-SA、PGC-04-U Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
Connection Diagram
OSCM25-10X
OSCM25-5ZF
OSCM-25YAW
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Compatible Controllers / Drivers and Cables
Comparison of TSD-401S＋SGSP13ACTB0 (right) and OSCM25-10X (left)
Comparison of TSD-603＋SGSP-13ACTB0 (left) and OSCM25-5ZF (right)
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Comparison of OSCM-25YAW (right) and OSMS-40YAW (left)
■Example Advantage of lightweight The amount of displacement is minimized even moment load is applied because of its lightweight.
Equipment Built-in Ideal for adjusting the optical axis in equipment with limited space or automation of workpiece positioning.
In a narrow space Remote adjustment of workpieces available since it can be placed in an optical system where the space between elements is limited.
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Small Motorized Goniometers
GOHM-A
W9107
Stepping motor driven goniometer with 25mm x 25mm table size. Significantly minimized body size and ideally suited for applications that require space-saving. ・Motorized version of 25mm x 25mm manual goniometer (GOH series) while maintaining compact size. Integrated limit sensor enables automatic control by using standard stage controllers. ▶Various controllers and drivers are available for different applications. ▶Appropriate cable (D15RP-CA or MINI-CA-SG) is required for selected controller or driver. W9052
Attention ▶Since dovetail slide mechanism is adopted, the accuracy may decrease due to wear when operating repeatedly and continually. Please use for alignment purposes that movement is not required frequently once it is aligned. Please use OSMS-40A60/75 series in case durability is required for repetitive and continual operation. W9079
Specifications Part Number
GOHM-25A40
Angle Range [°]
±6
Stage Size [mm] Mechanical Specifications
25 x 25
Positioning Slide
Dovetail slide method
Transmission mechanism
Worm gear
Stage Material
Brass
Finish
Weight [kg] Resolution
Black chrome 0.28
(Full) [°/pulse]
Approx. 0.00334
(Half) [°/pulse]
Approx. 0.00167
MAX Speed [°/sec]
3
Positional Repeatability [°] Load Capacity [N] Accuracy Specifications
Moment Stiffness Lost Motion [°]
0.01
9.8 (1.0kgf)
Pitch [″/N･cm]
-
Yaw [″/N･cm]
-
Roll [″/N･cm]
5
0.05
Backlash
-
Parallelism
-
Wobble
-
Running Parallelism
-
Pitch [″]/ Yaw [″] Sensor
-
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped (NORMAL CLOSE)
Origin Sensor
None
Motor / Sensor Specifications Motor
Type
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK513PB-C9 (□20mm)
Step Angle
0.72°
Power Voltage
Sensor
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller Control System
Compatible Driver
Compatible Controller
SG-5MA, MC-S0514ZU, SG-514MSC
GSC-01, GSC-02A, SHOT-302GS, SHOT-304GS, SHOT-702A, HIT-MV/HIT-SA, PGC-04-U
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
GOHM-25A40
Connection Diagram
Compatible Controllers / Drivers and Cables
HIT-MV･HIT-SA
GOHM-A
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Feedback Stage
NFS Series
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution. • • •
Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available.
▶Use a controller (SHRC-203) compatible with Feedback Stage (NFS series). ▶Sample programs are available for download on our website. ◦SG Sample 32/64 bit for Windows® ◦LabVIEW
▶When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃) ▶Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment. ▶Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur. ▶Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Points for selecting the Travel *If you require a Travel other than those listed below, please contact our Sales.
Travel
20 mm
Stage Size 75 x 60 mm
40 mm
Stage Size 110 x 60 mm
50 mm
Stage Size 100 x 100 mm, 120 x 120 mm
For high resolution positioning over long distances.
100 mm
Stage Size 175 x 100 mm, 175 x 120mm
For high resolution positioning over long distances.
Space-saving type, used when short travel is sufficient. This is the most stable type and is recommended if there is enough space for installation.
200 mm
Stage Size 230 x 180 mm
For high resolution positioning over long distances. Lineup includes 10nm and 50nm resolution.
300 mm
Stage Size
330 x 180 mm
For high resolution positioning over long distances. Lineup includes 10nm and 50nm resolution. Research Object
Resolution [nm]
Feedback Stages (NFS Series) Resolution and Travel Lineups
1
1
X-ray Si Crystal DNA
X-ray research, etc.
Carbon Nanotube
10 50
Spectroscopic studies with light and lasers in the order of 100 nm
EUV light LSI Patterns
Microscope Stage
Inspection of microfabricated parts
Select a stage with a resolution 10 times finer than the research object
20 40 Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
50
100
150
200
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
300
Virus NUV light Visible light Chromosome Terahertz Travel [mm]
FS_E2305
1nm Feedback Stage NFS-UPX
W9315
Resolution 1nm
The 1 nm Feedback Stage is available in 6 different table sizes. Travel [mm] 20
40
50
100
Cable for NFS Feedback Stage(See cable page for details) Motor cable
D15H12A-RC-3
Scale cable
DM15HD14A-RC-3
Specifications Part Number Travel [mm] Stage Size [mm] Mechanical Specifications
Feed Screw Positioning Slide Stage Material Finish
NFS120-50UPX
NFS120100UPX
20
40
50
100
50
100
75 x 60
110 x 60
100 x 100
175 x 100
120 x 120
175 x 120
Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw diameter φ4mm, diameter φ4mm, diameter φ8mm, diameter φ8mm, diameter φ8mm, diameter φ8mm, 1mm lead 1mm lead 1mm lead 1mm lead 1mm lead 1mm lead Crossed roller
Crossed roller
Crossed roller
Crossed roller
Crossed roller
Aluminum
Aluminum
Aluminum
Aluminum
Aluminum
Crossed roller Aluminum
Black anodized
Black anodized
Black anodized
Black anodized
Black anodized
Black anodized
1.0
2.7
3.7
3.0
4.0
1
1
2
2
2
2
(Half) [μm/pulse]
0.5
0.5
1
1
1
1
5
5
5
5
5
5
1
1
1
2
1
2
Positional Repeatability [μm]*2
0.4
0.4
0.4
0.4
0.4
0.4
Micro-range Bi-directional Repeatability *3
±4nm
±4nm
±3nm
±3nm
±3nm
±3nm
Least Increment Step Test (MIN)
3nm
3nm
3nm
3nm
3nm
3nm
49 (5.0kgf)
49 (5.0kgf)
98 (10.0kgf)
98 (10.0kgf)
98 (10.0kgf)
98 (10.0kgf)
Pitch [″/N・cm]
0.5
0.5
0.05
0.05
0.05
0.05
Yaw [″/N・cm]
0.5
0.5
0.05
0.05
0.05
0.05
Roll [″/N・cm]
0.5
0.5
0.05
0.05
0.05
0.05
Lost Motion [μm]
0.4
0.4
0.4
0.4
0.4
0.4
Backlash [μm]
1
1
1
1
1
1
Parallelism[μm]
50
50
50
50
50
50
Load Capacity [N]
Running Parallelism [μm]
10
10
10
10
10
10
Pitch [″]/ Yaw [″]
15/15
15/15
15/15
15/15
15/15
15/15
Type Motor Part Number
Encoder
NFS100100UPX
Positioning Accuracy [μm]*2
Moment Stiffness
Motor
NFS100-50UPX
0.5
MAX Speed [mm/sec]
Accuracy Specifications
NFS60-40UPX
(Full) [μm/pulse]
Weight [kg] Resolution *1
NFS60-20UPX
Scale Resolution [nm]
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.) PK523PMB-C5 (□28mm) 1
1
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK545NBW (□42mm) 1
1
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 1 nm feedback stage (NFS-UPX series): 5 nm
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
1
1
Outline Drawing
NFS60-20UPX
NFS60-40UPX
NFS100-50UPX
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
NFS100-100UPX
NFS120-50UPX
NFS120-100UPX
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
10nm Feedback Stage
NFS-PX
W9316
Resolution 10nm
The 10 nm Feedback Stage is available in 8 different table sizes. Travel [mm] 20
40
50
100
200
300
Cable for NFS Feedback Stage (See cable page for details) Motor cable
D15H12A-RC-3
Scale cable
DM15HD14A-RC-3
Specifications Part Number Travel [mm] Stage Size [mm] Feed Screw Mechanical Specifications Positioning Slide
20
40
50
100
75 x 60
110 x 60
100 x 100
175 x 100
Ball screw diameter φ4mm, 1mm lead
Ball screw diameter φ4mm, 1mm lead
Ball screw diameter φ8mm, 1mm lead
Ball screw diameter φ8mm, 1mm lead
Crossed roller
Crossed roller
Crossed roller
Crossed roller
Aluminum
Aluminum
Aluminum
Black anodized
Black anodized
0.5
1.0
2.7
3.7
(Full) [μm/pulse]
2
2
2
2
(Half) [μm/pulse]
1
1
1
1
10
10
10
10
MAX Speed [mm/sec] Positioning Accuracy [μm]*2
1
1
1
2
Positional Repeatability [μm]*2
Micro-range Bi-directional Repeatability *3
0.5
0.5
0.5
0.5
±20nm
±20nm
±20nm
±20nm
30nm
30nm
30nm
30nm
Load Capacity [N]
49 (5.0kgf)
49 (5.0kgf)
98 (10.0kgf)
98 (10.0kgf)
0.5
0.5
0.05
0.05
Least Increment Step Test (MIN)
Moment Stiffness
Pitch [″/N・cm] Yaw [″/N・cm]
0.5
0.5
0.05
0.05
Roll [″/N・cm]
0.5
0.5
0.05
0.05
0.5
0.5
0.5
0.5
Lost Motion [μm] Backlash [μm]
1
1
1
1
Parallelism[μm]
50
50
50
50
Running Parallelism [μm]
10
10
10
10
15/15
15/15
15/15
15/15
Pitch [″]/ Yaw [″]
Encoder
NFS100-100PX
Black anodized
Weight [kg]
Motor
NFS100-50PX
Aluminum
Finish
Accuracy Specifications
NFS60-40PX
Black anodized
Stage Material
Resolution*1
NFS60-20PX
Type
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
PK523PB-C7 (□28mm)
PK545NBW (□42mm)
Motor Part Number
Scale Resolution [nm]
10
10
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro Measurement step for 10 nm feedback stage (NFS-PX series): 50 nm
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
10
range.
10
Resolution 10nm
Specifications Part Number
NFS120-50PX Travel [mm]
100
200
300
175 x 120
230 x 180
330 x 180
Ball screw diameter φ8mm, 1mm lead
Ball screw diameter φ8mm, 1mm lead
Ball screw diameter φ10mm, 2mm lead
Ball screw diameter φ10mm, 2mm lead
Positioning Slide
Crossed roller
Crossed roller
LM guide
LM guide
Stage Material
Aluminum
Aluminum
Aluminum
Aluminum
Black anodized
Black anodized
Black anodized
Black anodized
Feed Screw
Weight [kg]
3.0
4.0
13.2
17
(Full) [μm/pulse]
2
2
4
4
(Half) [μm/pulse]
1
1
2
2
MAX Speed [mm/sec]
10
10
20
20
Positioning Accuracy [μm]*2
1
2
2
2
Positional Repeatability [μm]*2
0.5
0.5
0.6
0.6
±20nm
±20nm
±20nm
±20nm
30nm
30nm
30nm
30nm
98 (10.0kgf)
98 (10.0kgf)
196 (20.0kgf)
196 (20.0kgf)
Pitch [″/N・cm]
0.05
0.05
0.02
0.02
Yaw [″/N・cm]
0.05
0.05
0.02
0.02
Roll [″/N・cm]
Resolution *1
Micro-range Bi-directional Repeatability *3
Least Increment Step Test (MIN) Load Capacity [N] Moment Stiffness
Motor
Encoder
NFS180-300PX
50
Finish
Accuracy Specifications
NFS180-200PX
120 x 120
Stage Size [mm]
Mechanical Specifications
NFS120-100PX
0.05
0.05
0.02
0.02
Lost Motion [μm]
0.5
0.5
0.6
0.6
Backlash [μm]
1
1
1
1
Parallelism[μm]
50
50
100
100
Running Parallelism [μm]
10
10
20
20
Pitch[″]/Yaw[″]
15/15
15/15
20/20
20/20
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
Scale Resolution [nm]
PK545NBW (□42mm) 10
10
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro Measurement step for 10 nm feedback stage (NFS-PX series): 50 nm
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
10
range.
10
Outline Drawing
NFS60-20PX
NFS60-40PX
NFS100-50PX
NFS100-100PX
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
NFS120-50PX
NFS120-100PX
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
NFS180-200PX
NFS180-300PX
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
50nm Feedback Stage
NFS-X
W9317
Resolution 50nm
The 50 nm Feedback Stage is available in 8 different table sizes. Travel [mm] 20
40
50
100
200
300
Cable for NFS Feedback Stage (See cable page for details) Motor cable
D15H12A-RC-3
Scale cable
DM15HD14A-RC-3
Specifications Part Number Travel [mm] Stage Size [mm] Mechanical Specifications
Feed Screw Positioning Slide
NFS100-100X
20
40
50
100
75 x 60
110 x 60
100 x 100
175 x 100
Ball screw diameter φ4mm, 1mm lead
Ball screw diameter φ4mm, 1mm lead
Ball screw diameter φ8mm, 1mm lead
Ball screw diameter φ8mm, 1mm lead
Crossed roller
Crossed roller
Crossed roller
Crossed roller
Aluminum
Aluminum
Aluminum
Black anodized
Black anodized
Black anodized
0.5
1.0
2.7
3.7
(Full) [μm/pulse]
2
2
2
2
(Half) [μm/pulse]
1
1
1
1
MAX Speed [mm/sec]
10
10
10
10
Positioning Accuracy [μm]*2
1
1
1
2
Positional Repeatability [μm]*2
Resolution *1
Micro-range Bi-directional Repeatability *3
0.5
0.5
0.5
0.5
±100nm
±100nm
±100nm
±100nm
150nm
150nm
150nm
150nm
Load Capacity [N]
49 (5.0kgf)
49 (5.0kgf)
98 (10.0kgf)
98 (10.0kgf)
Pitch[″/N・cm]
0.5
0.5
0.05
0.05
Yaw[″/N・cm]
0.5
0.5
0.05
0.05
Roll[″/N・cm]
0.5
0.5
0.05
0.05
Lost Motion [μm]
0.5
0.5
0.5
0.5
Backlash [μm]
1
1
1
1
Parallelism[μm]
50
50
50
50
Running Parallelism [μm]
10
10
10
10
Pitch [″]/ Yaw [″]
15/15
15/15
15/15
15/15
Least Increment Step Test (MIN)
Moment Stiffness
Encoder
NFS100-50X
Aluminum
Weight [kg]
Motor
NFS60-40X
Black anodized
Stage Material Finish
Accuracy Specifications
NFS60-20X
Type
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
PK523PB-C7 (□28mm)
PK545NBW (□42mm)
Motor Part Number
Scale Resolution [nm]
50
50
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a microrange. Measurement step for 50 nm feedback stage (NFS-X series): 100 nm
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
50
50
Resolution 50nm
Specifications Part Number Travel [mm]
50
100
200
300
175 x 120
230 x 180
330 x 180
Ball screw diameter φ10mm, 2mm lead
Ball screw diameter φ10mm, 2mm lead
Positioning Slide
Crossed roller
Crossed roller
LM guide
LM guide
Stage Material
Aluminum
Aluminum
Aluminum
Aluminum
Black anodized
Black anodized
Black anodized
Black anodized
3.0
4.0
13.2
17
(Full) [μm/pulse]
2
2
4
4
(Half) [μm/pulse]
1
1
2
2
MAX Speed [mm/sec]
10
10
20
20
Positioning Accuracy [μm]*2
1
2
2
2
Positional Repeatability [μm]*2
Feed Screw
Resolution*1
Micro-range Bi-directional Repeatability *3
0.5
0.5
0.6
0.6
±100nm
±100nm
±100nm
±100nm
150nm
150nm
150nm
150nm
Load Capacity [N]
98 (10.0kgf)
98 (10.0kgf)
196 (20.0kgf)
196 (20.0kgf)
Pitch [″/N・cm]
0.05
0.05
0.02
0.02
Yaw [″/N・cm]
0.05
0.05
0.02
0.02
Roll [″/N・cm]
0.05
0.05
0.02
0.02
Lost Motion [μm]
0.5
0.5
0.6
0.6
Backlash [μm]
1
1
1
1
Parallelism[μm]
50
50
100
100
Running Parallelism [μm]
10
10
20
20
Pitch[″]/Yaw[″]
15/15
15/15
20/20
20/20
Least Increment Step Test (MIN)
Moment Stiffness
Encoder
NFS180-300X
Ball screw diameter φ8mm, 1mm lead
Weight [kg]
Motor
NFS180-200X
120 x 120
Finish
Accuracy Specifications
NFS120-100X
Ball screw diameter φ8mm, 1mm lead
Stage Size [mm] Mechanical Specifications
NFS120-50X
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK545NBW (□42mm)
Motor Part Number
Scale Resolution [nm]
50
50
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a microrange. Measurement step for 50 nm feedback stage (NFS-X series): 100 nm
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
50
50
Outline Drawing
NFS60-20X
NFS60-40X
NFS100-50X
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
NFS100-100X
NFS120-50X
NFS120-100X
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Outline Drawing
NFS180-200X
NFS180-300X
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Cable for NFS Feedback Stage
W9318
Various cables for use with the NFS Feedback Stage are available. D15H12A-RC-3 is a Motor Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203). DM15HD14A-RC-3 is a Scale Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203). Wiring Diagram
D15H12A-RC-3 Controller side (15pin) Connector: 17JE-23150-02 (D1) Hood: 17JE-15H-1A4-CF (Plug type) DDK Ltd.
Stage side (12pin) Connector: HR10A-10P-12SC (73) (Socket type) Hirose Electric Co., Ltd.
DM15HD14A-RC-3 Stage side (14pin) Connector: HDR-E14FSG1+ Hood: HDR-E14LPHP＋ (Socket type) HTK Ltd.
Controller side (15pin) Connector: D02-M15PG-N-F0 Hood: DE-C8-J9-F4-1R (Plug type) Japan Aviation Electronics Industry, Ltd.
Specifications Part Number
D15H12A-RC-3
DM15HD14A-RC-3
Product Name
Motor Cable
Scale Cable
3
3
Cable Length［m］ Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
3 Axis Stage Controller SHRC-203
W9314
Controller capable of controlling a wide range of high-resolution stages from an open-loop Motorized Stage with 5-phase stepping motor to a 1 nm Feedback Stage. ◦ Stage controller with built-in driver for 5-phase stepping motors, capable of 3-axis full closed-loop to open-loop control independently for each axis. ◦ External control via USB/GP-IB/Ethernet interface, manual operation via front panel or handy terminal (JS-301, JB-401, JD-101, MD-400), and automatic control via internal program (8 banks) are available. ◦ Full closed loop control is available when used with Precision Motorized Stages with Built-in Compact Scale.
▶ Sample programs are available for download on our website. ◦SG Sample 32/64 bit for Windows® ◦LabVIEW
Part Number
SHRC-203
Product Name
3 Axis Stage Controller
Outline Drawing
SHRC-203
SHRC-203_E2301 Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Specifications General Specifications Power Voltage
Power Consumption
Operating Temperature Storage Temperature Ambient Humidity
Weight External Dimensions (W×H×D)
AC100 - 240V±10% 50/60Hz 2A
5 - 40℃
-20 - 60℃
20 - 80%RH (without condensation) 4.6kg
Coordinate Indication Range Max. Travel to Set
Max. Driving Speed
Min. Driving Speed Acceleration/Deceleration Time Micro-step (Max. Division) Driving Current
Number of Control Axes Stored Program Control Feedback Control
Circular Interpolation Control Linear Interpolation Control Machine Origin Return
Theoretical Origin Setting Relative Position Drive
Absolute Position Drive Jog Operation
Position Appointment Deceleration stop Emergency Stop Speed Setting
Driver Function
Motor Free/Hold
○
RS232C
-
USB
○
Ethernet
○
Origin Sensor
○
Proximity Sensor
○
±999,999,999
CW (+) Limit
○
CCW(−) Limit
○
1,000,000pps
General Purpose Input
-2147483648 - ＋2147483647 phase 1pps
1 - 1,000ms 8,000
0.3 - 1.4A/phase
Control Command
Controller Function
GP-IB
I/O Specification
265×99×265mm
Performance Specifications
Interface
○
3 axes ○ GS ○ ○ ○
6 point
General Purpose Output
6 point
Control Input
18 point
Control Output
5 point
Trigger Output
○
Optional CJ-200A
-
JS-301
○
JB-401
○
JD-101
○
SJT-02
-
MD-400
○
○ ○ ○ ○ ○ ○ ○
Micro-step ○
For more information, please check here !
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Driver Integrated Motorized Stages SBIS Series
This product is a motorized stage with a built-in 5-phase stepping motor driver and controller. It saves wiring, takes up little space, and can be controlled by a simple command.
• • • •
There are two types of stages, X-axis and Z-axis. The Z-axis type is equipped with an electromagnetic power-off brake as standard. When the power is turned off, the braking force works to hold the load securely. PC control via RS232C interface, or manual control via the knob on the controller body are available. Up to 99 axes of SBIS series stages can be connected using dedicated cables. (Daisy Chain configuration)
▶ The SBIS interconnection cable HR10HR10P-RC-1 (with power cord inside) or HR10HR10-RC-1 (without power cord inside) is available separately. (Note1) ▶Cable D9HR10-RC-2 for PC to SBIS connection is required separately. ▶AC adapter "AC-ADP-2433" is recommended to supply power for up to 3 axes. (For the fourth and subsequent axes, an additional AC adapter is required for each of the three axes.) (Note 1) ▶ The following sample program can be downloaded and used. ◦SG Sample for 32/64 bit Windows® ◦LabVIEW
▶(Note 1) Use "HR10HR10-RC-1" (without power wire) to connect SBISs if power is supplied from a different power supply. ▶ Use "HR10HR10P-RC-1" (with power wires) when connecting up to 3 axes using the same power supply.
What’s daisy chain❓
Up to 99 axes of SBIS series stages can be connected using dedicated cables. (Daisy Chain configuration) If you send command for connect, device number will automatically assign like 1~99 from nearest axis from PC. Example connect
AC adapter AC-ADP-2433 Ex.)DC24V 3.33A
If the stage uses AC-ADP-2433 for power supply, has to connect with one of the stages in these 3 stages. All stage’s rated current < rated current of AC adapter. It must prepare above relationship.
first axis third axis Communication Cable D9HR10-RC-2
second axis
SBIS26‐**X or Z
SBIS26‐**X or Z
Connect cable that have power wire HR10HR10P-RC-1
SBIS26‐**X or Z
Connect cable that have power wire HR10HR10P-RC-1
AC adapter AC-ADP-2433 Ex.)DC24V 3.33A
sixth axis fourth axis SBIS26‐**X or Z
Connect cable that doesn’t have power wire. (HR10HR10-RC-1)
fourth axis SBIS26‐**X or Z
SBIS26‐**X or Z
Connect cable that have power wire Connect cable that have power wire HR10HR10P-RC-1 HR10HR10P-RC-1
It has to connect every 3 axes by cable that doesn’t have power wire like below. HR10HR10-RC-1
For next stage SBIS_E2207 Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Driver Integrated Motorized Stages SBIS-X Series
W9311
X Type The X-axis model has a lineup of 5 types. Up to 99 axes can be controlled by connecting SBIS series with each other using dedicated cables. Travel [mm] 35
50
100
SBIS Cable
SBIS Communication Cables
D9HR10-RC-2
HR10HR10P-RC-1
SBIS Cables (without power cord)
Part Number (-M6) Part Number (-INCH）
Travel [mm] Stage Size [mm]
SBIS26-50X-M6
SBIS26-35X-INCH
SBIS26-50X-INCH
Feed Screw Guide Method Finish
Electromagnetic Brake
50
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Outer rail structure
Outer rail structure
Outer rail structure
Outer rail structure
Outer rail structure
Black anodized
Black anodized
Black anodized
Black anodized
Black anodized
3.00
3.00
3.70
4.65
5.60
None
120 x 120
Aluminum
120 x 120
None
Aluminum None
SBIS26-300XINCH 300 120 x 120
Aluminum None
0.05μm/pulse
0.05μm/pulse
0.05μm/pulse
0.05μm/pulse
0.05μm/pulse
MAX Speed [mm/sec]
40
40
40
40
40
Positional Repeatability [μm]
3
3
3
6
Positioning Accuracy [μm] Load Capacity [N]
Accuracy Specifications Moment Stiffness Lost Motion [μm]
Pitch [″/N・ cm]
Yaw [″/N・cm] Roll [″/N・cm]
Backlash [μm]
5
5
10
15
20 6
117N (12.0kgf)
117N (12.0kgf)
117N (12.0kgf)
117N (12.0kgf)
117N (12.0kgf)
0.23
0.23
0.23
0.23
0.23
0.12
0.12
0.12
0.12
0.12
3
3
3
5
5
0.2 3
0.2 3
0.2 3
0.2 3
0.2 3
Parallelism [μm]
50
50
50
50
50
Pitch [″] /Yaw [″]
25/20
25/20
25/20
30/25
30/25
Running Parallelism [μm]
Sensor Part Number Limit Sensor
Proximity Origin Sensor Origin Sensor
10
None
Motor / Sensor Specifications Type Motor Motor Part Number Step Angle Power Voltage Sensor
Aluminum
SBIS26-200XINCH 200
SBIS26-300X-M6
120 x 120
None
Resolution (DIVIDE=80) ※Factory default
SBIS26-200X-M6
120 x 120
Aluminum
Weight [kg]
SBIS26-100X-M6
HR10HR10-RC-1
SBIS26-100XINCH 100
35
Mechanical Specifications Positioning Slide
Sensor
SBIS26-35X-M6
300
(See to SBIS Cables page)
SBIS Cables (with power cord)
Specifications
200
Output Logic
10
10
Micro photo sensor: GP1S092HCPIF (Sharp Corporation) Equipped (NORMAL CLOSE)
Equipped (NORMAL OPEN)
Equipped (NORMAL OPEN)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK525HPB-C4 (□28mm) 0.72° DC5～24V±10％ 80mA or lower (20mA or lower per sensor) SBIS26-35: 60mA or lower (20mA or lower per sensor)
Current Consumption Control Output
10
NPN open collector output DC30V or lower, 50mA or lower
When shaded: Output transistor OFF (no conduction) : Limit Sensor When shaded: Output transistor ON (conduction): Origin sensor, Proximity Origin Sensor
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
20
Outline Drawing
SBIS26-**X-M6
Hexagon socket head cap screw M6×10…6 screws (35) Hexagon socket head cap screw M6×10…10 screws (50, 100) Hexagon socket head cap screw M6×10…14 screws (200) Hexagon socket head cap screw M6×10…18 screws (300)
<Mounting hole pattern of a top plate >
SBIS26-**X-INCH
Hexagon socket head cap screw 1/4-20UNC×3/8…6 screws (35) Hexagon socket head cap screw 1/4-20UNC×3/8…10 screws (50, 100) Hexagon socket head cap screw 1/4-20UNC×3/8…14 screws (200) Hexagon socket head cap screw 1/4-20UNC×3/8…18 screws (300)
<Mounting hole pattern of a top plate >
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Driver Integrated Motorized Stages SBIS-Z Series
W9312
Z Type The Z-axis model has a lineup of 5 types. Up to 99 axes can be controlled by connecting SBIS series with each other using dedicated cables. Travel [mm] 35
50
100
SBIS Cable
SBIS26-35Z-M6
D9HR10-RC-2
SBIS Cables (without power cord)
HR10HR10-RC-1
120 x 120
120 x 120
50
Feed Screw
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Ball screw diameter φ8mm 2mm lead
Positioning Slide
Outer rail structure
Outer rail structure
Outer rail structure
Outer rail structure
Outer rail structure
Black anodized
Black anodized
Black anodized
Black anodized
Black anodized
5.85
5.85
6.55
9.50
10.45
SBIS26-35Z-INCH SBIS26-50Z-INCH
Part Number (-INCH） Travel [mm]
35
Stage Size [mm]
Mechanical Specifications
Guide Method
Aluminum
Finish
Electromagnetic Brake Weight [kg]
Resolution (DIVIDE=80) ※Factory default MAX Speed [mm/sec]
Positioning Accuracy [μm]
Positional Repeatability [μm]
Accuracy Specifications
Load Capacity [N] Moment Stiffness Lost Motion [μm]
Pitch [″/N・ cm]
Yaw [″/N・cm] Roll [″/N・cm]
Backlash [μm]
Perpendicularity of Motion [μm] Pitch [″]/ Yaw [″]
Sensor Part Number
Sensor
Limit Sensor
Proximity Origin Sensor
Origin Sensor
Equipped
Control Output
Equipped
0.05μm/pulse
10
10
15
120 x 120
Aluminum
SBIS26-200Z-M6 SBIS26-200ZINCH 200
SBIS26-300Z-M6 SBIS26-300ZINCH 300
120 x 120
Equipped
0.05μm/pulse 10
Aluminum Equipped
0.05μm/pulse
120 x 120
Aluminum Equipped
0.05μm/pulse
10
10
15
20
30
40
39.2N (4.0kgf)
39.2N (4.0kgf)
39.2N (4.0kgf)
39.2N (4.0kgf)
39.2N (4.0kgf)
0.4
0.4
0.4
0.4
0.4
0.15
0.15
0.15
0.15
0.15
3
3
3
5
5
3
0.2 3
30
50/20
None
3
0.2
3
0.2
3
30
50/20
3
40
50/20
6
0.2 3
50
55/20
Micro photo sensor: GP1S092HCPIF(Sharp Corporation) Equipped (NORMAL CLOSE)
Equipped (NORMAL OPEN)
Equipped (NORMAL OPEN)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK525HPB-C4 (□28mm) 0.72° DC5 - 24V±10％ 80mA or lower (20mA or lower per sensor) SBIS26-35：60mA or lower (20mA or lower per sensor)
Current Consumption
Output Logic
Aluminum
0.05μm/pulse
Motor / Sensor Specifications Type Motor Motor Part Number Step Angle Power Voltage Sensor
HR10HR10P-RC-1
SBIS26-100Z-M6 SBIS26-100ZINCH 100
Part Number (-M6)
SBIS26-50Z-M6
300
(See to SBIS Cables page)
SBIS Communication Cables
SBIS Cables (with power cord)
Specifications
200
NPN open collector output DC30V or lower, 50mA or lower
When shaded: Output transistor OFF (no conduction) : Limit Sensor When shaded: Output transistor ON (conduction): Origin sensor, Proximity Origin Sensor
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
6
0.2 3
50
55/20
Outline Drawing
SBIS26-**Z-M6
<Mounting hole pattern of a top plate >
SBIS26-**Z-INCH
<Mounting hole pattern of a top plate >
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
(Specifications) Controller/ Driver
General Specifications Power Voltage
Interface
DC24V
Power Consumption
X:0.8A Z:1.0A
Storage Temperature
-20 - 60℃
Operating Temperature
GP-IB
5 - 40℃
Ambient Humidity
○
Ethernet
-
USB
20 - 80%RH (without condensation)
Optional
Primary Functions
Coordinate Indication Range
-
Max. Travel to Set
Max. Driving Speed
800,000pps
Min. Driving Speed Acceleration/Deceleration Time Driver Function (Max. Division)
Control Command Controller Function
Number of Control Axes Stored Program Control Feedback Control
MD-400
0.75AA/phase
I/O Specification
○ 1 axis/unit * Up to 99 axes can be driven if connected by Daisy Chain configuration. -
Circular Interpolation Control
Linear Interpolation Control
Machine Origin Return
Theoretical Origin Setting Relative Position Drive
Absolute Position Drive Jog Operation
○ (Simplified Control) ○ (Simplified Control) ○ ○ ○
-
-
-
-
* Stage is equipped with JOG operation knob
1 - 250
-
JB-401 SJT-02
1 - 1,000ms
Driving Current
-
JD-101
1pps
-
CJ-200A JS-301
-134,217,727 - 134,217,727
-
RS232C
Origin Sensor
-
CW (+) Limit
-
Proximity Sensor CCW (−) Limit
-
General Purpose Input
-
General Purpose Output
-
Control Input
-
Control Output
-
○ ○
Position Appointment
○
Deceleration Stop Emergency Stop
○
Speed Setting
○
Driver Function
Micro-step ○
Motor Free/ Hold Port Input
In addition, manual operation is possible by knob.
-
Port Output
-
AC Adapter
W9313
The power supply specifications for the SBIS26 series are 24 VDC, 0.8 A for the X-axis type and 1.0 A for the Z-axis type. Please purchase AC-ADP-2433 or prepare your own power supply. Specifications Part Number
Product Name Power Voltage Input Voltage External Dimensions [mm] Weight [kg]
AC-ADP-2433 AC Adapter 24V 3.33A 100-240V 50/60Hz 168(L) x 77.6(W) x 45(H) 0.6
Weight does not include AC cable. The weight including AC cable is about 0.8 kg. Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
SBIS Cables
W9313
Various cables for use with the SBIS series are available. ■Cables to connect SBIS series motorized stages to each other 1. HR10HR10P-RC-1 is used when the same power supply is shared for connection. 2. HR10HR10-RC-1 is used when connected SBIS stages are powered by separate power supplies. ■D9HR10-RC-2 is a connection cable between the host PC and the SBIS stage. Specifications Part Number
HR10HR10P-RC-1
HR10HR10-RC‐1
D9HR10-RC-2
Prodcut Name
SBIS Cable (with power cord)
SBIS Cable (without power cord)
SBIS Communication Cable
1
1
2
Equipped
None
‐
Cable Length [m] Power wire
Example connect
AC adapter AC-ADP-2433 Ex.)DC24V 3.33A
first axis third axis
second axis
SBIS26‐**X or Z Communication Cable D9HR10-RC-2
Please purchase AC-ADP-2433 or prepare your own power supply.
SBIS26‐**X or Z
SBIS26‐**X or Z
Connect cable that have power wire Connect cable that have power wire HR10HR10P-RC-1 HR10HR10P-RC-1
AC adapter AC-ADP-2433 Ex.)DC24V 3.33A
sixth axis fourth axis SBIS26‐**X or Z
Connect cable that doesn’t have power wire. (HR10HR10-RC-1)
fourth axis SBIS26‐**X or Z
SBIS26‐**X or Z
Connect cable that have power wire Connect cable that have power wire HR10HR10P-RC-1 HR10HR10P-RC-1
It has to connect every 3 axes by cable that doesn’t have power wire like below. HR10HR10-RC-1
For next stage
first axis 24[V] power Communication Cable
Connect from first axis’s COM OUT to second axis’s COM IN by connect cable.
second axis
Connect from second axis’s COM OUT to next axis’s COM IN by second axis connect cable.
Connect flow
① Confirm the power didn’t connect to power supply connector. ② Connect SBIS stage to PC by communication cable for SBIS that customized RS232C. refer to above Figure SBIS Stage connect diagram. ③ In second or later case, connect SBIS stage to next SBIS stage by built-in power wire connect cable or cable that doesn’t have power wire. ④ Turn on power. Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com
Cabling Diagram
HR10HR10P-RC-1 Stage Side (OUT) (10pin) Connector: HR10A-10P-10P (73) (male type) Hirose Electric Co., Ltd.
How to identify cables (have power wire)
HR10HR10P-RC-1
Stage Side (IN) (10pin) Connector: HR10A-10S-10P (73) (male type) Hirose Electric Co., Ltd.
(non power wire) HR10HR10-RC-1
have power wire
HR10HR10-RC-1 Stage Side (OUT) (10pin) Connector: HR10A-10P-10P (73) (male type) Hirose Electric Co., Ltd.
Stage Side (IN) (10pin) Connector: HR10A-10S-10P(73) (female type) Hirose Electric Co., Ltd.
non power wire
D9HR10-RC-2 PC side (9pin) Connector: 17JE-13090-02(D8C6)A-CG (male type) D-sub9pin DDK Ltd.,
Stage Side (IN) (10pin) Connector: HR10A-10P-10S (73) (female type) Hirose Electric Co., Ltd.
For details, please access here !
Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com
Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com