Motorized Stages Products Brochure

NEW Products and standard products Small Motorized Stage

Driver Integrated Motorized Stages

Small Motorized X Axis Stage / OSCM25-10X Small Motorized Flat Z Axis Stage / OSCM25-5ZF Small Motorized Rotation Stage / OSCM-25YAW Small Motorized Goniometer / GOHM-25A40

X-axis Driver Integrated Motorized Stages / SBIS-X Z-axis Driver Integrated Motorized Stages / SBIS-Z

Feedback Stages

OSMS Series Motorized Stages – Standard Type-

1nm Feedback Stage / NFS-UPX 10nm Feedback Stage / NFS-PX 50nm Feedback Stage / NFS-X Cable for NFS Feedback Stage / NFS-CABLE

Linear Motorized Stages / OSMS series Rotation Motorized Stages - 5 Phase Stepping Motor / OSMS-YAW Motorized Extended Guide Goniometer / OSMS-A and OSMS-B

3 Axis Stage Controller / SHRC-203 https://www.optosigma-sea.com Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Operating Environment of Motorized Stages

Use motorized positioning stages within the following operational environment temperature range.

Contact our International Sales Division separately if you desire to use the stages outside the operational environment temperature range. *Operating environment Temperature: 5°C − 40°C Humidity: 30% − 80% (without condensation)

*Recommended environment Temperature: 23°C ±5° Humidity: 60±10% (without condensation)

Operational environment temperature changes depending on various conditions such as the type of motorized positioning stage, installation and operation conditions.

Avoid use of the stages in the following sites. ◦Sites subject to water or oil ◦Sites subject to direct sunlight or radiant heat ◦Sites subject to dirt and dust

Life Cycle

Although the life cycle varies depending on intended use or application, 2,000 to 3,000 hours for linear systems and 1,000 to 1,500 hours/year (about 3 to 4 hours/day) for rotation/goniometer systems are assumed.

Note that the above assumption may not apply to repeated operations (high-speed drive or high-load drive).

Careful maintenance or supply of grease is important for using the products for a long time without a problem.

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

◦Sites subject to vibration or impact ◦Sites close to fire ◦Sites subject to inflammable gas and corrosive gas

Storage

When not using motorized stages for a long time, store motorized stages wrapped with anti-rust paper, or store in a plastic bag with a desiccant.

Storage Temperature: 0°C − 40°C Humidity: 10% − 85% (without condensation)

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Motorized Stages – Standard Type– Linear – OSMS Series

Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools for which high stiffness and high precision are required.

These stages are our standard CE-compliant motorized stages, covering motors neatly. (excluding OSMS33-800) Stepping motor stages compatible with versatile travel range between 35 to 500mm and can be used in any orientation.

Lineup Axis; X, Y, Z, XYZ

Please review the reference product list for the OSMS series (X-axis). (see below).

M4

OSMS20-35(X) OSMS20-85(X)

Part Number Top Plate Mounting Hole Type M6 INCH OSMS20-35(X)-M6

OSMS20-35(X)-INCH

OSMS20-85(X)-M6

OSMS20-85(X)-INCH

Stage Size (M6, INCH)

Width (M6, INCH)

Stage Height

Travel

Load Capacity

85x85mm

85mm

35.7mm

35mm

78.4N (8.0kgf)

85mm

35.7mm

85mm

78.4N (8.0kgf)

43mm

50mm

117N (12.0kgf)

43mm

100mm 117N (12.0kgf)

43mm

200mm 117N (12.0kgf)

43mm

300mm 117N (12.0kgf)

85x85mm

100x100mm (120x120mm) 100x100mm (120x120mm) 100x100mm (120x120mm) 100x100mm (120x120mm)

100mm (120mm) 100mm (120mm) 100mm (120mm) 100mm (120mm) 120mm

56.7mm

300mm 196N (20.0kgf)

OSMS26-50(X)

OSMS26-50(X)-M6

OSMS26-50(X)-INCH

OSMS26-100(X)

OSMS26-100(X)-M6

OSMS26-100(X)-INCH

OSMS26-200(X)

OSMS26-200(X)-M6

OSMS26-200(X)-INCH

OSMS26-300(X)

OSMS26-300(X)-M6

OSMS26-300(X)-INCH

OSMS33-300(X)

OSMS33-300(X)-M6

OSMS33-300(X)-INCH

OSMS33-500(X)

OSMS33-500(X)-M6

OSMS33-500(X)-INCH

120x120mm

120mm

56.7mm

500mm 196N (20.0kgf)

OSMS33-800(X)

OSMS33-800(X)-M6

OSMS33-800(X)-INCH

120x120mm

120mm

66.7mm

800mm 196N (20.0kgf)

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

120x120mm

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

– Rotation – OSMS-YAW Series

Stepping motor driven rotation stages utilizing precision bearings and worm gear drive mechanisms.

Suitable for rotating optics aout the optical axis, measuring, inspection and evaluation instruments.

Lineup Axis; θ Please review the reference product list for the OSMS series (θ-axis). (see below).

Part Number

Stage Size

Rotation Range

Load Capacity

Travel Mechanism

(reduction ratio)

Positioning Slide

Stage Material

Weight

OSMS-40YAW

φ40mm

19.6N (2.0kgf)

Bearing method

0.35kg

OSMS-60YAW

φ60mm

29.4N (3.0kgf)

Bearing method

0.45kg

OSMS-60YAW-W

φ60mm

29.4N (3.0kgf)

Bearing method

OSMS-80YAW

φ80mm

OSMS-120YAW

φ120mm

OSMS-160YAW OSMS-120YAW-W

Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.

98N (10.0kgf)

Worm gear (1:144)

Bearing method

1.0kg Aluminum / Aluminum bronze

1.1kg

196N (20.0kgf)

Crossed roller

φ160mm

196N (20.0kgf)

Crossed roller

2.5kg

φ120mm

196N (20.0kgf)

Crossed roller

5.5kg

2.0kg

– Goniometer – OSMS-A/B Series

High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability. Their smooth movement is ideal for frequent angle adjustment. Extended Contact bearing ways are machined directly into the main body reduce the number of parts and assembly time, making these very durable and cost effective.

Lineup Axis; α, αβ Please review the reference product list for the OSMS series (α-axis). (see below).

Part Number

(Opposite Model)

Stage Size Travel

Travel Mechanism Stage Rotation Center Height (reduction ratio) Height

Rotation Center Deflection Load Capacity Accuracy

Weight

OSMS-40A60 OSMS-40A60R

40x40mm

±5°

Worm gear (1 : 332)

15mm

60±0.1mm

Within φ0.01mm

19.6N(2.0kgf)

0.4kg

OSMS-40A75 OSMS-40A75R

40x40mm

±4°

Worm gear (1 : 406)

15mm

75±0.1mm

Within φ0.01mm

19.6N(2.0kgf)

0.4kg

OSMS-60A60 OSMS-60A60R

60x60mm

±14° Worm gear (1 : 246)

25mm

60±0.1mm

Within φ0.01mm

29.4N(3.0kgf)

0.85kg

OSMS-60A85 OSMS-60A85R

60x60mm

±9°

Worm gear (1 : 314)

20mm

85±0.1mm

Within φ0.01mm

29.4N(3.0kgf)

0.75kg

OSMS-60A105 OSMS-60A105R 60x60mm

±7°

Worm gear (1 : 380)

20mm

105±0.1mm

Within φ0.01mm

29.4N(3.0kgf)

0.75kg

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Small Motorized Stage OSCM

Small table size stage with stepping motor. The table size is 25*25mm.

Ideal for production and experimental applications require significantly smaller size. ・X-axis, Z-axis, Rotation and Goniometer available. ・High precision stepping motor is used to achieve precision positioning.

Small motorized rotation stage OSCM-25YAW

Small motorized flat Z axis stage OSCM25-5ZF

Small motorized X axis stage OSCM25-10X

W9104

W9105

W9106

・SigmaKoki’s standard controller and cables compatible. ・Please select D15RP-CA series or MINI-CA-SG series depending on the controller.

Specifications Part Number

Travel [mm] Mechanical Specifications

Stage Size [mm] Feed Screw, Positioning Slide Positioning Slide Giude Method Finish Weight [kg] Resolution MAX Speed Positioning Accuracy Positional Repeatability Load Capacity [N]

Accuracy Specifications

Moment Stiffness

(Full) (Half)

Pitch [″/N・cm] Yaw [″/N・cm] Roll [″/N・cm]

Lost Motion Backlash [μm] Parallelism [μm] Wobble [μm] Running Parallelism [μm] Pitch [″]/ Yaw [″] Sensor

Sensor Part Number Limit Sensor Origin Sensor

Motor / Sensor Specifications Motor

Sensor

Type Motor Part Number Step Angle Power Voltage Current Consumption Control Output Output Logic

Compatible Driver / Controller Compatible Driver Control System Compatible Controller Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

OSCM25-10X

OSCM25-5ZF

10

5

OSCM-25YAW

Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction φ25mm

25x25mm 25x25mm Ball screw diameter Precision ground screw Worm gear (1:72) φ3mm, 1mm lead φ4mm, 0.5mm lead Crossed roller Crossed roller Bearing method Steel Aluminum Aluminum / Aluminum bronze Black chrome Black anodized Black anodized 0.25 0.3 0.25 2μm/pulse 1μm/pulse 0.01°/pulse 1μm/pulse 0.5μm/pulse 0.005°/pulse 10mm/sec 1mm/sec 30°/sec 15μm 0.2° 3μm 5μm 0.02° 19.6 (2.0kgf) 9.8 (1.0kgf) 9.8 (1.0kgf) 10 25 10 10 15 5 25 5μm 10μm 0.05° 1 1 1 30 60 50 30 20 30 100/60 60/ Micro photo sensor: GP1S092HCPIF BP4SWA (Sharp Corporation) (Metrol Co., Ltd.) Equipped (NORMAL CLOSE) Touch sensor (NORMAL OPEN) None 5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.) PK513PB-C9 (□20mm) 0.72° DC5 - 24V±10% 40mA or lower (20mA or lower per sensor) 20mA or lower NPN open collector output DC30V or lower, Touch sensor 50mA or lower When shaded: Output transistor OFF NORMAL OPEN (no conduction) SG-5MA、MC-S0514ZU、SG-514MSC GSC-01、GSC-02A、SHOT-302GS、SHOT-304GS、 SHOT-702H、HIT-MA/HIT-SA、PGC-04-U Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

Connection Diagram

OSCM25-10X

OSCM25-5ZF

OSCM-25YAW

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Compatible Controllers / Drivers and Cables

Comparison of TSD-401S＋SGSP13ACTB0 (right) and OSCM25-10X (left)

Comparison of TSD-603＋SGSP-13ACTB0 (left) and OSCM25-5ZF (right)

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Comparison of OSCM-25YAW (right) and OSMS-40YAW (left)

■Example Advantage of lightweight The amount of displacement is minimized even moment load is applied because of its lightweight.

Equipment Built-in Ideal for adjusting the optical axis in equipment with limited space or automation of workpiece positioning.

In a narrow space Remote adjustment of workpieces available since it can be placed in an optical system where the space between elements is limited.

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Small Motorized Goniometers

GOHM-A

W9107

Stepping motor driven goniometer with 25mm x 25mm table size.

Significantly minimized body size and ideally suited for applications that require space-saving. ・Motorized version of 25mm x 25mm manual goniometer (GOH series) while maintaining compact size.

Integrated limit sensor enables automatic control by using standard stage controllers. ▶Various controllers and drivers are available for different applications. ▶Appropriate cable (D15RP-CA or MINI-CA-SG) is required for selected controller or driver.

W9052

Attention ▶Since dovetail slide mechanism is adopted, the accuracy may decrease due to wear when operating repeatedly and continually. Please use for alignment purposes that movement is not required frequently once it is aligned. Please use OSMS-40A60/75 series in case durability is required for repetitive and continual operation.

W9079

Specifications Part Number

GOHM-25A40

Angle Range [°]

±6

Stage Size [mm] Mechanical Specifications

25 x 25

Positioning Slide

Dovetail slide method

Transmission mechanism

Worm gear

Stage Material

Brass

Finish

Weight [kg] Resolution

Black chrome 0.28

(Full) [°/pulse]

Approx. 0.00334

(Half) [°/pulse]

Approx. 0.00167

MAX Speed [°/sec]

3

Positional Repeatability [°] Load Capacity [N] Accuracy Specifications

Moment Stiffness Lost Motion [°]

0.01

9.8 (1.0kgf)

Pitch [″/N･cm]

-

Yaw [″/N･cm]

-

Roll [″/N･cm]

5

0.05

Backlash

-

Parallelism

-

Wobble

-

Running Parallelism

-

Pitch [″]/ Yaw [″] Sensor

-

Sensor Part Number

Micro photo sensor: GP1S092HCPIF (Sharp Corporation)

Limit Sensor

Equipped (NORMAL CLOSE)

Origin Sensor

None

Motor / Sensor Specifications Motor

Type

5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)

Motor Part Number

PK513PB-C9 (□20mm)

Step Angle

0.72°

Power Voltage

Sensor

DC5 - 24V±10%

Current Consumption

40mA or lower (20mA or lower per sensor)

Control Output

NPN open collector output DC30V or lower 50mA or lower

Output Logic

When shaded: Output transistor OFF (no conduction)

Compatible Driver / Controller Control System

Compatible Driver

Compatible Controller

SG-5MA, MC-S0514ZU, SG-514MSC

GSC-01, GSC-02A, SHOT-302GS, SHOT-304GS, SHOT-702A, HIT-MV/HIT-SA, PGC-04-U

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

GOHM-25A40

Connection Diagram

Compatible Controllers / Drivers and Cables

HIT-MV･HIT-SA

GOHM-A

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Feedback Stage

NFS Series

High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.

• • •

Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.

A plugin for the "Autoconfig" function is equipped for user convenience.

Controllers compatible with the Feedback Stage (NFS series) are available.

▶Use a controller (SHRC-203) compatible with Feedback Stage (NFS series). ▶Sample programs are available for download on our website. ◦SG Sample 32/64 bit for Windows® ◦LabVIEW

▶When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃) ▶Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment. ▶Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur. ▶Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.

Points for selecting the Travel *If you require a Travel other than those listed below, please contact our Sales.

Travel

20 mm

Stage Size 75 x 60 mm

40 mm

Stage Size 110 x 60 mm

50 mm

Stage Size 100 x 100 mm, 120 x 120 mm

For high resolution positioning over long distances.

100 mm

Stage Size 175 x 100 mm, 175 x 120mm

For high resolution positioning over long distances.

Space-saving type, used when short travel is sufficient.

This is the most stable type and is recommended if there is enough space for installation.

200 mm

Stage Size 230 x 180 mm

For high resolution positioning over long distances.

Lineup includes 10nm and 50nm resolution.

300 mm

Stage Size

330 x 180 mm

For high resolution positioning over long distances.

Lineup includes 10nm and 50nm resolution.

Research Object

Resolution [nm]

Feedback Stages (NFS Series) Resolution and Travel Lineups

1

1

X-ray Si Crystal DNA

X-ray research, etc.

Carbon Nanotube

10 50

Spectroscopic studies with light and lasers in the order of 100 nm

EUV light LSI Patterns

Microscope Stage

Inspection of microfabricated parts

Select a stage with a resolution 10 times finer than the research object

20 40 Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

50

100

150

200

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

300

Virus NUV light Visible light Chromosome Terahertz Travel [mm]

FS_E2305

1nm Feedback Stage NFS-UPX

W9315

Resolution 1nm

The 1 nm Feedback Stage is available in 6 different table sizes.

Travel [mm] 20

40

50

100

Cable for NFS Feedback Stage(See cable page for details) Motor cable

D15H12A-RC-3

Scale cable

DM15HD14A-RC-3

Specifications Part Number Travel [mm] Stage Size [mm] Mechanical Specifications

Feed Screw Positioning Slide Stage Material Finish

NFS120-50UPX

NFS120100UPX

20

40

50

100

50

100

75 x 60

110 x 60

100 x 100

175 x 100

120 x 120

175 x 120

Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw diameter φ4mm, diameter φ4mm, diameter φ8mm, diameter φ8mm, diameter φ8mm, diameter φ8mm, 1mm lead 1mm lead 1mm lead 1mm lead 1mm lead 1mm lead Crossed roller

Crossed roller

Crossed roller

Crossed roller

Crossed roller

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Crossed roller Aluminum

Black anodized

Black anodized

Black anodized

Black anodized

Black anodized

Black anodized

1.0

2.7

3.7

3.0

4.0

1

1

2

2

2

2

(Half) [μm/pulse]

0.5

0.5

1

1

1

1

5

5

5

5

5

5

1

1

1

2

1

2

Positional Repeatability [μm]*2

0.4

0.4

0.4

0.4

0.4

0.4

Micro-range Bi-directional Repeatability *3

±4nm

±4nm

±3nm

±3nm

±3nm

±3nm

Least Increment Step Test (MIN)

3nm

3nm

3nm

3nm

3nm

3nm

49 (5.0kgf)

49 (5.0kgf)

98 (10.0kgf)

98 (10.0kgf)

98 (10.0kgf)

98 (10.0kgf)

Pitch [″/N・cm]

0.5

0.5

0.05

0.05

0.05

0.05

Yaw [″/N・cm]

0.5

0.5

0.05

0.05

0.05

0.05

Roll [″/N・cm]

0.5

0.5

0.05

0.05

0.05

0.05

Lost Motion [μm]

0.4

0.4

0.4

0.4

0.4

0.4

Backlash [μm]

1

1

1

1

1

1

Parallelism[μm]

50

50

50

50

50

50

Load Capacity [N]

Running Parallelism [μm]

10

10

10

10

10

10

Pitch [″]/ Yaw [″]

15/15

15/15

15/15

15/15

15/15

15/15

Type Motor Part Number

Encoder

NFS100100UPX

Positioning Accuracy [μm]*2

Moment Stiffness

Motor

NFS100-50UPX

0.5

MAX Speed [mm/sec]

Accuracy Specifications

NFS60-40UPX

(Full) [μm/pulse]

Weight [kg] Resolution *1

NFS60-20UPX

Scale Resolution [nm]

5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.) PK523PMB-C5 (□28mm) 1

1

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK545NBW (□42mm) 1

1

*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range.

Measurement step for 1 nm feedback stage (NFS-UPX series): 5 nm

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

1

1

Outline Drawing

NFS60-20UPX

NFS60-40UPX

NFS100-50UPX

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

NFS100-100UPX

NFS120-50UPX

NFS120-100UPX

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

10nm Feedback Stage

NFS-PX

W9316

Resolution 10nm

The 10 nm Feedback Stage is available in 8 different table sizes.

Travel [mm] 20

40

50

100

200

300

Cable for NFS Feedback Stage (See cable page for details) Motor cable

D15H12A-RC-3

Scale cable

DM15HD14A-RC-3

Specifications Part Number Travel [mm] Stage Size [mm] Feed Screw Mechanical Specifications Positioning Slide

20

40

50

100

75 x 60

110 x 60

100 x 100

175 x 100

Ball screw diameter φ4mm, 1mm lead

Ball screw diameter φ4mm, 1mm lead

Ball screw diameter φ8mm, 1mm lead

Ball screw diameter φ8mm, 1mm lead

Crossed roller

Crossed roller

Crossed roller

Crossed roller

Aluminum

Aluminum

Aluminum

Black anodized

Black anodized

0.5

1.0

2.7

3.7

(Full) [μm/pulse]

2

2

2

2

(Half) [μm/pulse]

1

1

1

1

10

10

10

10

MAX Speed [mm/sec] Positioning Accuracy [μm]*2

1

1

1

2

Positional Repeatability [μm]*2

Micro-range Bi-directional Repeatability *3

0.5

0.5

0.5

0.5

±20nm

±20nm

±20nm

±20nm

30nm

30nm

30nm

30nm

Load Capacity [N]

49 (5.0kgf)

49 (5.0kgf)

98 (10.0kgf)

98 (10.0kgf)

0.5

0.5

0.05

0.05

Least Increment Step Test (MIN)

Moment Stiffness

Pitch [″/N・cm] Yaw [″/N・cm]

0.5

0.5

0.05

0.05

Roll [″/N・cm]

0.5

0.5

0.05

0.05

0.5

0.5

0.5

0.5

Lost Motion [μm] Backlash [μm]

1

1

1

1

Parallelism[μm]

50

50

50

50

Running Parallelism [μm]

10

10

10

10

15/15

15/15

15/15

15/15

Pitch [″]/ Yaw [″]

Encoder

NFS100-100PX

Black anodized

Weight [kg]

Motor

NFS100-50PX

Aluminum

Finish

Accuracy Specifications

NFS60-40PX

Black anodized

Stage Material

Resolution*1

NFS60-20PX

Type

5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

PK523PB-C7 (□28mm)

PK545NBW (□42mm)

Motor Part Number

Scale Resolution [nm]

10

10

*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro Measurement step for 10 nm feedback stage (NFS-PX series): 50 nm

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

10

range.

10

Resolution 10nm

Specifications Part Number

NFS120-50PX Travel [mm]

100

200

300

175 x 120

230 x 180

330 x 180

Ball screw diameter φ8mm, 1mm lead

Ball screw diameter φ8mm, 1mm lead

Ball screw diameter φ10mm, 2mm lead

Ball screw diameter φ10mm, 2mm lead

Positioning Slide

Crossed roller

Crossed roller

LM guide

LM guide

Stage Material

Aluminum

Aluminum

Aluminum

Aluminum

Black anodized

Black anodized

Black anodized

Black anodized

Feed Screw

Weight [kg]

3.0

4.0

13.2

17

(Full) [μm/pulse]

2

2

4

4

(Half) [μm/pulse]

1

1

2

2

MAX Speed [mm/sec]

10

10

20

20

Positioning Accuracy [μm]*2

1

2

2

2

Positional Repeatability [μm]*2

0.5

0.5

0.6

0.6

±20nm

±20nm

±20nm

±20nm

30nm

30nm

30nm

30nm

98 (10.0kgf)

98 (10.0kgf)

196 (20.0kgf)

196 (20.0kgf)

Pitch [″/N・cm]

0.05

0.05

0.02

0.02

Yaw [″/N・cm]

0.05

0.05

0.02

0.02

Roll [″/N・cm]

Resolution *1

Micro-range Bi-directional Repeatability *3

Least Increment Step Test (MIN) Load Capacity [N] Moment Stiffness

Motor

Encoder

NFS180-300PX

50

Finish

Accuracy Specifications

NFS180-200PX

120 x 120

Stage Size [mm]

Mechanical Specifications

NFS120-100PX

0.05

0.05

0.02

0.02

Lost Motion [μm]

0.5

0.5

0.6

0.6

Backlash [μm]

1

1

1

1

Parallelism[μm]

50

50

100

100

Running Parallelism [μm]

10

10

20

20

Pitch[″]/Yaw[″]

15/15

15/15

20/20

20/20

Type

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

Motor Part Number

Scale Resolution [nm]

PK545NBW (□42mm) 10

10

*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro Measurement step for 10 nm feedback stage (NFS-PX series): 50 nm

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

10

range.

10

Outline Drawing

NFS60-20PX

NFS60-40PX

NFS100-50PX

NFS100-100PX

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

NFS120-50PX

NFS120-100PX

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

NFS180-200PX

NFS180-300PX

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

50nm Feedback Stage

NFS-X

W9317

Resolution 50nm

The 50 nm Feedback Stage is available in 8 different table sizes.

Travel [mm] 20

40

50

100

200

300

Cable for NFS Feedback Stage (See cable page for details) Motor cable

D15H12A-RC-3

Scale cable

DM15HD14A-RC-3

Specifications Part Number Travel [mm] Stage Size [mm] Mechanical Specifications

Feed Screw Positioning Slide

NFS100-100X

20

40

50

100

75 x 60

110 x 60

100 x 100

175 x 100

Ball screw diameter φ4mm, 1mm lead

Ball screw diameter φ4mm, 1mm lead

Ball screw diameter φ8mm, 1mm lead

Ball screw diameter φ8mm, 1mm lead

Crossed roller

Crossed roller

Crossed roller

Crossed roller

Aluminum

Aluminum

Aluminum

Black anodized

Black anodized

Black anodized

0.5

1.0

2.7

3.7

(Full) [μm/pulse]

2

2

2

2

(Half) [μm/pulse]

1

1

1

1

MAX Speed [mm/sec]

10

10

10

10

Positioning Accuracy [μm]*2

1

1

1

2

Positional Repeatability [μm]*2

Resolution *1

Micro-range Bi-directional Repeatability *3

0.5

0.5

0.5

0.5

±100nm

±100nm

±100nm

±100nm

150nm

150nm

150nm

150nm

Load Capacity [N]

49 (5.0kgf)

49 (5.0kgf)

98 (10.0kgf)

98 (10.0kgf)

Pitch[″/N・cm]

0.5

0.5

0.05

0.05

Yaw[″/N・cm]

0.5

0.5

0.05

0.05

Roll[″/N・cm]

0.5

0.5

0.05

0.05

Lost Motion [μm]

0.5

0.5

0.5

0.5

Backlash [μm]

1

1

1

1

Parallelism[μm]

50

50

50

50

Running Parallelism [μm]

10

10

10

10

Pitch [″]/ Yaw [″]

15/15

15/15

15/15

15/15

Least Increment Step Test (MIN)

Moment Stiffness

Encoder

NFS100-50X

Aluminum

Weight [kg]

Motor

NFS60-40X

Black anodized

Stage Material Finish

Accuracy Specifications

NFS60-20X

Type

5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

PK523PB-C7 (□28mm)

PK545NBW (□42mm)

Motor Part Number

Scale Resolution [nm]

50

50

*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a microrange.

Measurement step for 50 nm feedback stage (NFS-X series): 100 nm

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

50

50

Resolution 50nm

Specifications Part Number Travel [mm]

50

100

200

300

175 x 120

230 x 180

330 x 180

Ball screw diameter φ10mm, 2mm lead

Ball screw diameter φ10mm, 2mm lead

Positioning Slide

Crossed roller

Crossed roller

LM guide

LM guide

Stage Material

Aluminum

Aluminum

Aluminum

Aluminum

Black anodized

Black anodized

Black anodized

Black anodized

3.0

4.0

13.2

17

(Full) [μm/pulse]

2

2

4

4

(Half) [μm/pulse]

1

1

2

2

MAX Speed [mm/sec]

10

10

20

20

Positioning Accuracy [μm]*2

1

2

2

2

Positional Repeatability [μm]*2

Feed Screw

Resolution*1

Micro-range Bi-directional Repeatability *3

0.5

0.5

0.6

0.6

±100nm

±100nm

±100nm

±100nm

150nm

150nm

150nm

150nm

Load Capacity [N]

98 (10.0kgf)

98 (10.0kgf)

196 (20.0kgf)

196 (20.0kgf)

Pitch [″/N・cm]

0.05

0.05

0.02

0.02

Yaw [″/N・cm]

0.05

0.05

0.02

0.02

Roll [″/N・cm]

0.05

0.05

0.02

0.02

Lost Motion [μm]

0.5

0.5

0.6

0.6

Backlash [μm]

1

1

1

1

Parallelism[μm]

50

50

100

100

Running Parallelism [μm]

10

10

20

20

Pitch[″]/Yaw[″]

15/15

15/15

20/20

20/20

Least Increment Step Test (MIN)

Moment Stiffness

Encoder

NFS180-300X

Ball screw diameter φ8mm, 1mm lead

Weight [kg]

Motor

NFS180-200X

120 x 120

Finish

Accuracy Specifications

NFS120-100X

Ball screw diameter φ8mm, 1mm lead

Stage Size [mm] Mechanical Specifications

NFS120-50X

Type

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK545NBW (□42mm)

Motor Part Number

Scale Resolution [nm]

50

50

*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. *2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a microrange.

Measurement step for 50 nm feedback stage (NFS-X series): 100 nm

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

50

50

Outline Drawing

NFS60-20X

NFS60-40X

NFS100-50X

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

NFS100-100X

NFS120-50X

NFS120-100X

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Outline Drawing

NFS180-200X

NFS180-300X

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Cable for NFS Feedback Stage

W9318

Various cables for use with the NFS Feedback Stage are available.

D15H12A-RC-3 is a Motor Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203).

DM15HD14A-RC-3 is a Scale Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203).

Wiring Diagram

D15H12A-RC-3 Controller side (15pin) Connector: 17JE-23150-02 (D1) Hood: 17JE-15H-1A4-CF (Plug type) DDK Ltd.

Stage side (12pin) Connector: HR10A-10P-12SC (73) (Socket type) Hirose Electric Co., Ltd.

DM15HD14A-RC-3 Stage side (14pin) Connector: HDR-E14FSG1+ Hood: HDR-E14LPHP＋ (Socket type) HTK Ltd.

Controller side (15pin) Connector: D02-M15PG-N-F0 Hood: DE-C8-J9-F4-1R (Plug type) Japan Aviation Electronics Industry, Ltd.

Specifications Part Number

D15H12A-RC-3

DM15HD14A-RC-3

Product Name

Motor Cable

Scale Cable

3

3

Cable Length［m］ Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

3 Axis Stage Controller SHRC-203

W9314

Controller capable of controlling a wide range of high-resolution stages from an open-loop Motorized Stage with 5-phase stepping motor to a 1 nm Feedback Stage. ◦ Stage controller with built-in driver for 5-phase stepping motors, capable of 3-axis full closed-loop to open-loop control independently for each axis. ◦ External control via USB/GP-IB/Ethernet interface, manual operation via front panel or handy terminal (JS-301, JB-401, JD-101, MD-400), and automatic control via internal program (8 banks) are available. ◦ Full closed loop control is available when used with Precision Motorized Stages with Built-in Compact Scale.

▶ Sample programs are available for download on our website. ◦SG Sample 32/64 bit for Windows® ◦LabVIEW

Part Number

SHRC-203

Product Name

3 Axis Stage Controller

Outline Drawing

SHRC-203

SHRC-203_E2301 Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Specifications General Specifications Power Voltage

Power Consumption

Operating Temperature Storage Temperature Ambient Humidity

Weight External Dimensions (W×H×D)

AC100 - 240V±10% 50/60Hz 2A

5 - 40℃

-20 - 60℃

20 - 80%RH (without condensation) 4.6kg

Coordinate Indication Range Max. Travel to Set

Max. Driving Speed

Min. Driving Speed Acceleration/Deceleration Time Micro-step (Max. Division) Driving Current

Number of Control Axes Stored Program Control Feedback Control

Circular Interpolation Control Linear Interpolation Control Machine Origin Return

Theoretical Origin Setting Relative Position Drive

Absolute Position Drive Jog Operation

Position Appointment Deceleration stop Emergency Stop Speed Setting

Driver Function

Motor Free/Hold

○

RS232C

-

USB

○

Ethernet

○

Origin Sensor

○

Proximity Sensor

○

±999,999,999

CW (+) Limit

○

CCW(−) Limit

○

1,000,000pps

General Purpose Input

-2147483648 - ＋2147483647 phase 1pps

1 - 1,000ms 8,000

0.3 - 1.4A/phase

Control Command

Controller Function

GP-IB

I/O Specification

265×99×265mm

Performance Specifications

Interface

○

3 axes ○ GS ○ ○ ○

6 point

General Purpose Output

6 point

Control Input

18 point

Control Output

5 point

Trigger Output

○

Optional CJ-200A

-

JS-301

○

JB-401

○

JD-101

○

SJT-02

-

MD-400

○

○ ○ ○ ○ ○ ○ ○

Micro-step ○

For more information, please check here !

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Driver Integrated Motorized Stages SBIS Series

This product is a motorized stage with a built-in 5-phase stepping motor driver and controller. It saves wiring, takes up little space, and can be controlled by a simple command.

• • • •

There are two types of stages, X-axis and Z-axis.

The Z-axis type is equipped with an electromagnetic power-off brake as standard. When the power is turned off, the braking force works to hold the load securely.

PC control via RS232C interface, or manual control via the knob on the controller body are available.

Up to 99 axes of SBIS series stages can be connected using dedicated cables. (Daisy Chain configuration)

▶ The SBIS interconnection cable HR10HR10P-RC-1 (with power cord inside) or HR10HR10-RC-1 (without power cord inside) is available separately. (Note1) ▶Cable D9HR10-RC-2 for PC to SBIS connection is required separately. ▶AC adapter "AC-ADP-2433" is recommended to supply power for up to 3 axes. (For the fourth and subsequent axes, an additional AC adapter is required for each of the three axes.) (Note 1) ▶ The following sample program can be downloaded and used. ◦SG Sample for 32/64 bit Windows® ◦LabVIEW

▶(Note 1) Use "HR10HR10-RC-1" (without power wire) to connect SBISs if power is supplied from a different power supply. ▶ Use "HR10HR10P-RC-1" (with power wires) when connecting up to 3 axes using the same power supply.

What’s daisy chain❓

Up to 99 axes of SBIS series stages can be connected using dedicated cables. (Daisy Chain configuration) If you send command for connect, device number will automatically assign like 1~99 from nearest axis from PC. Example connect

AC adapter AC-ADP-2433 Ex.)DC24V 3.33A

If the stage uses AC-ADP-2433 for power supply, has to connect with one of the stages in these 3 stages. All stage’s rated current < rated current of AC adapter. It must prepare above relationship.

first axis third axis Communication Cable D9HR10-RC-2

second axis

SBIS26‐**X or Z

SBIS26‐**X or Z

Connect cable that have power wire HR10HR10P-RC-1

SBIS26‐**X or Z

Connect cable that have power wire HR10HR10P-RC-1

AC adapter AC-ADP-2433 Ex.)DC24V 3.33A

sixth axis fourth axis SBIS26‐**X or Z

Connect cable that doesn’t have power wire.

(HR10HR10-RC-1)

fourth axis SBIS26‐**X or Z

SBIS26‐**X or Z

Connect cable that have power wire Connect cable that have power wire HR10HR10P-RC-1 HR10HR10P-RC-1

It has to connect every 3 axes by cable that doesn’t have power wire like below.

HR10HR10-RC-1

For next stage SBIS_E2207 Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Driver Integrated Motorized Stages SBIS-X Series

W9311

X Type The X-axis model has a lineup of 5 types.

Up to 99 axes can be controlled by connecting SBIS series with each other using dedicated cables.

Travel [mm] 35

50

100

SBIS Cable

SBIS Communication Cables

D9HR10-RC-2

HR10HR10P-RC-1

SBIS Cables (without power cord)

Part Number (-M6) Part Number (-INCH）

Travel [mm] Stage Size [mm]

SBIS26-50X-M6

SBIS26-35X-INCH

SBIS26-50X-INCH

Feed Screw Guide Method Finish

Electromagnetic Brake

50

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Outer rail structure

Outer rail structure

Outer rail structure

Outer rail structure

Outer rail structure

Black anodized

Black anodized

Black anodized

Black anodized

Black anodized

3.00

3.00

3.70

4.65

5.60

None

120 x 120

Aluminum

120 x 120

None

Aluminum None

SBIS26-300XINCH 300 120 x 120

Aluminum None

0.05μm/pulse

0.05μm/pulse

0.05μm/pulse

0.05μm/pulse

0.05μm/pulse

MAX Speed [mm/sec]

40

40

40

40

40

Positional Repeatability [μm]

3

3

3

6

Positioning Accuracy [μm] Load Capacity [N]

Accuracy Specifications Moment Stiffness Lost Motion [μm]

Pitch [″/N・ cm]

Yaw [″/N・cm] Roll [″/N・cm]

Backlash [μm]

5

5

10

15

20 6

117N (12.0kgf)

117N (12.0kgf)

117N (12.0kgf)

117N (12.0kgf)

117N (12.0kgf)

0.23

0.23

0.23

0.23

0.23

0.12

0.12

0.12

0.12

0.12

3

3

3

5

5

0.2 3

0.2 3

0.2 3

0.2 3

0.2 3

Parallelism [μm]

50

50

50

50

50

Pitch [″] /Yaw [″]

25/20

25/20

25/20

30/25

30/25

Running Parallelism [μm]

Sensor Part Number Limit Sensor

Proximity Origin Sensor Origin Sensor

10

None

Motor / Sensor Specifications Type Motor Motor Part Number Step Angle Power Voltage Sensor

Aluminum

SBIS26-200XINCH 200

SBIS26-300X-M6

120 x 120

None

Resolution (DIVIDE=80) ※Factory default

SBIS26-200X-M6

120 x 120

Aluminum

Weight [kg]

SBIS26-100X-M6

HR10HR10-RC-1

SBIS26-100XINCH 100

35

Mechanical Specifications Positioning Slide

Sensor

SBIS26-35X-M6

300

(See to SBIS Cables page)

SBIS Cables (with power cord)

Specifications

200

Output Logic

10

10

Micro photo sensor: GP1S092HCPIF (Sharp Corporation) Equipped (NORMAL CLOSE)

Equipped (NORMAL OPEN)

Equipped (NORMAL OPEN)

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK525HPB-C4 (□28mm) 0.72° DC5～24V±10％ 80mA or lower (20mA or lower per sensor) SBIS26-35: 60mA or lower (20mA or lower per sensor)

Current Consumption Control Output

10

NPN open collector output DC30V or lower, 50mA or lower

When shaded: Output transistor OFF (no conduction) : Limit Sensor When shaded: Output transistor ON (conduction): Origin sensor, Proximity Origin Sensor

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

20

Outline Drawing

SBIS26-**X-M6

Hexagon socket head cap screw M6×10…6 screws (35) Hexagon socket head cap screw M6×10…10 screws (50, 100) Hexagon socket head cap screw M6×10…14 screws (200) Hexagon socket head cap screw M6×10…18 screws (300)

<Mounting hole pattern of a top plate >

SBIS26-**X-INCH

Hexagon socket head cap screw 1/4-20UNC×3/8…6 screws (35) Hexagon socket head cap screw 1/4-20UNC×3/8…10 screws (50, 100) Hexagon socket head cap screw 1/4-20UNC×3/8…14 screws (200) Hexagon socket head cap screw 1/4-20UNC×3/8…18 screws (300)

<Mounting hole pattern of a top plate >

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Driver Integrated Motorized Stages SBIS-Z Series

W9312

Z Type The Z-axis model has a lineup of 5 types.

Up to 99 axes can be controlled by connecting SBIS series with each other using dedicated cables.

Travel [mm] 35

50

100

SBIS Cable

SBIS26-35Z-M6

D9HR10-RC-2

SBIS Cables (without power cord)

HR10HR10-RC-1

120 x 120

120 x 120

50

Feed Screw

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Ball screw diameter φ8mm 2mm lead

Positioning Slide

Outer rail structure

Outer rail structure

Outer rail structure

Outer rail structure

Outer rail structure

Black anodized

Black anodized

Black anodized

Black anodized

Black anodized

5.85

5.85

6.55

9.50

10.45

SBIS26-35Z-INCH SBIS26-50Z-INCH

Part Number (-INCH） Travel [mm]

35

Stage Size [mm]

Mechanical Specifications

Guide Method

Aluminum

Finish

Electromagnetic Brake Weight [kg]

Resolution (DIVIDE=80) ※Factory default MAX Speed [mm/sec]

Positioning Accuracy [μm]

Positional Repeatability [μm]

Accuracy Specifications

Load Capacity [N] Moment Stiffness Lost Motion [μm]

Pitch [″/N・ cm]

Yaw [″/N・cm] Roll [″/N・cm]

Backlash [μm]

Perpendicularity of Motion [μm] Pitch [″]/ Yaw [″]

Sensor Part Number

Sensor

Limit Sensor

Proximity Origin Sensor

Origin Sensor

Equipped

Control Output

Equipped

0.05μm/pulse

10

10

15

120 x 120

Aluminum

SBIS26-200Z-M6 SBIS26-200ZINCH 200

SBIS26-300Z-M6 SBIS26-300ZINCH 300

120 x 120

Equipped

0.05μm/pulse 10

Aluminum Equipped

0.05μm/pulse

120 x 120

Aluminum Equipped

0.05μm/pulse

10

10

15

20

30

40

39.2N (4.0kgf)

39.2N (4.0kgf)

39.2N (4.0kgf)

39.2N (4.0kgf)

39.2N (4.0kgf)

0.4

0.4

0.4

0.4

0.4

0.15

0.15

0.15

0.15

0.15

3

3

3

5

5

3

0.2 3

30

50/20

None

3

0.2

3

0.2

3

30

50/20

3

40

50/20

6

0.2 3

50

55/20

Micro photo sensor: GP1S092HCPIF(Sharp Corporation) Equipped (NORMAL CLOSE)

Equipped (NORMAL OPEN)

Equipped (NORMAL OPEN)

5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) PK525HPB-C4 (□28mm) 0.72° DC5 - 24V±10％ 80mA or lower (20mA or lower per sensor) SBIS26-35：60mA or lower (20mA or lower per sensor)

Current Consumption

Output Logic

Aluminum

0.05μm/pulse

Motor / Sensor Specifications Type Motor Motor Part Number Step Angle Power Voltage Sensor

HR10HR10P-RC-1

SBIS26-100Z-M6 SBIS26-100ZINCH 100

Part Number (-M6)

SBIS26-50Z-M6

300

(See to SBIS Cables page)

SBIS Communication Cables

SBIS Cables (with power cord)

Specifications

200

NPN open collector output DC30V or lower, 50mA or lower

When shaded: Output transistor OFF (no conduction) : Limit Sensor When shaded: Output transistor ON (conduction): Origin sensor, Proximity Origin Sensor

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

6

0.2 3

50

55/20

Outline Drawing

SBIS26-**Z-M6

<Mounting hole pattern of a top plate >

SBIS26-**Z-INCH

<Mounting hole pattern of a top plate >

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

(Specifications) Controller/ Driver

General Specifications Power Voltage

Interface

DC24V

Power Consumption

X:0.8A Z:1.0A

Storage Temperature

-20 - 60℃

Operating Temperature

GP-IB

5 - 40℃

Ambient Humidity

○

Ethernet

-

USB

20 - 80%RH (without condensation)

Optional

Primary Functions

Coordinate Indication Range

-

Max. Travel to Set

Max. Driving Speed

800,000pps

Min. Driving Speed Acceleration/Deceleration Time Driver Function (Max. Division)

Control Command Controller Function

Number of Control Axes Stored Program Control Feedback Control

MD-400

0.75AA/phase

I/O Specification

○ 1 axis/unit * Up to 99 axes can be driven if connected

by Daisy Chain configuration.

-

Circular Interpolation Control

Linear Interpolation Control

Machine Origin Return

Theoretical Origin Setting Relative Position Drive

Absolute Position Drive Jog Operation

○ (Simplified Control) ○ (Simplified Control) ○ ○ ○

-

-

-

-

* Stage is equipped with JOG operation knob

1 - 250

-

JB-401 SJT-02

1 - 1,000ms

Driving Current

-

JD-101

1pps

-

CJ-200A JS-301

-134,217,727 - 134,217,727

-

RS232C

Origin Sensor

-

CW (+) Limit

-

Proximity Sensor CCW (−) Limit

-

General Purpose Input

-

General Purpose Output

-

Control Input

-

Control Output

-

○ ○

Position Appointment

○

Deceleration Stop Emergency Stop

○

Speed Setting

○

Driver Function

Micro-step ○

Motor Free/ Hold Port Input

In addition, manual operation is possible by knob.

-

Port Output

-

AC Adapter

W9313

The power supply specifications for the SBIS26 series are 24 VDC, 0.8 A for the X-axis type and 1.0 A for the Z-axis type.

Please purchase AC-ADP-2433 or prepare your own power supply.

Specifications Part Number

Product Name Power Voltage Input Voltage External Dimensions [mm] Weight [kg]

AC-ADP-2433 AC Adapter 24V 3.33A 100-240V 50/60Hz 168(L) x 77.6(W) x 45(H) 0.6

Weight does not include AC cable. The weight including AC cable is about 0.8 kg.

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

SBIS Cables

W9313

Various cables for use with the SBIS series are available.

■Cables to connect SBIS series motorized stages to each other 1. HR10HR10P-RC-1 is used when the same power supply is shared for connection.

2. HR10HR10-RC-1 is used when connected SBIS stages are powered by separate power supplies.

■D9HR10-RC-2 is a connection cable between the host PC and the SBIS stage.

Specifications Part Number

HR10HR10P-RC-1

HR10HR10-RC‐1

D9HR10-RC-2

Prodcut Name

SBIS Cable (with power cord)

SBIS Cable (without power cord)

SBIS Communication Cable

1

1

2

Equipped

None

‐

Cable Length [m] Power wire

Example connect

AC adapter AC-ADP-2433 Ex.)DC24V 3.33A

first axis third axis

second axis

SBIS26‐**X or Z Communication Cable D9HR10-RC-2

Please purchase AC-ADP-2433 or prepare your own power supply.

SBIS26‐**X or Z

SBIS26‐**X or Z

Connect cable that have power wire Connect cable that have power wire HR10HR10P-RC-1 HR10HR10P-RC-1

AC adapter AC-ADP-2433 Ex.)DC24V 3.33A

sixth axis fourth axis SBIS26‐**X or Z

Connect cable that doesn’t have power wire.

(HR10HR10-RC-1)

fourth axis SBIS26‐**X or Z

SBIS26‐**X or Z

Connect cable that have power wire Connect cable that have power wire HR10HR10P-RC-1 HR10HR10P-RC-1

It has to connect every 3 axes by cable that doesn’t have power wire like below.

HR10HR10-RC-1

For next stage

first axis 24[V] power Communication Cable

Connect from first axis’s COM OUT to second axis’s COM IN by connect cable.

second axis

Connect from second axis’s COM OUT to next axis’s COM IN by second axis connect cable.

Connect flow

① Confirm the power didn’t connect to power supply connector. ② Connect SBIS stage to PC by communication cable for SBIS that customized RS232C. refer to above Figure SBIS Stage connect diagram. ③ In second or later case, connect SBIS stage to next SBIS stage by built-in power wire connect cable or cable that doesn’t have power wire. ④ Turn on power.

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com

Cabling Diagram

HR10HR10P-RC-1 Stage Side (OUT) (10pin) Connector: HR10A-10P-10P (73) (male type) Hirose Electric Co., Ltd.

How to identify cables (have power wire)

HR10HR10P-RC-1

Stage Side (IN) (10pin) Connector: HR10A-10S-10P (73) (male type) Hirose Electric Co., Ltd.

(non power wire) HR10HR10-RC-1

have power wire

HR10HR10-RC-1 Stage Side (OUT) (10pin) Connector: HR10A-10P-10P (73) (male type) Hirose Electric Co., Ltd.

Stage Side (IN) (10pin) Connector: HR10A-10S-10P(73) (female type) Hirose Electric Co., Ltd.

non power wire

D9HR10-RC-2 PC side (9pin) Connector: 17JE-13090-02(D8C6)A-CG (male type) D-sub9pin DDK Ltd.,

Stage Side (IN) (10pin) Connector: HR10A-10P-10S (73) (female type) Hirose Electric Co., Ltd.

For details, please access here !

Tokyo Head Office 5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku,Tokyo, 130-0021, JAPAN TEL.+81-3-5638-8228 FAX. +81-3-5638-6550 E-mail international@sigma-koki.com

Singapore Branch 83 Science Park #02-01, The Curie Singapore 118258 TEL.+65 6909 9318 E-mail sales@optosigma-sea.com