K E N S I N G T O N
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WAFER PRE ALIGNERS W a f e r
A l i g n e r H V M
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O p e r a t i o n s
Kensington’s Pre Aligners have a long history of operation in semiconductor wafer fabrication. Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand alone units as well as integrated directly into robots.
Features Rotational Accuracy < 2 arc sec Centration Accuracy < 0.002” (0.051 mm) Supports Transparent Substrates Glass and Quartz Plastic SiC Throughput of up to 450 WPH Accurately measures location and orientation in a single rotation for high throughput All combinations of SEMI standard wafers are supported Station Self Teach Functionality
Options Small wafers: 50 mm to 100 mm Transparent Substrates Thin Wafer Edge Grip Crown/Taiko Wafers CONTACT KENSINGTON TODAY FOR TECHNICAL DETAILS & TO OBTAIN A QUESTION.