Know About the Crucial Part of the Wafer Transmitting System-Wafer Pre Aligner

Wafer Pre Aligner- A Crucial Part of the Wafer Transmitting System

Introduction Wafer pre aligners are a very vital component in the manufacturing of wafers. It positions the wafers precisely before they are actually transferred onto the exposure platform. The positioning precision highly affects the exposure accuracy of the wafer and efficiency of the work in the whole manufacturing system.

Position The Wafers With Wafer-Pre Aligner These cs are used to accurately place the silicon wafers before photo-etching. As the precision requirement of machining is more than that of transportation of wafer, there is the need to position the wafers with wafer-pre aligner to balance the position error produced during the transportation. Due to the improvement of the manufacturing system of the wafer, it demands greater accuracy and speedy alignment of the wafer-pre aligner system.Â

Features Kensington automation offers high-speed type, non-contact type, a built-in controller, compact design, and provides one-chuck system wafer pre-aligners that are ready to meet the various client demands for the exterior colors and materials.

• Rotational Accuracy < 2 arc sec • Centration Accuracy < 0.002” (0.051 mm) • Supports Transparent Substrates  Glass and Quartz  Plastic  SiC • Throughput of up to 450 WPH • Accurately measures location and orientation in a single rotation for high throughput • All combinations of SEMI standard wafers are supported • Station Self Teach Functionality

Classification The pre-aligners are classified into two different types namely mechanical and optical. In the mechanical type, it utilizes the mechanical structure to place the center of wafers, and its precision is too low to meet the high accuracy demands of today.

On the other hand, the optical type is highly used in the pre-alignment of the wafers as it offers great position accuracy and satisfies the high precision requirements. As the optical type uses optical sensors as well as mechanical structure to meet the high accuracy position of a wafer thatâ&#x20AC;&#x2122;s why it provides greater precision.

Conclusion Kensington Laboratories is one of the finest laboratories based in Dublin, CA, selling the best products since 1976.It is a leading supplier of wafer handling robots, precision motion control, linear stages, rotary stages and integrated stages designed to meet the most demanding requirements.

Contact Us Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 510.324.0130

510.324.0126

www.kensingtonlabs.com