PRE ALIGNERS- WAFER ALIGNER FIELD PROVEN IN HVM OPERATIONS
ABOUT US Kensington’s Pre Aligners have a long history of operation in semiconductor wafer fabrication. Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand alone units as well as integrated directly into robots. The alignment technology is used for opaque as well as transparent materials and the wafer aligner supports substrates that are not round. Pre Aligners are used across the semiconductor equipment spectrum: Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems .
PRE-ALIGNERS Both integrated and external pre-aligners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.
EXTERNAL Our external pre-aligner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.
EXTERNAL SMALL WAFER Our external small wafer prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability.
INTEGRATED The integrated pre-aligner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and pre-aligner system and maximizing cleanliness, accuracy, and reliability.
FEATURES •
Rotational Accuracy < 2 arc sec
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Centration Accuracy < 0.002” (0.051 mm)
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Supports Transparent Substrates • Glass and Quartz • Plastic • SiC
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Throughput of up to 450 WPH
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Accurately measures location and orientation in a single rotation for high throughput
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All combinations of SEMI standard wafers are supported
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Station Self Teach Functionality
OPTIONS
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Small wafers: 50 mm to 100 mm
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Transparent Substrates
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Thin Wafer
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Edge Grip
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Crown/Taiko Wafers
STANDARD CONFIGURATIONS Design
Wafer Size
Size Change Adjustment
Single Axis Single CCD
100 mm to 300 mm
Manual
Single Axis Dual CCD
200mm and 300 mm
Automatic
Dual Axis Single CCD
100 mm to 300 mm
Automatic
Integrated Designs
50 mm to 300 mm
Automatic and Manual
CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts
Kensington Laboratories, LLC
sales@kensingtonlabs.com
6200 Village Parkway Dublin , CA 94568
Service - Kensington robot
Phone: 510.324.0126
and stage repairs, Newport PM500 stage repairs
Fax: 510.324.0130
service@kensingtonlabs.com
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800