PERFORMIX SYSTEM HIGH PERFORMANCE 300 MM EFEM Performix combines the best of newly developed advanced robotic technologies and industry-proven equipment. Available in 2, 3, and 4 port configurations, the Performix system’s monochrome construction, a uni-body frame, provides a sturdy foundation for the four major components, each uniquely designed to provide the speed, accuracy, and flexibility to meet your particular needs.
KEY PATENTS Latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition.
FOUP latchkeys require no vacuum door attachment. Dual end effector, multiple link robot arm system with corner reach-around and extended reach capabilities. High torque, synchronously operating multiple link robot arm mechanism. Continuously rotatable multiple link robot arm mechanism. Robot arm with specimen edge gripping end effector. Robot arm with specimen sensing and edge gripping end effector. Self-teaching robot arm position method. Through-beam wafer mapping.
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