PERFORMIX EQUIPMENT FRONT END MODULE (EFEM)
EFEM Configurable For A Wide Range Of Semiconductor Substrate Processing Applications
EFEM - EQUIPMENT FRONT END MODULE Performix™ EFEM is an integrated sub-system for a wide range of semiconductor process applications, and had been deployed in the following applications areas Metrology; Dry Wafer Processing; Wet Wafer Processing; Lithography; Wafer Level Packaging. The EFEM is configurable for different wafer sizes as well as different substrate shapes and formats while using the BOLTS interface.
FEATURES Unibody frame for simple and sturdy foundation Configurable using Kensington full line of MultiLink Robots, Pre-Aligners and FOUP Load Ports SEMI Complaint and CE Certified Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide BOLTS interface for ADO as well as alternative substrate handling platforms Class 1 Cleanliness Options BOLTS interface for non-wafer applications BOLTS interface for small wafer applications Chemical Filtration AMHS Options Programmable lights, light tower and buttons
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